Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2009
10/06/2009US7598568 Semiconductor apparatus and method of manufacturing the same
10/06/2009US7598566 Trench gate field effect devices
10/06/2009US7598565 Semiconductor memory element, semiconductor memory device and method of fabricating the same
10/06/2009US7598563 Memory device and method for manufacturing the same
10/06/2009US7598562 Semiconductor device and method of manufacturing the same
10/06/2009US7598558 Method of manufacturing semiconductor integrated circuit device having capacitor element
10/06/2009US7598557 Semiconductor device and method for fabricating a semicondutor device including first and second hydrogen diffusion preventing films
10/06/2009US7598556 Ferroelectric memory device
10/06/2009US7598553 CMOS image sensor and method of manufacturing thereof
10/06/2009US7598551 High voltage device
10/06/2009US7598547 Low noise vertical variable gate control voltage JFET device in a BiCMOS process and methods to build this device
10/06/2009US7598546 Separative extended gate field effect transistor based vitamin C sensor and forming method thereof
10/06/2009US7598544 Hybrid carbon nanotude FET(CNFET)-FET static RAM (SRAM) and method of making same
10/06/2009US7598542 SRAM devices and methods of fabricating the same
10/06/2009US7598541 Semiconductor device comprising transistor pair isolated by trench isolation
10/06/2009US7598537 Semiconductor device
10/06/2009US7598536 Semiconductor device having load resistor and method of fabricating the same
10/06/2009US7598527 Monitoring photodetector for integrated photonic devices
10/06/2009US7598522 Semiconductor substrate and production process thereof
10/06/2009US7598513 Semiconductors; chemical vapor deposition
10/06/2009US7598497 Charged particle beam scanning method and charged particle beam apparatus
10/06/2009US7598320 a formal or acetal protected vinyl acetate-vinyl alcohol copolymer, a derivataive of melamine, urea, guanamine, glycoluril or amino resin crosslinking agent; water as solvent or mixed with organic solvents, such as methanol, ethylene glycol, monomethyl ether, acetone etc; for resist pattern; electronics
10/06/2009US7598184 Plasma composition for selective high-k etch
10/06/2009US7598183 Bi-layer capping of low-K dielectric films
10/06/2009US7598182 Anti-reflective coating forming composition containing polyamic acid
10/06/2009US7598181 Process for enhancing solubility and reaction rates in supercritical fluids
10/06/2009US7598180 Semiconductor process for removing defects due to edge chips of a semiconductor wafer and semiconductor device fabricated thereby
10/06/2009US7598179 Techniques for removal of photolithographic films
10/06/2009US7598178 Carbon precursors for use during silicon epitaxial film formation
10/06/2009US7598177 Methods of filling trenches using high-density plasma deposition (HDP)
10/06/2009US7598176 Method for photoresist stripping and treatment of low-k dielectric material
10/06/2009US7598175 Apparatus and method for confined area planarization
10/06/2009US7598174 Feature patterning methods
10/06/2009US7598173 Electro-optic displays, and components for use therein
10/06/2009US7598172 Method for manufacturing semiconductor device by using dual damascene process and method for manufacturing article having communicating hole
10/06/2009US7598171 Method of manufacturing a semiconductor device
10/06/2009US7598170 Plasma-enhanced ALD of tantalum nitride films
10/06/2009US7598169 Method to remove beol sacrificial materials and chemical residues by irradiation
10/06/2009US7598168 Method of fabricating dual damascene interconnection and etchant for stripping sacrificial layer
10/06/2009US7598167 Method of forming vias in semiconductor substrates without damaging active regions thereof and resulting structures
10/06/2009US7598166 Dielectric layers for metal lines in semiconductor chips
10/06/2009US7598165 Methods for forming a multiplexer of a memory device
10/06/2009US7598164 Method for direct bonding of metallic conductors to a ceramic substrate
10/06/2009US7598163 Post-seed deposition process
10/06/2009US7598162 Method of manufacturing semiconductor device
10/06/2009US7598161 Method of forming transistor devices with different threshold voltages using halo implant shadowing
10/06/2009US7598160 Method for manufacturing thin film semiconductor
10/06/2009US7598159 Method of fabricating thin film transistor substrate and thin film transistor substrate produced using the same
10/06/2009US7598158 Method and device for growing pseudomorphic AlInAsSb on InAs
10/06/2009US7598157 Wafer dicing method
10/06/2009US7598156 Method of manufacturing device having adhesive film on back-side surface thereof including breaking the adhesive with tension
10/06/2009US7598155 Method of manufacturing an overlay mark
10/06/2009US7598154 Manufacturing method of semiconductor device
10/06/2009US7598153 Method and structure for fabricating bonded substrate structures using thermal processing to remove oxygen species
10/06/2009US7598152 Device and method for bonding wafers
10/06/2009US7598151 Semiconductor device fabrication method
10/06/2009US7598150 Compensation techniques for substrate heating processes
10/06/2009US7598149 Micro-leds
10/06/2009US7598148 Non-self-aligned heterojunction bipolar transistor and a method for preparing a non-self-aligned heterojunction bipolar transistor
10/06/2009US7598147 Method of forming CMOS with Si:C source/drain by laser melting and recrystallization
10/06/2009US7598146 Self-aligned gate and method
10/06/2009US7598145 Method for producing Si1-yGey based zones with different contents in Ge on a same substrate by condensation of germanium
10/06/2009US7598144 Method for forming inter-poly dielectric in shielded gate field effect transistor
10/06/2009US7598143 Method for producing an integrated circuit with a trench transistor structure
10/06/2009US7598142 CMOS device with dual-epi channels and self-aligned contacts
10/06/2009US7598141 Method of fabricating static random access memory
10/06/2009US7598140 Method of producing a semiconductor device having an oxide film
10/06/2009US7598139 Single chip data processing device with embedded nonvolatile memory and method thereof
10/06/2009US7598138 Semiconductor device manufacturing method
10/06/2009US7598137 Method for manufacturing semiconductor device including MIM capacitor
10/06/2009US7598136 Image sensor and related fabrication method
10/06/2009US7598135 Method for fabricating CMOS image sensor
10/06/2009US7598134 Memory device forming methods
10/06/2009US7598133 Semiconductor memory device and a method of manufacturing the same
10/06/2009US7598132 Active photosensitive structure with buried depletion layer
10/06/2009US7598131 High power-low noise microwave GaN heterojunction field effect transistor
10/06/2009US7598130 Method for reducing layout-dependent variations in semiconductor devices
10/06/2009US7598129 Light-emitting device and method for manufacturing the same
10/06/2009US7598128 Thin silicon-on-insulator double-diffused metal oxide semiconductor transistor
10/06/2009US7598127 Nanotube fuse structure
10/06/2009US7598126 Use of nanoscale particles for creating scratch-resistant protective layers on semiconductor chips
10/06/2009US7598125 Method for wafer level packaging and fabricating cap structures
10/06/2009US7598124 System and method to increase die stand-off height
10/06/2009US7598123 Semiconductor component and method of manufacture
10/06/2009US7598122 Die attach method and microarray leadframe structure
10/06/2009US7598121 Method of manufacturing a semiconductor device
10/06/2009US7598120 Method for holding semiconductor wafer
10/06/2009US7598119 System and method for inhibiting and containing resin bleed-out from adhesive materials used in assembly of semiconductor devices
10/06/2009US7598118 Method of manufacturing semiconductor sensor
10/06/2009US7598117 Method for manufacturing semiconductor module using interconnection structure
10/06/2009US7598114 Sacrificial benzocyclobutene/norbornene polymers for making air gap semiconductor devices
10/06/2009US7598113 Phase change memory device and fabricating method therefor
10/06/2009US7598111 Thin film transistor and method of manufacturing the same
10/06/2009US7598110 CMOS image sensor and method for manufacturing the same
10/06/2009US7598109 Method for fabricating micrometer or nanometer channels
10/06/2009US7598108 Gallium nitride-on-silicon interface using multiple aluminum compound buffer layers
10/06/2009US7598107 Semi-sacrificial mold for diamond structures
10/06/2009US7598106 Optical semiconductor device and fabrication method therefor
10/06/2009US7598105 Light emitting diode structure and method for fabricating the same
10/06/2009US7598104 Method of forming a metal contact and passivation of a semiconductor feature