| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/11/2011 | US7867811 Encapsulated organic luminescent display panel and method for manufacturing the same |
| 01/11/2011 | US7867810 Method for manufacturing a solid-state image capturing apparatus |
| 01/11/2011 | US7867809 One-step diffusion method for fabricating a differential doped solar cell |
| 01/11/2011 | US7867808 Image sensor and method for manufacturing the same |
| 01/11/2011 | US7867807 Method for manufacturing photoelectric converting device |
| 01/11/2011 | US7867806 Electronic component structure and method of making |
| 01/11/2011 | US7867805 Structure replication through ultra thin layer transfer |
| 01/11/2011 | US7867804 Semiconductor device and method for fabricating the same |
| 01/11/2011 | US7867803 Method of fabricating light emitting device and compound semiconductor wafer and light emitting device |
| 01/11/2011 | US7867802 Diamond LED devices and associated methods |
| 01/11/2011 | US7867801 Apparatus for producing group-III nitride semiconductor layer, method of producing group-III nitride semiconductor layer, method of producing group-III nitride semiconductor light-emitting device, group-III nitride semiconductor light-emitting device thereof, and lamp thereof |
| 01/11/2011 | US7867800 Light-emitting semiconductor device using group III nitrogen compound |
| 01/11/2011 | US7867799 MBE growth of a semiconductor laser diode |
| 01/11/2011 | US7867798 Semiconductor laser, method of manufacturing semiconductor laser, optical pickup and optical disk system |
| 01/11/2011 | US7867797 Method of fabricating organic light emitting diode display device |
| 01/11/2011 | US7867796 Liquid crystal display and fabrication method thereof |
| 01/11/2011 | US7867795 Manufacturing method of light emitting diode apparatus |
| 01/11/2011 | US7867794 Surface-mount type optical semiconductor device and method for manufacturing the same |
| 01/11/2011 | US7867793 Substrate removal during LED formation |
| 01/11/2011 | US7867792 Method of providing electrical separation in integrated devices and related devices |
| 01/11/2011 | US7867791 Manufacturing method of semiconductor device using multiple mask layers formed through use of an exposure mask that transmits light at a plurality of intensities |
| 01/11/2011 | US7867789 Contact clean by remote plasma and repair of silicide surface |
| 01/11/2011 | US7867788 Spin-dependent tunnelling cell and method of formation thereof |
| 01/11/2011 | US7867787 Forming inductor and transformer structures with magnetic materials using damascene processing for integrated circuits |
| 01/11/2011 | US7867786 Ferroelectric layer with domains stabilized by strain |
| 01/11/2011 | US7867674 allows a desired resist pattern dimension to be attained after a photolithography sequence, so that a uniform resist pattern is formed on the surface of a substrate, independently of the precision level in the light exposure process |
| 01/11/2011 | US7867673 Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program |
| 01/11/2011 | US7867671 Photo-mask having phase and non-phase shifter parts for patterning an insulated gate transistor |
| 01/11/2011 | US7867574 Heat resistance; noncracking; dielectrics; semiconductors |
| 01/11/2011 | US7867408 Anisotropic wet etching of silicon |
| 01/11/2011 | US7867402 Method for realizing a multispacer structure, use of said structure as a mold and circuital architectures obtained from said mold |
| 01/11/2011 | US7867356 Apparatus for reducing polymer deposition on a substrate and substrate support |
| 01/11/2011 | US7867337 Substrate processing method and substrate processing apparatus |
| 01/11/2011 | US7867303 Cerium oxide abrasive and method of polishing substrates |
| 01/11/2011 | US7867066 Polishing pad |
| 01/11/2011 | US7867059 Semiconductor wafer, apparatus and process for producing the semiconductor wafer |
| 01/11/2011 | US7867053 Method for manufacturing light emitting device |
| 01/11/2011 | US7866480 Front opening substrate container with bottom plate |
| 01/11/2011 | US7866457 Conveyor belt cleaner scraper blade with sensor and control system therefor |
| 01/11/2011 | US7866341 Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same |
| 01/11/2011 | US7866202 Method of fabricating a carbon monoxide detector and a carbon monoxide detector fabricated using the same |
| 01/11/2011 | CA2493988C Installation for the vacuum treatment notably of substrates |
| 01/11/2011 | CA2455220C Photoinitiated reactions |
| 01/06/2011 | WO2011003117A2 Arrangement for identifying uncontrolled events at the process module level and methods thereof |
| 01/06/2011 | WO2011003057A2 Method of forming monolithic cmos-mems hybrid integrated, packaged structures |
| 01/06/2011 | WO2011002898A1 Methods of using a silicon nanoparticle fluid to control in situ a set of dopant diffusion profiles |
| 01/06/2011 | WO2011002811A2 Arrangement for identifying uncontrolled events at the process module level and methods thereof |
| 01/06/2011 | WO2011002810A2 Methods for constructing an optimal endpoint algorithm |
| 01/06/2011 | WO2011002800A2 Methods and arrangements for in-situ process monitoring and control for plasma processing tools |
| 01/06/2011 | WO2011002798A2 Automatic fault detection and classification in a plasma processing system and methods thereof |
| 01/06/2011 | WO2011002778A2 Methods and structures for a vertical pillar interconnect |
| 01/06/2011 | WO2011002705A2 Hollow gst structure with dielectric fill |
| 01/06/2011 | WO2011002612A2 Circuit structure and method for programming and re-programming a low power, multiple states, electronic fuse(e-fuse) |
| 01/06/2011 | WO2011002603A2 Methods of forming capacitors |
| 01/06/2011 | WO2011002590A1 Method of forming contact hole arrays using a hybrid spacer technique |
| 01/06/2011 | WO2011002574A2 Memory cells, and methods of forming memory cells |
| 01/06/2011 | WO2011002516A2 A self-imageable film forming polymer, compositions thereof and devices and structures made therefrom |
| 01/06/2011 | WO2011002242A2 Square cutting device for solar cell ingots |
| 01/06/2011 | WO2011002156A2 Apparatus for injecting melted solder into template cavities |
| 01/06/2011 | WO2011002155A2 Flat plate precision floating system |
| 01/06/2011 | WO2011002149A2 Cmp polishing pad with pores formed therein, and method for forming pores |
| 01/06/2011 | WO2011002102A1 Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same |
| 01/06/2011 | WO2011002081A1 Radiation-sensitive resin composition |
| 01/06/2011 | WO2011002068A1 ArF-LITHOGRAPHY MIRROR AND ArF-LITHOGRAPHY OPTICAL MEMBER |
| 01/06/2011 | WO2011002060A1 Function-gradient inorganic resist, substrate with function-gradient inorganic resist, cylindrical substrate with function-gradient inorganic resist, method for forming function-gradient inorganic resist, method for forming fine pattern, and inorganic resist and process for producing same |
| 01/06/2011 | WO2011002058A1 Method for depositing thin film |
| 01/06/2011 | WO2011002046A1 Method for manufacturing semiconductor device |
| 01/06/2011 | WO2011001992A1 Semiconductor device, mounted substrate to be used in semiconductor device, and manufacturing method of mounted substrate |
| 01/06/2011 | WO2011001978A1 Electrostatic attracting structure and fabricating method therefor |
| 01/06/2011 | WO2011001967A1 Pattern shape evaluation method and pattern shape evaluation apparatus |
| 01/06/2011 | WO2011001942A1 Photosensitive adhesive, and film adhesive, adhesive sheet, adhesive pattern, semiconductor wafer with adhesive layer, and semiconductor device, which are made using same |
| 01/06/2011 | WO2011001929A1 Abnormality detection system, abnormality detection method, and recording medium |
| 01/06/2011 | WO2011001905A1 Method for producing sapphire single crystal, and sapphire single crystal obtained by the method |
| 01/06/2011 | WO2011001881A1 Method for manufacturing semiconductor device |
| 01/06/2011 | WO2011001880A1 Method for manufacturing semiconductor device |
| 01/06/2011 | WO2011001879A1 Method for manufacturing semiconductor device |
| 01/06/2011 | WO2011001847A1 Electrolytic copper plating solution for filling for forming microwiring of copper for ulsi |
| 01/06/2011 | WO2011001838A1 Semiconductor integrated circuit |
| 01/06/2011 | WO2011001822A1 Method for manufacturing semiconductor device |
| 01/06/2011 | WO2011001818A1 Semiconductor device and method for manufacturing semiconductor device |
| 01/06/2011 | WO2011001784A1 Semiconductor integrated circuit |
| 01/06/2011 | WO2011001779A1 Method for manufacturing silicon structure, device for manufacturing same, and program for manufacturing same |
| 01/06/2011 | WO2011001778A1 Method for manufacturing silicon structure, device for manufacturing same, and program for manufacturing same |
| 01/06/2011 | WO2011001770A1 Epitaxial silicon wafer and method for manufacturing same |
| 01/06/2011 | WO2011001767A1 Wet treatment device and wet treatment method |
| 01/06/2011 | WO2011001755A1 Two-pack urethane resin composite for use in an abrasive pad, polyurethane abrasive pad, and method for manufacturing a polyurethane abrasive pad |
| 01/06/2011 | WO2011001747A1 Production method and production device for solar battery |
| 01/06/2011 | WO2011001746A1 Magnetic memory element and driving method therefor |
| 01/06/2011 | WO2011001740A1 Polishing device, polishing method, exposure device, and device producing method |
| 01/06/2011 | WO2011001739A1 Multi-split anode wall plasma generating device and plasma treating device |
| 01/06/2011 | WO2011001734A1 Fluid for removing coating film formed by csd, method for removing csd coating film using same, and ferroelectric thin film and process for producing same |
| 01/06/2011 | WO2011001704A1 Thin film transistor and method for producing the same |
| 01/06/2011 | WO2011001692A1 Tape application apparatus |
| 01/06/2011 | WO2011001678A1 Exposure condition setting method and surface inspection apparatus |
| 01/06/2011 | WO2011001675A1 Device for teaching robot and method for teaching robot |
| 01/06/2011 | WO2011001651A1 Defect inspection method and defect inspection apparatus |
| 01/06/2011 | WO2011001637A1 Conveyance cart |
| 01/06/2011 | WO2011001635A1 Semiconductor inspection device and semiconductor inspection method using the same |
| 01/06/2011 | WO2011001588A1 Semiconductor device |
| 01/06/2011 | WO2011001586A1 Charged particle beam apparatus and method for stably obtaining charged particle beam image |