Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2012
03/21/2012CN101866831B Epitaxial substrate with low surface defect density and manufacturing method thereof
03/21/2012CN101861641B Plasma processing apparatus and method for plasma processing semiconductor substrate
03/21/2012CN101853842B Package structure for chip and method for forming the same
03/21/2012CN101847591B Method for packaging multiple chips on strip
03/21/2012CN101842870B Substrate processing apparatus
03/21/2012CN101840875B Image capturing device and image capturing control method for measuring aperture of contact hole
03/21/2012CN101840863B Semiconductor field effect transistors and fabrication thereof
03/21/2012CN101836282B Mos structures that exhibit lower contact resistance and methods for fabricating the same
03/21/2012CN101834134B Method for enhancing quality factor of metal-oxide semiconductor variable capacitance diode
03/21/2012CN101834128B Method for manufacturing semiconductor device
03/21/2012CN101834125B Method for preparing low-temperature polysilicon thin film material
03/21/2012CN101828253B Semiconductor device, usage of the same, and device containing the same
03/21/2012CN101826460B Dry etching method of semiconductor component
03/21/2012CN101819929B Method for manufacturing and separating floating gate of grid storage
03/21/2012CN101814453B Silicon slice alignment method for silicon through hole interconnection
03/21/2012CN101814432B Film for machining wafer
03/21/2012CN101809730B Processing method and semiconductor device manufacturing method
03/21/2012CN101809727B DMOS transistor and method for manufacturing the same
03/21/2012CN101802987B Method for manufacturing electronic device
03/21/2012CN101801605B Work polishing head, and polishing apparatus having the polishing head
03/21/2012CN101796615B Top panel and plasma processing apparatus using the same
03/21/2012CN101794774B Semiconductor integrated circuit
03/21/2012CN101794711B Method of manufacturing semiconductor elements
03/21/2012CN101789383B Method for making packaging substrate with recess structure
03/21/2012CN101788738B Thin-film transistor array substrate, method of manufacturing the same, and liquid crystal display device
03/21/2012CN101785086B Display device manufacturing method and laminated structure
03/21/2012CN101783305B Probe device
03/21/2012CN101772846B Semiconductor light emitting element and method for manufacturing the same
03/21/2012CN101743622B Forming a semiconductor device having a metal electrode and structure thereof
03/21/2012CN101728322B Method for manufacturing light-emitting component array
03/21/2012CN101728246B Method for forming deep trap of high-voltage component
03/21/2012CN101719495B 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
03/21/2012CN101710588B Top gate medium for carbon-based field-effect transistors, and preparation method thereof
03/21/2012CN101692421B Method for fabricating gate dielectrics of metal-oxide-semiconductor transistors
03/21/2012CN101689551B Method of fabricating a self-aligning damascene memory structure
03/21/2012CN101681828B Method for manufacturing semiconductor element
03/21/2012CN101666983B Fluid handling structure, lithographic apparatus and device manufacturing method
03/21/2012CN101663736B Fluid handling system for wafer electroless plating and associated methods
03/21/2012CN101652835B Method of annealing semiconductor device having silicon carbide substrate and semiconductor device
03/21/2012CN101647113B 半导体装置及其制造方法 Semiconductor device and manufacturing method
03/21/2012CN101645410B Apparatus for holding chips used for semiconductor chip manufacture process and heater
03/21/2012CN101641792B Semiconductor device and process for producing the same
03/21/2012CN101621009B Method for manufacturing body-contact structure of partially depleted SOI MOSFET
03/21/2012CN101616772B Sapphire substrates and methods of making same
03/21/2012CN101611484B Leadless semiconductor package and method of manufacture
03/21/2012CN101609796B Film forming method and method for manufacturing film solar battery
03/21/2012CN101604620B Method for making chemical preparation flow, method and device for manufacturing ic apparatus by using the same
03/21/2012CN101601122B Semiconductor wafter coated with a filled, spin-coatable material
03/21/2012CN101587886B Electronic device package and fabrication method thereof
03/21/2012CN101587681B Display device, method of laying out light emitting elements, and electronic device
03/21/2012CN101568572B Polyimide precursor and photosensitive resin composition containing polyimide precursor
03/21/2012CN101567344B Semiconductor chip encapsulating structure capable of reaching front-surface electric conduction and preparing method thereof
03/21/2012CN101558001B Substrate transfer apparatus
03/21/2012CN101548376B One-time-programmable logic bit with multiple logic elements
03/21/2012CN101543147B Wiring board and display unit
03/21/2012CN101542760B Nitride semiconductor light emitting device and process for producing the same
03/21/2012CN101536155B Plasma dielectric etch process including in-situ backside polymer removal for low-dielectric constant material
03/21/2012CN101533813B Contact bonding pad for reducing parasitic capacitance and manufacturing method thereof
03/21/2012CN101527313B Metal oxide semiconductor element and manufacturing method thereof
03/21/2012CN101521215B Lens module and method for fabricating the same
03/21/2012CN101512724B Design rules for on-chip inductors
03/21/2012CN101509796B Flow sensor and mass flow controller using the same
03/21/2012CN101501573B Electronic circuit device and method for fabricating the same
03/21/2012CN101499399B Substrate plasma processing apparatus and plasma processing method
03/21/2012CN101471291B Semiconductor device and method for manufacturing the device
03/21/2012CN101465320B Method for forming light-transmitting regions and image sensing apparatus
03/21/2012CN101464474B Semiconductor measuring probe bench with rotatable probe card
03/21/2012CN101431039B Wafer detection system
03/21/2012CN101416281B Back-gated semiconductor device with a storage layer and methods for forming thereof
03/21/2012CN101409233B Method for depositing group III/V compounds
03/21/2012CN101401211B Semiconductor structure used for n-FET application
03/21/2012CN101393902B Flip chip structure and method of manufacture
03/21/2012CN101390203B Interconnect structure and method of fabrication of same
03/21/2012CN101385402B Circuit board and process for producing the same
03/21/2012CN101383364B Image sensor and method for manufacturing same
03/21/2012CN101383281B Wafer grinding method and grinding apparatus
03/21/2012CN101373765B Semiconductor device having a resistor and methods of forming the same
03/21/2012CN101369531B A semiconductor device and a method of manufacture thereof
03/21/2012CN101361179B Manufacturing method of semiconductor device and semiconductor device
03/21/2012CN101354540B Exposure apparatus and method for producing device
03/21/2012CN101351518B Free radical-forming activator attached to solid and used to enhance CPM formulations
03/21/2012CN101350349B Semiconductor device and method for fabricating the same
03/21/2012CN101341579B Self-aligned trench field effect transistors with regrown gates and bipolar junction transistors with regrown base contact regions and methods of making
03/21/2012CN101290936B Semiconductor device and method for manufactruing of the same
03/21/2012CN101286456B Wiring board manufacturing method, semiconductor device manufacturing method and wiring board
03/21/2012CN101251719B Method for minimizing precipitation of developing reactant by reducing ph value mutation
03/21/2012CN101246875B Semiconductor device and method for fabricating the same
03/21/2012CN101241917B Semiconductor device, method of manufacturing semiconductor device, and electronic apparatus
03/21/2012CN101241883B Preparation method of a coating of gallium nitride
03/21/2012CN101233621B Method for passivating a substrate surface
03/21/2012CN101233578B Semiconductor memory
03/21/2012CN101228615B Para-position method
03/21/2012CN101226923B Semiconductor structure with field shield and method of forming the structure
03/21/2012CN101226335B Method for forming resist pattern, semiconductor device and production method thereof
03/21/2012CN101211754B Method for fabricating a semiconductor device
03/21/2012CN101208295B Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including the same
03/21/2012CN101202268B Semiconductor device for measuring an overlay error, method for measuring an overlay error, lithographic apparatus and device manufacturing method
03/21/2012CN101159305B High power light-emitting diode fluorescent powder coating process
03/21/2012CN101159231B Inductor and method for manufacturing the same
03/21/2012CN101157127B Silver-containing nanoparticles with replacement stabilizer