Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2009
08/05/2009CN100523970C Array substrate for liquid crystal display device using organic semiconductor material and method of fabricating the same
08/05/2009CN100523969C Liquid crystal display device with color film on thin-film transistor and its manufacture method
08/05/2009CN100523967C Transflective liquid crystal display and manufacturing method of the same
08/05/2009CN100523960C Liquid crystal display device and method for fabricating the same
08/05/2009CN100523898C LSI package provided with interface module and method of mounting the same
08/05/2009CN100523886C Optical waveguide and its manufacture method thereof
08/05/2009CN100523873C Diffractive optical element with anti-reflection coating
08/05/2009CN100523839C Metrology tool error log analysis methodology and system
08/05/2009CN100523826C Assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component
08/05/2009CN100523804C Evaluation method of resist composition using immersion solvent
08/05/2009CN100523795C Inspection device and inspection method for pattern profile, exposure system
08/05/2009CN100523780C Particle monitoring device and vacuum treatment apparatus
08/05/2009CN100523296C Apparatus for the deposition of high dielectric constant films
08/05/2009CN100523293C Method of forming film, film forming apparatus
08/05/2009CN100523292C Method of plasma chemistry vapor depositing fluoridation amorphous carbon membrane and membrane layer structure thereof
08/05/2009CN100523291C Thin film forming method and thin film forming apparatus
08/05/2009CN100523290C Surface treatment method and device
08/05/2009CN100523289C Method and apparatus for the delivery of precursor materials
08/05/2009CN100523287C Film-forming apparatus and film-forming method
08/05/2009CN100523282C Sputter source, sputtering device, and sputtering method
08/05/2009CN100523281C Sputter arrangement with a magnetron and a target
08/05/2009CN100523276C Design of hardware features to facilitate arc-spray coating applications and functions
08/05/2009CN100523272C Method of forming shadow mask pattern
08/05/2009CN100523107C Adhesive sheet for laser dicing and its manufacturing method
08/05/2009CN100522814C Method for purifying aqueous alkaline solution
08/05/2009CN100522765C Workpiece levitating device
08/05/2009CN100522484C Substrate peripheral portion measuring device and substrate peripheral portion polishing apparatus
08/05/2009CN100522480C Surface polishing method and apparatus thereof
08/05/2009CN100522478C Two-sided polishing method for gallium phosphide crystal plate
08/05/2009CN100522442C Soldering method, soldering device, bonding method, bonding device, and nozzle unit
08/05/2009CN100522395C Solvent for removing residue containing silicon from substrate and removing method for using said solvent
08/04/2009US7571417 Method and system for correcting a mask pattern design
08/04/2009US7571416 Automatic design device, method, and program for semiconductor integrated circuits
08/04/2009US7571410 Resonant tree driven clock distribution grid
08/04/2009US7570876 Method and system for loading substrate supports into a substrate holder
08/04/2009US7570799 Morphological inspection method based on skeletonization
08/04/2009US7570516 Three-dimensional semiconductor memory device having a first and second charge accumulation region
08/04/2009US7570455 Data storage device and magnetic disk drive in hermetically sealed condition
08/04/2009US7570345 Method of optimizing imaging performance
08/04/2009US7570130 Apparatus and methods for a fixed impedance transformation network for use in connection with a plasma chamber
08/04/2009US7570084 Semiconductor integrated circuit outputting detection signal based on detection result of a detecting device and electronic device including the same
08/04/2009US7569941 Methods of fabricating nanostructures and nanowires and devices fabricated therefrom
08/04/2009US7569940 Method and device for connecting chips
08/04/2009US7569936 Semiconductor device and method of manufacturing the same
08/04/2009US7569934 Copper interconnect
08/04/2009US7569913 Boron etch-stop layer and methods related thereto
08/04/2009US7569910 Multiple-transistor structure systems and methods in which portions of a first transistor and a second transistor are formed from the same layer
08/04/2009US7569908 Semiconductor device and method of manufacturing the same
08/04/2009US7569901 P channel radhard device with boron diffused P-type polysilicon gate
08/04/2009US7569900 Silicon carbide high breakdown voltage semiconductor device
08/04/2009US7569883 Switching-controlled power MOS electronic device
08/04/2009US7569882 Non-volatile multibit memory cell and method of manufacturing thereof
08/04/2009US7569881 Semiconductor integrated circuit device with reduced leakage current
08/04/2009US7569880 Non-volatile electromechanical field effect devices and circuits using same and methods of forming same
08/04/2009US7569877 System and method based on field-effect transistors for addressing nanometer-scale devices
08/04/2009US7569873 Integrated circuit using complementary junction field effect transistor and MOS transistor in silicon and silicon alloys
08/04/2009US7569865 Method of fabricating vertical structure LEDs
08/04/2009US7569862 Semiconductor light-emitting device and a method of manufacture thereof
08/04/2009US7569860 Integrated photonic devices
08/04/2009US7569856 Semiconductor device and method for manufacturing the same
08/04/2009US7569854 Semiconductor device and fabrication method thereof
08/04/2009US7569847 Methods of fabricating nanostructures and nanowires and devices fabricated therefrom
08/04/2009US7569844 Memory cell sidewall contacting side electrode
08/04/2009US7569842 Method for correcting electron beam exposure data
08/04/2009US7569840 Alignment method of a laser beam processing machine
08/04/2009US7569793 Sequential lateral solidification device and method of crystallizing silicon using the same
08/04/2009US7569728 as charge transport materials in electronic devices; organic light emitting diodes; as monomers to create homopolymers or copolymers of polyamines
08/04/2009US7569693 Naphthalene-based semiconductor materials and methods of preparing and use thereof
08/04/2009US7569503 Contact doping and annealing systems and processes for nanowire thin films
08/04/2009US7569502 Method of forming a silicon oxynitride layer
08/04/2009US7569501 Atomic layer deposition (ALD); tetrakis(diethylamido)hafnium; hafium oxides/nitrides; capacitors
08/04/2009US7569500 Atomic layer deposition (ALD); vaporization; uniformity
08/04/2009US7569499 Semiconductor device made by multiple anneal of stress inducing layer
08/04/2009US7569498 Manufacturing method of semiconductor device
08/04/2009US7569497 Method and apparatus for forming insulating layer
08/04/2009US7569496 Method for manufacturing SiC semiconductor device
08/04/2009US7569495 Semiconductor devices and methods of manufacturing the same
08/04/2009US7569494 Apparatus and method for deposition of thin films
08/04/2009US7569493 Nitride-based compound semiconductor, method of cleaning a compound semiconductor, method of producing the same, and substrate
08/04/2009US7569492 Method for post-etch cleans
08/04/2009US7569491 Method for enlarging a nano-structure
08/04/2009US7569490 Etchant solution comprising dilute acid and adsorbate comprising 2-benzimidazole proprionic acid, generating electric field within etchant solution, and anisotropically etching pattern in NiP surface; discrete track recording pattern
08/04/2009US7569489 High performance 3D FET structures, and methods for forming the same using preferential crystallographic etching
08/04/2009US7569488 Methods of making a MEMS device by monitoring a process parameter
08/04/2009US7569487 Method for atomic layer deposition of materials using a pre-treatment for semiconductor devices
08/04/2009US7569486 Spin on glass (SOG) etch improvement method
08/04/2009US7569485 Method for an integrated circuit contact
08/04/2009US7569484 Plasma and electron beam etching device and method
08/04/2009US7569483 Methods of forming metal silicide layers by annealing metal layers using inert heat transferring gases established in a convection apparatus
08/04/2009US7569482 Method for the selective removal of an unsilicided metal
08/04/2009US7569481 Method for forming via-hole in semiconductor device
08/04/2009US7569480 Semiconductor devices and methods of fabricating the same
08/04/2009US7569479 Method for fabricating semiconductor device
08/04/2009US7569478 Method and apparatus for manufacturing semiconductor device, control program and computer storage medium
08/04/2009US7569477 Method for fabricating fine pattern in semiconductor device
08/04/2009US7569476 Semiconductor integrated circuit device and a method of manufacturing the same
08/04/2009US7569475 Interconnect structure having enhanced electromigration reliability and a method of fabricating same
08/04/2009US7569474 Method and apparatus for soldering modules to substrates
08/04/2009US7569472 Method and apparatus of power ring positioning to minimize crosstalk
08/04/2009US7569471 Method of providing mixed size solder bumps on a substrate using a solder delivery head