H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2011
06/03/2011	WO2011065243A1 Semiconductor device and manufacturing method thereof
06/03/2011	WO2011065218A1 Surface protective film, gas contact member, gas processing apparatus, and mechanical pump
06/03/2011	WO2011065216A1 Stacked oxide material, semiconductor device, and method for manufacturing the semiconductor device
06/03/2011	WO2011065210A1 Stacked oxide material, semiconductor device, and method for manufacturing the semiconductor device
06/03/2011	WO2011065209A1 Non-linear element, display device including non-linear element, and electronic device including display device
06/03/2011	WO2011065208A1 Semiconductor device and method for manufacturing the same
06/03/2011	WO2011065207A1 Radiation-sensitive composition and method for forming resist pattern
06/03/2011	WO2011065200A1 Aluminum ribbon for ultrasonic bonding
06/03/2011	WO2011065198A1 Semiconductor device
06/03/2011	WO2011065183A1 Semiconductor device including memory cell
06/03/2011	WO2011065156A1 Organic transistor and manufacturing method therefor
06/03/2011	WO2011065122A1 Method for manufacturing semiconductor substrate
06/03/2011	WO2011065094A1 Laser annealing device and laser annealing method
06/03/2011	WO2011065083A1 Organic thin film transistor, and process for production thereof
06/03/2011	WO2011065059A1 Thin film transistor and manufacturing method for same, semiconductor device and manufacturing method for same, and display device
06/03/2011	WO2011065025A1 Bonding method, bonding apparatus, and bonding system
06/03/2011	WO2011065022A1 Semiconductor integrated circuit
06/03/2011	WO2011065021A1 Vacuum chuck
06/03/2011	WO2011065015A1 Composition containing organic semiconductor material and organic thin film transistor using same
06/03/2011	WO2011065004A1 Cyclic compound, process for production thereof, radiation-sensitive composition, and resist pattern formation method
06/03/2011	WO2011064997A1 Semiconductor substrate and method for manufacturing semiconductor substrate
06/03/2011	WO2011064957A1 Method for forming insulating film
06/03/2011	WO2011064955A1 Bidirectional switch
06/03/2011	WO2011064940A1 Carbon electrode and equipment for manufacturing polycrystalline silicon rod
06/03/2011	WO2011064937A1 Semiconductor device and method for manufacturing same
06/03/2011	WO2011064891A1 Method of producing semiconductor device, and method of producing dynamic threshold transistor
06/03/2011	WO2011064866A1 Nonvolatile semiconductor memory device and erasure method therefor
06/03/2011	WO2011064817A1 Semiconductor device and method for manufacturing same
06/03/2011	WO2011064735A1 Process for removing bulk material layer from substrate and chemical mechanical polishing agent suitable for this process
06/03/2011	WO2011064734A1 Process for removing a bulk material layer from a substrate and a chemical mechanical polishing agent suitable for this process
06/03/2011	WO2011064624A1 Bypass capacitor circuit and method of providing a bypass capacitance for an integrated circuit die
06/03/2011	WO2011064575A1 Electronic circuits including planar electronic devices
06/03/2011	WO2011063988A1 Separation device
06/03/2011	WO2011063987A1 Method and device for separating disk-shaped elements which adhere to each other
06/03/2011	WO2011063932A1 Method for improving the quality of wafers, and use of the method
06/03/2011	WO2011063872A1 Method for making contact with a chip
06/03/2011	WO2011063650A1 Semiconductor device and fabrication method thereof
06/03/2011	WO2011063649A1 Method for adjusting metal gate work function of pmos device
06/03/2011	WO2011063646A1 Nand structure and a manufacturing method thereof
06/03/2011	WO2011063552A1 Method for forming via interconnects for 3-d wafer/chip stacking
06/03/2011	WO2011063547A1 Through silicon via guard ring
06/03/2011	WO2011043869A3 Semiconductor device having a copper plug
06/03/2011	WO2011040701A3 Brush roll for semiconductor wafer
06/03/2011	WO2011031589A3 Methods and arrangement for detecting a wafer-released event within a plasma processing chamber
06/03/2011	WO2011028667A3 Reduced isotropic etchant material consumption and waste generation
06/03/2011	WO2011028644A3 Vacuum transition for solder bump mold filling
06/03/2011	WO2011026127A3 A local plasma confinement and pressure control arrangement and methods thereof
06/03/2011	WO2011026126A3 A multi-peripheral ring arrangement for performing plasma confinement
06/03/2011	WO2011019157A3 Nitrogen gas injection apparatus
06/03/2011	WO2011017501A3 Cvd apparatus
06/03/2011	WO2011017119A3 Wet etching methods for copper removal and planarization in semiconductor processing
06/03/2011	WO2011013937A3 Pretreatment method using a sputtering system, and pretreatment apparatus used in a roll-to-roll sputtering apparatus
06/03/2011	WO2011010821A3 Clamp for ingot squaring and grinding equipment
06/03/2011	WO2011006146A9 Substantially rigid collapsible liner and flexible gusseted or non-gusseted liners and methods of manufacturing the same and methods for limiting choke-off in liners
06/03/2011	WO2011005057A3 Vacuum dryer and drying method using the same
06/03/2011	WO2011002810A4 Methods for constructing an optimal endpoint algorithm
06/03/2011	WO2010091660A3 Method for producing a connection between a semiconductor component and semiconductor module resistant to high temperatures and temperature changes by means of a temperature impinging process
06/03/2011	WO2006091291A3 Apparatus and process for carbon nanotube growth
06/03/2011	CA2758266A1 Method of manufacturing semiconductor substrate
06/02/2011	US20110130013 Substrate processing method and semiconductor device manufacturing method
06/02/2011	US20110130012 Rapid thermal processing by stamping
06/02/2011	US20110130011 Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus
06/02/2011	US20110130010 Etching and cleaning methods and etching and cleaning apparatuses used therefor
06/02/2011	US20110130009 Method and apparatus for surface treatment using a mixture of acid and oxidizing gas
06/02/2011	US20110130008 Method to control critical dimension
06/02/2011	US20110130007 In-situ clean to reduce metal residues after etching titanium nitride
06/02/2011	US20110130006 Mask material conversion
06/02/2011	US20110130005 Processing for overcoming extreme topography
06/02/2011	US20110130004 Method for forming side contact in semiconductor device through self-aligned damascene process
06/02/2011	US20110130003 Method and apparatus for conformable polishing
06/02/2011	US20110130002 Methods and Apparatus for Edge Chamfering of Semiconductor Wafers Using Chemical Mechanical Polishing
06/02/2011	US20110130001 Substrate Processing Apparatus
06/02/2011	US20110130000 Methods of manufacturing a semiconductor device using compositions for etching copper
06/02/2011	US20110129999 Method for manufacturing semiconductor device
06/02/2011	US20110129998 Cleaning liquid for lithography and method for forming wiring
06/02/2011	US20110129997 Method for manufacturing semiconductor device
06/02/2011	US20110129996 Through substrate annular via including plug filler
06/02/2011	US20110129995 Multilayer wiring structure of semiconductor device, method of producing said multilayer wiring structure and semiconductor device to be used for reliability evaluation
06/02/2011	US20110129994 Method of manufacturing a dual face package
06/02/2011	US20110129993 Semiconductor device and inspection method therefor
06/02/2011	US20110129992 Method for fabricating vertical channel type non-volatile memory device
06/02/2011	US20110129991 Methods Of Patterning Materials, And Methods Of Forming Memory Cells
06/02/2011	US20110129990 Method for doping non-planar transistors
06/02/2011	US20110129989 Semiconductor device manufacturing method and device for same
06/02/2011	US20110129988 Method of making multiple implantations in a substrate
06/02/2011	US20110129987 Semiconductor device and manufacturing method thereof
06/02/2011	US20110129986 Nitrogen-plasma surface treatment in a direct bonding method
06/02/2011	US20110129985 Methods for forming isolation structures for semiconductor devices
06/02/2011	US20110129984 Method of manufacturing semiconductor integrated circuit device
06/02/2011	US20110129983 Method for fabricating a dual-orientation group-iv semiconductor substrate
06/02/2011	US20110129982 Method for Forming a Capacitor of a Semiconductor Memory Device
06/02/2011	US20110129981 Filler for filling a gap and method for manufacturing semiconductor capacitor using the same
06/02/2011	US20110129980 Cap removal in a high-k metal gate electrode structure by using a sacrificial fill material
06/02/2011	US20110129979 Method of Manufacturing a Semiconductor Device Having Improved Transistor Performance
06/02/2011	US20110129978 Method and structure for forming finfets with multiple doping regions on a same chip
06/02/2011	US20110129977 Plasma doping method and manufacturing method of semiconductor device
06/02/2011	US20110129976 Local interconnect having increased misalignment tolerance
06/02/2011	US20110129975 Method for fabricating side contact in semiconductor device using double trench process
06/02/2011	US20110129974 Method for fabricating semiconductor device
06/02/2011	US20110129973 Nonvolatile memory device using semiconductor nanocrystals and method of forming same

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