Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2012
03/28/2012CN1577080B Marker structure for alignment or overlay, mask pattern defined it and lithographic projector using the same
03/28/2012CN102396297A Solder bump formation on a circuit board using a transfer sheet
03/28/2012CN102396084A Method and apparatus for providing an electrical connection to graphene
03/28/2012CN102396071A Ldmos with self aligned vertical ldd and backside drain
03/28/2012CN102396070A Semiconductor device and method for manufacturing semiconductor device
03/28/2012CN102396069A Method for manufacturing silicon carbide semiconductor device
03/28/2012CN102396064A Semiconductor device and method of producing same
03/28/2012CN102396062A Methods of forming phase change materials and methods of forming phase change memory circuitry
03/28/2012CN102396061A Methods of depositing antimony-comprising phase change material onto a substrate and methods of forming phase change memory circuitry
03/28/2012CN102396060A Substrate support having side gas outlets and methods
03/28/2012CN102396059A Method for measuring electrical characteristics of semiconductor substrate
03/28/2012CN102396058A Detecting defects on a wafer
03/28/2012CN102396057A Method for producing a connection between a semiconductor component and semiconductor module resistant to high temperatures and temperature changes by means of a temperature impinging process
03/28/2012CN102396056A Method for manufacturing semiconductor device
03/28/2012CN102396055A Anneal wafer, method for manufacturing anneal wafer, and method for manufacturing device
03/28/2012CN102396054A Method for selective oxidation, device for selective oxidation, and computer-readable memory medium
03/28/2012CN102396053A Plasma processing apparatus and slow-wave plate used therein
03/28/2012CN102396052A Plasma processing apparatus, plasma processing method, and method of manufacturing chip provided with processed substrate
03/28/2012CN102396051A Method to thin a silicon-on-insulator substrate
03/28/2012CN102396050A Method and apparatus for removing contaminants from substrate
03/28/2012CN102396049A Metal oxide semiconductor devices having doped silicon-comprising capping layers and methods of manufacturing the same
03/28/2012CN102396048A Ion source cleaning in semiconductor processing systems
03/28/2012CN102395925A Acid-sensitive, developer-soluble bottom anti-reflective coatings
03/28/2012CN102395876A Method and apparatus for residue detection in the edge deleted area of a substrate
03/28/2012CN102395712A A process for electroplating of copper
03/28/2012CN102395705A Device and method for forming film
03/28/2012CN102395542A In-ga-zn-type oxide, oxide sintered body, and sputtering target
03/28/2012CN102395445A Device and method for simultaneously microstructuring and doping semiconductor substrates
03/28/2012CN102394555A Power converter, control circuit, and manufacturing method of control circuit
03/28/2012CN102394254A Crystal silicon solar battery dry etching clamp
03/28/2012CN102394246A Updatable crosswise double-diffusion metal oxide semiconductor transistor and manufacturing method thereof
03/28/2012CN102394245A Metal oxide semiconductor field-effect transistor and preparing method thereof
03/28/2012CN102394244A Insulated gate bipolar transistor and manufacturing method thereof
03/28/2012CN102394243A Floating gate structure of auto-registration flash memory and manufacture method thereof
03/28/2012CN102394242A Amorphous indium zinc oxide/carbon nanotube composite film transistor and preparation method thereof
03/28/2012CN102394240A TFT (thin film transistor)-LED (light-emitting diode) color array display base plate and manufacturing method thereof
03/28/2012CN102394238A Manufacturing procedure of electric conduction structure
03/28/2012CN102394235A Insulated gate bipolar transistor (IGBT) module and manufacturing method thereof
03/28/2012CN102394228A Method for enhancing read-in speed of floating body effect storage unit and semiconductor device
03/28/2012CN102394227A Manufacturing method of copper interconnection structure capable of reducing square resistance
03/28/2012CN102394226A Solar panel delivery and cache equipment
03/28/2012CN102394225A Method for measuring and calculating wafer bow
03/28/2012CN102394224A Preparation method of chloro silane-samaric sulfide film on single crystal silicon surface
03/28/2012CN102394223A Preparation method for preparing thin film transistor on plastic substrate
03/28/2012CN102394222A Method for preventing solid particle formation on wafer surface
03/28/2012CN102394221A 60 volts high voltage LDPMOS structure and manufacture method thereof
03/28/2012CN102394220A Method for improving carrier mobility of MOS (Metal Oxide Semiconductor) device and MOS device manufacturing method
03/28/2012CN102394219A Processing method of salicide block (SAB)
03/28/2012CN102394218A Titanium nitride film sputtering method and semiconductor device manufacturing method
03/28/2012CN102394217A Manufacturing method of metal- silicon nitride-metal capacitor
03/28/2012CN102394216A Metal-oxide-metal capacitor manufacturing method
03/28/2012CN102394215A Manufacturing method of multilayer metal-silicon oxide-metal capacitor
03/28/2012CN102394211A Control equipment of tungsten growth and method thereof
03/28/2012CN102393607A Positive photosensitive resin composition, and semiconductor device and display using same
03/28/2012CN102392216A Method for preparing high thermal stability double layer diffusion impervious layer material
03/28/2012CN102391822A Adhesive, adhesive for connecting circuit, connecting body and semiconductor device
03/28/2012CN102391809A Thermosetting die bonding film
03/28/2012CN102044457B Method for manufacturing metal bonding pad and corresponding metal bonding pad structure
03/28/2012CN102005432B Packaging structure with four pin-less sides and packaging method thereof
03/28/2012CN101996854B System and method for generating rolling codes
03/28/2012CN101989539B Capacitor manufacturing method
03/28/2012CN101946327B Tft, shift register, scanning signal line drive circuit, switch circuit, and display device
03/28/2012CN101934494B Chemical mechanical grinding method
03/28/2012CN101933129B Method for manufacturing electronic component device
03/28/2012CN101930947B CMOS (Complementary Metal-Oxide-Semiconductor) transistor and making method thereof
03/28/2012CN101924108B Semiconductor memory device and production method therefor
03/28/2012CN101911251B Apparatus and method for processing substrate
03/28/2012CN101901759B MOCVD (Metal-organic Chemical Vapor Deposition) growth method of nonpolar a-side GaN film on r-side based Al2O3 substrate
03/28/2012CN101897008B Semiconductor device
03/28/2012CN101894787B Method for constructing shallow trench isolation groove of wafer
03/28/2012CN101894746B Method for modifying chips by using electron beam radiation
03/28/2012CN101882587B Structure for achieving wire bonding and packaging and production method thereof
03/28/2012CN101882572B Method for realizing selectively growing Ge-containing material layer through low temperature
03/28/2012CN101872713B Electrostatic chuck device, plasma processing device and method for manufacturing electrostatic chuck device
03/28/2012CN101866836B Preparation method of nanometer silicon quantum dots and application thereof in film solar batteries
03/28/2012CN101859771B CMOS device structure with strain channel and formation method thereof
03/28/2012CN101849280B Showerhead, substrate processing apparatus, and plasma supplying method
03/28/2012CN101842885B Gold alloy wire for ball bonding
03/28/2012CN101809176B Iridium alloy excellent in hardness, processability and stain proofness
03/28/2012CN101807511B method for horizontal chip-level package of laser marking wafer
03/28/2012CN101802996B Stop detecting method for conveyor apparatus
03/28/2012CN101794790B Semiconductor device and method of manufacturing the same
03/28/2012CN101786260B Grinding method for eliminating corner effect in shallow trench isolation
03/28/2012CN101783316B Method of implantation
03/28/2012CN101777558B Semiconductor memory and manufacturing method thereof
03/28/2012CN101772838B Wire saw process
03/28/2012CN101770962B Structures and methods for improving solder bump connections in semiconductor devices
03/28/2012CN101752220B Loading lock device and vacuum processing system
03/28/2012CN101743628B Process for producing organic semiconductor element, organic semiconductor element, and organic semiconductor device
03/28/2012CN101740484B Method of forming through-silicon vias
03/28/2012CN101740337B Semiconductor carbon dioxide supercritical sweeping and cleaning machine
03/28/2012CN101728422B Light-emission device, method of manufacturing same, electro-optical device and electronic device
03/28/2012CN101728327B Semiconductor device and its fabrication process, and electronic apparatus
03/28/2012CN101728291B Method for determining height of insulating material in shallow trench
03/28/2012CN101687409B Method of duplicating nano pattern texture on object's surface
03/28/2012CN101681860B Method of transferring adhesive film
03/28/2012CN101681806B Data display, data display method, and program
03/28/2012CN101667550B Method for monitoring metal layer on gate structure
03/28/2012CN101662892B Ultra-thin copper foil with carrier, method for producing ultra-thin copper foil with carrier and printed circuit board
03/28/2012CN101661930B Electronic element wafer module and method for manufacturing electronic element wafer module and electronic information device