Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2010
04/13/2010US7696063 Manufacturing method of semiconductor device
04/13/2010US7696062 Method of batch integration of low dielectric substrates with MMICs
04/13/2010US7696061 Semiconductor device and method for manufacturing same
04/13/2010US7696060 Recyclable stamp device and recyclable stamp process for wafer bond
04/13/2010US7696059 Method for manufacturing semiconductor substrate
04/13/2010US7696058 Method for manufacturing SOI substrate
04/13/2010US7696057 Method for co-alignment of mixed optical and electron beam lithographic fabrication levels
04/13/2010US7696056 Methods of forming capacitors
04/13/2010US7696055 Method for manufacturing passive device and semiconductor package using thin metal piece
04/13/2010US7696054 Transistor, a transistor arrangement and method thereof
04/13/2010US7696053 Implantation method for doping semiconductor substrate
04/13/2010US7696052 Technique for providing stress sources in transistors in close proximity to a channel region by recessing drain and source regions
04/13/2010US7696051 Method of fabricating a MOSFET having doped epitaxially grown source/drain region on recessed substrate
04/13/2010US7696050 Method of manufacturing semiconductor device carrying out ion implantation before silicide process
04/13/2010US7696049 Method to manufacture LDMOS transistors with improved threshold voltage control
04/13/2010US7696048 Method of improving gate resistance in a memory array
04/13/2010US7696047 Method for evaluating a gate insulation film characteristic for use in a semiconductor device
04/13/2010US7696046 Method of manufacturing a semiconductor device having a multi-channel type MOS transistor
04/13/2010US7696045 Method of manufacturing semiconductor device
04/13/2010US7696044 Method of making an array of non-volatile memory cells with floating gates formed of spacers in substrate trenches
04/13/2010US7696043 Method of manufacturing a flash memory device
04/13/2010US7696042 Semiconductor capacitor structure and method to form same
04/13/2010US7696041 Method for fabricating a semiconductor component and semiconductor component
04/13/2010US7696040 Method for fabrication of fin memory structure
04/13/2010US7696039 Method of fabricating semiconductor device employing selectivity poly deposition
04/13/2010US7696038 Methods for fabricating flash memory devices
04/13/2010US7696037 CMOS (complementary metal oxide semiconductor) technology
04/13/2010US7696036 CMOS transistors with differential oxygen content high-k dielectrics
04/13/2010US7696035 Method for fabricating non-volatile memory with boost structures
04/13/2010US7696034 Methods of base formation in a BiCOMS process
04/13/2010US7696033 Method of fabricating complementary metal-oxide semiconductor (CMOS) thin film transistor (TFT)
04/13/2010US7696032 Semiconductor device including a crystal semiconductor layer, its fabrication and its operation
04/13/2010US7696031 Method for manufacturing semiconductor device
04/13/2010US7696030 Method of fabricating semiconductor device and semiconductor fabricated by the same method
04/13/2010US7696029 Method for forming thin film devices for flat panel displays
04/13/2010US7696028 Pixel structure of a thin film transistor liquid crystal display
04/13/2010US7696026 Array substrate for a liquid crystal display and method for fabricating thereof
04/13/2010US7696025 Sidewall semiconductor transistors
04/13/2010US7696024 Semiconductor device and manufacturing method thereof
04/13/2010US7696022 Electric device having nanowires, manufacturing method thereof, and electric device assembly
04/13/2010US7696021 Semiconductor device manufactured using a non-contact implant metrology
04/13/2010US7696020 Process for fabricating a thin film semiconductor device, thin film semiconductor device, and liquid crystal display
04/13/2010US7696019 Semiconductor devices and methods of manufacturing thereof
04/13/2010US7696018 Methods for fabricating multi-terminal phase change devices
04/13/2010US7696017 Memory device with a selection element and a control line in a substantially similar layer
04/13/2010US7696016 Method of packaging a device having a tangible element and device thereof
04/13/2010US7696015 Method of forming a stack of heat generating integrated circuit chips with intervening cooling integrated circuit chips
04/13/2010US7696014 Method for breaking adhesive film mounted on back of wafer
04/13/2010US7696013 Connecting microsized devices using ablative films
04/13/2010US7696012 Wafer dividing method
04/13/2010US7696011 Methods for applying front side and edge protection material to electronic devices at the wafer level, devices made by the methods, and systems including the devices
04/13/2010US7696010 Wafer dividing method
04/13/2010US7696009 Method for fabricating a semiconductor device having a heat radiation layer
04/13/2010US7696008 Wafer-level chip packaging process and chip package structure
04/13/2010US7696007 Semiconductor package board using a metal base
04/13/2010US7696006 Composite flip-chip package with encased components and method of fabricating same
04/13/2010US7696005 Method for manufacturing an electronic module in an installation base
04/13/2010US7696004 Wafer level package fabrication method
04/13/2010US7696003 Microelectronic component assemblies with recessed wire bonds and methods of making same
04/13/2010US7696002 Electrolytic capacitor case design with insert molded elastomer seals
04/13/2010US7696001 Method for mounting semiconductor chips on a substrate and corresponding assembly
04/13/2010US7696000 Low defect Si:C layer with retrograde carbon profile
04/13/2010US7695997 Semiconductor device and manufacturing method thereof
04/13/2010US7695996 Photodetecting device
04/13/2010US7695995 Image sensor and method of fabricating the same
04/13/2010US7695994 Material sidewall deposition method
04/13/2010US7695993 Matrix nanocomposite sensing film for SAW/BAW based hydrogen sulphide sensor and method for making same
04/13/2010US7695992 Vertical type CMOS image sensor and fabricating method thereof
04/13/2010US7695991 Method for manufacturing GaN semiconductor light-emitting element
04/13/2010US7695990 Fabricating surface mountable semiconductor components with leadframe strips
04/13/2010US7695989 Method of manufacturing vertical gallium-nitride based light emitting diode
04/13/2010US7695988 Quantum dot conjugates in a sub-micrometer fluidic channel
04/13/2010US7695987 Method for automatic determination of semiconductor plasma chamber matching and source of fault by comprehensive plasma monitoring
04/13/2010US7695986 Method and apparatus for modifying process selectivities based on process state information
04/13/2010US7695985 Light exposure apparatus and manufacturing method of semiconductor device using the same
04/13/2010US7695984 Use of modeled parameters for real-time semiconductor process metrology applied to semiconductor processes
04/13/2010US7695983 Independent control of ion density, ion energy distribution and ion dissociation in a plasma reactor
04/13/2010US7695982 Refurbishing a wafer having a low-k dielectric layer
04/13/2010US7695981 biochemical immobilization; chemical mechanical polishing; semiconductors
04/13/2010US7695894 negative tone photoinitiators; polynorbornenes, polycarbonates
04/13/2010US7695875 Photo-sensitive composition
04/13/2010US7695763 Method for cleaning process chamber of substrate processing apparatus, substrate processing apparatus, and method for processing substrate
04/13/2010US7695760 Deposition method for oxide thin film or stacked metal thin films using supercritical fluid or subcritical fluid, and deposition apparatus therefor
04/13/2010US7695652 Optical waveguide and method for manufacturing the same
04/13/2010US7695637 Slurry composition for chemical mechanical polishing and precursor composition thereof
04/13/2010US7695632 Critical dimension reduction and roughness control
04/13/2010US7695590 Chemical vapor deposition plasma reactor having plural ion shower grids
04/13/2010US7695589 Versatile system for conditioning slurry in CMP process
04/13/2010US7695570 Processing-subject cleaning method and apparatus, and device manufacturing method and device
04/13/2010US7695563 Pulsed deposition process for tungsten nucleation
04/13/2010US7695347 Method and pad for polishing wafer
04/13/2010US7695345 Polishing compound for semiconductor integrated circuit device, polishing method and method for producing semiconductor integrated circuit device
04/13/2010US7695239 End effector gripper arms having corner grippers which reorient reticle during transfer
04/13/2010US7695234 Device for temporarily loading, storing and unloading a container
04/13/2010US7695232 Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
04/13/2010US7695231 Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
04/13/2010US7695026 Tube device, and piping system including the tube device
04/13/2010US7695023 Vacuum feeding joint
04/13/2010US7694871 Self-encapsulated silver alloys for interconnects
04/13/2010US7694700 Apparatus for transporting substrates under a controlled atmosphere
1 ... 1843 1844 1845 1846 1847 1848 1849 1850 1851 1852 1853 1854 1855 1856 1857 1858 1859 1860 1861 1862 1863 ... 6590