Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2014
06/10/2014US8748225 Semiconductor device manufacturing method
06/10/2014US8748224 Manufacturing method of semiconductor device
06/10/2014US8748223 Method for manufacturing oxide semiconductor film and method for manufacturing semiconductor device
06/10/2014US8748222 Method for forming oxide thin film transistor
06/10/2014US8748221 Nanoball solution coating method and applications thereof
06/10/2014US8748217 Metal-based solution treatment of CIGS absorber layer in thin-film solar cells
06/10/2014US8748215 Stacked oxide material, semiconductor device, and method for manufacturing the semiconductor device
06/10/2014US8748214 Method of p-type doping of cadmium telluride
06/10/2014US8748213 Light transmission member, image pickup device, and method of manufacturing same
06/10/2014US8748212 Method and device for producing solar cell strings
06/10/2014US8748210 Method of manufacturing semiconductor device having air gaps in multilayer wiring structure
06/10/2014US8748209 Semiconductor chip package structure for achieving flip-chip type electrical connection without using wire-bonding process and method for making the same
06/10/2014US8748208 Method for fabricating thermo-electric generator
06/10/2014US8748207 Hybrid MEMS RF switch and method of fabricating same
06/10/2014US8748206 Systems and methods for a four-layer chip-scale MEMS device
06/10/2014US8748205 MEMS structure with adaptable inter-substrate bond
06/10/2014US8748204 Structure and method for III-nitride device isolation
06/10/2014US8748202 Substrate free LED package
06/10/2014US8748200 Method for manufacturing LED package
06/10/2014US8748199 In-situ measurement of feature dimensions
06/10/2014US8748198 Method of manufacturing semiconductor device
06/10/2014US8748197 Reverse partial etching scheme for magnetic device applications
06/10/2014US8748196 Coherent quantum information transfer between topological and conventional qubits
06/10/2014US8747949 Coating and developing system, method of controlling coating and developing system and storage medium
06/10/2014US8747943 Method for producing a master mold and cutout processing method for a master mold
06/10/2014US8747625 Grinding/electrolysis combined multi-wire-slicing processing method for silicon wafers
06/10/2014US8747611 Apparatus and method for treating substrate, and injection head used in the Apparatus
06/10/2014US8747609 Plasma processing apparatus and shower head
06/10/2014US8747560 System and method for pedestal adjustment
06/10/2014US8747559 Substrate support having dynamic temperature control
06/10/2014US8747556 Apparatuses and methods for atomic layer deposition
06/10/2014US8747555 Thin film production apparatus and inner block for thin film production apparatus
06/10/2014US8747519 Method for recovering metal copper from coated copper wires
06/10/2014US8747189 Method of controlling polishing
06/10/2014US8747050 Substrate transport apparatus
06/10/2014US8747046 Vacuum processing apparatus
06/10/2014US8746170 Substrate process apparatus, substrate process method, and computer readable storage medium
06/10/2014US8745863 Method of manufacturing multi-layer printed circuit board
06/10/2014US8745841 Aluminum bonding member and method for producing same
06/10/2014CA2549341C Methods for fabricating isolated micro- and nano- structures using soft or imprint lithography
06/10/2014CA2453318C Aluminum gallium nitride/gallium nitride high electron mobility transistors having a gate contact on a gallium nitride based cap segment and methods of fabricating same
06/05/2014WO2014085787A1 Silicon microsystems for high-throughput analysis of neural circuit activity, method and process for making the same
06/05/2014WO2014085656A1 Wafer cleaning apparatus and methods
06/05/2014WO2014085570A1 Composite compositions for electronics applications
06/05/2014WO2014085479A1 Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing
06/05/2014WO2014085442A1 Methods of using polished silicon wafer strips for euv homogenizer
06/05/2014WO2014085410A1 Ambipolar vertical field effect transistor
06/05/2014WO2014085343A1 Methods and apparatus for measurement of relative critical dimensions
06/05/2014WO2014085338A1 Apodization for pupil imaging scatterometry
06/05/2014WO2014085299A1 Metal density distribution for double pattern lithography
06/05/2014WO2014085203A1 Three-zone carrier head and flexible membrane
06/05/2014WO2014085201A1 Thermal treatment methods and apparatus
06/05/2014WO2014085163A1 Vibration-controlled substrate handling robot, systems, and methods
06/05/2014WO2014085159A1 Schottky diodes and method of manufacturing the same
06/05/2014WO2014085122A1 Enhanced preventative maintenance utilizing direct part marking
06/05/2014WO2014085108A1 Select gate formation for nanodot flat cell
06/05/2014WO2014085037A1 Method for etching euv material layers utilized to form a photomask
06/05/2014WO2014084992A1 Circuits for self-reconfiguration or intrinsic functional changes of chips before vs. after stacking
06/05/2014WO2014084909A1 Low voltage embedded memory having cationic-based conductive oxide element
06/05/2014WO2014084888A1 Gas enclosure assembly and system
06/05/2014WO2014084795A1 Selectively doped layer for interdigitated back-contact solar cells and method of fabricating the same
06/05/2014WO2014084700A1 Roll
06/05/2014WO2014084682A1 Method for exfoliating semiconductor thin film from mother substrate, and method for fabricating semiconductor device using same
06/05/2014WO2014084667A1 Group iii nitride semiconductor laminate
06/05/2014WO2014084624A1 Curable transparent silicon composition for optical device
06/05/2014WO2014084574A1 Device and method for analyzing defects by using heat distribution measurement
06/05/2014WO2014084550A1 Epitaxial wafer and switch element and light-emitting element using same
06/05/2014WO2014084549A1 Epitaxial wafer and switch element and light-emitting element using same
06/05/2014WO2014084501A1 Cold trap using thermoelectric element
06/05/2014WO2014084472A1 Wafer etching system and wafer etching process using same
06/05/2014WO2014084447A1 Method for fabricating ultra-low density three-dimensional thin film structure based on photo-lithography
06/05/2014WO2014084406A1 Field-effect transistor, display element, image display device, and system
06/05/2014WO2014084395A1 Imprinting method and curable composition for imprinting
06/05/2014WO2014084357A1 Sheet provided with curable resin film-forming layer and method for manufacturing semiconductor device using sheet
06/05/2014WO2014084352A1 Adhesive agent composition, adhesive sheet, and electronic device and production method therefor
06/05/2014WO2014084351A1 Adhesive agent composition, adhesive sheet, and electronic device
06/05/2014WO2014084350A1 Adhesive agent composition, adhesive sheet, and electronic device
06/05/2014WO2014084349A1 Adhesive agent composition, adhesive sheet, and electronic device
06/05/2014WO2014084334A1 Electrostatic chuck
06/05/2014WO2014084304A1 Manufacturing method and manufacturing device for semiconductor device
06/05/2014WO2014084229A1 Transfer system, exposure apparatus, transfer method, exposure method, device manufacturing method, and suction apparatus
06/05/2014WO2014084228A1 Suction apparatus, carry-in method, conveyance system, light exposure device, and device production method
06/05/2014WO2014084217A1 Normal temperature bonding device, wafer having normal temperature bonding device, and normal temperature bonding method
06/05/2014WO2014084204A1 Method for etching semiconductor substrate and method for manufacturing semiconductor device
06/05/2014WO2014084190A1 Photocurable composition, transfer material, cured product, method for producing cured product, method for producing resin pattern, cured film, liquid crystal display device, organic el display device, and touch panel display device
06/05/2014WO2014084152A1 Semiconductor device
06/05/2014WO2014084132A1 Apparatus and method for manufacturing same
06/05/2014WO2014084115A1 Substrate housing container
06/05/2014WO2014084091A1 Polishing composition
06/05/2014WO2014084078A1 Surface modifying agent for metal electrodes, surface-modified metal electrode, and method for producing surface-modified metal electrode
06/05/2014WO2014084060A1 Placement member and method for manufacturing same
06/05/2014WO2014084051A1 Oxide semiconductor element, method for manufacturing oxide semiconductor element, display device and image sensor
06/05/2014WO2014084030A1 Method for producing microstructure and photocurable composition for nanoimprinting
06/05/2014WO2014084006A1 Semiconductor device
06/05/2014WO2014083997A1 Non-volatile semiconductor storage device
06/05/2014WO2014083973A1 Semiconductor-device manufacturing method
06/05/2014WO2014083969A1 Silicon carbide semiconductor device, and method for producing same
06/05/2014WO2014083965A1 Electrostatic chuck, glass substrate processing method, and said glass substrate
06/05/2014WO2014083943A1 Silicon carbide semiconductor device, and manufacturing method for same
06/05/2014WO2014083942A1 Silicon carbide semiconductor device, and manufacturing method for same