Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2011
05/05/2011WO2011052615A1 Conductive connection material and terminal-to-terminal connection method using same
05/05/2011WO2011052611A1 Method for forming reversed pattern and polysiloxane resin composition
05/05/2011WO2011052610A1 Optical member for deep ultraviolet and process for producing same
05/05/2011WO2011052583A1 Organic photoelectric conversion element
05/05/2011WO2011052546A1 Organic photoelectric conversion element and manufacturing method thereof
05/05/2011WO2011052488A1 Semiconductor device
05/05/2011WO2011052475A1 Magnetic memory element, magnetic memory, and methods for initializing magnetic memory element and magnetic memory
05/05/2011WO2011052471A1 Wiring layer, semiconductor device, and liquid crystal display device using semiconductor device
05/05/2011WO2011052463A1 Plasma cvd device and method of manufacturing silicon thin film
05/05/2011WO2011052453A1 Material for forming ruthenium film and method for forming ruthenium film
05/05/2011WO2011052443A1 Chemical solution for forming protective film
05/05/2011WO2011052434A1 Semiconductor device and method for manufacturing semiconductor device
05/05/2011WO2011052427A1 Product manufacturing method and manufacturing system
05/05/2011WO2011052413A1 Non-linear element, display device, and electronic device
05/05/2011WO2011052411A1 Transistor
05/05/2011WO2011052410A1 Power diode, rectifier, and semiconductor device including the same
05/05/2011WO2011052409A1 Transistor
05/05/2011WO2011052396A1 Semiconductor device
05/05/2011WO2011052386A1 Semiconductor device
05/05/2011WO2011052385A1 Semiconductor device
05/05/2011WO2011052384A1 Semiconductor device and method for manufacturing the same
05/05/2011WO2011052383A1 Logic circuit and semiconductor device
05/05/2011WO2011052367A1 Semiconductor device
05/05/2011WO2011052366A1 Voltage regulator circuit
05/05/2011WO2011052351A1 Semiconductor device
05/05/2011WO2011052321A1 Silicon carbide substrate production method and silicon carbide substrate
05/05/2011WO2011052320A1 Silicon carbide substrate production method and silicon carbide substrate
05/05/2011WO2011052296A1 Plasma etching method
05/05/2011WO2011052271A1 Optical sensor, semiconductor device, and liquid crystal panel
05/05/2011WO2011052267A1 Polishing device for polygonal column member, and method for polishing same
05/05/2011WO2011052193A1 Guide roller
05/05/2011WO2011052179A1 Method for driving semiconductor storage device
05/05/2011WO2011052176A1 Semiconductor device
05/05/2011WO2011052173A1 Polishing pad and chemical mechanical polishing method
05/05/2011WO2011052171A1 Method of manufacturing titanium-containing sputtering target
05/05/2011WO2011052132A1 Method for polishing semiconductor wafer
05/05/2011WO2011052111A1 Substrate cleaning device and substrate cleaning method
05/05/2011WO2011052108A1 Semiconductor device and method for manufacturing same
05/05/2011WO2011052104A1 Semiconductor device and method for manufacturing same
05/05/2011WO2011052070A1 Pattern measuring apparatus and pattern measuring method
05/05/2011WO2011051796A2 A method and device to reduce random defects in the yield
05/05/2011WO2011051791A2 Method and system for lithography hotspot correction of a post-route layout
05/05/2011WO2011051500A1 Method for fabricating semiconductor wafers for the integration of silicon components with hemts, and appropriate semiconductor layer arrangement
05/05/2011WO2011051499A1 Method for producing silicon semiconductor wafers comprising a layer for integrating iii-v semiconductor components
05/05/2011WO2011051409A1 Method of plasma etching and plasma chamber cleaning using f2 and cof2
05/05/2011WO2011051356A1 Method and apparatus for treating a substrate surface of a substrate
05/05/2011WO2011051352A1 Substrate transport system and method
05/05/2011WO2011051251A1 Etching process for producing a tft matrix
05/05/2011WO2011051109A1 BI-LAYER nFET EMBEDDED STRESSOR ELEMENT AND INTEGRATION TO ENHANCE DRIVE CURRENT
05/05/2011WO2011051078A1 Method for controlling the distribution of stresses in a semiconductor-on-insulator type structure and corresponding structure.
05/05/2011WO2011051015A2 Aluminum containing metal layer for threshold voltage shift
05/05/2011WO2011051012A1 Method of forming semiconductor film and photovoltaic device including the film
05/05/2011WO2011050829A1 Module for modularly constructed clean-room facilities
05/05/2011WO2011050712A1 Compatible vertical double diffused metal oxide semiconductor transistor and lateral double diffused metal oxide semiconductor transistor and manufacture method thereof
05/05/2011WO2011050711A1 Formation method of fuse structure
05/05/2011WO2011050623A1 Patterning method
05/05/2011WO2011050455A1 Method and apparatus for testing operation of an optical liquid crystal device, and manufacturing of device
05/05/2011WO2011050399A1 Improved metallization method for silicon solar cells
05/05/2011WO2011024083A3 Method and device for the bubble-free bonding of large-surface glass panes
05/05/2011WO2011021800A3 Method for fabricating a physical vapor deposition target
05/05/2011WO2011019562A3 Fin anti-fuse with reduced programming voltage
05/05/2011WO2011017716A3 Seasoning plasma processing systems
05/05/2011WO2011014328A3 Light-up prevention in electrostatic chucks
05/05/2011WO2011011476A3 Compositions for forming doped regions in semiconductor substrates, methods for fabricating such compositions, and methods for forming doped regions using such compositions
05/05/2011WO2011008805A3 Processing chamber with translating wear plate for lift pin
05/05/2011WO2011008688A3 Scanner performance comparison and matching using design and defect data
05/05/2011WO2010151057A3 Plasma deposition of a thin film
05/05/2011WO2010150134A3 Method for treating a semiconductor wafer
05/05/2011WO2010141942A4 Mems switch with latch mechanism
05/05/2011WO2010141464A3 Corrosion-resistant cmp conditioning tools and methods for making and using same
05/05/2011WO2010132591A3 Pecvd coating using an organosilicon precursor
05/05/2011WO2010129398A3 Multi-feed rf distribution systems and methods
05/05/2011WO2010124217A4 Treatment of polishing pad window
05/05/2011WO2010119792A9 Substrate, substrate provided with thin film, semiconductor device, and method for manufacturing semiconductor device
05/05/2011WO2010006798A3 Solar cell chips with new geometry and method for the production thereof
05/05/2011WO2009141740A3 Semiconductor wafer and method for producing the same
05/05/2011US20110106300 System and method for overhead cross-system transportation
05/05/2011US20110104995 Carrier for a double-side polishing apparatus, double-side polishing apparatus using this carrier, and double-side polishing method
05/05/2011US20110104990 Substrate Retainer
05/05/2011US20110104908 Laser Mask and Crystallization Method Using the Same
05/05/2011US20110104907 Methods of forming a metal silicate layer and methods of fabricating a semiconductor device including the metal silicate layer
05/05/2011US20110104906 Method of growing oxide thin films
05/05/2011US20110104905 Etching composition, in particular for strained or stressed silicon materials, method for characterizing defects on surfaces of such materials and process of treating such surfaces with the etching composition
05/05/2011US20110104904 Method of processing silicon wafer
05/05/2011US20110104903 Manufacturing apparatus and method for semiconductor device
05/05/2011US20110104902 Plasma processing apparatus and plasma processing method
05/05/2011US20110104901 Semiconductor device manufacturing method
05/05/2011US20110104900 Alkaline Rinse Agents For Use In Lithographic Patterning
05/05/2011US20110104899 Sub-lithographic printing method
05/05/2011US20110104898 Method of Forming Semiconductor Device
05/05/2011US20110104897 Contact clean by remote plasma and repair of silicide surface
05/05/2011US20110104896 Method of manufacturing semiconductor device and substrate processing apparatus
05/05/2011US20110104895 Method for forming a plug structure
05/05/2011US20110104894 Method for fabricating semiconductor device
05/05/2011US20110104893 Method for fabricating mos transistor
05/05/2011US20110104892 Etching method and manufacturing method of semiconductor device
05/05/2011US20110104891 Methods and apparatus of creating airgap in dielectric layers for the reduction of rc delay
05/05/2011US20110104890 Method for forming cu electrical interconnection film
05/05/2011US20110104889 Methods of Forming Integrated Circuit Devices Using Contact Hole Spacers to Improve Contact Isolation
05/05/2011US20110104888 Semiconductor devices having redistribution structures and packages, and methods of forming the same