Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2010
08/19/2010WO2010065332A3 Semiconductor device structures including transistors with energy barriers adjacent to transistor channels and associated methods
08/19/2010WO2010065312A3 A transparent conductive film with high surface roughness formed by a reactive sputter deposition
08/19/2010WO2010059868A3 Method and apparatus for trench and via profile modification
08/19/2010WO2010059857A3 Bottom up plating by organic surface passivation and differential plating retardation
08/19/2010WO2010053866A3 Reaction chamber
08/19/2010WO2010049086A3 Recessed drain and source areas in combination with advanced silicide formation in transistors
08/19/2010WO2010036307A3 Method of assembling integrated circuit elements with a chip substrate using a thermal activatable barrier layer and the resulting product thereof
08/19/2010WO2009158311A3 Methods and apparatus for in-situ chamber dry clean during photomask plasma etching
08/19/2010WO2007127496A8 Topography directed patterning
08/19/2010US20100211903 User Interface for Wafer Data Analysis and Visualization
08/19/2010US20100211352 Mark arrangement inspecting method, mask data, and manufacturing method of semiconductor device
08/19/2010US20100211216 Substrate processing apparatus and method of displaying abnormal state of substrate processing apparatus
08/19/2010US20100211215 Substrate transfer apparatus and substrate treatment system
08/19/2010US20100211210 Position correcting apparatus, vacuum processing equipment and position correcting method
08/19/2010US20100211207 Manufacturing apparatus for semiconductor device, controlling method for the manufacturing apparatus, and storage medium storing control program for the manufacturing apparatus
08/19/2010US20100211203 Substrate processing system and substrate transfer method
08/19/2010US20100210615 Compositions and methods for enhancing corticosteroid delivery
08/19/2010US20100210614 Compositions and methods for enhancing corticosteroid delivery
08/19/2010US20100210609 Free of medium chain glycerides; topical delivery to skin; vehicle comprising at least two penetration enhancers such as propylene glycol, diisopropyl adipate, dimethyl isosorbide, 1,2,6-hexanetriol, and benzyl alcohol, as well as solvents and emulsifiers
08/19/2010US20100210197 Polishing pad
08/19/2010US20100210122 Electrical connecting apparatus
08/19/2010US20100210118 Semiconductor device manufacturing method and substrate processing apparatus
08/19/2010US20100210117 Selective removal of oxygen from metal-containing materials
08/19/2010US20100210116 Methods of forming vapor thin films and semiconductor integrated circuit devices including the same
08/19/2010US20100210115 Substrate mounting mechanism, substrate processing apparatus, method for suppressing film deposition on substrate mounting mechanism, and storage medium
08/19/2010US20100210114 Plasma processing method
08/19/2010US20100210113 Method for forming via
08/19/2010US20100210112 Method for fabricating a semiconductor device having a lanthanum-family-based oxide layer
08/19/2010US20100210111 Pitch reduced patterns relative to photolithography features
08/19/2010US20100210110 Etching apparatus, a method of controlling an etching solution, and a method of manufacturing a semiconductor device
08/19/2010US20100210109 Cmp polishing slurry and method of polishing substrate
08/19/2010US20100210108 Radiation-assisted selective deposition of metal-containing cap layers
08/19/2010US20100210107 Semiconductor device and manufacturing method thereof
08/19/2010US20100210106 Semiconductor device having a interlayer insulation film with low dielectric constant and high mechanical strength
08/19/2010US20100210105 Method of fabricating semiconductor device having buried wiring
08/19/2010US20100210104 Method for forming copper wiring in a semiconductor device
08/19/2010US20100210103 Method of manufacturing semiconductor device
08/19/2010US20100210102 Method of manufacturing a semiconductor device
08/19/2010US20100210101 Formation of Solder Bumps
08/19/2010US20100210100 Semiconductor device and method for manufacturing the same
08/19/2010US20100210099 Methods of forming a metal silicide layer for semiconductor devices
08/19/2010US20100210098 Self-aligned contact
08/19/2010US20100210097 Manufacturing method of semiconductor device
08/19/2010US20100210096 Production method for semiconductor device
08/19/2010US20100210095 Polarity dependent switch for resistive sense memory
08/19/2010US20100210094 Method for using apparatus configured to form germanium-containing film
08/19/2010US20100210093 Method for forming silicon-based thin film by plasma cvd method
08/19/2010US20100210092 Method and apparatus for manufacturing silicon thin film layer and manufacturing apparatus of solar cell
08/19/2010US20100210091 Method for producing a semiconductor
08/19/2010US20100210090 Forming structures that include a relaxed or pseudo-relaxed layer on a substrate
08/19/2010US20100210089 SUBSTRATE HAVING THIN FILM OF GaN JOINED THEREON AND METHOD OF FABRICATING THE SAME, AND A GaN-BASED SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
08/19/2010US20100210088 Manufacturing method of semiconductor device
08/19/2010US20100210087 Methods of Manufacturing Semiconductor Devices Having Contact Plugs in Insulation Layers
08/19/2010US20100210086 Junction Profile Engineering Using Staged Thermal Annealing
08/19/2010US20100210085 Method for fabricating non-volatile memory
08/19/2010US20100210084 Methods for fabricating mos devices having highly stressed channels
08/19/2010US20100210083 Method for manufacturing semiconductor device
08/19/2010US20100210082 Method for manufacturing semiconductor device
08/19/2010US20100210081 Stress memorization dielectric optimized for nmos and pmos
08/19/2010US20100210080 Method of manufacturing gan-based transistors
08/19/2010US20100210079 Production method for semiconductor device
08/19/2010US20100210078 Manufacturing Method of Semiconductor Device
08/19/2010US20100210077 Configurable integrated circuit with built-in turns
08/19/2010US20100210076 Memory circuit arrangement and method for the production thereof
08/19/2010US20100210075 Techniques for providing a source line plane
08/19/2010US20100210074 Semiconductor package, integrated circuit cards incorporating the semiconductor package, and method of manufacturing the same
08/19/2010US20100210073 Method for Encapsulating a Device in a Microcavity
08/19/2010US20100210072 Buffer coating having a physical mixture of high toughness polymer and a low shrinkage polymer
08/19/2010US20100210071 Method of manufacturing semiconductor devices
08/19/2010US20100210070 Method of manufacturing a field effect transistor having an oxide semiconductor
08/19/2010US20100210069 Solution composition and method of forming thin film and method of manufacturing thin film transistor using the solution composition
08/19/2010US20100210068 Method of forming phase change memory device
08/19/2010US20100210067 Migration and plasma enhanced chemical vapor deposition
08/19/2010US20100210065 Method of manufacturing solar cell
08/19/2010US20100210057 Method for Manufacturing Thin Film Transistor and Method for Manufacturing Display Device
08/19/2010US20100210056 Method of fabricating array substrate
08/19/2010US20100210055 Method of fabricating a flexible display device
08/19/2010US20100210050 Method of manufacturing liquid crystal display device
08/19/2010US20100210049 Method of making a semiconductor chip assembly with a post/base heat spreader and dual adhesives
08/19/2010US20100210047 Method for manufacturing organic electroluminescence device
08/19/2010US20100210046 Light emitting diode chip, and methods for manufacturing and packaging the same
08/19/2010US20100210045 Opto-electronic device package with a semiconductor-based sub-mount having smd metal contacts
08/19/2010US20100210044 Charge transfer device
08/19/2010US20100210043 In-line depth measurement of thru silicon via
08/19/2010US20100210042 Method of manufacturing semiconductor module
08/19/2010US20100210041 Multi-zone temperature control for semiconductor wafer
08/19/2010US20100209852 Track nozzle system for semiconductor fabrication
08/19/2010US20100209834 Mask pattern correction device, method of correcting mask pattern, light exposure correction device, and method of correcting light exposure
08/19/2010US20100209829 Photomask manufacturing method and semiconductor device manufacturing method
08/19/2010US20100209828 Reticle manufacturing method, surface shape measuring apparatus and signal processor
08/19/2010US20100209827 Novel sulfonate and its derivative, photosensitive acid generator, and resist composition and patterning process using the same
08/19/2010US20100209686 Mg-CONTAINING ZnO MIXED SINGLE CRYSTAL, LAMINATE THEREOF AND THEIR PRODUCTION METHODS
08/19/2010US20100209596 Scalable lead zirconium titanate (pzt) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material
08/19/2010US20100209226 Method and apparatus to support process tool modules in a cleanspace fabricator
08/19/2010US20100209225 Substrate transfer robot, substrate transfer device, semiconductor manufacturing apparatus, and method for producing semiconductor
08/19/2010US20100209220 Rotary actuator position sensor
08/19/2010US20100209219 Electronic device sorter comprising dual buffers
08/19/2010US20100209217 Work transfer apparatus
08/19/2010US20100209041 Photoelectric composite wiring module and method for manufacturing the same
08/19/2010US20100208978 Method of inspecting mask pattern and mask pattern inspection apparatus
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