Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2014
06/18/2014CN103871868A Straight hole etching method
06/18/2014CN103871867A Method for forming low-stress silicon nitride thin film
06/18/2014CN103871866A Thin film forming method and thin film forming apparatus
06/18/2014CN103871865A Method for cleaning side wall of plasma reaction cavity
06/18/2014CN103871864A Cutting device
06/18/2014CN103871863A Method for manufacturing semiconductor device, and semiconductor device
06/18/2014CN103871862A Dual-gate oxide preparation method
06/18/2014CN103871861A Method for improving uniformity of large-size silicon wafer device performance
06/18/2014CN103871860A Double-layer gate dielectric layer structure and preparation method thereof
06/18/2014CN103871859A Method for forming side wall silicon oxide protective layer
06/18/2014CN103871858A Manufacturing method for submicron electrode of indium phosphide-based heterojunction transistor
06/18/2014CN103871857A Forming method of semiconductor device
06/18/2014CN103871856A Forming method for metal gate
06/18/2014CN103871855A Preparation method of integrated circuit dual gate oxide
06/18/2014CN103871854A Laser annealing equipment
06/18/2014CN103871853A Device and method for improving uniformity of thin film
06/18/2014CN103871852A Manufacture method of PT type power device with FS layers
06/18/2014CN103871851A Copper indium gallium diselenide thin film cell co-evaporation linear source array configuration
06/18/2014CN103871850A Method for reducing e-SiGe lattice imperfections in PMOS manufacturing process
06/18/2014CN103871849A Forming method of epitaxial layers
06/18/2014CN103871848A Method for improving uniformity of ultra shallow junction
06/18/2014CN103871847A Dry etching method
06/18/2014CN103871846A Self-alignment multiple patterning method and application of silicon-based hard mask composition
06/18/2014CN103871845A Combined thin film preparation device and method
06/18/2014CN103871844A Method for overcoming abnormal bottom etching of patterned sapphire substrate
06/18/2014CN103871843A Method for overcoming defects caused by chemical acid fluid cleaning process
06/18/2014CN103871842A Method for reducing protrusions of aluminum welding plate
06/18/2014CN103871841A Device isolation groove surface repairing method
06/18/2014CN103871840A Groove power device and manufacturing method thereof
06/18/2014CN103871839A Apparatus and method of cleaning wafers
06/18/2014CN103871838A Manufacturing method for power device
06/18/2014CN103871837A Method for improving warping degree of wafer
06/18/2014CN103871836A Method for processing semiconductor chip
06/18/2014CN103871835A Film forming technology used for thick film hybrid integrated circuit
06/18/2014CN103871834A Flip chip packaged wafer combined platform temperature stabilization fixture
06/18/2014CN103871819A Large-size chamber for forming HJT of high uniformity
06/18/2014CN103871815A Semiconductor processing device and method for processing semiconductor wafer
06/18/2014CN103871813A Method for improving uniformity of semiconductor ion implantation
06/18/2014CN103871812A Ion injection device
06/18/2014CN103869603A Photolithographic plate assembly and photolithographic alignment accuracy detection method
06/18/2014CN103869599A Optical proximity correction method for through hole
06/18/2014CN103869597A Semiconductor device resolution enhancement by etching multiple sides of a mask
06/18/2014CN103869560A Pixel structure of liquid crystal display panel and pixel forming method
06/18/2014CN103869548A Manufacturing method of liquid crystal display and liquid crystal display
06/18/2014CN103869531A Color film substrate and manufacturing method thereof
06/18/2014CN103869508A Array substrate welding pad, manufacture method thereof, array substrate and liquid crystal display device
06/18/2014CN103867675A Wafer transport robot
06/18/2014CN103866398A Corrosion method and device for silicon carbide wafers
06/18/2014CN103866289A Preparation method for P-N co-doped zinc oxide film
06/18/2014CN103866273A Method for preparing N-Zr-codoped zinc oxide film through atomic layer deposition
06/18/2014CN103866272A Method for improving P-type stability of zinc oxide film
06/18/2014CN103866271A Preparation method for donor-acceptor co-doping of zinc oxide thin film
06/18/2014CN103866270A Preparation method for Te-N co-doping of zinc oxide thin film
06/18/2014CN103866269A Method for preparing Te-N co-doped zinc oxide thin film through atomic layer deposition
06/18/2014CN103866266A Method for preparing low surface roughness zinc oxide film
06/18/2014CN103866265A Nitrogen-based preparation method for double-acceptor co-doped zinc oxide film
06/18/2014CN103865416A Dicing tape integrated adhesive sheet, method of manufacturing semiconductor device using dicing tape integrated adhesive sheet, and semiconductor device
06/18/2014CN103865401A Application of chemo-mechanical polishing liquid
06/18/2014CN103862762A Environmentally sensitive electronic device package, and manufacturing methods thereof
06/18/2014CN103862468A Wafer carrying robot
06/18/2014CN103862169A Laser annealing device and method
06/18/2014CN103487593B Gas analysis device and method
06/18/2014CN103000662B Array substrate, preparation method of array substrate and display device
06/18/2014CN102959711B Semiconductor device and method for manufacturing same
06/18/2014CN102782074B Resin composition for adhesive agent, adhesive agent comprising the resin composition, adhesive sheet, and printed wiring board involving the adhesive sheet as adhesive layer
06/18/2014CN102738080B Method for manufacturing array substrate with embedded photovoltaic cell
06/18/2014CN102725438B Deposition device
06/18/2014CN102722089B Non-contact coarse-motion and fine-motion cascading SDOF (six-degree of freedom) positioning device
06/18/2014CN102707579B Driver switching device used in position exchange of double workpiece benches
06/18/2014CN102693938B Thin film transistor liquid crystal display, array substrate and manufacture method of array substrate
06/18/2014CN102655080B Method for preparing grapheme nanobelt by injecting Si to SiC based on Cu membrane annealing
06/18/2014CN102645803B Pixel unit, array substrate, liquid crystal panel, display device and manufacturing methods thereof
06/18/2014CN102640253B Discrete component backward traceability and semiconductor device forward traceability
06/18/2014CN102593105B Triggered enhanced polycrystalline diode and manufacturing method thereof
06/18/2014CN102569108B Tool for mounting solder ball
06/18/2014CN102566164B Silicon-based liquid crystal display unit and manufacturing method thereof, and color filter structure
06/18/2014CN102540415B Projection lithographic objective
06/18/2014CN102522449B Phosphorus diffusion method for preparing silicon solar battery
06/18/2014CN102522345B Ball mounting device and ball mounting method utilizing same
06/18/2014CN102483378B Separation of doping density and minority carrier lifetime in photoluminescence measurements on semiconductor materials
06/18/2014CN102482779B Stress-reduced ni-p/pd stacks for bondable wafer surfaces
06/18/2014CN102481679B Supporting pad
06/18/2014CN102474076B Group III nitride semiconductor optical element and epitaxial substrate
06/18/2014CN102473682B Nonvolatile semiconductor memory
06/18/2014CN102468232B Method of fabricating array substrate
06/18/2014CN102468182B Method and device for increasing fin device density for unaligned fins
06/18/2014CN102468154B Substrate processing method
06/18/2014CN102449099B Chemical-mechanical polishing slurry composition comprising nonionized heat-activated nanocatalyst, and polishing method using same
06/18/2014CN102437102B Method of and apparatus for active energy assist baking
06/18/2014CN102427068B Monolithical integration lattice mismatched crystal template and manufacturing method thereof
06/18/2014CN102422386B Photovolaic device
06/18/2014CN102420111B Method for improving resistivity uniformity of epitaxial layer, epitaxial wafer and semiconductor device
06/18/2014CN102396052B Plasma processing apparatus, plasma processing method, and method of manufacturing chip provided with processed substrate
06/18/2014CN102386280B Method for forming selective emitter of solar cell and diffusion apparatus for forming the same
06/18/2014CN102376526B Substrate cleaning/drying apparatus and substrate processing apparatus comprising the same
06/18/2014CN102362005B Sputter deposition device
06/18/2014CN102358516B Stage apparatus and application processing apparatus
06/18/2014CN102347320B Device and manufacturing method thereof
06/18/2014CN102341473B Chemical mechanical planarization using nanodiamond
06/18/2014CN102341215B Abrasive tool for use as a chemical mechanical planarization pad conditioner
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