Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2012
03/27/2012DE202012100732U1 Bearbeitungsgerät für Wafer Processing apparatus for wafer
03/27/2012CA2475491C Lead-free tin-silver-copper alloy solder composition
03/22/2012WO2012037537A2 Sealed packaging for microelectromechanical systems
03/22/2012WO2012037536A2 Packaging to reduce stress on microelectromechanical systems
03/22/2012WO2012037465A1 Laser based processing of layered materials
03/22/2012WO2012037396A1 Polar regions for electrostatic de-chucking with lift pins
03/22/2012WO2012037376A2 Epitaxial growth temperature control in led manufacture
03/22/2012WO2012037312A2 Low profile dual arm vacuum robot
03/22/2012WO2012037278A2 Transfer chamber metrology for improved device yield
03/22/2012WO2012037216A2 Staged via formation from both sides of chip
03/22/2012WO2012037140A2 Integrated circuits with through-substrate vias
03/22/2012WO2012037136A2 Improved lateral uniformity in silicon recess etch
03/22/2012WO2012036963A2 Integrated platform for in-situ doping and activation of substrates
03/22/2012WO2012036923A2 Methods for controlling plasma constituent flux and deposition during semiconductor fabrication and apparatus for implementing the same
03/22/2012WO2012036911A1 Mechanism and method for alignment of a workpiece to a mask
03/22/2012WO2012036856A2 Multiple section showerhead assembly
03/22/2012WO2012036808A2 Smooth silicon-containing films
03/22/2012WO2012036760A1 Method, process and fabrication technology for high-efficency low-cost crytalline silicon solar cells
03/22/2012WO2012036752A2 An eeprom-based, data-oriented combo nvm design
03/22/2012WO2012036739A2 An eeprom-based, data-oriented combo nvm design
03/22/2012WO2012036685A1 Nanoscale switching device
03/22/2012WO2012036537A2 Apparatus and method for manufacturing graphene using a flash lamp or laser beam, and graphene manufactured by same
03/22/2012WO2012036522A2 Substrate structure for high-efficiency light emitting diodes and method of growing epitaxial base-layers thereon
03/22/2012WO2012036499A2 Thin film deposition apparatus
03/22/2012WO2012036491A2 Plasma treatment device using leakage current transformer
03/22/2012WO2012036444A2 Polishing pad for cmp
03/22/2012WO2012036393A2 Substrate-processing apparatus and substrate-transferring method
03/22/2012WO2012036346A1 Vapor deposition method of silicon-based nanoparticle thin film, silicon-based nanoparticle thin film, and a vapor deposition device of silicon-based nanoparticle thin film
03/22/2012WO2012036315A1 Method of forming pattern
03/22/2012WO2012036282A1 Magnetoresistive element and magnetic random-access memory
03/22/2012WO2012036252A1 Movable body apparatus, exposure apparatus, device manufacturing method, flat-panel display manufacturing method, and object exchange method
03/22/2012WO2012036247A1 Semiconductor device
03/22/2012WO2012036229A1 Semiconductor device and manufacturing method for same
03/22/2012WO2012036209A1 Pressure-sensitive adhesive compound, pressure-sensitive adhesive tape, and wafer treatment method
03/22/2012WO2012036207A1 Inductor
03/22/2012WO2012036206A1 Wafer storing device, and wafer cassette storage case
03/22/2012WO2012036205A1 Pattern formation method, and device production method
03/22/2012WO2012036198A1 Pattern formation method and device manufacturing method
03/22/2012WO2012036189A1 Conveyance device, substrate processing system, and attitude control mechanism
03/22/2012WO2012036177A1 Surface treatment method for wafer, and production method
03/22/2012WO2012036165A1 Semiconductor element
03/22/2012WO2012036149A1 Dicing film
03/22/2012WO2012036128A1 Polymer, resist material containing same, and method for forming pattern using same
03/22/2012WO2012036114A1 Etching device and etching method
03/22/2012WO2012036104A1 Method for manufacturing semiconductor device
03/22/2012WO2012036090A1 Patterning method, chemically-amplified resist composition, and resist film
03/22/2012WO2012036087A1 Polishing agent and polishing method
03/22/2012WO2012036079A1 Manufacturing method for semiconductor device
03/22/2012WO2012036043A1 Vacuum processing device
03/22/2012WO2012036017A1 Dielectric thin film element, anti-fuse element, and method for producing dielectric thin film element
03/22/2012WO2012036001A1 Memory device
03/22/2012WO2012036000A1 Positive photosensitive resin composition, method of creating resist pattern, and electronic component
03/22/2012WO2012035984A1 Semiconductor device and display device
03/22/2012WO2012035975A1 Liquid crystal display device and manufacturing method thereof
03/22/2012WO2012035965A1 Substrate processing system and display method of substrate processing device
03/22/2012WO2012035950A1 Carbamoyloxyadamantane derivative, polymer compound, and photoresist composition
03/22/2012WO2012035892A1 Drawing method and drawing device
03/22/2012WO2012035888A1 Silicon etching fluid and method for producing transistor using same
03/22/2012WO2012035880A1 Production method for semiconductor device
03/22/2012WO2012035852A1 Defect inspection method and device thereof
03/22/2012WO2012035843A1 Projection aligner
03/22/2012WO2012035842A1 High-frequency power supply device, plasma processing device and method for producing thin film
03/22/2012WO2012035731A1 Method for manufacturing semiconductor device and electrical equipment
03/22/2012WO2012035722A1 Processing device
03/22/2012WO2012035693A1 Automated warehouse and article removal method
03/22/2012WO2012035688A1 Semiconductor device, semiconductor device unit, and semiconductor device production method
03/22/2012WO2012035684A1 Semiconductor device and production method for same
03/22/2012WO2012035679A1 Semiconductor device and manufacturing method therefor
03/22/2012WO2012035651A1 Circuit device, frequency altering circuit, method for testing circuit device, and method for controlling frequency altering circuit
03/22/2012WO2012035493A1 Assembling and packaging a discrete electronic component
03/22/2012WO2012035416A2 Methods and apparatuses for generating patterns on workpieces
03/22/2012WO2012035281A1 Method for manufacturing a metal oxide semiconductor
03/22/2012WO2012035194A1 An apparatus and associated methods
03/22/2012WO2012035135A1 Semiconductor chip and method for producing the same
03/22/2012WO2012035000A1 Method for the removal of f2 and/or of2 from a gas
03/22/2012WO2012034978A1 Plant for fluorine production
03/22/2012WO2012034945A1 Method and apparatus for transporting support to be printed
03/22/2012WO2012034854A1 Device for etching semiconductor wafers having an inline process control
03/22/2012WO2012034853A1 Layer system of a silicon-based support and a heterostructure applied directly onto the support
03/22/2012WO2012034371A1 Mos transistor
03/22/2012WO2012034346A1 Transistor and fabricaing method thereof
03/22/2012WO2012034345A1 Graphene device and manufacturing method thereof
03/22/2012WO2012018581A3 Liquid chemical deposition apparatus and process and products therefrom
03/22/2012WO2011139073A3 Negative photoresist composition, and method for patterning device
03/22/2012WO2011118911A9 Pad for touch panel and touch panel using same
03/22/2012WO2011108884A3 Metal oxide thin film, preparation method thereof, and solution for metal oxide thin film
03/22/2012WO2009117670A3 Self-aligned barrier layers for interconnects
03/22/2012US20120072005 Substrate processing system, substrate placing position adjusting method and storage medium
03/22/2012US20120071037 Elastic contact device for electronic components with buckling columns
03/22/2012US20120071007 Substrate processing with reduced warpage and/or controlled strain
03/22/2012US20120071006 Starting material for use in forming silicon oxide film and method for forming silicon oxide film using same
03/22/2012US20120071005 Heat treating apparatus, heat treating method and storage medium
03/22/2012US20120071004 Stress-adjusting method of mos device
03/22/2012US20120071003 Vacuum Processing Apparatus, Vacuum Processing Method, and Micro-Machining Apparatus
03/22/2012US20120071002 Method of manufacturing semiconductor device and substrate processing apparatus
03/22/2012US20120071001 Vaporizing and feed apparatus and vaporizing and feed method
03/22/2012US20120071000 Manufacturing apparatus and method for semiconductor device
03/22/2012US20120070999 Replaceable substrate masking on carrier and method for processing a substrate
03/22/2012US20120070998 Composition for Wet Etching of Silicon Dioxide
03/22/2012US20120070997 Gas switching section including valves having different flow coefficient's for gas distribution system
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