Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2009
10/13/2009US7601621 Method of forming surface irregularities and method of manufacturing gallium nitride-based light emitting diode
10/13/2009US7601620 Methods for fabricating nanocoils
10/13/2009US7601619 Method and apparatus for plasma processing
10/13/2009US7601618 Method for producing semi-conditioning material wafers by moulding and directional crystallization
10/13/2009US7601617 Semiconductor wafer and manufacturing method thereof
10/13/2009US7601616 Wafer laser processing method
10/13/2009US7601615 Method of grinding back surface of semiconductor wafer and semiconductor wafer grinding apparatus
10/13/2009US7601614 Manufacturing method of silicon on insulator wafer
10/13/2009US7601613 Manufacturing method of bonded wafer
10/13/2009US7601612 Method for forming solder joints for a flip chip assembly
10/13/2009US7601611 Method of fabricating a semiconductor hetero-structure
10/13/2009US7601610 Method for manufacturing a high integration density power MOS device
10/13/2009US7601609 Method for manufacturing device isolation film of semiconductor device
10/13/2009US7601608 Memory array buried digit line
10/13/2009US7601607 Protruded contact and insertion of inter-layer-dielectric material to match damascene hardmask to improve undercut for low-k interconnects
10/13/2009US7601606 Method for reducing the trap density in a semiconductor wafer
10/13/2009US7601605 Method for manufacturing semiconductor device, method for forming alignment mark, and semiconductor device
10/13/2009US7601604 Method for fabricating conducting plates for a high-Q MIM capacitor
10/13/2009US7601603 Method for manufacturing semiconductor device
10/13/2009US7601602 Trench type buried on-chip precision programmable resistor
10/13/2009US7601601 Method for manufacturing semiconductor device
10/13/2009US7601599 Semiconductor device and method for manufacturing the same
10/13/2009US7601598 Reverse metal process for creating a metal silicide transistor gate structure
10/13/2009US7601597 Manufacturing method of a super-junction semiconductor device
10/13/2009US7601596 Semiconductor device with trench transistors and method for manufacturing such a device
10/13/2009US7601595 Surround gate access transistors with grown ultra-thin bodies
10/13/2009US7601594 Method for fabricating semiconductor memory
10/13/2009US7601593 Flash memory with metal-insulator-metal tunneling program and erase
10/13/2009US7601592 Method for forming multi-gate non-volatile memory devices using a damascene process
10/13/2009US7601591 Method of manufacturing sidewall spacers on a memory device, and device comprising same
10/13/2009US7601590 Electronic memory circuit and related manufacturing method
10/13/2009US7601589 Method of manufacturing flash memory device
10/13/2009US7601588 Method of forming a trench isolation layer and method of manufacturing a non-volatile memory device using the same
10/13/2009US7601587 Fabricating method of CMOS
10/13/2009US7601586 Methods of forming buried bit line DRAM circuitry
10/13/2009US7601585 Method of manufacturing a ferroelectric semiconductor device utilizing an oxide reduction film
10/13/2009US7601584 Semiconductor array and method for manufacturing a semiconductor array
10/13/2009US7601582 Method for manufacturing a semiconductor device having a device isolation trench
10/13/2009US7601581 Method of manufacturing a semiconductor device
10/13/2009US7601580 Image sensor and method of fabricating the same
10/13/2009US7601579 Method of manufacturing semiconductor integrated circuit
10/13/2009US7601578 Defect control in gate dielectrics
10/13/2009US7601577 Work function control of metals
10/13/2009US7601576 Method for fabricating semiconductor device
10/13/2009US7601575 Integration of pre-S/D anneal selective nitride/oxide composite cap for improving transistor performance
10/13/2009US7601574 Methods for fabricating a stress enhanced MOS transistor
10/13/2009US7601573 Method for producing nitride semiconductor device
10/13/2009US7601572 Semiconductor device and manufacturing method thereof
10/13/2009US7601571 Methods of manufacturing interferometric modulators with thin film transistors
10/13/2009US7601570 Method for producing a device comprising a structure equipped with one or more microwires or nanowires based on a Si and Ge compound by germanium condensation
10/13/2009US7601569 Partially depleted SOI field effect transistor having a metallized source side halo region
10/13/2009US7601568 MOS transistor and method for producing a MOS transistor structure
10/13/2009US7601567 Method of preparing organic thin film transistor, organic thin film transistor, and organic light-emitting display device including the organic thin film transistor
10/13/2009US7601566 Semiconductor device and manufacturing method thereof
10/13/2009US7601565 Thin film transistor and method of fabricating the same
10/13/2009US7601564 Semiconductor device including memory cell and anti-fuse element
10/13/2009US7601563 Small form factor molded memory card and a method thereof
10/13/2009US7601561 Heat-radiating tape carrier package and method for manufacturing the same
10/13/2009US7601560 Method for producing an electronic circuit
10/13/2009US7601559 Apparatus and method for identifying proper orientation and electrical conductivity between a semiconductor device and a socket or contactor
10/13/2009US7601558 Transparent zinc oxide electrode having a graded oxygen content
10/13/2009US7601557 Method of manufacturing image sensor
10/13/2009US7601556 Front side electrical contact for photodetector array and method of making same
10/13/2009US7601555 Wafer inspection system and method thereof
10/13/2009US7601554 Shaped MEMS contact
10/13/2009US7601553 Method of manufacturing a gallium nitride semiconductor light emitting device
10/13/2009US7601552 Semiconductor structure of liquid crystal display and manufacturing method thereof
10/13/2009US7601551 Method for manufacturing optical device
10/13/2009US7601550 Methods for producing a light emitting semiconductor body with a luminescence converter element
10/13/2009US7601549 Method of processing semiconductor wafers
10/13/2009US7601548 Methods of fabricating ferroelectric capacitors having oxidation barrier conductive layers and lower electrodes disposed in trenches defined by supporting insulating layers
10/13/2009US7601547 Magnetic annealing sequences for patterned MRAM synthetic antiferromagnetic pinned layers
10/13/2009US7601541 Using absorption spectrochemical analysis to determine extent of copper contamination of silicon semiconductor
10/13/2009US7601538 such as nickel or copper present in a silicon wafer; involves dissolving wafer in hydrofluoric acid, measurement and calibration
10/13/2009US7601485 Negates effect of fine dust causing defects; locating an exposure mask at a predetermined position with respect to a wafer, exposing a resist film, then displacing the exposure mask relative to the wafer by a predetermined dimension, and further exposing the resist film; semiconductors
10/13/2009US7601471 the transferred patterns of respective evaluation patterns transferred using the test photo mask are calculated on the basis of the relationship with the opening ratio of the flare generation patterns; enables performing accurate pattern-dimension corrections against local flares
10/13/2009US7601469 Plasma etching chamber and method for manufacturing photomask using the same
10/13/2009US7601468 Providing a target containing a metal and silicon, and carrying out reactive sputtering in an atmosphere containing a reactive gas ( nitrogen, oxygen, fluorine) to form half-tone film on said transparent substrate
10/13/2009US7601441 single polytype single crystal silicon carbide wafer, diameter greater than 3 inches and less than 5 inches, resistivity greater than 10,000 ohm-cm, a micropipe density less than 200 cm-2, combined concentration of shallow level dopants less than 5E16 cm-3
10/13/2009US7601424 Stabilized semiconductor nanocrystals
10/13/2009US7601402 Method for forming insulation film and apparatus for forming insulation film
10/13/2009US7601393 Method that allows one part of an atomic layer deposition (ALD) process sequence to occur at a first temperature while allowing another part of the ALD process sequence to occur at a second temperature; can switch between these two thermal states in rapid succession
10/13/2009US7601278 Precursor solution, method of preparation thereof and use thereof
10/13/2009US7601248 Substrate holder and plating apparatus
10/13/2009US7601242 Plasma processing system and baffle assembly for use in plasma processing system
10/13/2009US7601241 Plasma processing apparatus and plasma processing method
10/13/2009US7601240 Disturbance-free, recipe-controlled plasma processing system and method
10/13/2009US7601236 Method of manufacturing display device
10/13/2009US7601225 System for controlling the sublimation of reactants
10/13/2009US7601224 Method of supporting a substrate in a gas cushion susceptor system
10/13/2009US7601223 Showerhead assembly and ALD methods
10/13/2009US7601220 Liquid droplet ejecting apparatus, electro-optical device, method of manufacturing the electro-optical device, and electronic apparatus
10/13/2009US7601217 Method of fabricating an epitaxially grown layer
10/13/2009US7601181 Methods of making thin film capacitors comprising a manganese doped barium titantate dielectric
10/13/2009US7601051 Grinding machine having grinder head and method of manufacturing semiconductor device by using the grinding machine
10/13/2009US7601050 Polishing apparatus with grooved subpad
10/13/2009US7601039 Microelectronic contact structure and method of making same
10/13/2009US7600522 Substrate treatment method and substrate treatment apparatus
10/13/2009CA2457042C Heat sink for semiconductor components or similar devices, method for its production and tool for carrying out the method
10/13/2009CA2433887C Chemical monolayer and micro-electronic junctions and devices containing same
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