| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/15/2010 | WO2010041485A1 Method for fabricating p-type gallium nitride-based semiconductor, method for fabricating nitride-based semiconductor element, and method for fabricating epitaxial wafer |
| 04/15/2010 | WO2010041446A1 Vacuum processing apparatus |
| 04/15/2010 | WO2010041409A1 Substrate managing method |
| 04/15/2010 | WO2010041403A1 Flexible substrate, method for manufacturing display element and apparatus for manufacturing display element |
| 04/15/2010 | WO2010041365A1 Semiconductor device |
| 04/15/2010 | WO2010041363A1 Semiconductor device and method for manufacturing semiconductor device |
| 04/15/2010 | WO2010041356A1 Manufacturing method of electronic parts modules |
| 04/15/2010 | WO2010041333A1 Stripping fluid and process for cleaning objects |
| 04/15/2010 | WO2010041331A1 Probe pin aligning apparatus |
| 04/15/2010 | WO2010041299A1 Ultraviolet curable-type removable pressure-sensitive adhesive composition and pressure-sensitive adhesive sheet using the ultraviolet curable-type removable pressure-sensitive adhesive composition |
| 04/15/2010 | WO2010041165A1 Method of plating through wafer vias in a wafer for 3d packaging |
| 04/15/2010 | WO2010040720A1 Transport device and substrate coating system |
| 04/15/2010 | WO2010040530A1 Method for the mechanical characterisation of production machines for fracturable materials |
| 04/15/2010 | WO2010025228A3 Method and apparatus for extended temperature pyrometry |
| 04/15/2010 | WO2010020578A4 Self-aligned borderless contacts for high density electronic and memory device integration |
| 04/15/2010 | WO2010020546A4 Dual metal gate corner |
| 04/15/2010 | WO2010019946A3 Anti-reflective surfaces and methods for making the same |
| 04/15/2010 | WO2010019196A3 Temperature controlled hot edge ring assembly |
| 04/15/2010 | WO2010019008A3 Vapor deposition reactor |
| 04/15/2010 | WO2010019007A3 Vapor deposition reactor for forming thin film |
| 04/15/2010 | WO2010018430A8 A hardmask process for forming a reverse tone image |
| 04/15/2010 | WO2010015878A3 Process for joining and separating substrates |
| 04/15/2010 | WO2010014626A3 Novel silicon precursors to make ultra low-k films with high mechanical properties by plasma enhanced chemical vapor deposition |
| 04/15/2010 | WO2010014433A3 Field enhanced inductively coupled plasma (fe-icp) reactor |
| 04/15/2010 | WO2010011560A3 Improved metrology through use of feed forward feed sideways and measurement cell re-use |
| 04/15/2010 | WO2010011476A3 Deposition methods and releasing stress buildup |
| 04/15/2010 | WO2010011036A3 Photonic crystal device produced by a wet process, and a production method thereof |
| 04/15/2010 | WO2010008827A3 Pedestal heater for low temperature pecvd application |
| 04/15/2010 | WO2010008517A3 Deposition apparatus for improving the uniformity of material processed over a substrate and method of using the apparatus |
| 04/15/2010 | WO2010005760A3 Increasing yield in ofets by using a high-k dielectric layer in a dual dielectric layer |
| 04/15/2010 | WO2009155500A3 Method and apparatus for controlling beam current uniformity in an ion implanter |
| 04/15/2010 | WO2009152259A3 Plasma processing systems with mechanisms for controlling temperatures of components |
| 04/15/2010 | WO2009149325A3 Method and apparatus for producing a dislocation-free crystalline sheet |
| 04/15/2010 | US20100095058 Integrated circuit random access memory capable of automatic internal refresh of memory array |
| 04/15/2010 | US20100094452 Substrate transfer method, control program, and storage medium storing same |
| 04/15/2010 | US20100094448 Method and system for controlling semiconductor manufacturing equipment |
| 04/15/2010 | US20100093585 Post-cmp treating liquid and manufacturing method of semiconductor device using the same |
| 04/15/2010 | US20100093187 Method for Depositing Conformal Amorphous Carbon Film by Plasma-Enhanced Chemical Vapor Deposition (PECVD) |
| 04/15/2010 | US20100093186 Method for forming silicon oxide film, plasma processing apparatus and storage medium |
| 04/15/2010 | US20100093185 Method for forming silicon oxide film, plasma processing apparatus and storage medium |
| 04/15/2010 | US20100093184 Method for making a metal oxide layer |
| 04/15/2010 | US20100093183 Unit for supplying chemical liquid and apparatus and method for treating substrate using the same |
| 04/15/2010 | US20100093182 Laser crystallization method for amorphous semiconductor thin film |
| 04/15/2010 | US20100093181 Purge step-controlled sequence of processing semiconductor wafers |
| 04/15/2010 | US20100093180 Method of fabricating semiconductor device |
| 04/15/2010 | US20100093179 Pattern forming method and semiconductor device manufacturing method |
| 04/15/2010 | US20100093178 Si ETCHING METHOD |
| 04/15/2010 | US20100093177 Method of cleaning semiconductor wafer and semiconductor wafer |
| 04/15/2010 | US20100093176 Method of forming a sacrificial layer |
| 04/15/2010 | US20100093175 Methods Of Forming Patterns Utilizing Lithography And Spacers |
| 04/15/2010 | US20100093174 Method of manufacturing low-k dielectric film, and formation of air-gap using the low-k dielectric film |
| 04/15/2010 | US20100093173 Method of forming patterns of semiconductor device |
| 04/15/2010 | US20100093172 Method of forming fine patterns of a semiconductor device |
| 04/15/2010 | US20100093171 Fabrication cubic boron nitride cone-microstructures and their arrays |
| 04/15/2010 | US20100093170 Method for forming tungsten materials during vapor deposition processes |
| 04/15/2010 | US20100093169 Through substrate via process |
| 04/15/2010 | US20100093168 Air gap interconnects using carbon-based films |
| 04/15/2010 | US20100093167 Methods of Fabricating Field Effect Transistors Having Protruded Active Regions |
| 04/15/2010 | US20100093166 Methods of manufacturing a semiconductor device |
| 04/15/2010 | US20100093165 Method of fabricating integrated circuit semiconductor device having gate metal silicide layer |
| 04/15/2010 | US20100093164 Semiconductor device and manufacturing method thereof |
| 04/15/2010 | US20100093163 Semiconductor device and method for manufacturing the same |
| 04/15/2010 | US20100093162 Method of manufacturing semiconductor device |
| 04/15/2010 | US20100093161 Method for manufacturing semiconductor device |
| 04/15/2010 | US20100093160 Methods of forming nano-devices using nanostructures having self-assembly characteristics |
| 04/15/2010 | US20100093159 Separate injection of reactive species in selective formation of films |
| 04/15/2010 | US20100093158 Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors and fabricating such devices |
| 04/15/2010 | US20100093157 Method for producing group iii nitride-based compound semiconductor crystal |
| 04/15/2010 | US20100093156 Method for production of silicon wafer for epitaxial substrate and method for production of epitaxial substrate |
| 04/15/2010 | US20100093155 Dicing/die-bonding film, method of fixing chipped work and semiconductor device |
| 04/15/2010 | US20100093154 Dicing/die bonding film |
| 04/15/2010 | US20100093153 Manufacturing method of soi substrate |
| 04/15/2010 | US20100093152 Method of bonding two substrates |
| 04/15/2010 | US20100093151 Oxide etch with nh4-nf3 chemistry |
| 04/15/2010 | US20100093150 Method of manufacturing capacitor |
| 04/15/2010 | US20100093149 Method of fabricating a semiconductor device |
| 04/15/2010 | US20100093148 Silicon germanium heterostructure barrier varactor |
| 04/15/2010 | US20100093147 Method for forming a semiconductor device |
| 04/15/2010 | US20100093146 Method of manufacturing multi-channel transistor device and multi-channel transistor device manufactured using the method |
| 04/15/2010 | US20100093145 Semiconductor device and manufacturing method thereof for reducing the area of the memory cell region |
| 04/15/2010 | US20100093144 Semiconductor device utilizing a metal gate material such as tungsten and method of manufacturing the same |
| 04/15/2010 | US20100093143 Method of manufacturing semiconductor device |
| 04/15/2010 | US20100093142 Method of fabricating device |
| 04/15/2010 | US20100093141 Method of manufacturing a transistor and method of manufacturing a semiconductor device |
| 04/15/2010 | US20100093140 Gated resonant tunneling diode |
| 04/15/2010 | US20100093139 Method of manufacturing semiconductor device |
| 04/15/2010 | US20100093138 Semiconductor device and manufacturing method thereof |
| 04/15/2010 | US20100093137 Thin Film Transistor Structure and Method of Fabricating the Same |
| 04/15/2010 | US20100093136 Process for manufacturing a charge-balance power diode and an edge-termination structure for a charge-balance semiconductor power device |
| 04/15/2010 | US20100093135 Stratified underfill method for an ic package |
| 04/15/2010 | US20100093134 Semiconductor package having insulated metal substrate and method of fabricating the same |
| 04/15/2010 | US20100093133 Electronic device and method for fabricating the same |
| 04/15/2010 | US20100093132 Chip module for complete power train |
| 04/15/2010 | US20100093131 Bonding apparatus and bonding method |
| 04/15/2010 | US20100093130 Methods of forming multi-level cell of semiconductor memory |
| 04/15/2010 | US20100093126 Method for manufacturing a poly-crystal silicon photovoltaic device using horizontal metal induced crystallization |
| 04/15/2010 | US20100093125 Method for temperature compensation in mems resonators with isolated regions of distinct material |
| 04/15/2010 | US20100093122 Thin film patterning method and method for manufacturing a liquid crystal display device |
| 04/15/2010 | US20100093121 System and method for differentiating pictures and texts |
| 04/15/2010 | US20100093120 Light emitting device and method of manufacturing the same |