Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2014
08/06/2014CN103972067A 具有取代栅极结构的集成电路及其制造方法 Gate structure having a substituent and a manufacturing method of an integrated circuit
08/06/2014CN103972066A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
08/06/2014CN103972065A SiGe层的形成方法 The method of forming a SiGe layer
08/06/2014CN103972064A 具有p型埋层的硅外延过程中抑制p型杂质自掺杂的工艺 A silicon epitaxial process having p-type buried layer in the p-type impurity suppressing self-doping process
08/06/2014CN103972063A 一种优化离子注入区域形貌的方法 A method of ion implantation region topography optimization
08/06/2014CN103972062A 一种离子注入的方法 An ion implantation method
08/06/2014CN103972061A 将掺杂剂注入到iii族氮化物结构中的方法及形成的器件 Iii implanting a dopant into the nitride structure formed in a method and device
08/06/2014CN103972060A 超浅结的制造 Manufacture USJ
08/06/2014CN103972059A 用于在沟槽中形成半导体区的方法 The method for forming a semiconductor region in the trench
08/06/2014CN103972058A 自对准双层图形半导体结构的制作方法 Self-aligned method of making a semiconductor structure of double Graphics
08/06/2014CN103972057A 一种半导体精细特征尺寸图形的形成方法 A method of forming a semiconductor fine feature size pattern
08/06/2014CN103972056A 一种自对准双层图形的形成方法 The method for forming a self-aligned double-figure
08/06/2014CN103972055A 光刻胶去除方法 Photoresist removal method
08/06/2014CN103972054A 图案化工艺 Patterning process
08/06/2014CN103972053A 一种图形化高能重离子注入的低损耗硅基射频无源器件的制作方法 A graphical method of making low-loss high-energy heavy ion implantation silicon RF passives
08/06/2014CN103972052A 应用晶边扫描预防线状分布缺陷发生的方法 Application crystal edge scanning linear distribution defect prevention of
08/06/2014CN103972051A 一种消除晶边颗粒残留的铝刻蚀前置工艺方法 For eliminating the residual aluminum particles crystal side etching process for the front
08/06/2014CN103972050A 多晶硅薄膜、多晶硅薄膜晶体管及阵列基板的制备方法 Preparation polycrystalline silicon thin film, polycrystalline silicon thin film transistor array substrate and
08/06/2014CN103972049A 晶圆回收方法 Wafer recovery methods
08/06/2014CN103972048A 改善层间介质层研磨返工工艺的方法 The method of the dielectric layer between the grinding rework process improvement layer
08/06/2014CN103972047A 链式通孔结构样品处理方法及失效测试方法 Chain via structure sample processing method and test methods fail
08/06/2014CN103972046A 用于制造电容器的方法及包括该电容器的显示设备 A method for manufacturing a capacitor comprising the capacitor and a display device
08/06/2014CN103972045A 半导体制造设备及半导体器件的制造方法 A semiconductor manufacturing apparatus and manufacturing method of a semiconductor device
08/06/2014CN103972044A Mim电容器的制备方法以及半导体器件的制备方法 Preparation Mim capacitor and production method of a semiconductor device
08/06/2014CN103972011A 离子注入设备及离子注入方法 Ion implantation apparatus and an ion implantation method
08/06/2014CN103972010A 用于衬底处理腔室的气体供应系统及其方法 The method for a gas supply system and the substrate processing chamber
08/06/2014CN103971722A 三维半导体器件及其制造方法 Three-dimensional semiconductor device and manufacturing method thereof
08/06/2014CN103970922A 在半导体晶圆厂中以设计为基础的制程最佳化装置 Process optimization means in the semiconductor fab design-based
08/06/2014CN103969967A 用于硅片对准级间串绕测试和拟合的信号处理方法 Wafer-level crosstalk between alignment and fit test method for signal processing
08/06/2014CN103969963A 用于光刻系统的图案生成器 The pattern generator for a lithographic system
08/06/2014CN103969902A 阵列基板及其制作方法及液晶显示装置 Array substrate and manufacturing method thereof and liquid crystal display device
08/06/2014CN103966663A 半导体设备 Semiconductor Equipment
08/06/2014CN103966662A 一种在硅电极上定位横向生长氧化锌纳米线的方法 An electrode is positioned on the lateral growth of silicon nanowires method zinc oxide
08/06/2014CN103966576A 基板处理装置、半导体器件的制造方法及程序 Substrate processing apparatus, method and program of manufacturing a semiconductor device
08/06/2014CN103966575A 基板处理装置及成膜方法 Film substrate processing apparatus and method
08/06/2014CN103966574A 气相生长装置及气相生长方法 Vapor phase growth apparatus and vapor growth method
08/06/2014CN103966558A Cu-Mn合金溅射靶材、Cu-Mn合金溅射靶材的制造方法以及半导体元件 Cu-Mn alloy sputtering target, a method of manufacturing Cu-Mn alloy sputtering target and a semiconductor element
08/06/2014CN103965788A 一种碱性抛光液及抛光方法 An alkaline polishing liquid and polishing method
08/06/2014CN103964686A 一种用于等离子处理腔室的石英组件及等离子体处理设备 For a plasma processing chamber and a plasma processing apparatus quartz components
08/06/2014CN103964233A 一种晶片传送控制方法及装置 A wafer transfer control method and apparatus
08/06/2014CN103962958A 加工装置 Processing device
08/06/2014CN103962938A 研磨装置 Grinding device
08/06/2014CN103962936A 研磨方法及装置 Polishing method and apparatus
08/06/2014CN103962729A 卡盘工作台 Chuck table
08/06/2014CN103962714A 环境温度的球焊接头 Ambient temperature solder ball head
08/06/2014CN103962713A 焊接劈刀 Welding chopper
08/06/2014CN103962341A 一种用于清除静电吸盘表面异物的吹扫装置 A purging apparatus for removing foreign matter in a surface of the electrostatic chuck
08/06/2014CN103962274A 树脂覆盖装置 Resin coating device
08/06/2014CN103145116B 制备选择性还原氧化石墨烯及电存储器的方法 Selective reduction of graphene oxide and method for preparing the electronic memory
08/06/2014CN102915957B 一种制作空气桥及电感的方法 A method of making an air bridge and inductance
08/06/2014CN102914950B 金属层光刻的干法去胶返工方法 Metal layer lithography dry ashing method rework
08/06/2014CN102842535B 形成存储器单元存取阵列的方法 The method of forming a memory cell array access
08/06/2014CN102790097B 功率二极管器件及其制备方法 Power diode device and its preparation method
08/06/2014CN102782827B 用于薄晶片的可移动静电载具 Mobile electrostatic carrier for thin wafers
08/06/2014CN102779858B 一种功率二极管器件及其制备方法 A power diode device and its preparation method
08/06/2014CN102760681B 组件内隔离结构的制造方法 A method of manufacturing the component isolation structure
08/06/2014CN102687264B 半导体装置 Semiconductor device
08/06/2014CN102683242B 旋转层叠设备 Rotating stacking equipment
08/06/2014CN102681245B 半透半反液晶显示阵列基板及其制造方法、显示装置 Transflective liquid crystal display and method of manufacturing the array substrate, a display device
08/06/2014CN102664197B Jfet及其制造方法以及使用该jfet的微型逆变器 Jfet its manufacturing method and the use of the micro-inverter jfet
08/06/2014CN102655112B 实现锗基mos器件有源区之间隔离的方法 Isolation between the germanium-based approach mos device active region
08/06/2014CN102651329B 一种放置盒内基板破损的检测方法及放置盒 A method of detecting breakage of the substrate is placed inside the box and placing the cartridge
08/06/2014CN102646628B 用于制造半导体装置的方法 The method for manufacturing a semiconductor device
08/06/2014CN102629627B 异质栅隧穿晶体管的形成方法 Heterojunction tunneling method for forming a gate transistor
08/06/2014CN102629564B 晶圆盒 Cassettes
08/06/2014CN102592997B 一种栅控二极管半导体器件的制造方法 A method of manufacturing a semiconductor device gated diode
08/06/2014CN102576576B 用于印刷导电迹线的组合物以及制备太阳能电池的方法 Composition is printed conductive traces and a method for manufacturing a solar cell
08/06/2014CN102569187B 一种低温多晶硅显示装置及其制作方法 An apparatus and a method of making low-temperature polysilicon display
08/06/2014CN102569120B 太阳能背板立式检测机 Solar energy back vertical detector
08/06/2014CN102560676B 一种使用减薄键合结构进行GaN单晶生长的方法 A method of using thinning bonded structure GaN single crystal growth method
08/06/2014CN102543881B 提高浮体效应存储单元写入速度的方法 Floating body effect to improve the writing speed of a memory cell
08/06/2014CN102543821B 浅沟槽隔离结构的形成方法 The method for forming a shallow trench isolation structure
08/06/2014CN102496566B 用于sonos存储芯片批产工艺中的存储管多晶刻蚀方法 Sonos batch production process memory chip storage tube etching method for polycrystalline
08/06/2014CN102482777B 金属氧化膜的成膜方法、金属氧化膜及金属氧化膜的成膜装置 Deposition of a metal oxide film, a metal oxide film and the metal film forming apparatus oxide film
08/06/2014CN102470993B 旋转定位装置 Rotary positioning device
08/06/2014CN102468153B 半导体器件的制造方法 The method of manufacturing a semiconductor device
08/06/2014CN102460660B 半导体装置的制造方法 The method of manufacturing a semiconductor device
08/06/2014CN102437119B 增强应力记忆技术效果的方法 Enhancement effect of stress memorization techniques
08/06/2014CN102428519B 驱动半导体存储装置的方法 The method of driving a semiconductor memory device
08/06/2014CN102422496B 氮化物半导体发光元件及外延衬底 The nitride semiconductor light emitting device and an epitaxial substrate
08/06/2014CN102414784B 接合装置控制装置及多层接合方法 Device control apparatus and method for multi-layer bonding bonding
08/06/2014CN102403295B 金属键接的半导体封装及其方法 Semiconductor package and method for a metal bonded
08/06/2014CN102403234B 利用自对准技术制备具有高k金属栅的鳍形场效应晶体管的方法 Fin field-effect transistor preparation method uses self-aligned technology with high-k metal gate
08/06/2014CN102361005B 一种片台扫描式激光加工中的遮光快门控制方法 Shading chip sets shutter control method of scanning laser machining
08/06/2014CN102347365B 双向开关以及其制造方法 Bidirectional switch and a manufacturing method thereof
08/06/2014CN102347355B 最小化场阑igbt的缓冲区及发射极电荷差异的方法 Igbt minimize field stop buffer and method emitter charge differences
08/06/2014CN102318045B 改良式击穿电压的边缘端点 Modified breakdown voltage edge endpoints
08/06/2014CN102315196B 多晶粒堆栈封装结构 Multi-grain stack package
08/06/2014CN102280436B 薄膜金属层接线结构及其制造方法和阵列基板 Thin-film metal-layer wiring structure and its manufacturing method and array substrate
08/06/2014CN102246283B 双极晶体管 Bipolar Transistors
08/06/2014CN102246282B 高压斜角刻蚀方法 High pressure bevel etching method
08/06/2014CN102237286B 一种用于超薄晶圆工艺的管芯贴片方法 Die placement method for ultra-thin wafer processing
08/06/2014CN102222622B 半导体装置和半导体装置的制造方法 The method of manufacturing a semiconductor device and a semiconductor device
08/06/2014CN102187741B 等离子体处理腔室的下电极组件 The lower electrode assembly of a plasma processing chamber
08/06/2014CN102177570B 利用平版印刷术及间隔物形成图案的方法 The use of lithography and a method for forming a pattern spacers
08/06/2014CN102134452B 半导体装置制造用耐热性粘合片和耐热性粘合片用粘合剂 The semiconductor device manufacturing heat-resistant adhesive sheet and heat-resistant adhesive sheet with an adhesive
08/06/2014CN102116981B 薄膜晶体管阵列基板及其制造方法 The thin film transistor array substrate and manufacturing method thereof
08/06/2014CN102046563B 强电介质薄膜形成用组合物、强电介质薄膜的形成方法及通过该方法形成的强电介质薄膜 Ferroelectric thin film forming composition, a method for forming a ferroelectric film and ferroelectric thin film formed by this method
08/06/2014CN102044491B 电阻式存储器装置及其制造方法与操作方法 Resistive memory device and manufacturing method and operating method
08/06/2014CN102034731B 基板处理装置和基板输送方法 Substrate processing apparatus and substrate transfer method
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