Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2014
10/14/2014US8859103 Glass wafers for semiconductor fabrication processes and methods of making same
10/14/2014US8859051 Composition for ferroelectric thin film formation, method for forming ferroelectric thin film and ferroelectric thin film formed by the method thereof
10/14/2014US8859047 Use of ruthenium tetroxide as a precursor and reactant for thin film depositions
10/14/2014US8859046 Substrate processing apparatus, control method adopted in substrate processing apparatus and program
10/14/2014US8859042 Methods for heating with lamps
10/14/2014US8859040 Method of applying atomic layer deposition coatings onto porous non-ceramic substrates
10/14/2014US8858844 In—Ga—Zn—O type sputtering target
10/14/2014US8858843 High fidelity doping paste and methods thereof
10/14/2014US8858819 Method for chemical mechanical planarization of a tungsten-containing substrate
10/14/2014US8858818 Method for minimizing defects in a semiconductor substrate due to ion implantation
10/14/2014US8858814 Photomask blank, processing method, and etching method
10/14/2014US8858774 Electroplating apparatus for tailored uniformity profile
10/14/2014US8858764 Electron beam sculpting of tunneling junction for nanopore DNA sequencing
10/14/2014US8858756 Ultrathin wafer debonding systems
10/14/2014US8858755 Edge bevel removal apparatus and method
10/14/2014US8858754 Plasma processing apparatus
10/14/2014US8858745 Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmas
10/14/2014US8858723 Integrated cleaner and dryer system
10/14/2014US8858716 Vacuum processing apparatus
10/14/2014US8858715 Device for layered deposition of various materials on a semiconductor substrate, as well as a lift pin for use in such a device
10/14/2014US8858710 Chemical solution vaporizing tank and chemical solution treating system
10/14/2014US8858298 Polishing pad with two-section window having recess
10/14/2014US8857805 Method, apparatus for holding and treatment of a substrate
10/14/2014US8857619 Mechanisms for wafer pod and pod door
10/14/2014US8857487 Room temperature bonding apparatus
10/14/2014US8857486 Flip arm module for a bonding apparatus incorporating changeable collet tools
10/14/2014US8857449 Substrate processing apparatus and substrate processing method
10/14/2014US8857371 Apparatus for generating dielectric barrier discharge gas
10/14/2014US8857047 Thin foil semiconductor package
10/14/2014US8857001 Brush mandrel for PVA sponge brush
10/09/2014WO2014165680A1 Apparatus and methods for determining defect depths in vertical stack memory
10/09/2014WO2014165669A2 Pulsed gas plasma doping method and apparatus
10/09/2014WO2014165638A1 Method of forming transistor with metal contacts in barrier layer
10/09/2014WO2014165547A1 Mesoscopic defect detection for reticle inspection
10/09/2014WO2014165540A1 Wafer shape and thickness measurement system utilizing shearing interferometers
10/09/2014WO2014165530A1 Highly etch-resistant polymer block for use in block copolymers for directed self-assembly
10/09/2014WO2014165414A1 Reducing registration error of front and back wafer surfaces utilizing a see-through calibration wafer
10/09/2014WO2014165406A1 Apparatus and method for thin wafer transfer
10/09/2014WO2014165309A1 Improved vjfet devices
10/09/2014WO2014165300A1 Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor
10/09/2014WO2014165298A1 Amorphous layer extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor
10/09/2014WO2014165295A1 Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor
10/09/2014WO2014165270A1 Methods for wet chemistry polishing for improved low viscosity printing in solar cell fabrication
10/09/2014WO2014165245A1 Porous alumina templates for electronic packages
10/09/2014WO2014165005A1 Method of fabricating igzo by sputtering in oxidizing gas
10/09/2014WO2014164966A1 Composite end effectors
10/09/2014WO2014164936A1 Detecting defects on a wafer
10/09/2014WO2014164935A1 Enhanced inspection and metrology techniques and systems using bright-field differential interference contrast
10/09/2014WO2014164929A1 Defect detection using surface enhanced electric field
10/09/2014WO2014164910A1 Multi zone heating and cooling esc for plasma process chamber
10/09/2014WO2014164776A1 Wafer handling apparatus
10/09/2014WO2014164743A1 High temperature process chamber lid
10/09/2014WO2014164742A1 Atomic layer deposition of hfaic as a metal gate workfunction material in mos devices
10/09/2014WO2014164710A1 Vertical nand and method of making thereof using sequential stack etching and landing pad
10/09/2014WO2014164507A1 Power field-effect transistor and corresponding package, system and manufacturing methods
10/09/2014WO2014164493A1 Methods for removing photoresist from substrates with atomic hydrogen
10/09/2014WO2014164465A1 Improvement of barrier film performance with n2o dilution process for thin film encapsulation
10/09/2014WO2014164449A1 Multi-zone heated esc with independent edge zones
10/09/2014WO2014164441A1 Method of improving ion beam quality in an implant system
10/09/2014WO2014164434A1 Solar cell with selectively doped conductive oxide layer and method of making the same
10/09/2014WO2014164433A1 Floating high vacuum seal cartridge
10/09/2014WO2014164300A1 Pulsed pc plasma etching process and apparatus
10/09/2014WO2014164152A1 Method and apparatus for light induced etching of glass substrates in the fabrication of electronic circuits
10/09/2014WO2014164062A1 Method of making a vertical nand device using sequential etching of multilayer stacks
10/09/2014WO2014163985A1 Surface roughening to reduce adhesion in an integrated mems device
10/09/2014WO2014163909A1 Multi-mode etch chamber source assembly
10/09/2014WO2014163841A1 Nanodot-enhanced hybrid floating gate for non-volatile memory devices
10/09/2014WO2014163829A1 Thermal management apparatus for solid state light source arrays
10/09/2014WO2014163809A1 Epi base ring
10/09/2014WO2014163802A1 Window assembly for substrate processing system
10/09/2014WO2014163800A1 Substrate support for plasma etch operations
10/09/2014WO2014163791A1 Semiconductor device manufacturing platform with single and twinned processing chambers
10/09/2014WO2014163785A1 Heated electrostatic chuck and semiconductor wafer heater and methods for manufacturing same
10/09/2014WO2014163776A1 Loadlock conveyor wafer holder design
10/09/2014WO2014163766A1 Pyrometry filter for thermal process chamber
10/09/2014WO2014163760A1 Lamphead pcb with flexible standoffs
10/09/2014WO2014163747A1 Silicon-germanium fins and silicon fins on a bulk substrate
10/09/2014WO2014163735A1 Reinforcement ring for carrier head
10/09/2014WO2014163603A1 Planar device on fin-based transistor architecture
10/09/2014WO2014163323A1 Ultraviolet light emitting device separated from growth substrate and method of fabricating the same
10/09/2014WO2014163188A1 Method for manufacturing semiconductor device
10/09/2014WO2014163183A1 Semiconductor memory device
10/09/2014WO2014163038A1 Structure equipped with amorphous carbon film having electrically conductive part and containing silicon, and method for manufacturing same
10/09/2014WO2014163010A1 Transfer equipment and transfer method
10/09/2014WO2014162998A1 Method for etching piezoelectric film and method for manufacturing piezoelectric element
10/09/2014WO2014162974A1 Underfill adhesive film, underfill adhesive film with integrated backgrinding tape, underfill adhesive film with integrated dicing tape, and semiconductor device
10/09/2014WO2014162973A1 Underfill film, sealing sheet, production method for semiconductor device, and semiconductor device
10/09/2014WO2014162952A1 Dummy load circuit and charge detection circuit
10/09/2014WO2014162951A1 Semiconductor device manufacturing method
10/09/2014WO2014162945A1 Water soluble cutting fluid for fixed abrasive grain wire saw, ingot cutting method using same, and substrate for electronic material obtained by means of same
10/09/2014WO2014162937A1 Semiconductor device and manufacturing method therefor
10/09/2014WO2014162912A1 Method for manufacturing organic processing fluid for patterning of chemical amplification type resist film, organic processing fluid for patterning of chemical amplification type resist film, pattern forming method, method for manufacturing electronic device, and electronic device
10/09/2014WO2014162844A1 Method for driving semiconductor device
10/09/2014WO2014162795A1 Esd protective device
10/09/2014WO2014162775A1 Method for manufacturing silicon carbide semiconductor device
10/09/2014WO2014162708A1 Slurry regeneration apparatus, slurry regeneration method, and regenerated slurry
10/09/2014WO2014162657A1 Method for manufacturing semiconductor wafer and cutting positioning system for semiconductor ingot
10/09/2014WO2014162627A1 Carrier for semiconductor process
10/09/2014WO2014162625A1 Connection structure, manufacturing method for same, and semiconductor device
10/09/2014WO2014162624A1 Tunnel field-effect transistor
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