Patents for H01J 27 - Ion beam tubes (3,716)
08/2014
08/07/2014US20140218729 Means of Introducing an Analyte into Liquid Sampling Atmospheric Pressure Glow Discharge
08/07/2014DE112012003090T5 Emitter, Gasfeldionenquelle und Ionenstrahlvorrichtung Emitter gas field ion source and ion beam apparatus
08/06/2014EP2761642A2 Inorganic materials, methods and apparatus for making same, and uses thereof
08/05/2014US8796649 Ion implanter
08/05/2014US8796639 Target for generating positive ions, method of fabricating the same, and treatment apparatus using the target
08/05/2014US8796614 Apparatuses for generating proton beam
07/2014
07/24/2014WO2014063970A3 Laminated materials, methods and apparatus for making same, and uses thereof
07/17/2014US20140197332 Ion generator
07/15/2014US8779383 Enriched silicon precursor compositions and apparatus and processes for utilizing same
07/15/2014US8779381 Aperture unit for a particle beam device
07/15/2014US8779380 Ion beam device
07/15/2014US8779361 Optical proximity sensor package with molded infrared light rejection barrier and infrared pass components
07/03/2014US20140184074 Ion source using field emitter array cathode and electromagnetic confinement
07/03/2014US20140183376 Ion source using heated cathode and electromagnetic confinement
07/03/2014US20140183349 Ion source using spindt cathode and electromagnetic confinement
07/03/2014US20140183348 Ion source with cathode having an array of nano-sized projections
07/01/2014US8766210 Variable energy charged particle systems
07/01/2014US8766209 Current limiter for high voltage power supply used with ion implantation system
07/01/2014US8765072 Hydroxyl generator
06/2014
06/26/2014WO2014097576A1 Grid assembly and ion beam etching apparatus
06/26/2014US20140175301 Ion Source, Nanofabrication Apparatus Comprising Such Source, and a Method for Emitting Ions
06/25/2014CN203674156U 一种用于诊断低能质子束流的电离室 An ionization chamber used for the diagnosis of low-energy proton beam
06/25/2014CN103887132A 注入装置的离子源和离子注入方法 Injection device the ion source and ion implantation method
06/25/2014CN102034665B 一种离子植入装置和一种通过植入氢化硼簇离子制造半导体的方法 And a method of manufacturing a semiconductor device by the implantation of boron hydride cluster ions of an ion implantation
06/24/2014US8760055 Electron cyclotron resonance ion generator
06/24/2014US8759788 Ion source
06/19/2014US20140166872 Ion Source Employing Secondary Electron Generation
06/19/2014US20140166870 Ion Source Having Increased Electron Path Length
06/11/2014EP2739764A2 Ion source
06/11/2014CN103858202A Ion source
06/10/2014US8748845 Ion sources, systems and methods
06/05/2014US20140151572 Gas mixture method and apparatus for generating ion beam
06/05/2014DE112012003887T5 lonenquelle und lonenstrahlvorrichtung, bei der diese verwendet wird ion source and lonenstrahlvorrichtung in which it is used
06/03/2014US8742362 Laser ion source
05/2014
05/30/2014WO2014081128A1 Linear accelerator
05/29/2014US20140145581 Ion Implanter
05/28/2014EP2735017A1 Charged particle source from a photoionized cold atom beam
05/28/2014CN103824742A 一种大功率离子源稳定长脉冲运行方法 One kind of stable long-pulse high power ion source operation method
05/20/2014US8729496 Sampling of confined spaces
05/20/2014US8729495 Methods and apparatus for detecting neutral chemical units via nanostructures
05/20/2014US8729494 Ion source with device for oxidising a sample
05/20/2014US8729465 Vacuum measurement device with ion source mounted
05/15/2014WO2014074414A1 Reducing glitching in an ion implanter
05/15/2014US20140135562 Target for generating positive ions, method of fabricating the same, and treatment apparatus using the target
05/15/2014DE112012003609T5 Ionenquelle Ion source
05/08/2014WO2014069094A1 Method for manufacturing semiconductor device, ion beam etching device, and control device
05/08/2014WO2014036130A3 Method and apparatus for a porous electrospray emitter
05/07/2014CN103779155A 等离子体源 Plasma source
05/07/2014CN103776816A 微型石英炉原子化器 Miniature quartz furnace atomizer
05/07/2014CN101764020B 离子管 Ion tube
05/01/2014WO2014065576A1 Apparatus for generating polarization beam for β-nmr
04/2014
04/30/2014CN103765545A Current limiter for high voltage power supply used with ion implantation system
04/29/2014US8710456 Linear jet ionizer
04/24/2014WO2014062515A1 Ion source having a shutter assembly
04/24/2014WO2014061625A1 Charged particle beam device equipped with cooling mechanism for charged particle beam source, and charged particle beam source
04/24/2014US20140110598 Ion source device and method for providing ion source
04/23/2014CN103748653A Emitter, gas field ionization ion source, and ion beam device
04/23/2014CN103748462A Looped ionization source
04/17/2014WO2014058642A1 Inductively coupled plasma ion source chamber with dopant material shield
04/17/2014US20140103793 Ion generation apparatus and electric equipment using the same
04/17/2014DE112012003062T5 lonenstrahlvorrichtung lonenstrahlvorrichtung
04/16/2014EP2720247A2 Improved ion source
04/16/2014CN103733296A Ion beam device
04/10/2014US20140099782 Method and apparatus for thermal control of ion sources and sputtering targets
04/10/2014US20140097752 Inductively Coupled Plasma ION Source Chamber with Dopant Material Shield
04/08/2014US8692217 Multi-source plasma focused ion beam system
04/08/2014US8692189 Parallel mass analysis
04/02/2014CN102354642B Field ionizing particle generator
03/2014
03/26/2014CN103681183A Ion generation method and ion source
03/26/2014CN103681179A Panel-shaped ionization chamber
03/26/2014CN103681178A Highly stable and long-life gas ion source
03/25/2014US8681471 Ion generator
03/25/2014US8680482 Alignment of an atom beam with an electric field in the production of a charged particle source
03/20/2014US20140077701 Ion generation apparatus and electric equipment using the same
03/20/2014US20140077077 Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currents
03/19/2014EP2707598A1 Plasma micro-thruster
03/18/2014US8674321 Microplasma ion source for focused ion beam applications
03/13/2014US20140070701 Advanced penning ion source
03/06/2014WO2014036130A2 Method and apparatus for a porous electrospray emitter
03/06/2014US20140061816 Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions
03/06/2014US20140061500 Atmospheric pressure ion source with exhaust system
03/05/2014CN103617941A Liquid metal two-stage cooling method for high current ion source electrode
03/04/2014US8664622 System and method of ion beam source for semiconductor ion implantation
03/04/2014US8664621 Device for generating an ion beam with magnetic filter
03/03/2014CA2820399A1 Atmospheric pressure ion source with exhaust system
02/2014
02/27/2014US20140055024 Ion source devices and methods
02/27/2014US20140054470 Active ionization control with interleaved sampling and neutralization
02/27/2014DE102013108850A1 Ionenquellenvorrichtungen und -verfahren Ion source apparatus and methods
02/25/2014US8658986 Ion source assembly
02/18/2014US8653475 Ion source
02/18/2014US8653435 Time-delay integration imaging method and apparatus using a high-speed in-pixel analog photon counter
02/13/2014WO2014025751A2 Non-radioactive ion source using high energy electrons
02/13/2014WO2014025611A1 Techniques for improving the performance and extending the lifetime of an ion source
02/13/2014US20140042337 Inductively coupled plasma ion source with multiple antennas for wide ion beam
02/11/2014CA2559847C Method and system for desorption electrospray ionization
02/06/2014US20140034844 Non-radioactive ion source using high energy electrons
02/04/2014US8642975 Ion generating device
01/2014
01/30/2014DE102013010589A1 Acceleration of ions used in e.g. cancer therapy, involves injecting gaseous mixture containing gas component containing hydrogen by nozzle into vacuum, irradiating pulsed laser light to gaseous mixture, ionizing, and accelerating
01/21/2014US8633452 Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source
01/15/2014CN103515172A Ion beam irradiation apparatus and operation method thereof
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