| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/19/2009 | WO2009022401A1 Method for sorting and acquiring semiconductor element, method for fabricating semiconductor device, and semiconductor device |
| 02/19/2009 | WO2009021941A1 Method of treating a transport support for the atmospheric storage and conveyance of semiconductor substrates, and treatment station for the implementation of such a method |
| 02/19/2009 | WO2009021713A1 Method for producing a semiconductor component, a semiconductor component, and an intermediate product in the production thereof |
| 02/19/2009 | WO2009021400A1 Cleaning composition for removing resist |
| 02/19/2009 | WO2009021364A1 The method of controlling scratching of the polished surface of silicon wafer |
| 02/19/2009 | WO2009021363A1 Nano silicon dioxide abradant polishing liquid for processing microcrystal glass |
| 02/19/2009 | WO2009009260A3 Dielectric charge-trapping materials having doped metal sites |
| 02/19/2009 | WO2009006147A3 Integrated steerability array arrangement for minimizing non-uniformity |
| 02/19/2009 | WO2009006127A3 Method for forming a metal siliicide |
| 02/19/2009 | WO2009005863A3 Fabricating complex micro and nanoscale structures, electronic devices, and components |
| 02/19/2009 | WO2009005624A3 Inductively coupled dual zone processing chamber with single planar antenna |
| 02/19/2009 | WO2009002644A3 Methods of making hierarchical articles |
| 02/19/2009 | WO2009002389A3 Method for selectively forming symmetrical or asymmetrical features using a symmetrical photomask during fabrication of a semiconductor device and electronic systems including the semiconductor device |
| 02/19/2009 | WO2009002019A3 Evaporation apparatus |
| 02/19/2009 | WO2009000608A3 Method for producing filmlike semiconductor materials and/or electronic elements by primary forming and/or coating |
| 02/19/2009 | WO2008156958A3 Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-rings |
| 02/19/2009 | WO2008154582A3 Semiconductor die coating and interconnection fixture and method |
| 02/19/2009 | WO2008154471A3 Stable gold bump solder connections |
| 02/19/2009 | WO2008153362A3 Wire saw device and its machining method using thereof |
| 02/19/2009 | WO2008152126A4 Device for coating substrates disposed on a susceptor |
| 02/19/2009 | WO2008152026A3 Vertical current controlled silicon on insulator (soi) device and method of forming same |
| 02/19/2009 | WO2008150930A3 Masking high-aspect ratio structures |
| 02/19/2009 | WO2008143766A8 Adaptor for cluster tool chambers |
| 02/19/2009 | WO2008142115A4 Device for coating a plurality of closest-packed substrates arranged on a susceptor |
| 02/19/2009 | WO2008102259A8 Antireflective coating composition based on a silicon polymer |
| 02/19/2009 | WO2008102258A3 Substrate preparation for enhanced thin film fabrication from group iv semiconductor nanoparticles |
| 02/19/2009 | WO2008096211A3 Measurement of critical dimensions of semiconductor wafers |
| 02/19/2009 | WO2008094666A3 An soi device having a substrate diode with process tolerant configuration and method of forming the soi device |
| 02/19/2009 | WO2008085187A3 Compositions, methods and systems for polishing aluminum oxide and aluminum oxynitride substrates |
| 02/19/2009 | WO2007044436A3 Ultra-high-q surface-tension-induced monolithically integrated on-chip resonator and associated devices |
| 02/19/2009 | WO2006031981A3 Nanotube transistor and rectifying devices |
| 02/19/2009 | WO2006001942A3 Electronic isolation device |
| 02/19/2009 | US20090049420 Dummy pattern placement apparatus, method and program and semiconductor device |
| 02/19/2009 | US20090047881 Combinatorial processing including rotation and movement within a region |
| 02/19/2009 | US20090047873 Substrate retainer |
| 02/19/2009 | US20090047872 Polishing pad |
| 02/19/2009 | US20090047799 Gate oxide leakage reduction |
| 02/19/2009 | US20090047798 Method of forming high dielectric constant films using a plurality of oxidation sources |
| 02/19/2009 | US20090047797 Method for producing shock and tamper resistant microelectronic devices |
| 02/19/2009 | US20090047796 Method of Manufacturing a Dielectric Layer having Plural High-K Films |
| 02/19/2009 | US20090047795 Plasma processing apparatus, plasma processing method and storage medium |
| 02/19/2009 | US20090047794 Method for manufacturing semiconductor device and storage medium |
| 02/19/2009 | US20090047793 Method of manufacturing semiconductor device |
| 02/19/2009 | US20090047792 Processes and equipments for preparing F2-containing gases, as well as process and equipments for modifying the surfaces of articles |
| 02/19/2009 | US20090047791 Semiconductor etching methods |
| 02/19/2009 | US20090047790 Selective Wet Etching of Hafnium Aluminum Oxide Films |
| 02/19/2009 | US20090047789 Method for fabricating semiconductor device |
| 02/19/2009 | US20090047788 Method for fabricating semiconductor device |
| 02/19/2009 | US20090047787 Slurry containing multi-oxidizer and nano-abrasives for tungsten CMP |
| 02/19/2009 | US20090047786 CMP Abrasive Slurry for Polishing Insulation Film, Polishing Method, and Semiconductor Electronic Part Polished by the Polishing Method |
| 02/19/2009 | US20090047785 CMP Polishing Method, CMP Polishing Apparatus, and Process for Producing Semiconductor Device |
| 02/19/2009 | US20090047784 Resist stripping methods using backfilling material layer |
| 02/19/2009 | US20090047783 Method of removing unwanted plated or conductive material from a substrate, and method of enabling metallization of a substrate using same |
| 02/19/2009 | US20090047782 Method for manufacturing a device having a high aspect ratio via |
| 02/19/2009 | US20090047781 Methods of Forming Through Substrate Interconnects |
| 02/19/2009 | US20090047780 Method for forming composite barrier layer |
| 02/19/2009 | US20090047779 Method for manufacturing semiconductor device |
| 02/19/2009 | US20090047778 Plasma oxidation method and method for manufacturing semiconductor device |
| 02/19/2009 | US20090047777 Semiconductor device and method of manufacturing the same |
| 02/19/2009 | US20090047776 Method of Forming a Thin Film Transistor |
| 02/19/2009 | US20090047775 Method for manufacturing display device |
| 02/19/2009 | US20090047774 Plasma CVD apparatus, method for manufacturing microcrystalline semiconductor layer, and method for manufacturing thin film transistor |
| 02/19/2009 | US20090047773 Method of forming stable functionalized nanoparticles |
| 02/19/2009 | US20090047772 Method for Improving the Quality of a SiC Crystal |
| 02/19/2009 | US20090047771 Manufacturing method and manufacturing apparatus of semiconductor device |
| 02/19/2009 | US20090047770 Method of forming isolation regions for integrated circuits |
| 02/19/2009 | US20090047769 Methods of Forming a Plurality of Capacitors |
| 02/19/2009 | US20090047768 Formation of shallow junctions by diffusion from a dielectric doped by cluster or molecular ion beams |
| 02/19/2009 | US20090047767 Semiconductor device and method of manufacturing the same |
| 02/19/2009 | US20090047766 Method for fabricating recess channel mos transistor device |
| 02/19/2009 | US20090047765 Method of manufacturing non-volatile memory |
| 02/19/2009 | US20090047764 Non-volatile memory and manufacturing method thereof |
| 02/19/2009 | US20090047763 Semiconductor device including transistor with composite gate structure and transistor with single gate structure, and method for manufacturing the same |
| 02/19/2009 | US20090047762 Apparatus and method for a memory array with shallow trench isolation regions between bit lines for increased process margins |
| 02/19/2009 | US20090047761 Manufacturing method of semiconductor device |
| 02/19/2009 | US20090047760 Method for manufacturing semiconductor device |
| 02/19/2009 | US20090047759 Method for manufacturing semiconductor device |
| 02/19/2009 | US20090047758 Method of manufacturing display device |
| 02/19/2009 | US20090047757 Semiconductor device and method of manufacturing the same |
| 02/19/2009 | US20090047756 Dual port gain cell with side and top gated read transistor |
| 02/19/2009 | US20090047755 Semiconductor package and manufacturing method therefor |
| 02/19/2009 | US20090047754 Packaging method involving rearrangement of dice |
| 02/19/2009 | US20090047753 Scaffold-organized clusters and electronic devices made using such clusters |
| 02/19/2009 | US20090047751 Method of fabricating semiconductor laser |
| 02/19/2009 | US20090047750 Thin film transistor array substrate and fabrication method thereof |
| 02/19/2009 | US20090047749 Methods of manufacturing thin film transistor and display device |
| 02/19/2009 | US20090047748 Enhanced sensitivity non-contact electrical monitoring of copper contamination on silicon surface |
| 02/19/2009 | US20090047747 Method of forming an amorphous ferroelectric memory device |
| 02/19/2009 | US20090047586 Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program |
| 02/19/2009 | US20090047584 Mask blank and mask |
| 02/19/2009 | US20090047526 Method for Manufacturing Semiconductor Wafer |
| 02/19/2009 | US20090047114 Apparatus for manufacturing thin-film laminated member and method of conveying the member therein |
| 02/19/2009 | US20090047111 Moving carrier for lead frame and method of moving lead frame using the moving carrier |
| 02/19/2009 | US20090046754 Nitride semiconductor device and method of manufacturing the same |
| 02/19/2009 | US20090046515 NOR Flash Memory Device and Method for Fabricating the Same |
| 02/19/2009 | US20090046504 Dram tunneling access transistor |
| 02/19/2009 | US20090046503 Enhanced Gated Diode Memory Cells |
| 02/19/2009 | US20090046501 Low-cost non-volatile flash-ram memory |
| 02/19/2009 | US20090046493 Method and apparatus for fabricating sub-lithography data tracks for use in magnetic shift register memory devices |
| 02/19/2009 | US20090046283 Metalized semiconductor substrates for raman spectroscopy |