| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/30/2009 | CN101546685A Plasma processing apparatus and plasma etching method |
| 09/30/2009 | CN101546345A Method for planning power supply network and integrated circuit related with same |
| 09/30/2009 | CN101546186A Processing system and processing method of target output of machine tables |
| 09/30/2009 | CN101546175A Control method for bonding machine |
| 09/30/2009 | CN101546135A Charged-particle beam writing method and charged-particle beam writing apparatus |
| 09/30/2009 | CN101546134A Electron beam writing apparatus and method |
| 09/30/2009 | CN101546117A Masstone photomask and pattern transfer method using the same |
| 09/30/2009 | CN101546077A Pixel structure of thin film transistor-liquid crystal display and manufacturing method thereof |
| 09/30/2009 | CN101546076A TFT-LCD array substrate and color film substrate and manufacturing method thereof |
| 09/30/2009 | CN101545948A Apparatus for transferring packaged chips, test handler and method for manufacturing packaged chips |
| 09/30/2009 | CN101545136A Micro-heater arrays and PN-junction devices having micro-heater arrays, and methods for fabricating the same |
| 09/30/2009 | CN101544881A Bi-component silicone pouring sealant for LED photoelectric display device and method for manufacturing same |
| 09/30/2009 | CN101544389A Method for preparing high-purity electro-melting corundum aluminum oxide epoxy casting filler |
| 09/30/2009 | CN100546132C Optical modulator module |
| 09/30/2009 | CN100546047C Structures for planar and multiple-gate transistors formed on SOI and its manufacture method |
| 09/30/2009 | CN100546044C One transistor DRAM cell structure and method for forming |
| 09/30/2009 | CN100546042C Semiconductor memory device with increased node capacitance |
| 09/30/2009 | CN100546025C Semiconductor device and manufacture method thereof |
| 09/30/2009 | CN100546024C Semiconductor integrated circuit device having diagonal direction wiring and layout method therefor |
| 09/30/2009 | CN100546016C Method of manufacturing semiconductor device |
| 09/30/2009 | CN100546015C Manufacture by Dimashg process |
| 09/30/2009 | CN100546014C Method of depositing metal, forming metalization layer and improving evenness of CMP process |
| 09/30/2009 | CN100546013C Thick oxide region in a semiconductor device and method of forming same |
| 09/30/2009 | CN100546012C Parallel fault detection method |
| 09/30/2009 | CN100546011C Manufacturing method of electronic device |
| 09/30/2009 | CN100546010C Method of manufacturing organic EL display |
| 09/30/2009 | CN100546009C Method of forming a low voltage gate oxide layer and tunnel oxide layer in an EEPROM cell |
| 09/30/2009 | CN100546008C Method of manufacturing flash memory device |
| 09/30/2009 | CN100546007C Planarization and side wall passivation technology for producing silicon carbide device |
| 09/30/2009 | CN100546006C Improved method of etching silicon |
| 09/30/2009 | CN100546005C Plasma generation device, plasma control method, and substrate manufacturing method |
| 09/30/2009 | CN100546004C Method and device for breaking work, method for scribing and breaking work, and scribing device with breaking function |
| 09/30/2009 | CN100546003C Method for making non-lead ferro-electric film compatible with semiconductor technology |
| 09/30/2009 | CN100546002C Vacuum processing apparatus |
| 09/30/2009 | CN100546001C Process of forming a curved profile on a semiconductor substrate |
| 09/30/2009 | CN100546000C Wireless substrate-like sensor |
| 09/30/2009 | CN100545999C Charged particle beam application device |
| 09/30/2009 | CN100545998C Substrate holding apparatus, substrate holding method, and substrate processing apparatus |
| 09/30/2009 | CN100545756C Thinner composition for removing photoresist |
| 09/30/2009 | CN100545748C Substrate for reticle and method of manufacturing the substrate, and mask blank and method of manufacturing the mask blank |
| 09/30/2009 | CN100545747C Method for detecting failure of database patterns of photo mask |
| 09/30/2009 | CN100545720C Display device |
| 09/30/2009 | CN100545666C Probe device capable of being used for plural kinds of testers |
| 09/30/2009 | CN100544839C Cleaning sheet and delivery material product with cleaning capability, method for cleaning substrate processing apparatus and the cleaned substrate processing apparatus |
| 09/30/2009 | CN100544836C Polyhedral oligomeric silsesquioxanes and metallized polyhedral oligomeric silsesquioxanes as coatings, composites and additives |
| 09/29/2009 | US7596425 Substrate detecting apparatus and method, substrate transporting apparatus and method, and substrate processing apparatus and method |
| 09/29/2009 | US7596420 Device manufacturing method and computer program product |
| 09/29/2009 | US7595932 Laser irradiation method and laser irradiation apparatus |
| 09/29/2009 | US7595885 Process monitoring system, process monitoring method, and method for manufacturing semiconductor device |
| 09/29/2009 | US7595861 Exposure apparatus and method of manufacturing device |
| 09/29/2009 | US7595849 Display device and manufacturing method thereof |
| 09/29/2009 | US7595632 Wafer probe station having environment control enclosure |
| 09/29/2009 | US7595588 Electroluminescent device and method of making same |
| 09/29/2009 | US7595556 Semiconductor device and method for manufacturing the same |
| 09/29/2009 | US7595555 Method of forming air gaps in a dielectric material using a sacrificial film and resulting structures |
| 09/29/2009 | US7595554 Interconnect structure with dielectric air gaps |
| 09/29/2009 | US7595543 Semiconductor processing method for increasing usable surface area of a semiconductor wafer |
| 09/29/2009 | US7595539 Method for release of surface micromachined structures in an epitaxial reactor |
| 09/29/2009 | US7595537 MOS type semiconductor device having electrostatic discharge protection arrangement |
| 09/29/2009 | US7595534 Layers in substrate wafers |
| 09/29/2009 | US7595533 Thin film semiconductor device and manufacturing method |
| 09/29/2009 | US7595529 Semiconductor integrated circuit devices having upper pattern aligned with lower pattern molded by semiconductor substrate and methods of forming the same |
| 09/29/2009 | US7595528 Nano-enabled memory devices and anisotropic charge carrying arrays |
| 09/29/2009 | US7595526 Capacitor and method for fabricating the same |
| 09/29/2009 | US7595524 Power device with trenches having wider upper portion than lower portion |
| 09/29/2009 | US7595518 Doping mask and methods of manufacturing charge transfer image and microelectronic device using the same |
| 09/29/2009 | US7595516 Optoelectronic circuit employing a heterojunction thyristor device to convert a digital optical signal to a digital electrical signal |
| 09/29/2009 | US7595515 Use of two different catalysts, one photosensitive, the other heat sensitive in photopolymerization of an ethenically unsaturated polysiloxane and a silicon-bonded hydrogen-functional polysiloxane; light emitting diodes made at lower temperatures and lower viscosity resins to avoid wire sweep problems |
| 09/29/2009 | US7595511 Nitride micro light emitting diode with high brightness and method of manufacturing the same |
| 09/29/2009 | US7595509 Single crystal wafer for semiconductor laser |
| 09/29/2009 | US7595508 Optical semiconductor device and method for fabricating the same |
| 09/29/2009 | US7595496 Optimized correction of wafer thermal deformations in a lithographic process |
| 09/29/2009 | US7595414 complex capable of being used for chemical vapor deposition of thin metal , or metal oxide films |
| 09/29/2009 | US7595271 Polymer coating for vapor deposition tool |
| 09/29/2009 | US7595270 Passivated stoichiometric metal nitride films |
| 09/29/2009 | US7595269 Semiconductor device comprising a copper alloy as a barrier layer in a copper metallization layer |
| 09/29/2009 | US7595268 Semiconductor package having re-distribution lines for supplying power and a method for manufacturing the same |
| 09/29/2009 | US7595267 Method of forming contact hole of semiconductor device |
| 09/29/2009 | US7595266 Method of manufacturing a semiconductor integrated circuit device |
| 09/29/2009 | US7595265 Semiconductor device and method for forming a metal line in the semiconductor device |
| 09/29/2009 | US7595264 Fabrication method of semiconductor device |
| 09/29/2009 | US7595263 Atomic layer deposition of barrier materials |
| 09/29/2009 | US7595262 Manufacturing method for an integrated semiconductor structure |
| 09/29/2009 | US7595261 Method and system for manufacturing semiconductor device having less variation in electrical characteristics |
| 09/29/2009 | US7595260 Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors, and fabricating such devices |
| 09/29/2009 | US7595259 Method for manufacturing compound semiconductor substrate with pn junction |
| 09/29/2009 | US7595258 Overlay vernier of semiconductor device and method of manufacturing the same |
| 09/29/2009 | US7595257 Process of forming an electronic device including a barrier layer |
| 09/29/2009 | US7595256 Semiconductor device, method of manufacturing thereof, and method of manufacturing base material |
| 09/29/2009 | US7595255 Method for manufacturing strip level substrate without warpage and method for manufacturing semiconductor package using the same |
| 09/29/2009 | US7595254 Method of manufacturing a semiconductor device |
| 09/29/2009 | US7595253 Method of forming the semiconductor device |
| 09/29/2009 | US7595252 Method of manufacturing a semiconductor memory device |
| 09/29/2009 | US7595251 Method of fabricating semiconductor device having alignment key and semiconductor device fabricated thereby |
| 09/29/2009 | US7595250 Semiconductor device and method of manufacturing the same |
| 09/29/2009 | US7595249 Bipolar transistors with vertical structures |
| 09/29/2009 | US7595248 Angled implantation for removal of thin film layers |
| 09/29/2009 | US7595247 Halo-first ultra-thin SOI FET for superior short channel control |
| 09/29/2009 | US7595246 Methods of manufacturing field effect transistors having elevated source/drain regions |
| 09/29/2009 | US7595245 Semiconductor device having a gate electrode material feature located adjacent a gate width side of its gate electrode and a method of manufacture therefor |