Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2011
04/27/2011CN102034737A Making method of metal interconnection layer
04/27/2011CN102034736A Photoetching method of contact hole
04/27/2011CN102034735A Method for improving uniformity of characteristic dimension of connecting hole
04/27/2011CN102034734A Method for manufacturing self-alignment metal interconnection wire
04/27/2011CN102034733A Interconnecting structure and forming method thereof
04/27/2011CN102034732A Attraction member, and attraction device and charged particle beam apparatus using the same
04/27/2011CN102034731A Substrate processing apparatus and substrate transfer method
04/27/2011CN102034730A Substrate processing apparatus
04/27/2011CN102034729A Adhesive tape joining apparatus
04/27/2011CN102034728A Positioning transmission apparatus
04/27/2011CN102034727A Substrate processing apparatus
04/27/2011CN102034726A Process module, substrate processing apparatus and substrate transfer method
04/27/2011CN102034725A Automatic substrate positioning and loading device
04/27/2011CN102034724A Method for determining dielectric constant value of fluoride silicon glass in actual process
04/27/2011CN102034723A Method and device for wire bonding
04/27/2011CN102034722A Mold for PLCC (plastic leaded chip carrier)
04/27/2011CN102034721A Method for encapsulating chip
04/27/2011CN102034720A Chip packaging method
04/27/2011CN102034719A TO-CAN coaxial small-sized packaging method for PIN-FET high-sensitivity detector
04/27/2011CN102034718A Semiconductor device and method of forming open cavity in TSV interposer to contain semiconductor die in WLCSMP
04/27/2011CN102034717A Packaging method for radio frequency card
04/27/2011CN102034716A 芯片接合装置 Chip bonding device
04/27/2011CN102034715A Method for producing power MOSFET (metal-oxide-semiconductor field effect transistor)
04/27/2011CN102034714A Methods for forming isolated fin structures on bulk semiconductor material
04/27/2011CN102034713A Manufacturing method of semiconductor device
04/27/2011CN102034712A Direct contact in trench with three-mask shield gate process
04/27/2011CN102034711A Method for manufacturing transistor with lightly doped drain structure
04/27/2011CN102034710A Gate pre-doping method of semiconductor device
04/27/2011CN102034709A Method for amplifying process window of PMOS (P-channel metal oxide semiconductor) core device
04/27/2011CN102034708A Manufacturing method of trench DMOS (double-diffused metal oxide semiconductor) transistor
04/27/2011CN102034707A Method for manufacturing IGBT
04/27/2011CN102034706A Method for controlling growth effect of facet of silicon-germanium (Si-Ge) alloy
04/27/2011CN102034705A Processing technology for reducing large-current diode stress
04/27/2011CN102034704A Method for improving etching selection ratio of etched hard mask oxidation layer to etched silicon nitride layer
04/27/2011CN102034703A Grinding method
04/27/2011CN102034702A Method of manufacturing semiconductor device and substrate processing apparatus
04/27/2011CN102034701A Method for forming dielectric layer and polishing method
04/27/2011CN102034700A Method of recycling silicon component for plasma etching apparatus and silicon component for plasma etching apparatus
04/27/2011CN102034699A Polishing method
04/27/2011CN102034698A Silicon wafer manufacturing method
04/27/2011CN102034697A Method for polishing semiconductor wafers
04/27/2011CN102034696A Workpiece dividing method
04/27/2011CN102034695A Enhanced method of forming nickel silicide
04/27/2011CN102034694A Method for forming integrated circuit
04/27/2011CN102034693A Method for preparing stress-free GaN thick film on sapphire patterned substrate
04/27/2011CN102034692A Method for transplanting silicon carbide (SiC) thin layer onto other substrates
04/27/2011CN102034691A Method for applying deep-UV photoresist to wet etching
04/27/2011CN102034690A Pretreatment method for electronic packaging
04/27/2011CN102034689A Method of forming integrated circuit structure
04/27/2011CN102034688A Method of protecting an integrated circuit chip against spying by laser attacks
04/27/2011CN102034687A Process for bonding and transferring layer
04/27/2011CN102034686A Capacitor and forming method thereof
04/27/2011CN102034685A Method for using post-epitaxial photoetching to align zero-level marks
04/27/2011CN102034684A Device and method for introducing multi-gradient temperature field in laser annealing process of silicon wafer
04/27/2011CN102034683A Laser repairing stand
04/27/2011CN102034682A Laser irradiation system and laser irradiation method
04/27/2011CN102034681A Method for repairing surface scratches of wafer
04/27/2011CN102034680A Drying method of wafer
04/27/2011CN102034679A Wafer cleaning method
04/27/2011CN102034678A Vaccum processing apparatus
04/27/2011CN102034665A An ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions
04/27/2011CN102034538A Charge trapping memory and manufacturing method thereof
04/27/2011CN102033979A Optimizing bias points for a semiconductor device
04/27/2011CN102033971A Design method of circuit patterns and rapid thermal annealing method of semiconductor device
04/27/2011CN102033423A Device and method for calibrating photoetching tool
04/27/2011CN102033420A Photomask, photomask manufacturing method, pattern transfer method and method for manufacturing liquid crystal display device
04/27/2011CN102033379A 液晶显示器与其制造方法 LCD monitors its manufacturing method
04/27/2011CN102033376A Fringe field switching mode liquid crystal display device and method of fabricating the same
04/27/2011CN102033374A Thin film transistor-liquid crystal display (TFT-LCD) array substrate, manufacturing method and disconnection maintenance method
04/27/2011CN102033372A TFT-LCD array substrate and manufacturing, detecting and driving methods thereof
04/27/2011CN102033371A Array substrate and manufacturing method thereof
04/27/2011CN102033370A Liquid crystal display substrate and manufacturing method thereof
04/27/2011CN102033367A Display substrate and manufacturing method thereof
04/27/2011CN102033365A Fringe field switching mode liquid crystal display device and method of fabricating the same
04/27/2011CN102033345A Manufacture method of liquid crystal display and array baseplate
04/27/2011CN102033343A Array substrate and manufacturing method thereof
04/27/2011CN102033332A Optical modulator utilizing wafer bonding technology
04/27/2011CN102033076A Inspection device and inspection method
04/27/2011CN102033071A Application state inspecting method
04/27/2011CN102031567A Heat processing apparatus and cooling method
04/27/2011CN102031557A Epitaxial wafer and production method thereof
04/27/2011CN102031554A Online monitoring method for electroplating process stability
04/27/2011CN102031525A Method for etching deep through silicon via (TSV)
04/27/2011CN102031501A Method for selectively depositing thin film on substrate by utilizing atomic layer deposition
04/27/2011CN102031498A Substrate support seat for III-V group thin film growth reaction chamber, reaction chamber thereof and process treatment method
04/27/2011CN102031204A Cleaning composition, cleaning process, and process for producing semiconductor device
04/27/2011CN102031072A Pressure-sensitive adhesive sheet for retaining elements and method of producing elements
04/27/2011CN102031070A Thin sheet adhesive agent and adhesive tape for processing wafer
04/27/2011CN102030471A Low-temperature cofiring glass and ceramic multilayer microcircuit substrate and preparation method thereof
04/27/2011CN102029655A Film for semiconductor apparatus
04/27/2011CN102029573A Method for grinding semiconductor wafer
04/27/2011CN102029572A Control method of CMP (chemical mechanical polishing) time
04/27/2011CN102029571A Polishing pad and application and manufacturing method thereof
04/27/2011CN101814430B Method for preparing composite trapping layer of floating gate type nonvolatile memory
04/27/2011CN101740502B Light sensitive component array forming method of mercury cadmium telluride micro-table-board infrared detection chip
04/27/2011CN101740448B Plasma processing equipment and substrate support plate thereof
04/27/2011CN101719464B Method for preparing ultra-shallow junction on surface of semiconductor chip through laser
04/27/2011CN101685801B Method for making storage electrode with stacked capacitor
04/27/2011CN101685781B Method for manufacturing packaging substrate
04/27/2011CN101675504B Method for etching glass or metal substrates using negative photoresist and method for fabricating cliche using the same