Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2012
03/15/2012WO2012033305A2 Method for manufacturing a semiconductor device
03/15/2012WO2012033301A2 Wafer inspection device and wafer inspection system comprising same
03/15/2012WO2012033299A2 Production method for a semiconductor element
03/15/2012WO2012033287A2 Cmp pad conditioner and method for manufacturing the same
03/15/2012WO2012033284A2 Chamber system adapted for a successive process
03/15/2012WO2012033258A1 Test contactor for semiconductor device and manufacturing method thereof
03/15/2012WO2012033211A1 Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method
03/15/2012WO2012033191A1 Plasma processing apparatus
03/15/2012WO2012033172A1 Semiconductor device production method and rinse
03/15/2012WO2012033135A1 Resin composition, and semiconductor device produced using resin composition
03/15/2012WO2012033114A1 Composition for water-repellent treatment of surface, and method for water-repellent treatment of surface of semiconductor substrate using same
03/15/2012WO2012033106A1 Memory cell block, manufacturing method therefor, memory device, and method for driving a memory device
03/15/2012WO2012033075A1 Organic semiconductor material, field-effect transistor, and manufacturing method therefor
03/15/2012WO2012033073A1 Organic semiconductor material, organic semiconductor composition, organic thin film, field-effect transistor, and manufacturing method therefor
03/15/2012WO2012033004A1 Resist pattern forming method
03/15/2012WO2012032960A1 Method for producing group iii nitride semiconductor light emitting element and group iii nitride semiconductor light emitting element
03/15/2012WO2012032959A1 Film for semiconductor device and semiconductor device
03/15/2012WO2012032958A1 Film for semiconductor device and semiconductor device
03/15/2012WO2012032942A1 Microwave introduction mechanism, microwave plasma source and microwave plasma treatment device
03/15/2012WO2012032937A1 Reconfigurable circuit
03/15/2012WO2012032915A1 Epitaxial substrate for semiconductor element, method for producing epitaxial substrate for semiconductor element, and semiconductor element
03/15/2012WO2012032904A1 Film exposure device and film exposure method
03/15/2012WO2012032856A1 Treatment liquid for inhibiting pattern collapse in microstructures, and microstructure manufacturing method using said treatment liquid
03/15/2012WO2012032855A1 Processing liquid for suppressing pattern collapse of microstructure, and method for producing microstructure using same
03/15/2012WO2012032854A1 Treatment liquid for inhibiting pattern collapse in microstructures, and microstructure manufacturing method using said treatment liquid
03/15/2012WO2012032840A1 Method for surface mounting electronic component, and substrate having electronic component mounted thereon
03/15/2012WO2012032831A1 Method of cutting out graph within specific time period
03/15/2012WO2012032803A1 Method for etching sapphire substrate
03/15/2012WO2012032790A1 Composition having acid-labile dissolution inhibiting group
03/15/2012WO2012032768A1 Mobile apparatus, exposure apparatus, exposure method, method for manufacturing flat-panel display, and method for manufacturing device
03/15/2012WO2012032749A1 Thin-film transistor substrate, method for producing same, and display device
03/15/2012WO2012032735A1 Semiconductor device and process for production thereof
03/15/2012WO2012032712A1 Solid state imaging device and method of producing same
03/15/2012WO2012032645A1 Form for wire winding of bonding wire for semiconductor
03/15/2012WO2012032629A1 Aluminum ribbon for ultrasonic bonding
03/15/2012WO2012032596A1 Plasma processing apparatus
03/15/2012WO2012032063A1 Methods and apparatus for patterning photovoltaic devices and materials for use with such devices
03/15/2012WO2012031998A1 Process for treating a substrate using a luminous flux of determined wavelength, and corresponding substrate
03/15/2012WO2012031869A1 Transistor having replacement metal gate and process for fabricating the same
03/15/2012WO2012031845A1 Method for producing a semiconductor component with a through-contact and semiconductor component with through-contact
03/15/2012WO2012031546A1 Mos device and fabricating method thereof
03/15/2012WO2012031453A1 Fluoride-containing cleaning liquid
03/15/2012WO2012011020A3 Aqueous alkaline cleaning compositions and methods of their use
03/15/2012WO2012002995A3 Thin films and methods of making them using cyclohexasilane
03/15/2012WO2011162977A3 Delta monolayer dopants epitaxy for embedded source/drain silicide
03/15/2012WO2011156289A3 Devices and methodologies related to cmos rf
03/15/2012WO2011156019A3 Group iv metal or semiconductor nanowire fabric
03/15/2012WO2011149638A3 Selective etch for silicon films
03/15/2012WO2011146835A3 Flexible, permeable, electrically conductive and transparent textiles and methods for making them
03/15/2012WO2011140541A3 Method of 1/f noise level reduction and manipulation in semiconductor based devices
03/15/2012WO2011139774A3 Method for forming an organic device
03/15/2012WO2011137373A4 Vertical inline cvd system
03/15/2012WO2011137009A3 Methods for extending the lifetime of pressure gauges coupled to substrate process chambers
03/15/2012WO2011134896A3 Trimming thinning
03/15/2012WO2011129636A3 Method for synthesizing nanoelectrode materials using an ultra-fast combustion method, and nanoelectrode materials synthesized by the method
03/15/2012WO2011126232A3 Atomic force microscope
03/15/2012WO2011113414A3 Method for sintering a semiconductor device using a low-temperature joining technique
03/15/2012WO2011107044A3 Waterproof structure for bonding pad, waterproof bonding pad and method for forming waterproof structure
03/15/2012WO2011087994A3 Devices, components and methods combining trench field plates with immobile electrostatic charge
03/15/2012US20120065906 High throughput semiconductor device testing
03/15/2012US20120064735 Solid-state laser lift-off apparatus and lift-off method
03/15/2012US20120064734 Substrate carrying mechanism, substrate processing apparatus, and semiconductor device manufacturing method
03/15/2012US20120064733 Method of manufacturing semiconductor device and substrate processing apparatus
03/15/2012US20120064732 Method for Determining Position of Auxiliary Pattern, Method for Manufacturing Photomask, and Method for Manufacturing Semiconductor Device
03/15/2012US20120064731 Silicon carbide semiconductor device and method for producing the same
03/15/2012US20120064730 Producing method of semiconductor device and substrate processing apparatus
03/15/2012US20120064729 Semiconductor device and method for manufacturing the same
03/15/2012US20120064728 Substrate depositing system and depositing method using the same
03/15/2012US20120064727 Substrate treatment equipment and method of treating substrate using the same
03/15/2012US20120064726 Plasma etching apparatus, plasma etching method, and semiconductor device manufacturing method
03/15/2012US20120064725 Naphthalene derivative, resist bottom layer material, and patterning process
03/15/2012US20120064724 Methods of Forming a Pattern of Semiconductor Devices
03/15/2012US20120064723 Method for fabricating semiconductor device using dual damascene process
03/15/2012US20120064722 Etching solution and trench isolation structure-formation process empolying the same
03/15/2012US20120064721 Polishing slurry and polishing method
03/15/2012US20120064720 Planarization control for semiconductor devices
03/15/2012US20120064719 Method and composition for depositing ruthenium with assistive metal species
03/15/2012US20120064718 Method of fabricating copper damascene and dual damascene interconnect wiring
03/15/2012US20120064717 Method for forming cvd-ru film and method for manufacturing semiconductor devices
03/15/2012US20120064716 Film forming apparatus and a barrier film producing method
03/15/2012US20120064715 Integration of bottom-up metal film deposition
03/15/2012US20120064714 Contact formation method incorporating a preventative etch step for reducing interlayer dielectric material flake defects
03/15/2012US20120064713 Ultra-low-k dual damascene structure and method of fabricating
03/15/2012US20120064712 Method for Reducing UBM Undercut in Metal Bump Structures
03/15/2012US20120064711 Copper bonding compatible bond pad structure and method
03/15/2012US20120064710 Method of manufacturing nonvolatile memory device
03/15/2012US20120064709 Method of forming semiconductor device
03/15/2012US20120064708 Film forming method, semiconductor device, manufacturing method thereof and substrate processing apparatus therefor
03/15/2012US20120064707 Methods of manufacturing semiconductor devices
03/15/2012US20120064706 Semicondcutor device and method of producing the same
03/15/2012US20120064705 Vaporizer
03/15/2012US20120064704 Method for fabricating semiconductor device with buried bit lines
03/15/2012US20120064703 Manufacturing method of semiconductor device
03/15/2012US20120064702 Method of fabricating polycrystalline silicon thin film
03/15/2012US20120064701 Crystalline semiconductor film manufacturing method and crystalline semiconductor film manufacturing apparatus
03/15/2012US20120064700 Semiconductor substrate, semiconductor device and method of manufacturing a semiconductor substrate
03/15/2012US20120064699 Methods and systems for spray pyrolysis with addition of volatile non-polar materials
03/15/2012US20120064698 Multiple section showerhead assembly
03/15/2012US20120064697 Method for packaging circuits
03/15/2012US20120064696 Wafer machining method
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