Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2012
03/08/2012WO2012029455A1 Sintered oxide and oxide semiconductor thin film
03/08/2012WO2012029454A1 Sintered oxide and oxide semiconductor thin film
03/08/2012WO2012029450A1 Silicon etchant and method for producing transistor by using same
03/08/2012WO2012029449A1 Exposure apparatus using microlens array therein, and optical member
03/08/2012WO2012029408A1 Oxide sintered body and oxide semiconductor thin film
03/08/2012WO2012029407A1 Sintered oxide and oxide semiconductor thin film
03/08/2012WO2012029402A1 Pickup method and pickup device
03/08/2012WO2012029381A1 Light emitting element and production method for same, production method for light-emitting device, illumination device, backlight, display device, and diode
03/08/2012WO2012029333A1 Production method for silicon thin film, production method for silicon thin-film solar cell, silicon thin film, and silicon thin-film solar cell
03/08/2012WO2012029292A1 Semiconductor substrate, insulated gate field effect transistor, and method for manufacturing semiconductor substrate
03/08/2012WO2012029291A1 Semiconductor substrate and insulated-gate field effect transistor
03/08/2012WO2012029220A1 Management apparatus for semiconductor manufacturing equipment, and computer program
03/08/2012WO2012029216A1 Method for manufacturing compound semiconductor
03/08/2012WO2012029194A1 Polishing device for columnar member and polishing method therefor
03/08/2012WO2012029130A1 Wafer tray, semiconductor wafer testing apparatus, and semiconductor wafer testing method
03/08/2012WO2012029000A1 Aqueous acidic solution and etching solution and method for texturizing surface of single crystal and polycrystal silicon substrates
03/08/2012WO2012028793A2 Treatment, before the bonding of a mixed copper oxide surface, by a plasma containing nitrogen and hydrogen
03/08/2012WO2012028792A1 Method for directly adhering two plates together, including a step for forming a temporary protective nitrogen layer
03/08/2012WO2012028738A1 Process for the production of photovoltaic cells
03/08/2012WO2012028705A1 Modular scanner, and method for operating same
03/08/2012WO2012028704A1 Substrate heating device
03/08/2012WO2012028593A1 Method for forming a dopant profile
03/08/2012WO2012028537A2 Photovoltaic cell having discontinuous conductors
03/08/2012WO2012028518A1 Process for producing a film, for example a single-crystal film, on a polymer substrate
03/08/2012WO2012028476A1 P-doped silicon layers
03/08/2012WO2012028415A1 Electrodeposition methods of gallium and gallium alloy films and related photovoltaic structures
03/08/2012WO2012028289A1 Method and device for producing a metallic contact structure for making electrical contact with a photovoltaic solar cell
03/08/2012WO2012028110A1 Semiconductor device and method for fabricating semiconductor buried layer
03/08/2012WO2012028109A1 Semicondunctor device and method of fabricating the same
03/08/2012WO2012028077A1 Ldmos device and method for manufacturing the same
03/08/2012WO2012028024A1 Epitaxial growth method of restraining the self-doping effect effectively
03/08/2012WO2012027988A1 Hybrid channel semiconductor device and manufacturing method thereof
03/08/2012WO2012027987A1 Surface treatment method for germanium-based part
03/08/2012WO2012027865A1 Manufacturing method of semicondcutor structure
03/08/2012WO2012027864A1 Semiconductor structure and method for manufacturing the same
03/08/2012WO2012027788A1 Systems and methods for detecting crystal defects in monocrystalline semiconductors
03/08/2012WO2012027763A1 Device for connecting a vacuum chamber to a vacuum valve
03/08/2012WO2012012026A3 Metal film deposition
03/08/2012WO2012009188A3 Neutron detector with wafer-to-wafer bonding
03/08/2012WO2012000685A3 Interposer and method for producing holes in an interposer
03/08/2012WO2011159060A3 Led-inspecting device and led-inspecting method using same
03/08/2012WO2011156695A8 Air gap isolation between the bit lines of a non-volatile memory and methods of manufacturing the same
03/08/2012WO2011154360A3 Integrated circuit having a junctionless depletion-mode fet device
03/08/2012WO2011152958A3 Tuning of polishing process in multi-carrier head per platen polishing station
03/08/2012WO2011151453A3 Method for dividing a large substrate into smaller ones and method for controllably selectively depositing a sealant material
03/08/2012WO2011146571A3 Tightly-fitted ceramic insulator on large-area electrode
03/08/2012WO2011145856A3 Wire tool
03/08/2012WO2011139524A3 Automatic generation of reference spectra for optical monitoring
03/08/2012WO2011137010A3 Apparatus for radial delivery of gas to a chamber and methods of use thereof
03/08/2012WO2011136603A3 Plasma processing apparatus
03/08/2012WO2011136512A3 High density plasma generating apparatus
03/08/2012WO2011133339A3 Monolayer dopant embedded stressor for advanced cmos
03/08/2012WO2011132971A3 Semiconductor chip including bump having barrier layer, and manufacturing method thereof
03/08/2012WO2011132913A3 Substrate processing apparatus
03/08/2012WO2011130205A3 Support system for a semiconductor device
03/08/2012WO2011129560A3 Fluid supply apparatus
03/08/2012WO2011126292A3 Method for repairing cnt-antistatic-processed working stage
03/08/2012WO2011110682A3 Photovoltaic cell with porous semiconductor regions for anchoring contact terminals, electrolitic and etching modules, and related production line
03/08/2012WO2011090907A3 Field-effect transistor device having a metal gate stack with an oxygen barrier layer
03/08/2012WO2011088061A8 Ventilation gas management systems and processes
03/08/2012US20120059502 Substrate transfer method and storage medium
03/08/2012US20120058649 Plasma processing apparatus and method thereof
03/08/2012US20120058648 Thermal reactor with improved gas flow distribution
03/08/2012US20120058647 Oxidation-promoting compositions, methods of forming oxide layers, and methods of fabricating semiconductor devices
03/08/2012US20120058646 Method of manufacturing a semiconductor device
03/08/2012US20120058645 Method of forming semiconductor device and semiconductor device
03/08/2012US20120058644 Resist stripping compositions and methods for manufacturing electrical devices
03/08/2012US20120058643 Aqueous metal polishing agent comprising a polymeric abrasiv containing pendant functional groups and its use in a cmp process
03/08/2012US20120058642 Silicon polishing compositions with high rate and low defectivity
03/08/2012US20120058641 Aqueous polishing agent comprising solid polymer particles and two complexing agents and its use in a process for polishing patterned and unstructured metal surfaces
03/08/2012US20120058640 Method for forming an interconnect structure
03/08/2012US20120058639 Semiconductor devices and methods of fabricating the same
03/08/2012US20120058638 Semiconductor device manufacturing method
03/08/2012US20120058637 Semiconductor device manufacturing method
03/08/2012US20120058636 Composition for removing a photoresist and method of manufacturing semiconductor device using the composition
03/08/2012US20120058635 Method for manufacturing semiconductor optical device
03/08/2012US20120058634 Method of fabricating complementary metal-oxide-semiconductor (cmos) device
03/08/2012US20120058633 Methods Of Forming Features Of Integrated Circuitry
03/08/2012US20120058632 Methods of forming a metal contact on a silicon substrate
03/08/2012US20120058631 Semiconductor Device and Manufacturing Method Thereof
03/08/2012US20120058630 Linear Cluster Deposition System
03/08/2012US20120058629 Methods of manufacturing vertical semiconductor devices
03/08/2012US20120058628 Multiple-Gate Transistors with Reverse T-Shaped Fins
03/08/2012US20120058627 Compound semiconductor deposition method and apparatus
03/08/2012US20120058626 Method for manufacturing nitride semiconductor crystal layer
03/08/2012US20120058625 Film for semiconductor device, and semiconductor device
03/08/2012US20120058624 Method and structure for fabricating solar cells using a thick layer transfer process
03/08/2012US20120058623 Method for Thinning Wafer
03/08/2012US20120058622 Method for producing bonded wafer
03/08/2012US20120058621 Fabrication of substrates with a useful layer of monocrystalline semiconductor material
03/08/2012US20120058620 Exposure mask and method for manufacturing semiconductor device using the same
03/08/2012US20120058619 Nand flash memory array having pillar structure and fabricating method of the same
03/08/2012US20120058617 Method for manufacturing silicon carbide semiconductor device
03/08/2012US20120058616 Methods of fabricating semiconductor devices using preliminary trenches with epitaxial growth
03/08/2012US20120058615 Method of Forming Shielded Gate Power Transistor Utilizing Chemical Mechanical Planarization
03/08/2012US20120058614 Pre-metal deposition clean process
03/08/2012US20120058613 Field effect transistor and method for manufacturing the same
03/08/2012US20120058612 Semiconductor device and method for manufacturing the same
03/08/2012US20120058611 Methods of forming and programming an electronically programmable resistor
03/08/2012US20120058610 Method of manufacturing semiconductor device