| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/10/2009 | US7488656 Removal of charged defects from metal oxide-gate stacks |
| 02/10/2009 | US7488655 Method for fabricating semiconductor device |
| 02/10/2009 | US7488654 Fabrication of local damascene finFETs using contact type nitride damascene mask |
| 02/10/2009 | US7488653 Semiconductor device and method for implantation of doping agents in a channel |
| 02/10/2009 | US7488652 Manufacturing method of gate oxidation films |
| 02/10/2009 | US7488651 Method of making vertical transistor structures having vertical-surrounding-gates with self-aligned features |
| 02/10/2009 | US7488650 Method of forming trench-gate electrode for FinFET device |
| 02/10/2009 | US7488649 Method of manufacturing split gate type non-volatile memory device |
| 02/10/2009 | US7488648 Methods of fabricating scalable two-transistor memory devices having metal source/drain regions |
| 02/10/2009 | US7488647 System and method for providing a poly cap and a no field oxide area to prevent formation of a vertical bird's beak structure in the manufacture of a semiconductor device |
| 02/10/2009 | US7488646 Nonvolatile semiconductor memory device and its manufacturing method |
| 02/10/2009 | US7488645 Method of fabricating a non-volatile memory |
| 02/10/2009 | US7488644 Method of fabricating a semiconductor device |
| 02/10/2009 | US7488643 MIM capacitor and method of making same |
| 02/10/2009 | US7488642 Process for forming a buried plate |
| 02/10/2009 | US7488641 Trench DRAM cell with vertical device and buried word lines |
| 02/10/2009 | US7488640 Aluminum nitride and aluminum oxide/aluminum nitride heterostructure gate dielectric stack based field effect transistors and method for forming same |
| 02/10/2009 | US7488639 Method of manufacturing a semiconductor integrated circuit device |
| 02/10/2009 | US7488638 Method for fabricating a voltage-stable PMOSFET semiconductor structure |
| 02/10/2009 | US7488637 CMOS image sensor and method for forming the same |
| 02/10/2009 | US7488636 Broken die detect sensor |
| 02/10/2009 | US7488635 Semiconductor structure with reduced gate doping and methods for forming thereof |
| 02/10/2009 | US7488634 Method for fabricating flash memory device |
| 02/10/2009 | US7488633 Method for forming polysilicon by illuminating a laser beam at the amorphous silicon substrate through a mask |
| 02/10/2009 | US7488632 Thin film transistor substrate for display device and fabricating method thereof |
| 02/10/2009 | US7488631 Semiconductor device having a schottky source/drain transistor |
| 02/10/2009 | US7488629 Fabricating method of an active-matrix organic electroluminescent display panel |
| 02/10/2009 | US7488628 Methods for fabricating ferroelectric memory devices with improved ferroelectric properties |
| 02/10/2009 | US7488627 Thyristor-based memory and its method of operation |
| 02/10/2009 | US7488625 Vertically stacked, field programmable, nonvolatile memory and method of fabrication |
| 02/10/2009 | US7488624 Techniques for providing decoupling capacitance |
| 02/10/2009 | US7488623 Integrated circuit chip packaging assembly |
| 02/10/2009 | US7488622 Method for producing a surface-mountable semiconductor component |
| 02/10/2009 | US7488621 Package-integrated thin film LED |
| 02/10/2009 | US7488620 Method of fabricating leadframe based flash memory cards including singulation by straight line cuts |
| 02/10/2009 | US7488619 Method and apparatus for manufacturing IC chip packaged device |
| 02/10/2009 | US7488618 Microlenses including a plurality of mutually adhered layers of optically transmissive material and systems including the same |
| 02/10/2009 | US7488617 CMOS image sensor and method for manufacturing the same |
| 02/10/2009 | US7488616 CMOS image sensor and method for manufacturing the same |
| 02/10/2009 | US7488615 Method of manufacturing a solid-state imaging device |
| 02/10/2009 | US7488614 Providing a charge dissipation structure for an electrostatically driven device |
| 02/10/2009 | US7488613 Nitride-based light-emitting device and method of manufacturing the same |
| 02/10/2009 | US7488612 Liquid crystal display device and fabricating method thereof |
| 02/10/2009 | US7488611 Devices and methods for integrated circuit manufacturing |
| 02/10/2009 | US7488610 Insulator film characteristic measuring method and insulator film characteristic measuring apparatus |
| 02/10/2009 | US7488609 Method for forming an MgO barrier layer in a tunneling magnetoresistive (TMR) device |
| 02/10/2009 | US7488593 Using genetic engineering to prepare virus having plurality of recognition sites for selective binding or nucleating; synthesis of trifunctionalized viral particles for use as field effect transistors |
| 02/10/2009 | US7488560 enables the pellicle to be removed from an exposure master plate without using a solvent, etc. and without being accompanied by cohesive failure in a pressure-sensitive adhesive |
| 02/10/2009 | US7488543 comprising two pieces of aluminum nitride sintered body plates joined together without using adhesive, and a metal layer formed on a portion of the junction interface; plate heater or an electrostatic chuck for treating a semiconductor wafer |
| 02/10/2009 | US7488532 Adhesive resin composition and adhesive agent in film form, and semiconductor device using the same |
| 02/10/2009 | US7488507 Capacitor with plasma deposited dielectric |
| 02/10/2009 | US7488505 Enhancing the inplane uniformity of the thickness of a coating film to improve throughput by applying coating liquid spirally, monitoring to detect uncoated regions, and applying a second coating liquid to fill the uncoated region |
| 02/10/2009 | US7488400 Apparatus for etching wafer by single-wafer process |
| 02/10/2009 | US7488385 Method for epitaxial growth of a gallium nitride film separated from its substrate |
| 02/10/2009 | US7488374 Trapping device, processing system, and method removing impurities |
| 02/10/2009 | US7488240 Polishing device |
| 02/10/2009 | US7488236 Polishing pad and method of producing the same |
| 02/10/2009 | US7488235 Polishing apparatus and related polishing methods |
| 02/10/2009 | US7488220 Electrical connector with locking mechanism |
| 02/10/2009 | US7488127 Resist pattern forming apparatus and method thereof |
| 02/10/2009 | US7487740 Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates |
| 02/10/2009 | US7487678 Z offset MEMS devices and methods |
| 02/10/2009 | US7487586 Process for producing semiconductor device |
| 02/10/2009 | CA2321360C Process for encapsulating electronic components |
| 02/05/2009 | WO2009018581A1 Copper metallization of through silicon via |
| 02/05/2009 | WO2009018556A2 Method of enhancing drive current in a transistor |
| 02/05/2009 | WO2009018395A2 Self-aligned t-gate carbon nanotube field effect transistor devices and method for forming the same |
| 02/05/2009 | WO2009018371A2 Nanomembrane structures having mixed crystalline orientations and compositions |
| 02/05/2009 | WO2009018267A1 Composite sheet |
| 02/05/2009 | WO2009018244A1 Method and system for increasing throughput during location specific processing of a plurality of substrates |
| 02/05/2009 | WO2009018203A2 Integrated circuit formation using different angled implants |
| 02/05/2009 | WO2009018110A2 Oblique vacuum deposition for roll-roll coating of wire grid polarizer lines oriented in a down-web direction |
| 02/05/2009 | WO2009018062A1 Interconnect structure with grain growth promotion layer and method for forming the same |
| 02/05/2009 | WO2009018059A2 Process of semiconductor fabrication with mask overlay on pitch multiplied features and associated structures |
| 02/05/2009 | WO2009018057A1 Method for etching metal nitride with high selectivity to other materials |
| 02/05/2009 | WO2009018044A2 Advanced multi-workpiece processing chamber |
| 02/05/2009 | WO2009017997A1 Method for forming a semiconductor device having abrupt ultra shallow epi-tip regions |
| 02/05/2009 | WO2009017990A1 Method and apparatus for verifying proper substrate positioning |
| 02/05/2009 | WO2009017982A2 Methods for device fabrication using pitch reduction and associated structures |
| 02/05/2009 | WO2009017929A2 Fabrication method to minimize ballast layer defects |
| 02/05/2009 | WO2009017923A1 Semiconductor device having backside redistribution layers and method for fabricating the same |
| 02/05/2009 | WO2009017894A1 Method for partitioning and incoherently summing a coherent beam |
| 02/05/2009 | WO2009017888A1 Method of processing a high-k dielectric for cet scaling |
| 02/05/2009 | WO2009017871A1 Non-volatile memory device with reduced write-erase cycle time |
| 02/05/2009 | WO2009017869A1 Improved buried isolation layer |
| 02/05/2009 | WO2009017854A2 Sensor system and method |
| 02/05/2009 | WO2009017835A2 Semiconductor packaging process using through silicon vias |
| 02/05/2009 | WO2009017830A1 Fabrication of patterned and ordered nanoparticles |
| 02/05/2009 | WO2009017829A1 Control of strain through thickness in epitaxial films via vertical nanocomposite heteroepitaxy |
| 02/05/2009 | WO2009017782A2 Ruthenium cmp compositions and methods |
| 02/05/2009 | WO2009017779A1 Self-aligned cross-point memory fabrication |
| 02/05/2009 | WO2009017758A2 Reconstituted wafer stack packaging with after-applied pad extensions |
| 02/05/2009 | WO2009017734A1 Slurry containing multi-oxidizer and nano-sized diamond abrasive for tungsten cmp |
| 02/05/2009 | WO2009017700A1 Polymer electronic devices by all-solution process |
| 02/05/2009 | WO2009017672A2 Wire saw process |
| 02/05/2009 | WO2009017667A1 Method of depositing tungsten using plasma-treated tungsten nitride |
| 02/05/2009 | WO2009017652A2 Compositions and methods for chemical-mechanical polishing of phase change materials |
| 02/05/2009 | WO2009017622A1 Ultra thin single crystalline semiconductor tft and process for making same |
| 02/05/2009 | WO2009017465A2 Patterned wafer defect inspection system and method |
| 02/05/2009 | WO2009017448A1 Method for producing electronic devices on a wafer. |