Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2011
01/06/2011US20110003402 Recovery of hydrophobicity of low-k and ultra low-k organosilicate films used as inter metal dielectrics
01/06/2011US20110003026 Sealing apparatus for semiconductor wafer, mold of sealing apparatus, and semiconductor wafer
01/06/2011US20110002674 Thermal processing apparatus
01/06/2011US20110002582 Semiconductor optical interconnection device and semiconductor optical interconnection method
01/06/2011US20110002352 Optical waveguide integrated semiconductor optical device and manufacturing method therefor
01/06/2011US20110002155 Current control element, memory element, and fabrication method thereof
01/06/2011US20110002154 Nonvolatile memory element, manufacturing method thereof, and nonvolatile semiconductor device incorporating nonvolatile memory element
01/06/2011US20110001974 Alignment apparatus and fabrication apparatus for planar member and alignment method and fabrication method for planar member
01/06/2011US20110001955 System and Method for Using a Two Part Cover and a Box for Protecting a Reticle
01/06/2011US20110001953 Transport apparatus and exposure apparatus
01/06/2011US20110001943 Exposure apparatus, exposure method, and device manufacturing method
01/06/2011US20110001942 Lithographic apparatus and device manufacturing method
01/06/2011US20110001820 System for creating an inspection recipe, system for reviewing defects, method for creating an inspection recipe and method for reviewing defects
01/06/2011US20110001504 Method and apparatus of deembedding
01/06/2011US20110001251 Adhesive composition, bonding member using the adhesive composition, support member for semiconductor mounting, semiconductor device, and processes for producing these
01/06/2011US20110001248 Semiconductor device having groove-shaped via-hole
01/06/2011US20110001247 Semiconductor device manufacturing method
01/06/2011US20110001245 Semiconductor device including sealing film for encapsulating semiconductor chip and projection electrodes and manufacturing method thereof
01/06/2011US20110001244 Method for Producing a Power Semiconductor Module, and Power Semiconductor Module Comprising a Connection Device
01/06/2011US20110001240 Chip Scale Module Package in BGA Semiconductor Package
01/06/2011US20110001238 Semiconductor construct and manufacturing method thereof as well as semiconductor device and manufacturing method thereof
01/06/2011US20110001234 Semiconductor device and fabrication method thereof
01/06/2011US20110001233 Semiconductor device mounted structure and semiconductor device mounting method
01/06/2011US20110001232 Flip-Chip Module and Method for the Production Thereof
01/06/2011US20110001230 Systems and Methods of Improved Heat Dissipation with Variable Pitch Grid Array Packaging
01/06/2011US20110001229 Package structure and package process
01/06/2011US20110001227 Semiconductor Chip Secured to Leadframe by Friction
01/06/2011US20110001222 Electronic device, layered substrate, and methods of manufacturing same
01/06/2011US20110001219 Silicon single crystal wafer, method for producing silicon single crystal or method for producing silicon single crystal wafer, and semiconductor device
01/06/2011US20110001217 Ultra high density capacity comprising pillar-shaped capacitors formed on both sides of a substrate
01/06/2011US20110001216 Semiconductor device and manufacturing method thereof
01/06/2011US20110001214 Semiconductor device with capacitor and/or inductor and method of making
01/06/2011US20110001213 Fuse part for semiconductor device
01/06/2011US20110001212 Fuse of semiconductor device and method for fabricating the same
01/06/2011US20110001211 Fuse for in use of a semiconductor device and method for forming the same
01/06/2011US20110001210 Fuse part in semiconductor device and method for fabricating the same
01/06/2011US20110001201 Sacrifice layer structure and method for magnetic tunnel junction (mtj) etching process
01/06/2011US20110001200 Micromechanical component and method for the manufacture thereof
01/06/2011US20110001199 Pressure sensor and pressure sensor manufacturing method
01/06/2011US20110001198 Mems device and interposer and method for integrating mems device and interposer
01/06/2011US20110001197 Method for manufacturing semiconductor device and semiconductor device
01/06/2011US20110001196 Semiconductor device and method for fabricating the same
01/06/2011US20110001192 Method of Fabricating Semiconductor Device
01/06/2011US20110001191 Semiconductor device and method for manufacturing the same
01/06/2011US20110001189 Power Semiconductor Devices Having Termination Structures
01/06/2011US20110001188 Semiconductor apparatus and method of manufacturing the same
01/06/2011US20110001186 Semiconductor device with buried gate and method for fabricating the same
01/06/2011US20110001184 Method of adjusting the threshold voltage of a transistor by a buried trapping layer
01/06/2011US20110001183 Memory device and method of fabricating the same
01/06/2011US20110001182 Semiconductor device and method for manufacturing same
01/06/2011US20110001180 Nonvolatile semiconductor memory device
01/06/2011US20110001178 Nonvolatile semiconductor memory device and method for manufacturing same
01/06/2011US20110001177 Semiconductor device comprising capacitor and method of fabricating the same
01/06/2011US20110001175 Semiconductor memory device and fabrication method thereof
01/06/2011US20110001174 Memory Cells, And Methods Of Forming Memory Cells
01/06/2011US20110001170 Semiconductor device and method of manufacturing semiconductor device
01/06/2011US20110001169 Forming uniform silicide on 3d structures
01/06/2011US20110001167 Reduced defect semiconductor-on-insulator hetero-structures
01/06/2011US20110001161 Light emitting diode and method of manufacturing the same, and light emitting device and method of manufacturing the light emitting device
01/06/2011US20110001159 Substrate for electronic device, layered body for organic led element, method for manufacturing the same, organic led element, and method for manufacturing the same
01/06/2011US20110001156 Light emitting device and method for manufacturing same
01/06/2011US20110001155 Light-emitting device and manufacturing method thereof
01/06/2011US20110001152 Led package structure for forming a stuffed convex lens to adjust light-projecting angle and method for manufacturing the same
01/06/2011US20110001144 Semiconductor device and method for manufacturing the same
01/06/2011US20110001143 Composition Comprising Silicon Carbide
01/06/2011US20110001142 Method for manufacturing electronic device, method for manufacturing epitaxial substrate, iii nitride semiconductor element and gallium nitride epitaxial substrate
01/06/2011US20110001141 Semiconductor device, Manufacturing method for the same, and electronic device
01/06/2011US20110001140 Semiconductor device and method of manufacturing same
01/06/2011US20110001138 Thin Film Transistor Array and Method for Manufacturing the Same
01/06/2011US20110001137 Thin-film transistor display panel and method of fabricating the same
01/06/2011US20110001136 Oxide semiconductor material, method for manufacturing oxide semiconductor material, electronic device and field effect transistor
01/06/2011US20110001135 Method for manufacturing self-aligned thin-film transistor and structure thereof
01/06/2011US20110001127 Semiconductor material, method of making the same, and semiconductor device
01/06/2011US20110001126 Nitride semiconductor chip, method of fabrication thereof, and semiconductor device
01/06/2011US20110001120 Semiconductor light-emitting device with double-sided passivation
01/06/2011US20110001119 Method for the synthesis of an array of metal nanowire capable of supporting localized plasmon resonances and photonic device comprising said array
01/06/2011US20110001117 Nanoscale wire-based memory devices
01/06/2011US20110001114 Phase change memory cell with self-aligned vertical heater and low resistivity interface
01/06/2011US20110001112 Nonvolatile memory device and manufacturing method thereof
01/06/2011US20110001111 Thermally insulated phase change material cells
01/06/2011US20110001110 Resistance change element and manufacturing method thereof
01/06/2011US20110001107 Hollow gst structure with dielectric fill
01/06/2011US20110001038 Image sensor device with silicon microstructures and fabrication method thereof
01/06/2011US20110000969 Tire antenna for RFID
01/06/2011US20110000896 System and method for selectively controlling ion composition of ion sources
01/06/2011US20110000883 Plasma processing apparatus, focus ring, and susceptor
01/06/2011US20110000876 Stripper solution and method of manufacturing liquid crystal display using the same
01/06/2011US20110000874 Method for stripping photoresist
01/06/2011US20110000619 Rotational antenna and semiconductor device including the same
01/06/2011US20110000618 Apparatus and method for processing substrate
01/06/2011US20110000542 Hybrid photovoltaic modules
01/06/2011US20110000521 Thin film solar cell and method for manufacturing the same
01/06/2011US20110000507 Supercritical processing apparatus, substrate processing system and supercritical processing method
01/06/2011US20110000318 Force sensor apparatus
01/06/2011US20110000304 Pressure sensor and manufacturing method
01/06/2011US20110000232 Load lock apparatus and substrate cooling method
01/06/2011US20110000224 Metal-core thermoelectric cooling and power generation device
01/06/2011CA2766085A1 Graphene device and method of fabricating a graphene device
01/05/2011EP2271196A1 Method for producing a frequency converter with cooling device and frequency converter
01/05/2011EP2270894A1 Use of organic mesomeric compounds as dotands