Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
---|
05/05/2011 | WO2011052615A1 Conductive connection material and terminal-to-terminal connection method using same |
05/05/2011 | WO2011052611A1 Method for forming reversed pattern and polysiloxane resin composition |
05/05/2011 | WO2011052610A1 Optical member for deep ultraviolet and process for producing same |
05/05/2011 | WO2011052583A1 Organic photoelectric conversion element |
05/05/2011 | WO2011052546A1 Organic photoelectric conversion element and manufacturing method thereof |
05/05/2011 | WO2011052488A1 Semiconductor device |
05/05/2011 | WO2011052475A1 Magnetic memory element, magnetic memory, and methods for initializing magnetic memory element and magnetic memory |
05/05/2011 | WO2011052471A1 Wiring layer, semiconductor device, and liquid crystal display device using semiconductor device |
05/05/2011 | WO2011052463A1 Plasma cvd device and method of manufacturing silicon thin film |
05/05/2011 | WO2011052453A1 Material for forming ruthenium film and method for forming ruthenium film |
05/05/2011 | WO2011052443A1 Chemical solution for forming protective film |
05/05/2011 | WO2011052434A1 Semiconductor device and method for manufacturing semiconductor device |
05/05/2011 | WO2011052427A1 Product manufacturing method and manufacturing system |
05/05/2011 | WO2011052413A1 Non-linear element, display device, and electronic device |
05/05/2011 | WO2011052411A1 Transistor |
05/05/2011 | WO2011052410A1 Power diode, rectifier, and semiconductor device including the same |
05/05/2011 | WO2011052409A1 Transistor |
05/05/2011 | WO2011052396A1 Semiconductor device |
05/05/2011 | WO2011052386A1 Semiconductor device |
05/05/2011 | WO2011052385A1 Semiconductor device |
05/05/2011 | WO2011052384A1 Semiconductor device and method for manufacturing the same |
05/05/2011 | WO2011052383A1 Logic circuit and semiconductor device |
05/05/2011 | WO2011052367A1 Semiconductor device |
05/05/2011 | WO2011052366A1 Voltage regulator circuit |
05/05/2011 | WO2011052351A1 Semiconductor device |
05/05/2011 | WO2011052321A1 Silicon carbide substrate production method and silicon carbide substrate |
05/05/2011 | WO2011052320A1 Silicon carbide substrate production method and silicon carbide substrate |
05/05/2011 | WO2011052296A1 Plasma etching method |
05/05/2011 | WO2011052271A1 Optical sensor, semiconductor device, and liquid crystal panel |
05/05/2011 | WO2011052267A1 Polishing device for polygonal column member, and method for polishing same |
05/05/2011 | WO2011052193A1 Guide roller |
05/05/2011 | WO2011052179A1 Method for driving semiconductor storage device |
05/05/2011 | WO2011052176A1 Semiconductor device |
05/05/2011 | WO2011052173A1 Polishing pad and chemical mechanical polishing method |
05/05/2011 | WO2011052171A1 Method of manufacturing titanium-containing sputtering target |
05/05/2011 | WO2011052132A1 Method for polishing semiconductor wafer |
05/05/2011 | WO2011052111A1 Substrate cleaning device and substrate cleaning method |
05/05/2011 | WO2011052108A1 Semiconductor device and method for manufacturing same |
05/05/2011 | WO2011052104A1 Semiconductor device and method for manufacturing same |
05/05/2011 | WO2011052070A1 Pattern measuring apparatus and pattern measuring method |
05/05/2011 | WO2011051796A2 A method and device to reduce random defects in the yield |
05/05/2011 | WO2011051791A2 Method and system for lithography hotspot correction of a post-route layout |
05/05/2011 | WO2011051500A1 Method for fabricating semiconductor wafers for the integration of silicon components with hemts, and appropriate semiconductor layer arrangement |
05/05/2011 | WO2011051499A1 Method for producing silicon semiconductor wafers comprising a layer for integrating iii-v semiconductor components |
05/05/2011 | WO2011051409A1 Method of plasma etching and plasma chamber cleaning using f2 and cof2 |
05/05/2011 | WO2011051356A1 Method and apparatus for treating a substrate surface of a substrate |
05/05/2011 | WO2011051352A1 Substrate transport system and method |
05/05/2011 | WO2011051251A1 Etching process for producing a tft matrix |
05/05/2011 | WO2011051109A1 BI-LAYER nFET EMBEDDED STRESSOR ELEMENT AND INTEGRATION TO ENHANCE DRIVE CURRENT |
05/05/2011 | WO2011051078A1 Method for controlling the distribution of stresses in a semiconductor-on-insulator type structure and corresponding structure. |
05/05/2011 | WO2011051015A2 Aluminum containing metal layer for threshold voltage shift |
05/05/2011 | WO2011051012A1 Method of forming semiconductor film and photovoltaic device including the film |
05/05/2011 | WO2011050829A1 Module for modularly constructed clean-room facilities |
05/05/2011 | WO2011050712A1 Compatible vertical double diffused metal oxide semiconductor transistor and lateral double diffused metal oxide semiconductor transistor and manufacture method thereof |
05/05/2011 | WO2011050711A1 Formation method of fuse structure |
05/05/2011 | WO2011050623A1 Patterning method |
05/05/2011 | WO2011050455A1 Method and apparatus for testing operation of an optical liquid crystal device, and manufacturing of device |
05/05/2011 | WO2011050399A1 Improved metallization method for silicon solar cells |
05/05/2011 | WO2011024083A3 Method and device for the bubble-free bonding of large-surface glass panes |
05/05/2011 | WO2011021800A3 Method for fabricating a physical vapor deposition target |
05/05/2011 | WO2011019562A3 Fin anti-fuse with reduced programming voltage |
05/05/2011 | WO2011017716A3 Seasoning plasma processing systems |
05/05/2011 | WO2011014328A3 Light-up prevention in electrostatic chucks |
05/05/2011 | WO2011011476A3 Compositions for forming doped regions in semiconductor substrates, methods for fabricating such compositions, and methods for forming doped regions using such compositions |
05/05/2011 | WO2011008805A3 Processing chamber with translating wear plate for lift pin |
05/05/2011 | WO2011008688A3 Scanner performance comparison and matching using design and defect data |
05/05/2011 | WO2010151057A3 Plasma deposition of a thin film |
05/05/2011 | WO2010150134A3 Method for treating a semiconductor wafer |
05/05/2011 | WO2010141942A4 Mems switch with latch mechanism |
05/05/2011 | WO2010141464A3 Corrosion-resistant cmp conditioning tools and methods for making and using same |
05/05/2011 | WO2010132591A3 Pecvd coating using an organosilicon precursor |
05/05/2011 | WO2010129398A3 Multi-feed rf distribution systems and methods |
05/05/2011 | WO2010124217A4 Treatment of polishing pad window |
05/05/2011 | WO2010119792A9 Substrate, substrate provided with thin film, semiconductor device, and method for manufacturing semiconductor device |
05/05/2011 | WO2010006798A3 Solar cell chips with new geometry and method for the production thereof |
05/05/2011 | WO2009141740A3 Semiconductor wafer and method for producing the same |
05/05/2011 | US20110106300 System and method for overhead cross-system transportation |
05/05/2011 | US20110104995 Carrier for a double-side polishing apparatus, double-side polishing apparatus using this carrier, and double-side polishing method |
05/05/2011 | US20110104990 Substrate Retainer |
05/05/2011 | US20110104908 Laser Mask and Crystallization Method Using the Same |
05/05/2011 | US20110104907 Methods of forming a metal silicate layer and methods of fabricating a semiconductor device including the metal silicate layer |
05/05/2011 | US20110104906 Method of growing oxide thin films |
05/05/2011 | US20110104905 Etching composition, in particular for strained or stressed silicon materials, method for characterizing defects on surfaces of such materials and process of treating such surfaces with the etching composition |
05/05/2011 | US20110104904 Method of processing silicon wafer |
05/05/2011 | US20110104903 Manufacturing apparatus and method for semiconductor device |
05/05/2011 | US20110104902 Plasma processing apparatus and plasma processing method |
05/05/2011 | US20110104901 Semiconductor device manufacturing method |
05/05/2011 | US20110104900 Alkaline Rinse Agents For Use In Lithographic Patterning |
05/05/2011 | US20110104899 Sub-lithographic printing method |
05/05/2011 | US20110104898 Method of Forming Semiconductor Device |
05/05/2011 | US20110104897 Contact clean by remote plasma and repair of silicide surface |
05/05/2011 | US20110104896 Method of manufacturing semiconductor device and substrate processing apparatus |
05/05/2011 | US20110104895 Method for forming a plug structure |
05/05/2011 | US20110104894 Method for fabricating semiconductor device |
05/05/2011 | US20110104893 Method for fabricating mos transistor |
05/05/2011 | US20110104892 Etching method and manufacturing method of semiconductor device |
05/05/2011 | US20110104891 Methods and apparatus of creating airgap in dielectric layers for the reduction of rc delay |
05/05/2011 | US20110104890 Method for forming cu electrical interconnection film |
05/05/2011 | US20110104889 Methods of Forming Integrated Circuit Devices Using Contact Hole Spacers to Improve Contact Isolation |
05/05/2011 | US20110104888 Semiconductor devices having redistribution structures and packages, and methods of forming the same |