H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2011
10/11/2011	US8034703 Semiconductor device and method for manufacturing the same
10/11/2011	US8034702 Methods of forming through substrate interconnects
10/11/2011	US8034701 Methods of forming recessed gate electrodes having covered layer interfaces
10/11/2011	US8034700 Method of fabricating a diode
10/11/2011	US8034699 Isolation with offset deep well implants
10/11/2011	US8034698 Systems and methods for inducing crystallization of thin films using multiple optical paths
10/11/2011	US8034697 Formation of devices by epitaxial layer overgrowth
10/11/2011	US8034696 Manufacturing method of semiconductor device
10/11/2011	US8034695 Semiconductor device and method of manufacturing the same
10/11/2011	US8034694 SOI substrate, method for manufacturing the same, and semiconductor device
10/11/2011	US8034693 Method for fabricating semiconductor device
10/11/2011	US8034692 Structure and method for manufacturing asymmetric devices
10/11/2011	US8034691 HDP-CVD process, filling-in process utilizing HDP-CVD, and HDP-CVD system
10/11/2011	US8034690 Method of etching oxide layer and nitride layer
10/11/2011	US8034689 Method for fabricating a semiconductor device and the semiconductor device made thereof
10/11/2011	US8034688 Methods of forming power switching semiconductor devices including rectifying junction-shunts
10/11/2011	US8034687 Methods of forming a plurality of transistor gates, and methods of forming a plurality of transistor gates having at least two different work functions
10/11/2011	US8034686 Method of manufacturing a trench MOSFET having trench contacts integrated with trench Schottky rectifiers having planar contacts
10/11/2011	US8034685 Semiconductor component and method of manufacture
10/11/2011	US8034684 Semiconductor device with improved overlay margin and method of manufacturing the same
10/11/2011	US8034683 Method of forming a phase change material layer, method of forming a phase change memory device using the same, and a phase change memory device so formed
10/11/2011	US8034682 Power device with trenches having wider upper portion than lower portion
10/11/2011	US8034681 Method of forming flash memory device having inter-gate plug
10/11/2011	US8034680 Method of manufacturing a memory device
10/11/2011	US8034679 Fabrication of field-effect transistor having hypoabrupt body dopant distribution below source/drain zone
10/11/2011	US8034678 Complementary metal oxide semiconductor device fabrication method
10/11/2011	US8034677 Integrated method for forming high-k metal gate FinFET devices
10/11/2011	US8034676 Semiconductor device and method of manufacturing the same
10/11/2011	US8034675 Semiconductor buffer architecture for III-V devices on silicon substrates
10/11/2011	US8034674 Semiconductor device, method for manufacturing semiconductor device, and electronic appliance
10/11/2011	US8034673 Film formation method and apparatus for forming silicon-containing insulating film doped with metal
10/11/2011	US8034672 Method of producing display device, display device, method of producing thin-film transistor substrate, and thin-film transistor substrate
10/11/2011	US8034671 Polysilicon film, thin film transistor using the same, and method for forming the same
10/11/2011	US8034670 Reliable memory cell
10/11/2011	US8034669 Drive current adjustment for transistors formed in the same active region by locally providing embedded strain-inducing semiconductor material in the active region
10/11/2011	US8034668 Method for forming semiconductor device having metallization comprising select lines, bit lines and word lines
10/11/2011	US8034667 Semiconductor sealing resin sheet and semiconductor device manufacturing method using the same
10/11/2011	US8034666 Multi-layer thick-film RF package
10/11/2011	US8034665 Microelectronic package with thermal access
10/11/2011	US8034664 Method of fabricating passive device applied to the three-dimensional package module
10/11/2011	US8034663 Low cost die release wafer
10/11/2011	US8034662 Thermal interface material with support structure
10/11/2011	US8034661 Semiconductor device and method of forming compliant stress relief buffer around large array WLCSP
10/11/2011	US8034659 Production method of semiconductor device and bonding film
10/11/2011	US8034658 Electronic module with a conductive-pattern layer and a method of manufacturing same
10/11/2011	US8034657 Chip packaging with metal frame pin grid array
10/11/2011	US8034656 Annealing method of zinc oxide thin film
10/11/2011	US8034655 Non-volatile resistive oxide memory cells, non-volatile resistive oxide memory arrays, and methods of forming non-volatile resistive oxide memory cells and memory arrays
10/11/2011	US8034654 Method for forming a GexSi1-x buffer layer of solar-energy battery on a silicon wafer
10/11/2011	US8034653 Method and apparatus for breaking semiconductor substrate, method for breaking solar cell and method for fabrication of solar cell module
10/11/2011	US8034652 Solid state imaging device and manufacturing method thereof
10/11/2011	US8034651 Light receiving device and method of manufacturing light receiving device
10/11/2011	US8034650 Fabrication method for a room temperature hydrogen sensor
10/11/2011	US8034649 Solid state imaging device, method of manufacturing the same, and imaging apparatus
10/11/2011	US8034648 Epitaxial regrowth in a distributed feedback laser
10/11/2011	US8034646 Light emitting element, light emitting device and semiconductor device
10/11/2011	US8034645 Method of making a semiconductor chip assembly with a copper/aluminum post/base heat spreader
10/11/2011	US8034644 Light emitting device
10/11/2011	US8034643 Method for fabrication of a semiconductor device
10/11/2011	US8034642 Method for pretreating electrochemical capacitor negative electrode, method for manufacturing the electrochemical capacitor negative electrode, and method for manufacturing electrochemical capacitor using the method for manufacturing the electrochemical capacitor negative electrode
10/11/2011	US8034641 Method for inspection of defects on a substrate
10/11/2011	US8034640 Apparatus and method to inspect defect of semiconductor device
10/11/2011	US8034639 Method for manufacturing solar cell module
10/11/2011	US8034638 Treatment of low K films with a silylating agent for damage repair
10/11/2011	US8034637 Techniques for coupling in semiconductor devices
10/11/2011	US8034545 Radiation curable composition, storing method thereof, forming method of cured film, patterning method, use of pattern, electronic components and optical waveguide
10/11/2011	US8034515 Pattern forming method, pattern designing method, and mask set
10/11/2011	US8034412 Treatment of items
10/11/2011	US8034252 Metal-polishing liquid and chemical-mechanical polishing method using the same
10/11/2011	US8034248 Dry etching method for oxide semiconductor film
10/11/2011	US8034213 Plasma processing apparatus and plasma processing method
10/11/2011	US8034212 Magnetron plasma processing apparatus
10/11/2011	US8034208 Deformation moderation method
10/11/2011	US8034190 Substrate processing apparatus and substrate processing method
10/11/2011	US8034181 Plasma processing apparatus
10/11/2011	US8034180 Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor
10/11/2011	US8034179 Method for insulating film formation, storage medium from which information is readable with computer, and processing system
10/11/2011	US8034177 Inner electrode for barrier film formation and apparatus for film formation
10/11/2011	US8033814 Device for holding a template for use in imprint lithography
10/11/2011	US8033772 Transfer chamber for vacuum processing system
10/11/2011	US8033771 Minimum contact area wafer clamping with gas flow for rapid wafer cooling
10/11/2011	US8033770 Vacuum processing apparatus
10/11/2011	US8033769 Loadlock designs and methods for using same
10/11/2011	US8033446 Manufacturing method of solid-state image pickup device
10/11/2011	US8033246 Arc suppression
10/11/2011	US8033245 Substrate support bushing
10/11/2011	US8033218 Printing device, production unit, and production method of electronic parts
10/11/2011	US8033039 High frequency flip chip package process of polymer substrate and structure thereof
10/11/2011	US8033011 Method for mounting a thinned semiconductor wafer on a carrier substrate
10/11/2011	CA2552488C Method of making lc polymer film
10/07/2011	CA2735527A1 Power switches for aircraft
10/06/2011	WO2011123786A2 Selective nanoparticle assembly systems and methods
10/06/2011	WO2011123539A2 Ultrasonic bonding systems and methods of using the same
10/06/2011	WO2011123500A2 Laser beam positioning system
10/06/2011	WO2011123465A1 Method and system for utilizing perovskite material for charge storage and as a dielectric
10/06/2011	WO2011123449A2 Laser systems and methods using triangular-shaped tailored laser pulses for selected target classes
10/06/2011	WO2011123442A1 Fabricating voids using slurry protect coat before chemical-mechanical polishing
10/06/2011	WO2011123373A1 Method for integrating low-k dielectrics
10/06/2011	WO2011123369A1 Atomic layer deposition of silicon and silicon-containing films
10/06/2011	WO2011123368A1 Surface cleaning and selective deposition of metal-containing cap layers for semiconductor devices

1 ... 1244 1245 1246 1247 1248 1249 1250 1251 1252 1253 1254 1255 1256 1257 1258 1259 1260 1261 1262 1263 1264 ... 6590