Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2014
07/16/2014CN103928338A 一种功率半导体器件抗单粒子烧毁方法 A power semiconductor device anti-SEB method
07/16/2014CN103928337A 双镶嵌式金属栅极 Dual inlaid metal gate
07/16/2014CN103928336A 一种pmos晶体管及其制备方法 One kind of pmos transistor and its preparation method
07/16/2014CN103928335A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
07/16/2014CN103928334A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
07/16/2014CN103928333A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
07/16/2014CN103928332A 晶体管及其形成方法 Transistor and method of forming
07/16/2014CN103928331A Mos晶体管的形成方法 Mos transistor forming method
07/16/2014CN103928330A 半导体结构及其形成方法 And a method for forming a semiconductor structure
07/16/2014CN103928329A Mos晶体管及其形成方法 Mos transistor and method of forming
07/16/2014CN103928328A 鳍式场效应晶体管的形成方法 The method of forming a fin field effect transistor,
07/16/2014CN103928327A 鳍式场效应晶体管及其形成方法 Fin-type field effect transistor and method of forming
07/16/2014CN103928326A 晶体管的形成方法 The method for forming a transistor
07/16/2014CN103928325A 超级结器件边缘外延平坦化方法 Super-junction devices edge flattening of epitaxial
07/16/2014CN103928324A 铝镓氮化合物/氮化镓高电子迁移率晶体管的制造方法 An aluminum gallium nitride compound / method of manufacturing a gallium nitride high electron mobility transistor
07/16/2014CN103928323A 降低hemt器件欧姆接触电阻的方法 Method of reducing the ohmic contact resistance hemt devices
07/16/2014CN103928322A 穿通型碳化硅绝缘栅双极型晶体管的制备方法 Through the preparation of silicon carbide through the insulated gate bipolar transistor
07/16/2014CN103928321A 碳化硅绝缘栅双极型晶体管的制备方法 Preparation SiC insulated gate bipolar transistor
07/16/2014CN103928320A 沟槽栅碳化硅绝缘栅双极型晶体管的制备方法 The method for preparing a silicon carbide trench gate insulated gate bipolar transistor
07/16/2014CN103928319A 锗硅外延生长方法 SiGe epitaxial growth method
07/16/2014CN103928318A 一种场终止型igbt 器件的制造方法 Method of manufacturing a field termination type igbt devices
07/16/2014CN103928317A 提高工艺片成膜均匀性的方法 Sheet forming process to improve the uniformity of the method
07/16/2014CN103928316A 硅氧化物膜的成膜方法 The method of forming a silicon oxide film,
07/16/2014CN103928315A 一种栅极侧墙减薄工艺 One kind of gate sidewall thinning process
07/16/2014CN103928314A 一种底部无负载的自对准双层图形的制作方法 The method of making a self-aligned double-layer pattern of the bottom of the no-load
07/16/2014CN103928313A 一种小尺寸图形的制作方法 Method of making a small-size pattern
07/16/2014CN103928312A 图案的形成方法 The method for forming a pattern
07/16/2014CN103928311A Hemt器件的欧姆接触电极制作方法 Ohmic contact electrode device manufacturing method Hemt
07/16/2014CN103928310A 打开多晶硅栅极的方法 Polysilicon gate opening methods
07/16/2014CN103928309A N沟道碳化硅绝缘栅双极型晶体管的制备方法 Preparation of N-channel insulated gate silicon carbide bipolar transistor
07/16/2014CN103928308A 具有不同长度的晶体管栅极阵列及其制作方法 Transistor gate array and its production methods have different lengths
07/16/2014CN103928307A 晶体管的形成方法、高k栅介质层的形成方法 The method for forming a transistor, a method of forming high-k gate dielectric layer,
07/16/2014CN103928306A 双金属栅极结构的形成方法及cmos晶体管 The method of forming a dual metal gate transistor structure and cmos
07/16/2014CN103928305A 一种通过控制衬底上的石墨烯成核位点生长石墨烯的方法 A nucleation sites for the growth of graphene on a method by controlling the graphite substrate into the ethylenically
07/16/2014CN103928304A 一种多晶硅上小尺寸图形结构的制备方法 One kind of small-sized polysilicon preparation graphical structure
07/16/2014CN103928303A 多重图形的形成方法 Multi-pattern formation method
07/16/2014CN103928302A 一种半导体引线框架制造工艺 A semiconductor leadframe manufacturing process
07/16/2014CN103928301A 一种金属-介质-金属结构电容的制作方法 One metal - dielectric - metal structure capacitor fabrication method
07/16/2014CN103928300A 一种基于多场耦合的键合方法 A multi-field coupling based bonding method
07/16/2014CN103928299A 一种沟槽内薄膜的制备方法 A method for the preparation of the film in the trench
07/16/2014CN103928298A 基板处理方法以及基板处理装置 A substrate processing method and substrate processing apparatus
07/16/2014CN103928297A 锗硅纳米低维结构的可控制备方法及产品 Germanium and silicon nano-controlled preparation of low-dimensional structure of the product
07/16/2014CN103928296A 一种将石墨烯转移到具有pdms过渡层硬质衬底上的方法 A graphene is transferred to the intermediate layer having a rigid substrate pdms
07/16/2014CN103928295A 一种将石墨烯转移到柔性衬底的方法 A method of graphene transferred to the flexible substrate, a method
07/16/2014CN103928294A 选择性外延生长锗硅的晶片预处理方法 Wafer pretreatment selective epitaxial growth of silicon germanium
07/16/2014CN103928293A 一种对金属前介质层进行处理的方法 A method for metal dielectric layer for processing before
07/16/2014CN103928292A 条形结构的形成方法 Method of forming a stripe structure
07/16/2014CN103928291A 半导体面电阻均匀性的改善方法 The semiconductor surface resistance method for improving the uniformity of the
07/16/2014CN103928290A 晶圆边缘的刻蚀方法 Etching the wafer edge
07/16/2014CN103926796A 用于光刻的涂层材料和方法 Coating materials and methods for lithography
07/16/2014CN103926789A 纳米压印模板、系统以及压印方法 Nano imprint template, the system and method of embossing
07/16/2014CN103926754A 一种阵列基板及其制备方法、显示面板、显示装置 One kind of array substrate and its preparation method, a display panel, a display device
07/16/2014CN103926264A 栅氧化层失效点的定位方法 Failure of the gate oxide layer point positioning method
07/16/2014CN103925380A 一种优化等离子体均匀性的压力控制阀门及方法 An optimized plasma uniformity and method of pressure control valves
07/16/2014CN103924287A 电致化学抛光方法 Electro-chemical polishing method
07/16/2014CN103924212A 氮化硅薄膜的制备方法 Preparation of silicon nitride films
07/16/2014CN103923573A 胶粘薄膜、切割/芯片接合薄膜、半导体装置的制造方法及半导体装置 A thin film manufacturing method of a semiconductor device and a semiconductor device adhesive film, cut / die-bonding
07/16/2014CN103922387A 一种磁性氧化锌纳米线及其制备方法 A magnetic zinc oxide nanowires and its preparation method
07/16/2014CN103922321A 石墨烯的制备方法、薄膜晶体管、阵列基板及显示面板 Preparation of graphene thin film transistor array substrate and a display panel
07/16/2014CN103922097A 搬运系统 Handling System
07/16/2014CN103921384A 电子部件的压缩成形方法及模具装置 The method of compression-molding electronic components and die apparatus
07/16/2014CN103921205A 一种6英寸铌酸锂晶片或钽酸锂晶片的生产工艺 A process for the production of 6 inches, lithium niobate or lithium tantalate wafer wafer
07/16/2014CN103920994A 一种激光脉冲退火设备和退火方法 A laser pulse annealing equipment and annealing method
07/16/2014CN103299397B 纳米压印用模具的制造方法 The method of producing a mold for nanoimprinting
07/16/2014CN103035604B 一种倒装芯片封装结构及其制作工艺 A flip-chip package structure and production process
07/16/2014CN102890402B 去除光感显影底部抗反射层缺陷的方法 Removing the light-sensitive bottom antireflective layer defects developing methods
07/16/2014CN102832189B 一种多芯片封装结构及其封装方法 A multi-chip package and packaging method
07/16/2014CN102804065B 放射线敏感性树脂组合物 The radiation-sensitive resin composition
07/16/2014CN102789132B 具有固定结构的极紫外光光罩储存传送盒 EUV reticle storage transfer case with a fixed structure
07/16/2014CN102762770B 包含铜层及钼层的多层薄膜用蚀刻液 Comprising a copper layer and a molybdenum layer of the multilayer film with an etching solution
07/16/2014CN102760678B 一种偏置漂移主动纠正系统、方法及引线键合机 One kind of active bias drift correction systems, methods and wire bonder
07/16/2014CN102723304B 用于直接驱动功率器件的n阱高压栅驱动芯片的制备方法 Preparation methods used to directly drive high voltage power device gate drive n-well chip
07/16/2014CN102683293B 双层SOI混合晶向后栅型反型模式SiNWFET的制备方法 Double back-gate SOI mixed crystal reverse mode SiNWFET preparation
07/16/2014CN102664149B 一种防止oj芯片碱洗时晶粒侧腐蚀的方法 A caustic when oj chip method of preventing corrosion of the grain side
07/16/2014CN102655152B 存储装置、其制造方法与操作方法 A storage device, its manufacturing method and operating method
07/16/2014CN102651310B 利用多缓冲层制备宽禁带单晶薄膜及方法 Preparation of a buffer layer using multiple wide-bandgap single crystal thin film and method
07/16/2014CN102637725B 采用Bipolar低压工艺实现的器件及其制造方法 Using the device and method of manufacturing the low pressure Bipolar process to achieve the
07/16/2014CN102623322B 基于体硅的纵向堆叠式SiNWFET制备方法 Longitudinally stacked SiNWFET bulk silicon-based preparation
07/16/2014CN102608816B 液晶显示面板以及其制造方法 Panel and a manufacturing method of a liquid crystal display
07/16/2014CN102593104B 半导体封装件及其制造方法 The semiconductor package and method for manufacturing
07/16/2014CN102569063B 半导体装置的制造方法 The method of manufacturing a semiconductor device
07/16/2014CN102543852B 金属互连结构及其制作方法 Metal interconnect structure and fabrication method thereof
07/16/2014CN102543768B 形成保护膜于芯片封装上的装置及其形成方法 The method of forming the protective film is formed on the device and on the chip package
07/16/2014CN102508376B 液晶显示面板以及其制造方式 The liquid crystal display panel and a manufacturing method
07/16/2014CN102498550B 用于蚀刻含硅膜的方法 A method for etching the silicon-containing film
07/16/2014CN102487066B 级联的高压结型场效应晶体管 High voltage cascade junction field effect transistor
07/16/2014CN102484098B 半导体装置及半导体装置供电方法 Semiconductor device and method for a semiconductor power device
07/16/2014CN102479821B 半导体器件及其形成方法 Semiconductor device and method of forming
07/16/2014CN102479687B 提高后层曝光工艺宽容度的方法 Methods to improve the layer after exposure process latitude
07/16/2014CN102473593B 异常检测系统以及异常检测方法 Anomaly detection systems and anomaly detection methods
07/16/2014CN102471869B 阳极壁多分割型等离子发生装置及等离子处理装置 Device and the wall of the plasma processing apparatus of the segmented type anode plasma generating
07/16/2014CN102468198B 刻蚀残留的检测方法和系统、谱线模型的建立方法和系统 Method and system for establishing an etching residues in a method and system for the model lines
07/16/2014CN102456590B 接合装置及接合方法 Apparatus and method of joining engagement
07/16/2014CN102456589B 接合装置 Engagement means
07/16/2014CN102456574B 一种自对准金属硅化物的沟槽型半导体器件及制造方法 A self-aligned trench-type semiconductor device and manufacturing method of the metal silicide
07/16/2014CN102422400B 用于半导体处理装备的模块式输入/输出电桥系统 Modular inputs for semiconductor processing equipment / output bridge system
07/16/2014CN102414791B 制造多晶硅薄膜的方法 The method of fabricating a polysilicon thin film
07/16/2014CN102412132B 电子可擦除式只读存储器单元 Electronic erasable read-only memory unit
07/16/2014CN102405514B 光纤激光基材处理 Fiber laser substrate processing
07/16/2014CN102405266B 粘接片 Adhesive sheet
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