Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2010
06/03/2010WO2010033813A3 Formation of devices by epitaxial layer overgrowth
06/03/2010WO2010033774A3 Bonding on silicon substrate having a groove
06/03/2010WO2010033723A3 Photonic milling using dynamic beam arrays
06/03/2010WO2010030718A3 Technique for monitoring and controlling a plasma process with an ion mobility spectrometer
06/03/2010WO2010028136A3 Probe block assembly
06/03/2010WO2010027962A3 Method of forming a nanoscale three-demensional pattern in a porous semiconductor
06/03/2010WO2010025357A3 Method for reducing tungsten roughness and improving reflectivity
06/03/2010WO2010025253A3 Load lock chamber for large area substrate processing system
06/03/2010WO2010019700A3 Improved cleaving of substrates
06/03/2010WO2010019339A3 Method for an improved chemical mechanical polishing system
06/03/2010WO2010015942A3 Method and device for producing photovoltaic modules
06/03/2010US20100138681 Semiconductor device
06/03/2010US20100137626 Organic silane compound for forming si-containing film by plasma cvd and method for forming si-containing film
06/03/2010US20100136886 Polishing apparatus and substrate processing apparatus
06/03/2010US20100136884 Substrate polishing apparatus and method of polishing substrate using the same
06/03/2010US20100136800 On-chip cooling systems for integrated circuits
06/03/2010US20100136799 Method of manufacturing semiconductor device, Exposure device, and recording medium
06/03/2010US20100136798 Silane monomers and siloxane polymers for semiconductor optoelectronics
06/03/2010US20100136797 Plasma oxidation processing method, plasma processing apparatus and storage medium
06/03/2010US20100136796 Substrate holding member, immersion type exposure device and method of fabricating semiconductor device
06/03/2010US20100136795 Film deposition apparatus, film deposition method, semiconductor device fabrication apparatus, susceptor for use in the same, and computer readable storage medium
06/03/2010US20100136794 Method for removing etching residues from semiconductor components
06/03/2010US20100136793 Efficient and accurate method for real-time prediction of the self-bias voltage of a wafer and feedback control of esc voltage in plasma processing chamber
06/03/2010US20100136792 Self-aligned multi-patterning for advanced critical dimension contacts
06/03/2010US20100136791 Method of Reducing Delamination in the Fabrication of Small-Pitch Devices
06/03/2010US20100136790 Method of fabricating semiconductor integrated circuit device
06/03/2010US20100136789 Dielectric Barrier Deposition Using Oxygen Containing Precursor
06/03/2010US20100136788 Thermal methods for cleaning post-cmp wafers
06/03/2010US20100136787 Methods for forming bit line contacts and bit lines during the formation of a semiconductor device
06/03/2010US20100136786 Process for manufacturing semiconductor integrated circuit device
06/03/2010US20100136785 Direct patterning method for manufacturing a metal layer of a semiconductor device
06/03/2010US20100136784 Self aligned double patterning flow with non-sacrificial features
06/03/2010US20100136783 Method of manufacturing through-via
06/03/2010US20100136782 Semiconductor device and method for manufacturing the same
06/03/2010US20100136781 Simultaneous via and trench patterning using different etch rates
06/03/2010US20100136780 Method of manufacturing semiconductor device
06/03/2010US20100136779 Sidewall SONOS Gate Structure with Dual-Thickness Oxide and Method of Fabricating the Same
06/03/2010US20100136778 Semiconductor Memory Device and a Method of Manufacturing the Same, A Method of Manufacturing a Vertical MISFET and a Vertical MISFET, and a Method of Manufacturing a Semiconductor Device and a Semiconductor Device
06/03/2010US20100136777 Flexible substrate with electronic devices formed thereon
06/03/2010US20100136776 Selective deposition of noble metal thin films
06/03/2010US20100136775 Method of manufacturing thin-film transistor substrate
06/03/2010US20100136774 Method of fabricating a diode
06/03/2010US20100136773 Semiconductor Device Manufacturing Method and Substrate Processing Apparatus
06/03/2010US20100136772 Delivery of vapor precursor from solid source
06/03/2010US20100136771 Sub-critical shear thinning group iv based nanoparticle fluid
06/03/2010US20100136770 Group-iii metal nitride and preparation thereof
06/03/2010US20100136769 Germanium-based polymers and products formed from germanium-based polymers
06/03/2010US20100136768 Method for simultaneous doping and oxidizing semiconductor substrates and the use thereof
06/03/2010US20100136767 Method for production of thin film and apparatus for manufacturing the same
06/03/2010US20100136766 Working method for cutting
06/03/2010US20100136765 Method for manufacturing semiconductor device
06/03/2010US20100136764 Method of manufacturing an integrated circuit
06/03/2010US20100136763 Methods of forming semiconductor device
06/03/2010US20100136762 Enhancing integrity of a high-k gate stack by protecting a liner at the gate bottom during gate head exposure
06/03/2010US20100136761 Semiconductor Devices and Methods of Manufacturing Thereof
06/03/2010US20100136760 Silicon Carbide Semiconductor Device and Manufacturing Method Thereof
06/03/2010US20100136759 Method of fabricating a dynamic random access memory
06/03/2010US20100136758 Semiconductor device manufacturing method
06/03/2010US20100136757 method for aligning elongated nanostructures
06/03/2010US20100136756 Thin film transistor, method for fabricating the same and display device
06/03/2010US20100136755 Method for fabricating thin film transistor
06/03/2010US20100136754 Thin film transistor and method of fabricating thin film transistor substrate
06/03/2010US20100136753 Fabricating method of thin film transistor
06/03/2010US20100136752 Semiconductor device and method for manufacturing the same
06/03/2010US20100136751 Method for making a p-i-n diode crystallized adjacent to a silicide in series with a dielectric antifuse
06/03/2010US20100136750 Etched Leadframe Structure
06/03/2010US20100136749 Microarray package with plated contact pedestals
06/03/2010US20100136748 Flexible diode package and method of manufacturing
06/03/2010US20100136747 Method for manufacturing semiconductor package
06/03/2010US20100136746 Method for producing a set of chips mechanically interconnected by means of a flexible connection
06/03/2010US20100136745 Pop package and method of fabricating the same
06/03/2010US20100136744 Method for making semiconductor multipackage module including die and inverted land grid array package stacked over ball grid array package
06/03/2010US20100136743 Semiconductor Device and Manufacturing Method Thereof
06/03/2010US20100136742 Phase change memory with ovonic threshold switch
06/03/2010US20100136738 Solid-state imaging device, solid-state imaging apparatus and methods for manufacturing the same
06/03/2010US20100136737 Method of making cmos image sensor-hybrid silicide
06/03/2010US20100136734 Semiconductor device and method of manufacturing the same
06/03/2010US20100136730 Thin film devices for flat panel displays and methods for forming the same
06/03/2010US20100136729 Liquid crystal display device and method of fabricating the same
06/03/2010US20100136726 Led array
06/03/2010US20100136724 Method for fabricating a nanostructured substrate for oled and method for fabricating an oled
06/03/2010US20100136721 Nitride-based white light emitting device and manufacturing method thereof
06/03/2010US20100136720 Manufacturing method of pixel structure
06/03/2010US20100136719 Thin film transistor substrate having electrode layers that are formed on insulating layer to cover common voltage line and grounding line
06/03/2010US20100136718 Methods and apparatus for aligning a set of patterns on a silicon substrate
06/03/2010US20100136717 Apparatus and method to inspect defect of semiconductor device
06/03/2010US20100136716 Manufacturing apparatus for semiconductor device and manufacturing method for semiconductor device
06/03/2010US20100136715 Screening of Silicon Wafers Used in Photovoltaics
06/03/2010US20100136714 Device for processing substrate and method of manufacturing semiconductor device
06/03/2010US20100136712 Compound and method for producing the same
06/03/2010US20100136488 Pattern creation method, semiconductor device manufacturing method, and computer-readable storage medium
06/03/2010US20100136487 Pattern formation method using levenson-type mask and method of manufacturing levenson-type mask
06/03/2010US20100136464 Reflective mask blank and method of producing the same, and method of producing a reflective mask
06/03/2010US20100135937 Metal oxide nanocrystals: preparation and uses
06/03/2010US20100135764 Magnetically coupled thin-wafer handling system
06/03/2010US20100135761 Substrate transport apparatus and substrate transport method
06/03/2010US20100135753 Load port
06/03/2010US20100135752 Robot device and control method thereof
06/03/2010US20100135751 Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatus
06/03/2010US20100135610 Stitched waveguide for use in a fiber-optic gyroscope
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