Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2012
03/21/2012CN101154646B Metal line in semiconductor device and method for forming the same
03/21/2012CN101143644B Substrate storage facility and substrate processing facility, and method for operating substrate storage
03/21/2012CN101084470B Material for pattern formation, apparatus for pattern formation, and method for pattern formation
03/21/2012CN101075620B Non-volatile memory integrated circuit device and method of fabricating the same
03/21/2012CN101064286B High performance stress-enhance mosfet and method of manufacture
03/21/2012CN101064285B High performance stress-enhance mosfet and method of manufacture
03/21/2012CN101064269B Method for fabricating semiconductor
03/21/2012CN101051188B Lithographic apparatus and device manufacturing method
03/21/2012CN101038906B Interlayer connecting line structure of three-dimensional storage and method for making the same
03/21/2012CN101030602B MOS transistor for decreasing short channel and its production
03/21/2012CN101022093B Method for producing picture element structure
03/20/2012US8141009 Preparing data for hybrid exposure using both electron beam exposure and reticle exposure in lithographic process
03/20/2012US8141006 Photomask data processing method, photomask data processing system and manufacturing method
03/20/2012US8139387 Method of erasing a memory device including complementary nonvolatile memory devices
03/20/2012US8139340 Conductive seal ring electrostatic chuck
03/20/2012US8139332 Level conversion circuit and semiconductor integrated circuit device employing the level conversion circuit
03/20/2012US8139327 Semiconductor integrated circuit
03/20/2012US8139228 Methods for optically enhanced holographic interferometric testing for test and evaluation of semiconductor devices and materials
03/20/2012US8139217 Alignment systems and methods for lithographic systems
03/20/2012US8139198 Exposure apparatus, exposure method, and method for producing device
03/20/2012US8139175 Thin film transistor, thin film transistor substrate, and methods for manufacturing the same
03/20/2012US8139145 Camera module
03/20/2012US8139139 Imaging apparatus with phase difference detecting sensor
03/20/2012US8139131 Solid state imaging device and fabrication method thereof, and camera incorporating the solid state imaging device
03/20/2012US8139005 Display device
03/20/2012US8138757 Manufacturing method for magnetic sensor and lead frame therefor
03/20/2012US8138617 Apparatus and method for packaging circuits
03/20/2012US8138613 Microelectronic devices
03/20/2012US8138597 Semiconductor assembly that includes a power semiconductor die located in a cell defined by a patterned polymer layer
03/20/2012US8138590 Integrated circuit package system with wire-in-film encapsulation
03/20/2012US8138584 Method of forming a semiconductor package and structure thereof
03/20/2012US8138582 Impurity introducing apparatus having feedback mechanism using optical characteristics of impurity introducing region
03/20/2012US8138577 Pulse-laser bonding method for through-silicon-via based stacking of electronic components
03/20/2012US8138576 Production method and production apparatus of tin or solder alloy for electronic components, and solder alloy
03/20/2012US8138575 Integrated circuit including a reverse current complex
03/20/2012US8138572 Semiconductor device and method for fabricating the same
03/20/2012US8138571 Semiconductor device comprising isolation trenches inducing different types of strain
03/20/2012US8138570 Isolated junction field-effect transistor
03/20/2012US8138566 Integrated circuit chip made secure against the action of electromagnetic radiation
03/20/2012US8138565 Lateral double diffused metal oxide semiconductor device and method of making the same
03/20/2012US8138562 Bit line preparation method in MRAM fabrication
03/20/2012US8138560 Microstructure, micromachine, and manufacturing method of microstructure and micromachine
03/20/2012US8138555 Semiconductor device and its manufacturing method
03/20/2012US8138553 Semiconductor device and method of manufacturing the same
03/20/2012US8138552 Semiconductor device and method of manufacturing the same
03/20/2012US8138551 Semiconductor device with transistors and its manufacturing method
03/20/2012US8138547 MOSFET on silicon-on-insulator REDX with asymmetric source-drain contacts
03/20/2012US8138542 Semiconductor device and manufacturing method of the semiconductor device
03/20/2012US8138539 Semiconductor devices and methods of manufacture thereof
03/20/2012US8138537 Semiconductor device with grooved capacitor structure
03/20/2012US8138536 Semiconductor device having cylindrical lower electrode of capacitor and manufacturing method thereof
03/20/2012US8138526 Semiconductor structures including dual fins
03/20/2012US8138523 Semiconductor device having silicon on stressed liner (SOL)
03/20/2012US8138511 Radiation-emitting semiconductor component and method for producing the semiconductor component
03/20/2012US8138504 Silicon carbide semiconductor device and method of manufacturing the same
03/20/2012US8138492 Formation of carbon and semiconductor nanomaterials using molecular assemblies
03/20/2012US8138451 Heating device for heating semiconductor wafers in thermal processing chambers
03/20/2012US8138450 Method for cutting workpiece
03/20/2012US8138442 Wire electric discharge machining method, semiconductor wafer manufacturing method, and solar battery cell manufacturing method
03/20/2012US8138268 Adhesive composition, circuit connecting material, connecting structure for circuit member, and semiconductor device
03/20/2012US8138105 Rapid thermal processing using energy transfer layers
03/20/2012US8138104 Method to increase silicon nitride tensile stress using nitrogen plasma in-situ treatment and ex-situ UV cure
03/20/2012US8138103 Plasma CVD method, method for forming silicon nitride film and method for manufacturing semiconductor device
03/20/2012US8138102 Method of placing a semiconducting nanostructure and semiconductor device including the semiconducting nanostructure
03/20/2012US8138101 Manufacturing method for semiconductor device
03/20/2012US8138100 Microelectronic structure by selective deposition
03/20/2012US8138099 Chip package solder interconnect formed by surface tension
03/20/2012US8138098 Method of patterning stacked structure
03/20/2012US8138097 Method for processing semiconductor structure and device based on the same
03/20/2012US8138096 Plasma etching method
03/20/2012US8138095 Method of substrate treatment, process for producing semiconductor device, substrate treating apparatus, and recording medium
03/20/2012US8138094 Method for manufacturing mask
03/20/2012US8138093 Method for forming trenches having different widths and the same depth
03/20/2012US8138092 Spacer formation for array double patterning
03/20/2012US8138091 Polishing composition and method for high silicon nitride to silicon oxide removal rate ratios
03/20/2012US8138090 Method for forming fine patterns in semiconductor device
03/20/2012US8138089 Method and apparatus for measurement and control of photomask to substrate alignment
03/20/2012US8138088 Manufacturing method of structure by imprint
03/20/2012US8138087 Method of manufacturing an integrated circuit
03/20/2012US8138086 Method for manufacturing flash memory device
03/20/2012US8138085 Laser annealing for 3-D chip integration
03/20/2012US8138084 Electroless Cu plating for enhanced self-forming barrier layers
03/20/2012US8138083 Interconnect structure having enhanced electromigration reliability and a method of fabricating same
03/20/2012US8138082 Method for forming metal interconnects in a dielectric material
03/20/2012US8138081 Aluminum bump bonding for fine aluminum wire
03/20/2012US8138080 Integrated circuit package system having interconnect stack and external interconnect
03/20/2012US8138079 Method of wire bonding over active area of a semiconductor circuit
03/20/2012US8138078 Mechanically stable diffusion barrier stack and method for fabricating the same
03/20/2012US8138076 MOSFETs having stacked metal gate electrodes and method
03/20/2012US8138075 Systems and methods for the manufacture of flat panel devices
03/20/2012US8138074 ICs with end gates having adjacent electrically connected field poly
03/20/2012US8138073 Method for forming a Schottky diode having a metal-semiconductor Schottky contact
03/20/2012US8138072 Semiconductor structures and methods of manufacture
03/20/2012US8138071 Isotopically-enriched boron-containing compounds, and methods of making and using same
03/20/2012US8138070 Methods of using a set of silicon nanoparticle fluids to control in situ a set of dopant diffusion profiles
03/20/2012US8138069 Substrate pretreatment for subsequent high temperature group III depositions
03/20/2012US8138068 Method to form nanopore array
03/20/2012US8138067 Method and system for the synthesis of semiconductor nanowires
03/20/2012US8138066 Dislocation engineering using a scanned laser
03/20/2012US8138065 Solid-state imaging device and method for manufacturing the same
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