Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/2009
02/24/2009US7494864 Method for production of semiconductor device
02/24/2009US7494863 Method for manufacturing capacitor for semiconductor device
02/24/2009US7494862 Methods for uniform doping of non-planar transistor structures
02/24/2009US7494861 Method for metal gated ultra short MOSFET devices
02/24/2009US7494860 Methods of forming nonvolatile memories with L-shaped floating gates
02/24/2009US7494859 Semiconductor device having metal gate patterns and related method of manufacture
02/24/2009US7494858 Transistor with improved tip profile and method of manufacture thereof
02/24/2009US7494857 Advanced activation approach for MOS devices
02/24/2009US7494856 Semiconductor fabrication process using etch stop layer to optimize formation of source/drain stressor
02/24/2009US7494855 Compound semiconductor device and method for fabricating the same
02/24/2009US7494854 Turn-on-efficient bipolar structures for on-chip ESD protection
02/24/2009US7494852 Method for creating a Ge-rich semiconductor material for high-performance CMOS circuits
02/24/2009US7494851 Thin film transistor array substrate and method for manufacturing the same
02/24/2009US7494850 Ultra-thin logic and backgated ultra-thin SRAM
02/24/2009US7494849 Methods for fabricating multi-terminal phase change devices
02/24/2009US7494847 Method for making a semiconductor multi-package module having inverted wire bond carrier second package
02/24/2009US7494846 Design techniques for stacking identical memory dies
02/24/2009US7494845 Method of forming a thin wafer stack for a wafer level package
02/24/2009US7494844 Method for manufacturing substrate with cavity
02/24/2009US7494843 Method of making a semiconductor chip assembly with thermal conductor and encapsulant grinding
02/24/2009US7494841 Solution-based deposition process for metal chalcogenides
02/24/2009US7494840 Introducing a (methylcyclopentadienyl)(1,5-cyclooctadiene)iridium(I) precursor onto growth promotion film with non-continuous surfaces, using metalorganic chemical vapor deposition (MOCVD) process and oxygen as a precursor reaction gas; mixing with carrier gas; oxidation; clustered growth
02/24/2009US7494839 Method for manufacturing a membrane sensor
02/24/2009US7494838 Manufacturing method for magnetic sensor and lead frame therefor
02/24/2009US7494837 Thin film forming apparatus
02/24/2009US7494836 Semiconductor laser with a weakly coupled grating
02/24/2009US7494835 Method for manufacturing thin film transistor substrate using maskless exposing device
02/24/2009US7494834 Method of manufacturing a transparent element including transparent electrodes
02/24/2009US7494833 Apparatus for stacking cassette and a method of fabricating a liquid crystal display device using the same
02/24/2009US7494832 Semiconductor optical devices and method for forming
02/24/2009US7494831 Process for making stacks of islands made of one semiconducting material encapsulated in another semiconducting material
02/24/2009US7494828 Substrate holder and device manufacturing method
02/24/2009US7494827 Plasma etching method and plasma etching apparatus
02/24/2009US7494825 Top contact alignment in semiconductor devices
02/24/2009US7494698 Polymers with high internal free volume
02/24/2009US7494695 forming a first pattern having a predetermined shape in a first printing roll, rotating the printing roll on a substrate to transfer the first pattern, forming a second pattern having a predetermined shape in a second printing roll, and rotating the second printing roll on the substrate
02/24/2009US7494635 Boron nitride agglomerated powder
02/24/2009US7494597 Method and apparatus for etching disk-like member
02/24/2009US7494596 Measurement of etching
02/24/2009US7494562 Vapor phase growth apparatus
02/24/2009US7494561 Plasma processing apparatus and method, and electrode plate for plasma processing apparatus
02/24/2009US7494560 Non-plasma reaction apparatus and method
02/24/2009US7494550 Fluid delivery ring and methods for making and implementing the same
02/24/2009US7494549 Substrate treatment apparatus and substrate treatment method
02/24/2009US7494546 Method of growing insulating, semiconducting, and conducting group III-nitride thin films and coatings, and use as radiation hard coatings for electronics and optoelectronic devices
02/24/2009US7494272 Dynamic surface annealing using addressable laser array with pyrometry feedback
02/24/2009US7494042 Method of forming low wire loops and wire loops formed using the method
02/24/2009US7494041 In-situ alloyed solders, articles made thereby, and processes of making same
02/24/2009US7493904 Liquid processing apparatus and liquid processing method
02/24/2009US7493819 Micromechanical pressure sensor system
02/24/2009US7493713 Image sensor and related method of fabrication
02/24/2009CA2306242C Methods and apparatus for cleaning semiconductor substrates after polishing of copper film
02/19/2009WO2009023787A2 Stoker with purge condition sensing
02/19/2009WO2009023785A2 Static random access memory cell testing and biasing
02/19/2009WO2009023768A2 Formation of shallow junctions by diffusion from a dielectric doped by cluster or molecular ion beams
02/19/2009WO2009023727A2 Automated contact alignment tool
02/19/2009WO2009023694A2 Methodology for reducing post burn-in vmin drift
02/19/2009WO2009023675A2 Improved metal conservation with stripper solutions containing resorcinol
02/19/2009WO2009023663A2 Combinatorial processing including movement and rotation within a region
02/19/2009WO2009023571A1 Computer-implemented methods, carrier media, and systems for generating a metrology sampling plan
02/19/2009WO2009023529A1 Target designs and related methods for coupled target assemblies, methods of production and uses thereof
02/19/2009WO2009023462A1 Semiconductor device and method for manufacturing thereof
02/19/2009WO2009023445A1 Method for etching low-k material using oxide hard mask
02/19/2009WO2009023442A1 Apparatus and method of improving beam shaping and beam homogenization
02/19/2009WO2009023387A2 Compositions and methods for modifying a surface suited for semiconductor fabrication
02/19/2009WO2009023154A2 Systems configured to inspect a wafer
02/19/2009WO2009023135A1 Apparatus for wafer level arc detection at an rf bias impedance match to the pedestal electrode
02/19/2009WO2009023134A1 Plasma reactor system with multi-location arc threshold comparators and communication channels
02/19/2009WO2009023081A1 Mos transistors for thin soi integration and methods for fabricating the same
02/19/2009WO2009022991A1 Die package and method for manufacturing the die package
02/19/2009WO2009022982A1 Nano-interconnects for atomic and molecular scale circuits
02/19/2009WO2009022768A1 Filter bracket
02/19/2009WO2009022741A1 Nonvolatile semiconductor memory device
02/19/2009WO2009022719A1 Semiconductor device, and its manufacturing method
02/19/2009WO2009022718A1 Interlayer insulation film and wiring structure, and their manufacturing method
02/19/2009WO2009022681A1 Positive resist composition, pattern forming method using the composition, and compound used in the composition
02/19/2009WO2009022603A1 Method and apparatus for correcting photomask defect
02/19/2009WO2009022589A1 Automatic warehouse system and container transfer method for the same
02/19/2009WO2009022583A1 Porous silica precursor composition and method for preparing the same, porous silica film and method for forming the same, semiconductor device, image display device, and liquid crystal display device
02/19/2009WO2009022582A1 Temperature control device and temperature control method
02/19/2009WO2009022581A1 Semiconductor device manufacturing method, semiconductor device manufacturing apparatus and storage medium
02/19/2009WO2009022573A1 Method for thin film formation
02/19/2009WO2009022561A1 Positive working resist composition and method for pattern formation using the positive working resist composition
02/19/2009WO2009022540A1 Compound and radiation-sensitive composition
02/19/2009WO2009022522A1 Wiring board and liquid crystal display device
02/19/2009WO2009022517A1 Wiring board and liquid crystal display device
02/19/2009WO2009022509A1 Mos transistor and semiconductor integrated circuit device using the same
02/19/2009WO2009022506A1 Lighting optical apparatus, photolithography equipment and device manufacturing method
02/19/2009WO2009022504A1 Fine pattern forming method and coat film forming material
02/19/2009WO2009022503A1 Thin film capacitor, and display and memory cell employing the film capacitor, and mehtods for fabricating the thin film capacitor, the display and the memory cell
02/19/2009WO2009022495A1 Wafer table, surface protection film removing apparatus and surface protection film removing method
02/19/2009WO2009022491A1 Method for resin encapsulation molding of optical element and device used therefor
02/19/2009WO2009022469A1 Aligning apparatus, bonding apparatus, laminated substrate manufacturing apparatus, exposure apparatus and aligning method
02/19/2009WO2009022461A1 Circuit device, circuit device manufacturing method and portable device
02/19/2009WO2009022457A1 Substrate bonding apparatus and substrate bonding method
02/19/2009WO2009022451A1 Vapor-phase epitaxial growth apparatus and vapor-phase epitaxial growth method
02/19/2009WO2009022440A1 Ashing apparatus
02/19/2009WO2009022437A1 Wiring and method for manufacturing the same and electronic components and related electronic equipment
02/19/2009WO2009022429A1 Substrate cleaning apparatus and method of cleaning substrate
02/19/2009WO2009022428A1 Method of removing foreign matter from surface of glass substrate