| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/28/2011 | US20110097907 Laser annealing method and apparatus |
| 04/28/2011 | US20110097906 Silicon crystallization system and silicon crystallization method using laser |
| 04/28/2011 | US20110097905 Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus |
| 04/28/2011 | US20110097904 Method for repairing low-k dielectric damage |
| 04/28/2011 | US20110097903 Method, apparatus and program for manufacturing silicon structure |
| 04/28/2011 | US20110097902 Method and apparatus of halogen removal |
| 04/28/2011 | US20110097901 Dual mode inductively coupled plasma reactor with adjustable phase coil assembly |
| 04/28/2011 | US20110097900 Quartz window for a degas chamber |
| 04/28/2011 | US20110097899 Method of forming funnel-shaped opening |
| 04/28/2011 | US20110097898 Improved method for degassing cables |
| 04/28/2011 | US20110097897 Method for manufacturing semiconductor device |
| 04/28/2011 | US20110097896 Method for fabrication of in-laid metal interconnects |
| 04/28/2011 | US20110097895 Semiconductor devices including interlayer conductive contacts and methods of forming the same |
| 04/28/2011 | US20110097894 Method of Forming a Topside Contact to a Backside Terminal of a Semiconductor Device |
| 04/28/2011 | US20110097893 Integrated Circuit Having Stress Tuning Layer and Methods of Manufacturing Same |
| 04/28/2011 | US20110097892 Sprocket Opening Alignment Process and Apparatus for Multilayer Solder Decal |
| 04/28/2011 | US20110097891 Method of Manufacturing the Semiconductor Device |
| 04/28/2011 | US20110097890 Method of fabricating semiconductor device |
| 04/28/2011 | US20110097889 STI Shape Near Fin Bottom of Si Fin in Bulk FinFET |
| 04/28/2011 | US20110097888 Semiconductor memory device and method of manufacturing the same |
| 04/28/2011 | US20110097887 Semiconductor storage device and method for manufacturing the same |
| 04/28/2011 | US20110097886 Semiconductor device with mushroom electrode and manufacture method thereof |
| 04/28/2011 | US20110097885 Mosfet using gate work function engineering for switching applications |
| 04/28/2011 | US20110097884 Method to attain low defectivity fully silicided gates |
| 04/28/2011 | US20110097883 Reduction of sheet resistance of phosphorus implanted poly-silicon |
| 04/28/2011 | US20110097882 Isotopically-enriched boron-containing compounds, and methods of making and using same |
| 04/28/2011 | US20110097881 Method of Forming Mono-Crystalline Germanium or Silicon Germanium |
| 04/28/2011 | US20110097880 Film deposition method |
| 04/28/2011 | US20110097879 Method of preparing luminescent nanocrystals, the resulting nanocrystals and uses thereof |
| 04/28/2011 | US20110097878 Chamber for pecvd |
| 04/28/2011 | US20110097877 Method for manufacturing microcrystalline semiconductor and thin film transistor |
| 04/28/2011 | US20110097876 Chemical vapor deposition reactor having multiple inlets |
| 04/28/2011 | US20110097875 Wafer processing method |
| 04/28/2011 | US20110097874 Progressive trimming method |
| 04/28/2011 | US20110097873 Method for producing thin film |
| 04/28/2011 | US20110097872 Method of manufacturing soi substrate and method of manufacturing semiconductor device |
| 04/28/2011 | US20110097871 Process for the transfer of a thin layer formed in a substrate with vacancy clusters |
| 04/28/2011 | US20110097870 Method of fabricating ultra-deep vias and three-dimensional integrated circuits using ultra-deep vias |
| 04/28/2011 | US20110097869 Semiconductor integrated circuit device having mim capacitor and method of fabricating the same |
| 04/28/2011 | US20110097868 Method for fabricating p-channel field-effect transistor (fet) |
| 04/28/2011 | US20110097867 Method of controlling gate thicknesses in forming fusi gates |
| 04/28/2011 | US20110097866 Non-volatile memory cell and method of fabricating the same |
| 04/28/2011 | US20110097865 High voltage-resistant semiconductor device and method of manufacturing high voltage-resistant semiconductor device |
| 04/28/2011 | US20110097864 Method of Fabricating High-Voltage Semiconductor Device |
| 04/28/2011 | US20110097863 Cross OD FinFET Patterning |
| 04/28/2011 | US20110097862 Semiconductor memory device and method of fabrication of the same |
| 04/28/2011 | US20110097861 Semiconductor device and manufacturing method thereof |
| 04/28/2011 | US20110097860 Method of manufacturing semiconductor device |
| 04/28/2011 | US20110097859 Method of fabricating cmos transistor |
| 04/28/2011 | US20110097858 Transition metal alloys for use as a gate electrode and devices incorporating these alloys |
| 04/28/2011 | US20110097857 Array substrate for liquid crystal display device and method of fabricating the same |
| 04/28/2011 | US20110097856 Method of manufacturing wafer level package |
| 04/28/2011 | US20110097855 Semiconductor device |
| 04/28/2011 | US20110097854 Method of manufacturing semiconductor device and method of manufacturing electronic device |
| 04/28/2011 | US20110097853 Via forming method and method of manufacturing multi-chip package using the same |
| 04/28/2011 | US20110097852 Wafer processing method without occurrence of damage to device area |
| 04/28/2011 | US20110097851 Method of fabricating a package structure |
| 04/28/2011 | US20110097850 Method of fabricating a packaging structure |
| 04/28/2011 | US20110097849 Manufacturing method for semiconductor integrated device |
| 04/28/2011 | US20110097848 Method for Connecting a Die Assembly to a Substrate in an Integrated Circuit and a Semiconductor Device Comprising a Die Assembly |
| 04/28/2011 | US20110097847 Microelectronic devices and methods for manufacturing microelectronic devices |
| 04/28/2011 | US20110097846 Semiconductor chip, wafer stack package using the same, and methods of manufacturing the same |
| 04/28/2011 | US20110097845 Method and Apparatus for Packaging Circuit Devices |
| 04/28/2011 | US20110097844 Method of fabricating a thin-film device |
| 04/28/2011 | US20110097843 Bistable resistance value acquisition device, manufacturing method thereof, metal oxide thin film, and manufacturing method thereof |
| 04/28/2011 | US20110097842 Method for preparing IGZO particles and method for preparing IGZO film by using the IGZO particles |
| 04/28/2011 | US20110097841 Rear electrode structure for use in photovoltaic device such as CIGS/CIS photovoltaic device and method of making same |
| 04/28/2011 | US20110097837 GaN-BASED NITRIC OXIDE SENSORS AND METHODS OF MAKING AND USING THE SAME |
| 04/28/2011 | US20110097836 Array substrate, method of manufacturing the same, and method of repairing line in the same |
| 04/28/2011 | US20110097835 Photoresist composition and method of manufacturing a display substrate using the same |
| 04/28/2011 | US20110097834 Thin film transistor, display device and liquid crystal display device and method for manufacturing the same |
| 04/28/2011 | US20110097830 Semiconductor element, method for manufacturing the same, liquid crystal display device, and method for manufacturing the same |
| 04/28/2011 | US20110097829 Method for inspection of defects on a substrate |
| 04/28/2011 | US20110097828 Method for fabricating semiconductor device |
| 04/28/2011 | US20110097827 Pattern formation method and a method for manufacturing a semiconductor device |
| 04/28/2011 | US20110097826 Device and method for detecting stress migration properties |
| 04/28/2011 | US20110097825 Methods For Reducing Recrystallization Time for a Phase Change Material |
| 04/28/2011 | US20110097824 Method of creating an extremely thin semiconductor-on- insulator (etsoi) layer having a uniform thickness |
| 04/28/2011 | US20110097823 Apparatus for forming thin film and method of manufacturing semiconductor film |
| 04/28/2011 | US20110097822 Fabrication method of semiconductor device with uniform topology |
| 04/28/2011 | US20110097821 Method for tunably repairing low-k dielectric damage |
| 04/28/2011 | US20110097631 Organic/inorganic composite comprising three-dimensional carbon nanotube networks, method for preparing the organic/inorganic composite and electronic device using the organic/inorganic composite |
| 04/28/2011 | US20110097609 Method and apparatus for integrated-circuit battery devices |
| 04/28/2011 | US20110097532 Method of manufacturing an optical data storage medium, optical data storage medium and apparatus for performing said method |
| 04/28/2011 | US20110097478 Scalable lead zirconium titanate (pzt) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material |
| 04/28/2011 | US20110096805 Nitride semiconductor laser device and method of manufacturing the same |
| 04/28/2011 | US20110096604 Semiconductor memory device including alternately arranged contact members |
| 04/28/2011 | US20110096598 Nonvolatile semiconductor memory having plural data storage portions for a bit line connected to memory cells |
| 04/28/2011 | US20110096595 Semiconductor memory device and operation method thereof |
| 04/28/2011 | US20110096508 Light-based sealing and device packaging |
| 04/28/2011 | US20110096461 Substrate for electrostatic chuck and electrostatic chuck |
| 04/28/2011 | US20110096460 Electrostatic chuck |
| 04/28/2011 | US20110096324 Reticle defect inspection apparatus and reticle defect inspection method |
| 04/28/2011 | US20110096278 Display substrate, method of manufacturing the same and display panel having the same |
| 04/28/2011 | US20110096270 Method of patterning transparent conductive film, thin film transistor substrate using the same and fabricating method thereof |
| 04/28/2011 | US20110096258 Array substrate for liquid crystal display device, liquid crystal display device and method of fabricating the same |
| 04/28/2011 | US20110095968 Active matrix organic electroluminescent display device and method of fabricating the same |
| 04/28/2011 | US20110095440 Semiconductor package including flip chip controller at bottom of die stack |
| 04/28/2011 | US20110095439 Integrated circuit package system with through semiconductor vias and method of manufacture thereof |
| 04/28/2011 | US20110095438 Methods and apparatus for layout of three dimensional matrix array memory for reduced cost patterning |