Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2014
07/23/2014CN103943539A 基板的处理装置以及处理方法 Processing apparatus and a substrate processing method
07/23/2014CN103943538A 一种氮气加热装置 One of nitrogen heating device
07/23/2014CN103943537A 使用二次工艺平面快速传导冷却 Using a secondary plane rapid conduction cooling technology
07/23/2014CN103943536A 光照射装置 Light irradiation device
07/23/2014CN103943535A 半导体元件翻转装置 The semiconductor element flip device
07/23/2014CN103943534A 进气系统及基片处理设备 Intake system and substrate processing apparatus
07/23/2014CN103943533A 密封对接装置 Sealed docking device
07/23/2014CN103943532A 用于监控炉管无氧氛围的监控片、制造方法及其监控方法 Oxygen-free atmosphere of the furnace tube for monitoring the monitoring chip manufacturing method and monitoring method
07/23/2014CN103943531A 在线监控锗硅工艺中自掺杂硼浓度的方法 On-line monitoring processes of self-doped silicon-germanium-boron concentration method
07/23/2014CN103943530A 太阳能电池背板膜检测机纠偏机构 Solar battery back-film detector corrective institutions
07/23/2014CN103943529A 太阳能电池背板膜检测机膜辊调节机构 Solar battery back-film detector film roll adjustment mechanism
07/23/2014CN103943528A 用于ndc薄膜的离线监控方法 Offline monitoring methods for ndc Films
07/23/2014CN103943527A 采用电容测试结构检测多晶硅栅极刻蚀缺陷的方法 Capacitance test structures using the method to detect defects in the polysilicon gate etching
07/23/2014CN103943526A 制造和测试芯片封装的方法 Manufacture and testing of chip packaging method
07/23/2014CN103943525A 一种生成离线辅助程式方案的方法 A method of generating an auxiliary program programs offline
07/23/2014CN103943524A 具有一不平整表面的基板的检视方法 The method has a view of the uneven surface of the substrate
07/23/2014CN103943523A 半导体生产过程中的抽样量测方法 Semiconductor manufacturing process sampling measurement method
07/23/2014CN103943522A 晶圆未断检测分区判断方法 Wafer determination method does not detect partition off
07/23/2014CN103943521A 封装热压板 Package hot plate
07/23/2014CN103943520A 具有可加热和可冷却抽吸构件的结合头 Having a binding head may be heated and cooled the suction member
07/23/2014CN103943519A 一次焊接封装工装结构 A welding tooling package structure
07/23/2014CN103943518A 用于制造牢固接合的连接和电气连接的方法 The method of manufacturing a solid engagement and electrical connections for
07/23/2014CN103943517A 一种采用二极管植入式温度取样的led封装方法 An encapsulation method using led diode temperature implanted samples
07/23/2014CN103943516A 叠层芯片的晶圆级凸块圆片级封装方法 Stacked chip wafer level bump wafer-level packaging method
07/23/2014CN103943515A 具有电绝缘壁的芯片堆叠及其形成方法 Chip stack has an electrically insulating walls and forming method
07/23/2014CN103943514A 一种防止引线框架振动的压紧装置 A clamping device for preventing the vibration of the lead frame
07/23/2014CN103943513A 一种柔性衬底上制备石墨烯器件的方法 The method of preparing a graphene device on a flexible substrate,
07/23/2014CN103943512A 一种降低石墨烯与电极接触电阻的方法 A method of reducing the contact resistance with the electrode graphene Method
07/23/2014CN103943511A 低功耗薄背栅石墨烯场效应晶体管的制备方法 Low-power thin graphene prepared back gate field-effect transistor
07/23/2014CN103943510A 一种氮掺杂SiC基底的外延石墨烯背栅晶体管的制备方法 A nitrogen-doped SiC epitaxial graphene substrate preparation back gate transistor
07/23/2014CN103943509A 薄膜晶体管的制程方法 Process method of thin film transistor
07/23/2014CN103943508A Pmos器件的制造方法 Pmos device manufacturing method
07/23/2014CN103943507A 嵌入式锗硅外延位错缺陷的改善方法 Improve methods of embedded silicon germanium epitaxial dislocation defects
07/23/2014CN103943506A 制造具有覆盖层的半导器件的方法 The method of manufacturing a semiconductor device having a covering layer
07/23/2014CN103943505A 一种半导体器件及其制造方法 A semiconductor device and its manufacturing method
07/23/2014CN103943504A 一种半导体器件及其制备方法 A semiconductor device and its preparation method
07/23/2014CN103943503A Mosfet的bto结构制造工艺方法 Bto manufacturing process for the structure of Mosfet
07/23/2014CN103943502A 鳍式场效应晶体管及其形成方法 Fin-type field effect transistor and method of forming
07/23/2014CN103943501A 一种半导体器件的制造方法 A method of manufacturing a semiconductor device
07/23/2014CN103943500A 鳍式场效应晶体管的制作方法 The method of making the FinFET
07/23/2014CN103943499A 鳍式场效应晶体管的形成方法 The method of forming a fin field effect transistor,
07/23/2014CN103943498A 三维量子阱晶体管及其形成方法 Dimensional quantum well transistors and method of forming
07/23/2014CN103943497A 一种背面形成方法 A rear formation method
07/23/2014CN103943496A 高压二极管硅块台面腐蚀工艺 High-voltage diode silicon block mesa etching process
07/23/2014CN103943495A 金属与n型硅肖特基接触势垒高度的调节方法 Metal and n-type silicon Schottky contact barrier height adjustment method
07/23/2014CN103943494A 选择性外延生长工艺的前处理方法及半导体器件制造方法 Pre-treatment process for the selective epitaxial growth process and manufacturing method of a semiconductor device
07/23/2014CN103943493A 一种半导体加工方法以及一种半导体结构 A semiconductor processing method, and a semiconductor structure
07/23/2014CN103943492A 一种半导体器件及其制备方法 A semiconductor device and its preparation method
07/23/2014CN103943491A 在转接板工艺中采用cmp对基板表面进行平坦化的方法 Cmp flattening method using the substrate surface in the adapter plate process
07/23/2014CN103943490A 硅通孔绝缘层制备方法 TSV insulating layer preparation
07/23/2014CN103943489A 多层膜的蚀刻方法 The etching method of the multilayer film
07/23/2014CN103943488A 晶片的加工方法 Wafer processing method
07/23/2014CN103943487A 半导体区的生长中的化学机械抛光 Growing a semiconductor region in the chemical mechanical polishing
07/23/2014CN103943486A 多晶硅膜层形貌的形成方法 The method for forming a polysilicon film morphology
07/23/2014CN103943485A 形成水平方向功函数可变的栅极的方法 Is formed in the horizontal direction of the work function of the gate variable method
07/23/2014CN103943484A 自对准的栅极分离方法 Self-aligned to the gate electrode separation
07/23/2014CN103943483A 降低多晶硅栅极与活化区镍硅化物厚度比的方法 Method of reducing the activation of the polysilicon gate regions and a nickel silicide thickness ratio
07/23/2014CN103943482A 降低多晶硅栅极与活化区镍硅化物厚度比的方法 Method of reducing the activation of the polysilicon gate regions and a nickel silicide thickness ratio
07/23/2014CN103943481A 改善器件负偏压温度不稳定性的方法 Method for improving the device's negative bias temperature instability
07/23/2014CN103943480A 栅氧化层的制备方法 Preparation of the gate oxide layer
07/23/2014CN103943479A 栅氧化层的制备方法 Preparation of the gate oxide layer
07/23/2014CN103943478A 浮栅结构的制备方法 Preparation of floating gate structure
07/23/2014CN103943477A 薄膜晶体管及其制备方法、双面显示器件、单面显示器件 The thin film transistor and a preparation method, double-sided display, single-sided display
07/23/2014CN103943476A 半导体栅堆叠结构及其形成方法 Semiconductor gate stack structure and method of forming
07/23/2014CN103943475A 一种提高栅氧化物介电常数的方法 Method for improving gate oxide dielectric constant method
07/23/2014CN103943474A 硅膜的形成方法及其形成装置 Its method of forming a silicon film forming apparatus
07/23/2014CN103943473A 具有修正轮廓的金属栅极的半导体器件 The semiconductor device having a metal gate contour correction
07/23/2014CN103943472A 离子注入方法 An ion implantation method
07/23/2014CN103943471A 外延层形成方法及半导体结构 The method of forming the epitaxial layer and the semiconductor structure
07/23/2014CN103943470A 半导体器件的制作方法 Method of manufacturing a semiconductor device
07/23/2014CN103943469A 一种图形自对准形成方法 A graphical method for forming a self-aligned
07/23/2014CN103943468A 一种图形自对准形成方法 A graphical method for forming a self-aligned
07/23/2014CN103943467A 利用应力梯度分离氮化物自支撑衬底的方法 Nitride stress gradient separation utilizing self-supporting substrate method
07/23/2014CN103943466A 去除高压二极管表面印记的方法 Remove the high-voltage diode surface imprinting method
07/23/2014CN103943465A 氧化硅薄膜制备方法 Method for preparing a silicon oxide film
07/23/2014CN103943464A 对准标记的形成方法 The method for forming alignment marks
07/23/2014CN103943463A 一种硫化镉半导体薄膜的简单高效制备方法 Simple and efficient method for preparing a semiconductor thin films of CdS
07/23/2014CN103943462A 针对薄膜沉积产生负载效应的消除方法 Methods for generating loading effect for thin film deposition
07/23/2014CN103943461A 降低手机时间管理模块漏电的工艺改进方法 Reduce phone time management module leakage process improvement methods
07/23/2014CN103943460A 拼接式平面螺旋电感的生成方法 Tiled planar spiral inductors generating method
07/23/2014CN103943459A 一种基于外延层转移实现N面GaN的方法 A method for transferring an epitaxial layer is achieved based on the N surface of the GaN
07/23/2014CN103943458A 一种去除碳纳米管阵列中金属性碳纳米管的方法 A method of removing metallic carbon nanotube carbon nanotube array method
07/23/2014CN103943457A 分离装置 Separation device
07/23/2014CN103941548A 具有吸光层的感光层结构与使用感光层结构的光刻工艺 Photolithography process using a photosensitive layer structure and layer structure of the photosensitive layer having a light absorbing
07/23/2014CN103941547A 硬掩模表面处理 Hard mask surface treatment
07/23/2014CN103941505A 一种阵列基板及其制备方法和显示装置 An arrayed substrate preparation method and display device
07/23/2014CN103941497A 一种薄膜晶体管阵列基板、制造方法以及液晶显示面板 A thin film transistor array substrate, and a method of manufacturing a liquid crystal display panel
07/23/2014CN103941496A 一种阵列基板、触控液晶显示面板及其制造方法 A panel and a method of manufacturing an array substrate, a liquid crystal display touch
07/23/2014CN103941068A 一种用于测量阈值电压漂移的芯片上传感器 A method of measuring the threshold voltage shift on the sensor chip for
07/23/2014CN103937411A 用于介电膜的提高速率的化学机械抛光组合物 The chemical mechanical polishing composition for increasing the rate of dielectric film
07/23/2014CN103937168A 用于高密度互连倒装晶片的底部填充料 The bottom of the flip chip interconnection for high density filler
07/23/2014CN103934568A 激光退火设备 Laser annealing equipment
07/23/2014CN103184113B 二氧化硅去除溶液及其制备方法和应用 Silica removal solution and its preparation method and application
07/23/2014CN103180959B 半导体元件及其制造方法 Semiconductor device and manufacturing method
07/23/2014CN103091971B 掩模板及其制造方法、以及监测掩模板雾状污染的方法 Mask and its manufacturing method, and a method of monitoring the mask mist contamination
07/23/2014CN102800632B 一种电荷俘获非挥发存储器的制造方法 A method for manufacturing a charge trapping non-volatile memory
07/23/2014CN102754029B 感光性树脂组合物、结构体的制造方法和液体排出头 The photosensitive resin composition, manufacturing method and the liquid discharge head of the structure
07/23/2014CN102683193B 晶体管的制作方法、晶体管、阵列基板以及显示装置 The method of making a transistor, the transistor array substrate and a display device
07/23/2014CN102683183B 基于Ni膜退火向SiC注Si的石墨烯纳米带制备方法 Based on the Ni film annealed Si-SiC injection method with graphene nano
07/23/2014CN102637631B 一种薄膜晶体管液晶显示器阵列基板的制造方法 A method of manufacturing a thin film transistor array substrate of a liquid crystal display
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