| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 12/17/2013 | US8609193 Poly(ethylene glycol) and poly(ethylene oxide) by initiated chemical vapor deposition |
| 12/17/2013 | US8609192 Method and device for controlling oxidizing-reducing of the surface of a steel strip running continuously through a radiant tubes furnace for its galvanizing |
| 12/17/2013 | US8609189 Method of forming carbon nanotubes from carbon-rich fly ash |
| 12/17/2013 | US8608903 Plasma processing apparatus and plasma processing method |
| 12/17/2013 | US8608902 Plasma processing apparatus |
| 12/17/2013 | US8608901 Process chamber cleaning method in substrate processing apparatus, substrate processing apparatus, and substrate processing method |
| 12/17/2013 | US8608900 Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes |
| 12/17/2013 | US8608856 Sealing part and substrate processing apparatus |
| 12/17/2013 | US8608855 Electrode cover and evaporation device |
| 12/17/2013 | US8608854 CVD device |
| 12/17/2013 | US8608853 Thermal reactor with improved gas flow distribution |
| 12/17/2013 | US8608852 Temperature controlled plasma processing chamber component with zone dependent thermal efficiencies |
| 12/17/2013 | US8608851 Plasma confinement apparatus, and method for confining a plasma |
| 12/17/2013 | US8608422 Particle sticking prevention apparatus and plasma processing apparatus |
| 12/17/2013 | US8607733 Atomic layer deposition apparatus and atomic layer deposition method |
| 12/17/2013 | US8607732 In-liquid plasma film-forming apparatus, electrode for in-liquid plasma, and film-forming method using in-liquid plasma |
| 12/17/2013 | US8607731 Cathode with inner and outer electrodes at different heights |
| 12/17/2013 | CA2566173C Al2o3 ceramic tools with diffusion bonding enhanced layer |
| 12/12/2013 | WO2013183660A1 Film-forming apparatus |
| 12/12/2013 | WO2013182880A2 Deposition systems having deposition chambers configured for in-situ metrology with radiation deflection and related methods |
| 12/12/2013 | WO2013182372A1 Plasma-assisted chemical gas separation method having increased plasma density and device for implementing the method |
| 12/12/2013 | US20130330935 REMOTE PLASMA BASED DEPOSITION OF SiOC CLASS OF FILMS |
| 12/12/2013 | US20130330912 Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device |
| 12/12/2013 | US20130330482 Carbon-doped silicon nitride thin film and manufacturing method and device thereof |
| 12/12/2013 | US20130330474 Apparatus for Coating a Substrate |
| 12/12/2013 | US20130330473 Atomic Layer Deposition of Transition Metal Thin Films Using Boranes as the Reducing Agent |
| 12/12/2013 | US20130330472 Substrate conveyance roller, thin film manufacturing device and thin film manufacturing method |
| 12/12/2013 | US20130330467 Method of applying a thin spray-on liner and robotic applicator therefor |
| 12/12/2013 | US20130330466 Spray Plume Position Feedback for Robotic Motion to Optimize Coating Quality, Efficiency, and Repeatability |
| 12/12/2013 | US20130327273 Substrate processing apparatus |
| 12/12/2013 | US20130327272 Diagnostic and control systems and methods for substrate processing systems using dc self-bias voltage |
| 12/12/2013 | US20130327271 Vapor deposition process and apparatus therefor |
| 12/12/2013 | DE102013204566A1 Substratträger und Halbleiterherstellungsvorrichtung Carrier substrate and semiconductor manufacturing apparatus |
| 12/12/2013 | DE102012209650A1 Plasma-unterstütztes chemisches Gasabscheidungs-Verfahren mit erhöhter Plasmadichte und Vorrichtung zur Umsetzung des Verfahrens Plasma-assisted chemical vapor deposition process with increased plasma density and device for implementation of the method |
| 12/12/2013 | DE102012108231A1 Coating strip-shaped substrate comprises transporting substrate strip in linear transport path without contacting sides of support rollers in coating zone, supporting strip in strip distance for coating source, and coating strip |
| 12/11/2013 | EP2671967A1 Diamond film for cutting-tools |
| 12/11/2013 | EP2671966A2 Method of forming thin film poly silicon layer |
| 12/11/2013 | EP2671965A2 Method of forming thin film polysilicon layer and method of forming thin film transistor |
| 12/11/2013 | EP2671260A2 Structure for forming solar cells |
| 12/11/2013 | EP2670883A1 Apparatus and method for atomic layer deposition |
| 12/11/2013 | EP2670882A1 Apparatus for atomic layer deposition |
| 12/11/2013 | EP2670881A1 Apparatus for atomic layer deposition |
| 12/11/2013 | EP2670880A1 Method for producing a three-dimensional structure and three-dimensional structure |
| 12/11/2013 | CN203333761U PECVD (Plasma Enhanced Chemical Vapor Deposition) furnace with double-high vacuum pump system |
| 12/11/2013 | CN203333760U Heating pipe positioning mechanism for coating machine |
| 12/11/2013 | CN203333759U Gas path system for PECVD (plasma enhanced chemical vapor deposition) coating at silicon solar cell manufacturing section |
| 12/11/2013 | CN203333758U Production equipment of silicon dioxide film |
| 12/11/2013 | CN203333757U Fault nano polymer pulling-out protective device of fine nano vacuum coating equipment |
| 12/11/2013 | CN203333740U Novel door body structure of vacuum coating equipment |
| 12/11/2013 | CN103443912A Vapor phase growth device |
| 12/11/2013 | CN103443904A Susceptor and method for manufacturing epitaxial wafer using the same |
| 12/11/2013 | CN103443903A Multiple level showerhead design |
| 12/11/2013 | CN103443658A Optical component and manufacturing method therefor |
| 12/11/2013 | CN103443327A Plasma enhanced chemical vapor deposition apparatus and method for controlling the same |
| 12/11/2013 | CN103443326A Plasma enhanced chemical vapor deposition apparatus and method for controlling the same |
| 12/11/2013 | CN103443325A Apparatus and process for atomic layer deposition |
| 12/11/2013 | CN103438348A Super-lubricity basic structure, multi-stage super-lubricity structure, component with super-lubricity basic structure or with multi-stage super-lubricity structure and forming method of super-lubricity basic structure |
| 12/11/2013 | CN103436863A Method for automatically generating tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) coating time |
| 12/11/2013 | CN103436862A MOCVD reactor and support shaft for MOCVD reactor |
| 12/11/2013 | CN103436861A Separating spray header device |
| 12/11/2013 | CN103436860A Gas passage and gas intake device |
| 12/11/2013 | CN103436859A Spray head and vapor deposition reaction chamber |
| 12/11/2013 | CN103436858A Spray header and vapor deposition reaction chamber |
| 12/11/2013 | CN103436857A Spray header and vapor deposition reaction chamber |
| 12/11/2013 | CN103436856A Reaction cavity |
| 12/11/2013 | CN103436855A Preparation method of diamond composite coating of micro milling cutter |
| 12/11/2013 | CN103436854A Preparation method of graphene and carbon nanotube composite material |
| 12/11/2013 | CN103436853A Fluorine-doped diamond-like film, preparation method thereof and impressing template comprising fluorine-doped diamond-like film |
| 12/11/2013 | CN103436836A Method of coating semiconductor processing apparatus with protective yttrium-containing coatings |
| 12/11/2013 | CN103435035A Device and method for continuous preparing and transferring graphene |
| 12/11/2013 | CN102677017B Loading and unloading mechanism, chemical vapor deposition (CVD) equipment and control method of CVD equipment |
| 12/11/2013 | CN102627413B Composite fiber preparation method of microwave-assisted diamond-like carbon film covered glass fiber |
| 12/11/2013 | CN102505112B Device and method for sticking graphene film |
| 12/11/2013 | CN102465283B Chuck and semiconductor processing device |
| 12/11/2013 | CN102296355B Guide shell made from carbon/carbon composite material and production method |
| 12/11/2013 | CN102162091B Low k precursors providing superior integration attributes |
| 12/11/2013 | CN101663417B Showerhead electrodes and showerhead electrode assemblies having low-particle performance for semiconductor material processing apparatuses |
| 12/11/2013 | CN101240446B Apparatus of supplying organometallic compound |
| 12/10/2013 | US8606731 Coating color database creating method, search method using the database, their system, program, and recording medium |
| 12/10/2013 | US8604231 Metal complexes for chemical vapour deposition of platinum |
| 12/10/2013 | US8603582 Non-stick masking fixtures and methods of preparing same |
| 12/10/2013 | US8603581 Manufacture of n-type chalcogenide compositions and their uses in photovoltaic devices |
| 12/10/2013 | US8603580 High stability and high capacity precursor vapor generation for thin film deposition |
| 12/10/2013 | US8603575 Thin-film absorber formation method |
| 12/10/2013 | US8603293 Plasma processing apparatus and method |
| 12/10/2013 | US8603250 System and method for deposition of a material on a substrate |
| 12/10/2013 | US8603249 Lift pin driving device and manufacturing apparatus having same |
| 12/10/2013 | US8603248 System and method for varying wafer surface temperature via wafer-carrier temperature offset |
| 12/10/2013 | US8603247 Apparatus for counting particles in a gas |
| 12/10/2013 | US8603246 Growth reactor systems and methods for low-temperature synthesis of nanowires |
| 12/10/2013 | US8603245 Systems and methods for sealing in site-isolated reactors |
| 12/10/2013 | US8603244 Vapor deposition device |
| 12/10/2013 | US8601978 Substrate processing apparatus, and magnetic recording medium manufacturing method |
| 12/10/2013 | US8601976 Gas supply system for semiconductor manufacturing facilities |
| 12/10/2013 | CA2527732C Ultraviolet (uv) and plasma assisted metalorganic chemical vapor deposition (mocvd) system |
| 12/05/2013 | WO2013181521A2 Source reagent-based delivery of fluid with high material flux for batch deposition |
| 12/05/2013 | WO2013181216A1 Apparatus for cvd and ald with an elongate nozzle and methods of use |
| 12/05/2013 | WO2013180204A1 Method and device for fabricating protective film for light emitting element |
| 12/05/2013 | WO2013180058A1 Semiconductor laminate structure and semiconductor element |
| 12/05/2013 | WO2013180057A1 Semiconductor layered structure and semiconductor element |