Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2011
05/04/2011CN102047396A Flexible semiconductor device and method for manufacturing same
05/04/2011CN102047395A Method of producing silylated porous insulating film, method of producing semiconductor device, and silylated material
05/04/2011CN102047394A Process for cleaning semiconductor element
05/04/2011CN102047393A Dicing method
05/04/2011CN102047392A Scribe apparatus for thin film solar cell
05/04/2011CN102047391A Techniques for improved uniformity tuning in an ion implanter system
05/04/2011CN102047390A Use of chained implants in solar cells
05/04/2011CN102047389A Junction formation on wafer substrates using group IV nanoparticles
05/04/2011CN102047388A Gas distribution showerhead skirt
05/04/2011CN102047387A Modular and readily configurable reactor enclosures and associated function modules
05/04/2011CN102047386A Low temperature deposition of silicon-containing films
05/04/2011CN102047385A Thin film formation device and semiconductor film manufacturing method
05/04/2011CN102047384A Methods of treating semiconducting materials and treated semiconducting materials
05/04/2011CN102047383A Wafer retainer for improving a method of connecting a high-frequency electrode, and semiconductor production device on which the wafer retainer is mounted
05/04/2011CN102047382A External electrode discharge lamp and ultraviolet ray irradiating apparatus using the same
05/04/2011CN102047376A Control of particles on semiconductor wafers when implanting boron hydrides
05/04/2011CN102047347A Circuit connection material and circuit connection structure
05/04/2011CN102047179A Photosensitive resin composition, process for producing cured relief pattern, and semiconductor device
05/04/2011CN102046858A AlxGa1-xN single crystal and electromagnetic wave transmission body
05/04/2011CN102046840A Processing apparatus and processing method
05/04/2011CN102046837A Sputtering apparatus
05/04/2011CN102046616A Dithiane derivative, polymer, resist composition, and process for producing semiconductor using the resist composition
05/04/2011CN102046563A Composition for ferroelectric thin film formation, method for ferroelectric thin film formation, and ferroelectric thin film formed by the method
05/04/2011CN102046357A Mold for nanoimprinting, process for producing the same, and processes for producing molded resin having fine rugged structure on surface and for producing wire-grid polarizer
05/04/2011CN102046344A Apparatus and method for multiple substrate processing
05/04/2011CN102046338A Carrier device, position-teaching method, and sensor jig
05/04/2011CN102045939A Metal layer structure of flexible multilayer base plate and preparation method thereof
05/04/2011CN102044600A Light-emitting diode (LED) encapsulating structure and preparation method thereof
05/04/2011CN102044569A Capacitor and manufacturing method thereof
05/04/2011CN102044568A Thin film transistor and method fabricating thereof
05/04/2011CN102044566A Semiconductor element and its manufacturing method
05/04/2011CN102044563A LDMOS (laterally diffused metal oxide semiconductor) device and manufacturing method thereof
05/04/2011CN102044562A High-voltage double-diffused metal-oxide-semiconductor (DMOS) device
05/04/2011CN102044561A Semiconductor device acted by stress and manufacturing method thereof
05/04/2011CN102044560A Ultrahigh frequency silicon and germanium heterojunction bipolar transistor
05/04/2011CN102044559A Semiconductor device and method of manufacturing the same
05/04/2011CN102044557A Organic light emitting diode display device and method of fabricating the same
05/04/2011CN102044546A Memory and manufacturing method thereof
05/04/2011CN102044545A Flash memory of discrete gate and manufacturing method thereof
05/04/2011CN102044544A Non-volatile memory with floating gates and formation method thereof
05/04/2011CN102044542A Semiconductor device and manufacturing method thereof
05/04/2011CN102044541A Semiconductor device and method of manufacturing the same
05/04/2011CN102044539A Semiconductor chip, seal ring structure and manufacturing method thereof
05/04/2011CN102044538A Semiconductor chip, seal ring structure and manufacturing method thereof
05/04/2011CN102044534A Light-emitting diode encapsulation structure capable of enhancing heat-radiating and light-emitting effects and manufacturing method thereof
05/04/2011CN102044533A Multichip package and method of manufacturing the same
05/04/2011CN102044532A Wireless communication module and manufacturing method thereof
05/04/2011CN102044531A Apparatus and method for vertically-structured passive components
05/04/2011CN102044530A System packaging structure and manufacture method thereof
05/04/2011CN102044529A System packaging structure and manufacture method thereof
05/04/2011CN102044528A Stacked packaging member and manufacturing method thereof
05/04/2011CN102044527A Overlapped packaging structure and manufacturing method thereof
05/04/2011CN102044526A Electromigration monitoring structure
05/04/2011CN102044525A Low-K dielectric layer structure, semiconductor device structure and formation method thereof
05/04/2011CN102044524A Interconnecting structure and forming method thereof
05/04/2011CN102044523A Semiconductor device structure and manufacturing method thereof
05/04/2011CN102044521A Semiconductor component with through guide hole, manufacturing method of semiconductor component and packaging structure of semiconductor component with through guide hole
05/04/2011CN102044520A Package carrier plate, package structure and manufacturing process of package carrier plate
05/04/2011CN102044518A Low temperature co-fired ceramic substrate structure
05/04/2011CN102044517A Super-high-power IC chip package and production method thereof
05/04/2011CN102044515A Package carrier, package structure, and process for fabricating same
05/04/2011CN102044500A Chip carrier plate as well as encapsulating structure and method thereof
05/04/2011CN102044499A Manufacturing method of isolation structure in BCD (binary coded decimal) technology
05/04/2011CN102044498A Formation method for split gate storage device
05/04/2011CN102044497A Method for forming discrete gate memory device
05/04/2011CN102044496A Method for selectively forming grooves
05/04/2011CN102044495A Method for manufacturing semiconductor device with buried gate
05/04/2011CN102044494A Method for manufacturing semiconductor device
05/04/2011CN102044493A Method for manufacturing self-aligned silicide layer on semiconductor device layer
05/04/2011CN102044492A Method for manufacturing semiconductor device
05/04/2011CN102044491A Resistance type memory device, manufacturing method and operating method thereof
05/04/2011CN102044490A Fabricating method of thin film transistor array substrate
05/04/2011CN102044489A Process for producing substrates free of patterns using an alpha stepper to ensure results
05/04/2011CN102044488A Dual-damascene structure and production method thereof
05/04/2011CN102044487A Tungsten dual-damascene process
05/04/2011CN102044486A Method for etching silicon contact hole by taking oxide film as barrier layer
05/04/2011CN102044485A Metalizing method and method for preventing corrosive defects of copper-aluminum alloy
05/04/2011CN102044484A Manufacturing method of tungsten plug on semiconductor device
05/04/2011CN102044483A Groove forming method
05/04/2011CN102044482A Method for forming groove
05/04/2011CN102044481A Method for preventing corrosion of tungsten plug
05/04/2011CN102044480A Manufacturing method of connection hole
05/04/2011CN102044479A Method for forming semiconductor device
05/04/2011CN102044478A Method for making metal plug
05/04/2011CN102044477A Making method of metal plug adapter
05/04/2011CN102044476A Forming method of metal pattern
05/04/2011CN102044475A Interconnecting structure and forming method thereof
05/04/2011CN102044474A Surface treatment method of copper metal layer subjected to chemically mechanical polishing
05/04/2011CN102044473A Formation method of semiconductor device
05/04/2011CN102044472A Method for reducing thickness of dielectric layer
05/04/2011CN102044471A Interconnecting structure and forming method thereof
05/04/2011CN102044470A Integrated circuit with multi recessed shallow trench isolation
05/04/2011CN102044469A Integrated circuit structure and forming method thereof
05/04/2011CN102044468A Method for grinding surface of shallow trench isolation structure
05/04/2011CN102044467A Manufacturing method of isolating structure
05/04/2011CN102044466A Electrostatic chuck and method for eliminating residual electric charges of electrostatic chuck
05/04/2011CN102044465A Apparatus and method for processing semiconductor wafers
05/04/2011CN102044464A Methods relating to capacitive monitoring of layer characteristics during back end-of-the-line processing
05/04/2011CN102044463A Photoresist coating monitoring method
05/04/2011CN102044462A Method for testing wafer