| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/10/2010 | US20100140513 Extreme ultraviolet light source apparatus |
| 06/10/2010 | US20100140474 Method of inspecting a semiconductor device and an apparatus thereof |
| 06/10/2010 | US20100140457 Semiconductor apparatus, solid state image pickup device using the same, and method of manufacturing them |
| 06/10/2010 | US20100140239 Method and system for high-speed, precise micromachining an array of devices |
| 06/10/2010 | US20100140235 Laser system for processing a memory link with a set of at least two laser pulses |
| 06/10/2010 | US20100140224 Plasma Processing Apparatus And Plasma Processing Method |
| 06/10/2010 | US20100140223 Plasma Treatment System |
| 06/10/2010 | US20100140104 Electrolytic etching method and method of producing a solar battery |
| 06/10/2010 | US20100140085 Magnetron plasma processing apparatus |
| 06/10/2010 | US20100139889 Multiple Slot Load Lock Chamber and Method of Operation |
| 06/10/2010 | US20100139862 Imprint lithography |
| 06/10/2010 | US20100139838 Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent |
| 06/10/2010 | US20100139772 Nanowire sensitized solar cells |
| 06/10/2010 | US20100139767 Chip package structure and method of fabricating the same |
| 06/10/2010 | US20100139759 Optical device |
| 06/10/2010 | US20100139754 Solar Cell With Co-Planar Backside Metallization |
| 06/10/2010 | US20100139747 Single-crystal nanowires and liquid junction solar cells |
| 06/10/2010 | US20100139741 Frame-Integrated Pivot Bearing For Solar Collector Assembly |
| 06/10/2010 | US20100139565 Particle-measuring system and particle-measuring method |
| 06/10/2010 | US20100139561 Counter sunk screen |
| 06/10/2010 | US20100139421 Evaluation method for chemical solution, qualification method for chemical solution and method for manufacturing semiconductor device |
| 06/10/2010 | US20100139410 Micromechanical Pressure Sensing Device |
| 06/10/2010 | DE19740996B4 Zweifluid-Reinigungsstrahldüse sowie Reinigungsvorrichtung und Anwendungsverfahren dafür Two-fluid cleaning jet nozzle and cleaning apparatus and method of application for |
| 06/10/2010 | DE112008002015T5 Weiterentwickelte Bearbeitungskammer für mehrere Werkstücke Enhanced processing chamber for several workpieces |
| 06/10/2010 | DE112008001114T5 Vorrichtung für die Oberflächenprüfung A device for surface inspection |
| 06/10/2010 | DE112006000234B4 Verfahren zum Ausbilden von Silizid und damit hergestellten Transistor und damit hergestellte Halbleiteranordnung A method of forming suicide and therewith transistor and thus produced semiconductor device |
| 06/10/2010 | DE112005002158B4 Verfahren zur Herstellung einer Halbleitervorrichtung, die eine dielektrische Gateschicht mit hohem K und eine Gateelektrode aus Metall aufweist A method of manufacturing a semiconductor device having a gate dielectric layer having a high K and a gate electrode made of metal |
| 06/10/2010 | DE10230134B4 Bildsensor und Verfahren zu dessen Herstellung Image sensor and method for its production |
| 06/10/2010 | DE102009053586A1 Photomaskenrohling, Herstellungsverfahren für Photomaskenrohling und Herstellungsverfahren für Photomaske Photomask blank, method of making photographic mask blank and method of making photographic mask |
| 06/10/2010 | DE102009007260B3 Vorrichtung zum Beschichten eines Substrats An apparatus for coating a substrate |
| 06/10/2010 | DE102008060275A1 Bonded wafer structuring method for manufacturing integrated components, involves carrying out etching process with respect to protective layer so that edge of handling-wafer is covered by protective layer |
| 06/10/2010 | DE102008060211A1 Method for metal contacting a solar cell by laser cladding process, comprises applying a seed layer of metal on a surface of substrate through powder stream, melting the particles by laser beam and soldering with surface of the solar cell |
| 06/10/2010 | DE102008060077A1 Verfahren zur Herstellung einer integrierten Schaltung A method of fabricating an integrated circuit |
| 06/10/2010 | DE102008059649A1 Geringere topographieabhängige Unregelmäßigkeiten während der Strukturierung zweier unterschiedlicher verspannungsinduzierender Schichten in der Kontaktebene eines Halbleiterbauelements Lower topography dependent irregularities during the patterning of layers of two different verspannungsinduzierender in the contact plane of a semiconductor device |
| 06/10/2010 | DE102008059647B3 Verfahren zur Herstellung einer Gateelektrodenstruktur mit Erhöhung der Integrität eines Gatestapels mit großem ε durch Schützen einer Beschichtung an der Gateunterseite während des Freilegens der Gateoberseite A method of manufacturing a gate electrode structure with increasing the integrity of a gate stack with large ε by protecting a coating on the gate during the underside exposing the gate top |
| 06/10/2010 | DE102008059504A1 Eingebaute Nachgiebigkeit in Strukturen zum Testen von Leckströmen und dielektrischen Durchschlag dielektrischer Materialien von Metallisierungssystemen von Halbleiterbauelementen Built-compliance in structures for testing of leakage currents and dielectric breakdown of dielectric materials of metallization of semiconductor devices |
| 06/10/2010 | DE102008059498A1 Beschränkte Verspannungsgebiete, die in der Kontaktebene eines Halbleiterbauelements gebildet sind Restricted stress areas, which are formed in the contact plane of a semiconductor device |
| 06/10/2010 | DE102008054415A1 Anordnung zweier Substrate mit einer SLID-Bondverbindung und Verfahren zur Herstellung einer solchen Anordnung Assembly of two substrates with a SLID bond and methods of making such an arrangement |
| 06/10/2010 | DE102008035806B4 Herstellungsverfahren für ein Halbleiterbauelement bzw. einen Transistor mit eingebettetem Si/GE-Material mit einem verbesserten Boreinschluss sowie Transistor Manufacturing method for a semiconductor device or a transistor with embedded Si / Ge material with an improved and transistor Boreinschluss |
| 06/10/2010 | DE102006004430B4 Verfahren und System für eine fortschrittliche Prozesssteuerung in einem Ätzsystem durch Gasflusssteuerung auf der Grundlage von CD-Messungen A method and system for an advanced process control in an etching system by the gas flow control on the basis of CD measurements |
| 06/10/2010 | DE102005041313B4 Technik zur Überwachung dynamischer Prozesse wie Elektromigration in Metallleitungen von Mikrostrukturen mit der Möglichkeit der Rekonfiguration der kristallinen Struktur Technique for monitoring dynamic processes such as electro-migration in metal lines of microstructures with the possibility of reconfiguring the crystalline structure |
| 06/10/2010 | DE102005035648B4 Verfahren zur Herstellung eines Hochleistungsbauelements A method for manufacturing a high-power device |
| 06/10/2010 | DE102004053095B4 Herstellung von neigungsfreien, gestapelten Kondensatoren Manufacture of passion free, stacked capacitors |
| 06/10/2010 | CA2745634A1 Energy conversion device |
| 06/09/2010 | EP2194575A2 Substrate Dividing Method |
| 06/09/2010 | EP2194574A2 Method for producing interconnect structures for integrated circuits |
| 06/09/2010 | EP2194573A2 Contact formation |
| 06/09/2010 | EP2194572A1 Electronic component part device |
| 06/09/2010 | EP2194571A1 Preparation of moulded body with electric circuit |
| 06/09/2010 | EP2194570A1 Materials for polishing liquid for metal, polishing liquid for metal, mehtod for preparation thereof and polishing method using the same |
| 06/09/2010 | EP2194569A1 Plasma etching method |
| 06/09/2010 | EP2194568A1 Semiconductor wafer manufacturing method |
| 06/09/2010 | EP2194567A1 Cleaning method of semiconductor wafer |
| 06/09/2010 | EP2194168A1 Silicon single crystal growing method, silicon wafer and soi substrate using such silicon wafer |
| 06/09/2010 | EP2194167A1 Method for growth of GaN single crystal, method for preparation of GaN substrate, process for producing GaN-based element, and GaN-based element |
| 06/09/2010 | EP2194161A1 Vaporization apparatus, film forming apparatus, film forming method, computer program and storage medium |
| 06/09/2010 | EP2194073A1 Positive-working photosensitive composition, method for pattern formation using the composition, and resin for use in the composition |
| 06/09/2010 | EP2194060A1 Organic silane compounds for forming silicon-containing films by plasma CVD and method for forming silicon-containing films |
| 06/09/2010 | EP2194030A1 Quartz glass member for plasma etching |
| 06/09/2010 | EP2194026A1 Large-area nanoenabled macroelectronic substrates and uses therefor |
| 06/09/2010 | EP2193541A1 Method of forming silicon-containing films |
| 06/09/2010 | EP2193540A2 Method for heating a plate with a light stream |
| 06/09/2010 | EP2193539A1 Carrier chip with cavity |
| 06/09/2010 | EP2193360A2 Method, device and system for measuring nanoscale deformations |
| 06/09/2010 | EP2193222A1 Process for making thin film transistors by atomic layer deposition |
| 06/09/2010 | EP1407486B1 Method for making a transistor on a soi substrate |
| 06/09/2010 | EP1129473B1 Conductive isostructural compounds |
| 06/09/2010 | EP1062684B1 Trench isolation for micromechanical devices |
| 06/09/2010 | CN201503858U Maskplate replacing device |
| 06/09/2010 | CN201503857U List tail box transferring device of plastic packaging chip-arranging machine |
| 06/09/2010 | CN201503856U Special multi-head glue dispensing device for integrated circuit package |
| 06/09/2010 | CN201503855U Device for carrying out quantitative automatic glue injection, vacuum exhaust and glue filling on electronic devices |
| 06/09/2010 | CN201503847U Plasma processing device |
| 06/09/2010 | CN201503846U Ion-source arc body and fixing device thereof |
| 06/09/2010 | CN1980984B Polyamide |
| 06/09/2010 | CN1976005B Semiconductor device manufacture method |
| 06/09/2010 | CN1954407B Exposure method and method for producing device |
| 06/09/2010 | CN1954095B Treating device and heater unit |
| 06/09/2010 | CN1953150B Method of making a circuitized substrate having a plurality of solder connection sites thereon |
| 06/09/2010 | CN1945429B Photosensitive resin composition and photosensitive resin laminate using the same |
| 06/09/2010 | CN1941577B Booster circuit |
| 06/09/2010 | CN1941400B Organic light emitting display and method for fabricating the same |
| 06/09/2010 | CN1939108B Mounting system for high-mass heatsinks |
| 06/09/2010 | CN1933111B Method for producing space wall, cleaning method after etching thereof and semiconductor element |
| 06/09/2010 | CN1885166B Substrate processing system and control method thereof |
| 06/09/2010 | CN1871692B Sheet-peeling device and method |
| 06/09/2010 | CN1855365B Subsurface imaging using an electron beam |
| 06/09/2010 | CN1845301B Extraction method for asymmetric equivalent circuit model parameter of silicon based spiral inductor |
| 06/09/2010 | CN1828832B Laser apparatus and manufacturing method of thin film transistor using the same |
| 06/09/2010 | CN1828206B Centrifugal drying device |
| 06/09/2010 | CN1819215B Element formation substrate, method of manufacturing the same, and semiconductor device |
| 06/09/2010 | CN1816251B Method of forming periphery of substrate |
| 06/09/2010 | CN1815751B Light emitting device, method of manufacturing light emitting device, and electronic apparatus |
| 06/09/2010 | CN1809914B Method for forming semiconductor structure |
| 06/09/2010 | CN1800991B Scanning exposure method and scanning exposure apparatus manufacture method |
| 06/09/2010 | CN1781826B Reticle-carrying container |
| 06/09/2010 | CN1777976B Method of forming a metal gate structure with tuning of work function by silicon incorporation |
| 06/09/2010 | CN1745487B Method for forming electronic devices in multi-layer structure of substrate |
| 06/09/2010 | CN1745456B Installation for processing a substrate |
| 06/09/2010 | CN1734662B Magnetic tunnel junction structures, magnetic random access memory cells employing the same and photomasks used in formation thereof |