H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2011
10/19/2011	CN101116928B Laser beam irradiation apparatus and laser working machine
10/19/2011	CN101111334B Silver particle powder and process for producing the same
10/19/2011	CN101092277B Baking method of quartz products
10/19/2011	CN101026931B Right-angled signal line making method and its circuit board
10/19/2011	CN101003895B Device for delivering reactant to substrate, and process method
10/18/2011	USRE42849 Lithographic apparatus and device manufacturing method
10/18/2011	US8042067 Pattern forming method and system, and method of manufacturing a semiconductor device
10/18/2011	US8041443 Surface defect data display and management system and a method of displaying and managing a surface defect data
10/18/2011	US8041441 Production management method and production management system
10/18/2011	US8040655 Substrate hold apparatus and method for judging substrate push-up state
10/18/2011	US8040503 Method of inspecting a semiconductor device and an apparatus thereof
10/18/2011	US8040474 Mold and method of manufacturing display device
10/18/2011	US8040446 Thin film transistor array panel for liquid crystal display and method for manufacturing the same
10/18/2011	US8040444 Display device, method of manufacturing the same and mask for manufacturing the same
10/18/2011	US8040338 Method of making passive circuits for de-multiplexing display inputs
10/18/2011	US8040148 System in package with built-in test-facilitating circuit
10/18/2011	US8039967 Wiring substrate with a wire terminal
10/18/2011	US8039957 System for improving flip chip performance
10/18/2011	US8039950 Solder material lining a cover wafer attached to wafer substrate
10/18/2011	US8039946 Chip package structure and fabricating method thereof
10/18/2011	US8039940 Semiconductor storage device, semiconductor device, and manufacturing method therefor
10/18/2011	US8039931 Power semiconductor component having a topmost metallization layer
10/18/2011	US8039929 Asymmetrically stressed CMOS FinFET
10/18/2011	US8039925 Integrated radio frequency circuits
10/18/2011	US8039921 Wiring structure, semiconductor device and manufacturing method thereof
10/18/2011	US8039920 Methods for forming planarized hermetic barrier layers and structures formed thereby
10/18/2011	US8039911 MEMS sensor
10/18/2011	US8039908 Damascene gate having protected shorting regions
10/18/2011	US8039904 Apparatus of memory array using finfets
10/18/2011	US8039895 Transistors having a channel region between channel-portion holes and methods of forming the same
10/18/2011	US8039894 Trench transistor and method for fabricating a trench transistor with high-energy-implanted drain
10/18/2011	US8039888 Conductive spacers for semiconductor devices and methods of forming
10/18/2011	US8039884 Semiconductor device having a contact hole with a curved cross-section and its manufacturing method
10/18/2011	US8039880 High performance microwave switching devices and circuits
10/18/2011	US8039878 Transistor having a channel with tensile strain and oriented along a crystallographic orientation with increased charge carrier mobility
10/18/2011	US8039859 Semiconductor light emitting devices including an optically transmissive element
10/18/2011	US8039853 Light emitting device
10/18/2011	US8039847 Printable semiconductor structures and related methods of making and assembling
10/18/2011	US8039845 Methods for coupling diamond structures to photonic devices
10/18/2011	US8039842 Thin film transistor and display device including thin film transistor
10/18/2011	US8039838 Silicon thin film transistors, systems, and methods of making same
10/18/2011	US8039807 Exposure apparatus, exposure method, and method for producing device
10/18/2011	US8039757 Electronic part mounting substrate and method for producing same
10/18/2011	US8039409 TiO2-containing silica glass for optical member for EUV lithography
10/18/2011	US8039406 Method of gap-filling using amplitude modulation radiofrequency power and apparatus for the same
10/18/2011	US8039405 Conductive oxide-deposited substrate and method for producing the same, and MIS laminated structure and method for producing the same
10/18/2011	US8039404 Production method for semiconductor device
10/18/2011	US8039403 Thin film transistor, method of manufacturing same, display device, method of modifying an oxide film, method of forming an oxide film, semiconductor device, method of manufacturing semiconductor device, and apparatus for manufacturing semiconductor device
10/18/2011	US8039402 Methods for forming a gate and a shallow trench isolation region and for planarizating an etched surface of silicon substrate
10/18/2011	US8039401 Structure and method for forming hybrid substrate
10/18/2011	US8039400 Reducing contamination of semiconductor substrates during BEOL processing by performing a deposition/etch cycle during barrier deposition
10/18/2011	US8039399 Methods of forming patterns utilizing lithography and spacers
10/18/2011	US8039398 Method of reducing non-uniformities during chemical mechanical polishing of excess metal in a metallization level of microstructure devices
10/18/2011	US8039397 Using optical metrology for within wafer feed forward process control
10/18/2011	US8039396 Method for manufacturing photovoltaic device
10/18/2011	US8039395 Technique for forming embedded metal lines having increased resistance against stress-induced material transport
10/18/2011	US8039394 Methods of forming layers of alpha-tantalum
10/18/2011	US8039393 Semiconductor structure, method for manufacturing semiconductor structure and semiconductor package
10/18/2011	US8039392 Resistor random access memory cell with reduced active area and reduced contact areas
10/18/2011	US8039391 Method of forming a contact in a semiconductor device with engineered plasma treatment profile of barrier metal layer
10/18/2011	US8039390 Method of manufacturing semiconductor device
10/18/2011	US8039389 Semiconductor device having an organic anti-reflective coating (ARC) and method therefor
10/18/2011	US8039388 Main spacer trim-back method for replacement gate process
10/18/2011	US8039387 Semiconductor device and method for manufacturing the same
10/18/2011	US8039386 Method for forming a through silicon via (TSV)
10/18/2011	US8039385 IC devices having TSVS including protruding tips having IMC blocking tip ends
10/18/2011	US8039384 Semiconductor device and method of forming vertically offset bond on trace interconnects on different height traces
10/18/2011	US8039383 Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric regions
10/18/2011	US8039382 Method for forming self-aligned metal silicide contacts
10/18/2011	US8039381 Photoresist etch back method for gate last process
10/18/2011	US8039380 Procedure for obtaining nanotube layers of carbon with conductor or semiconductor substrate
10/18/2011	US8039379 Nanoparticle cap layer
10/18/2011	US8039378 Method of manufacturing a semiconductor device
10/18/2011	US8039376 Methods of changing threshold voltages of semiconductor transistors by ion implantation
10/18/2011	US8039375 Shallow junction formation and high dopant activation rate of MOS devices
10/18/2011	US8039374 Method for low temperature ion implantation
10/18/2011	US8039373 Pattern film forming method and pattern film forming apparatus
10/18/2011	US8039372 Methods of manufacturing variable resistance non-volatile memory devices including a uniformly narrow contact layer
10/18/2011	US8039371 Reduced defect semiconductor-on-insulator hetero-structures
10/18/2011	US8039370 Method of transferring a layer onto a liquid material
10/18/2011	US8039369 Semiconductor light-emitting element and method of producing the same
10/18/2011	US8039368 Nanogaps: methods and devices containing same
10/18/2011	US8039367 Scribe line structure and method for dicing a wafer
10/18/2011	US8039366 Method for providing rotationally symmetric alignment marks for an alignment system that requires asymmetric geometric layout
10/18/2011	US8039365 Integrated circuit package system including wafer level spacer
10/18/2011	US8039364 Manufacturing method of semiconductor device
10/18/2011	US8039363 Small chips with fan-out leads
10/18/2011	US8039362 Method for fabricating light emitting device
10/18/2011	US8039361 Multilayered semiconductor wafer and process for manufacturing the same
10/18/2011	US8039360 Method of assembling integrated circuit components
10/18/2011	US8039359 Method of forming low capacitance ESD device and structure therefor
10/18/2011	US8039358 Method of manufacturing semiconductor device on which a plurality of types of transistors are mounted
10/18/2011	US8039357 Integrated circuitry and methods of forming a semiconductor-on-insulator substrate
10/18/2011	US8039356 Through silicon via lithographic alignment and registration
10/18/2011	US8039355 Method for fabricating PIP capacitor
10/18/2011	US8039354 Passive components in the back end of integrated circuits
10/18/2011	US8039353 Semiconductor device and manufacturing method of semiconductor device
10/18/2011	US8039352 Polarization-induced barriers for N-face nitride-based electronics
10/18/2011	US8039351 Method of fabricating hetero-junction bipolar transistor (HBT)
10/18/2011	US8039350 Methods of fabricating MOS transistors having recesses with elevated source/drain regions

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