Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2010
06/02/2010CN101136323B Method for memory isolation structure formed by selective etching
06/02/2010CN101132021B Vertical BJT, manufacturing method thereof
06/02/2010CN101131959B Display and method for manufacturing the same
06/02/2010CN101127333B Semiconductor device and manufacturing method of the same
06/02/2010CN101127316B Wafer transfer method and grinding device
06/02/2010CN101127300B Monitoring substrate processing using reflected radiation
06/02/2010CN101118865B Substrate support with a protective layer for plasma resistance
06/02/2010CN101118864B Substrate detecting mechanism and substrate processing device using the same
06/02/2010CN101110391B System and method for cutting underlay
06/02/2010CN101110382B Electrostatic chuck heater
06/02/2010CN101110374B Module and method of manufacturing the same
06/02/2010CN101106130B High voltage multi-output current device
06/02/2010CN101090120B A nand memory device with inversion bit lines and methods for making the same
06/02/2010CN101086958B Ultraviolet radiation device and cutting machine with the same
06/02/2010CN101083236B Electronic device and method of manufacturing the electronic device
06/02/2010CN101071762B Electronic device manufacturing device and device for supporting the electronic device manufacturing chamber
06/02/2010CN101060772B Pasting method for different kinds of adhesive tapes, and jointing method and device using the same
06/02/2010CN101060074B Method for etching wafer in plasma etching cell
06/02/2010CN101058712B Grinding fluid for metal and grinding method
06/02/2010CN101055851B CMOS and its forming method
06/02/2010CN101051614B Method for forming reinforced interconnects on a substrate
06/02/2010CN101038937B Thin film semiconductor device and method for manufacturing same
06/02/2010CN101038865B A method of fabricating a thin film
06/02/2010CN101030044B Method of processing a substrate
06/02/2010CN101005020B Fabrication method of semiconductor device
06/01/2010USRE41363 Thin film transistor substrate
06/01/2010USRE41362 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
06/01/2010USRE41361 Method for connecting microchips to an antenna arranged on a support strip for producing a transponder
06/01/2010US7730445 Pattern data verification method for semiconductor device, computer-readable recording medium having pattern data verification program for semiconductor device recorded, and semiconductor device manufacturing method
06/01/2010US7730440 Clock signal distribution system and method
06/01/2010US7730434 Contactless technique for evaluating a fabrication of a wafer
06/01/2010US7730372 Device and method for testing integrated circuit dice in an integrated circuit module
06/01/2010US7730349 Self-reparable semiconductor and method thereof
06/01/2010US7729938 Method and system to connect consumers to information
06/01/2010US7729798 Substrate processing system, and method of control therefor, control program, and storage medium
06/01/2010US7729529 Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle
06/01/2010US7729528 Automated wafer defect inspection system and a process of performing such inspection
06/01/2010US7728914 Position encoded sensing device with amplified light reflection intensity and a method of manufacturing the same
06/01/2010US7728653 Display and method of driving the same
06/01/2010US7728509 Organic electroluminescent display device and method of fabricating the same
06/01/2010US7728440 Warp-suppressed semiconductor device
06/01/2010US7728423 Semiconductor device having step-wise connection structures for thin film elements
06/01/2010US7728418 Semiconductor device and manufacturing method thereof
06/01/2010US7728416 Semiconductor device, a method of manufacturing the same and an electronic device
06/01/2010US7728410 Semiconductor device comprising light-blocking region enclosing semiconductor element
06/01/2010US7728408 Verticle BJT, manufacturing method thereof
06/01/2010US7728390 Multi-level interconnection memory device
06/01/2010US7728380 Semiconductor device
06/01/2010US7728374 Embedded memory device and a manufacturing method thereof
06/01/2010US7728373 DRAM device with cell epitaxial layers partially overlap buried cell gate electrode
06/01/2010US7728368 Semiconductor device and method of manufacturing the same
06/01/2010US7728361 Method of testing an integrated circuit die, and an integrated circuit die
06/01/2010US7728360 Multiple-gate transistor structure
06/01/2010US7728354 Semiconductor device
06/01/2010US7728353 Semiconductor device in which GaN-based semiconductor layer is selectively formed
06/01/2010US7728350 Memory cell with negative differential resistance
06/01/2010US7728347 ZnO layer and semiconductor light emitting device
06/01/2010US7728341 Illumination device for providing directionally guided light
06/01/2010US7728339 Boundary isolation for microelectromechanical devices
06/01/2010US7728334 Semiconductor device and manufacturing method thereof
06/01/2010US7728331 Thin film transistor panel and manufacturing method thereof
06/01/2010US7728329 Thin film transistor array panel for X-ray detector
06/01/2010US7728258 Laser machining of a workpiece
06/01/2010US7728257 Method of forming embrittled areas inside wafer for division
06/01/2010US7728256 Silicon crystallization apparatus and silicon crystallization method thereof
06/01/2010US7728065 Polycarbosilane substituted with a benzyl or diazo group and/or a polysilazane having a substituent capable of absorbing exposure light; high exposure light (particularly ultraviolet light) absorptivity, which efficiently blocks the exposure light that reaches porous insulating films
06/01/2010US7727913 Method of crystallizing semiconductor film
06/01/2010US7727912 Method of light enhanced atomic layer deposition
06/01/2010US7727911 Method for forming a gate insulating film
06/01/2010US7727910 Zirconium-doped zinc oxide structures and methods
06/01/2010US7727909 Method for producing fine-grained particles
06/01/2010US7727908 Deposition of ZrA1ON films
06/01/2010US7727907 Manufacturing method of semiconductor device and semiconductor device produced therewith
06/01/2010US7727906 H2-based plasma treatment to eliminate within-batch and batch-to-batch etch drift
06/01/2010US7727905 Zirconium-doped tantalum oxide films
06/01/2010US7727904 Methods of forming SiC MOSFETs with high inversion layer mobility
06/01/2010US7727903 Method of forming strain-causing layer for MOS transistors and process for fabricating strained MOS transistors
06/01/2010US7727902 Composition for forming nitride coating film for hard mask
06/01/2010US7727901 Preparation of group IV semiconductor nanoparticle materials and dispersions thereof
06/01/2010US7727900 Surface preparation for gate oxide formation that avoids chemical oxide formation
06/01/2010US7727899 Manufacturing method of semiconductor device and semiconductor storage device including fine contact holes
06/01/2010US7727898 Semiconductor device and method of fabricating same
06/01/2010US7727897 Method of etching a TE/PCMO stack using an etch stop layer
06/01/2010US7727896 Stacked die manufacturing process
06/01/2010US7727895 Substrate processing system and substrate processing method
06/01/2010US7727894 Formation of an integrated circuit structure with reduced dishing in metallization levels
06/01/2010US7727893 Method of forming a dielectric layer pattern and method of manufacturing a non-volatile memory device using the same
06/01/2010US7727892 Method and apparatus for forming metal-metal oxide etch stop/barrier for integrated circuit interconnects
06/01/2010US7727891 Method of manufacturing a semiconductor device using a wet process
06/01/2010US7727890 High aspect ratio electroplated metal feature and method
06/01/2010US7727889 Method for forming fine pattern by spacer patterning technology
06/01/2010US7727888 Interconnect structure and method for forming the same
06/01/2010US7727887 Method for improved power distribution in a three dimensional vertical integrated circuit
06/01/2010US7727886 Forming vias using sacrificial material
06/01/2010US7727885 Reduction of punch-thru defects in damascene processing
06/01/2010US7727884 Methods of forming a semiconductor device including a phase change material layer
06/01/2010US7727883 Method of forming a diffusion barrier and adhesion layer for an interconnect structure
06/01/2010US7727882 Compositionally graded titanium nitride film for diffusion barrier applications
06/01/2010US7727881 Protective self-aligned buffer layers for damascene interconnects
06/01/2010US7727880 Protective self-aligned buffer layers for damascene interconnects