Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
---|
11/27/2013 | CN103409729A Method for preparing diamond-like film by virtue of high-power laser irradiation |
11/27/2013 | CN103409728A Method for preparing graphene through chemical vapor deposition |
11/27/2013 | CN103408598A Organoruthenium complex, and method for production of ruthenium thin film using the ruthenium complex |
11/27/2013 | CN103408316A A connection method for a C/SiC composite material |
11/27/2013 | CN102796998B Method for operating and controlling position of nano-grating deposition substrate in vacuum vessel and device therefor |
11/27/2013 | CN102543884B Method for manufacturing one time programmable (OTP) device |
11/27/2013 | CN102465280B Double-side growth type MOCVD reactor |
11/27/2013 | CN102465277B Reverse radial MOCVD reactor |
11/27/2013 | CN102443769B Method for recovering physical vapor deposition (PVD) false sheets |
11/27/2013 | CN102251227B Diffuser support |
11/27/2013 | CN101903562B Apparatus and method for manufacturing photoelectric converting element, and photoelectric converting element |
11/27/2013 | CN101802254B Chemical vapor deposition reactor |
11/27/2013 | CN101504980B Non-aqueous electrolyte secondary battery negative electrode material, making method, lithium ion secondary battery, and electrochemical capacitor |
11/26/2013 | US8594310 Intelligent call transfer between call centers |
11/26/2013 | US8592862 Gallium nitride semiconductor structures with compositionally-graded transition layer |
11/26/2013 | US8592606 Liquid precursor for depositing group 4 metal containing films |
11/26/2013 | US8592324 Method for forming laminated structure including amorphous carbon film |
11/26/2013 | US8592015 Container having improved ease of discharge product residue, and method for the production thereof |
11/26/2013 | US8592004 Film deposition method |
11/26/2013 | US8591993 Epitaxial wafer manufacturing apparatus and manufacturing method |
11/26/2013 | US8591991 Fabrication method and fabrication apparatus for fabricating metal oxide thin film |
11/26/2013 | US8591989 SiCN film formation method and apparatus |
11/26/2013 | US8591988 Method of fabrication of anchored nanostructure materials |
11/26/2013 | US8591824 Heat treating furnace |
11/26/2013 | US8591809 Substrate transfer container, gas purge monitoring tool, and semiconductor manufacturing equipment with the same |
11/26/2013 | US8591697 Transmission electron microscopy sample etching fixture |
11/26/2013 | US8591657 Substrate processing apparatus and method of manufacturing semiconductor device |
11/26/2013 | US8591656 Compound semiconductor manufacturing device, compound semiconductor manufacturing method, and jig for manufacturing compound semiconductor |
11/26/2013 | US8591655 Apparatus for the preparation of film |
11/26/2013 | US8591654 Device for manufacturing sic single crystal and method for the same |
11/26/2013 | US8591223 Evaporator for organic materials and method for evaporating organic materials |
11/26/2013 | US8590485 Small form factor plasma source for high density wide ribbon ion beam generation |
11/26/2013 | US8590484 Semiconductor device manufacturing method and substrate processing apparatus |
11/26/2013 | DE202013010250U1 Glanzgradeinstellung von Kunststoffsubstraten mit metallischen Finish Gloss level setting of plastic substrates with metallic finish |
11/21/2013 | WO2013173152A1 Rotating disk reactor with ferrofluid seal for chemical vapor deposition |
11/21/2013 | WO2013172941A1 Late-stage customization of steel |
11/21/2013 | WO2013172456A1 Plasma processing apparatus and plasma processing method |
11/21/2013 | WO2013172359A1 Gas barrier film, manufacturing method for gas barrier film, and electronic device |
11/21/2013 | WO2013172203A1 Solar cell manufacturing method and plasma processing apparatus |
11/21/2013 | WO2013171988A1 Film deposition method and film deposition apparatus |
11/21/2013 | WO2013171975A1 Method for manufacturing nitride semiconductor device |
11/21/2013 | WO2013171360A1 Powder particle coating using atomic layer deposition cartridge |
11/21/2013 | WO2013170854A1 Dlc coating for an optical ir component and optical ir components having said dlc coating |
11/21/2013 | WO2013108189A3 Chemical vapour deposition of ptsi from organometallic complexes of pt |
11/21/2013 | WO2013084160A3 Graphene composite and a method of manufacturing a graphene composite |
11/21/2013 | US20130309522 Sliding member and method for manufacturing the same |
11/21/2013 | US20130309419 Ceramic Coating Deposition |
11/21/2013 | US20130309417 Methods for forming multi-component thin films |
11/21/2013 | US20130309416 Atmospheric pressure plasma treatment apparatus and atmospheric pressure plasma treatment method |
11/21/2013 | US20130309415 Systems and methods for modulating step coverage during conformal film deposition |
11/21/2013 | US20130309402 Interdigitated substrate support assembly for synthesis of large area thin films |
11/21/2013 | US20130309401 Atomic layer deposition apparatus and atomic layer deposition method |
11/21/2013 | US20130306240 System and Method for Controlling Plasma With an Adjustable Coupling to Ground Circuit |
11/21/2013 | US20130305988 Inline Capacitive Ignition of Inductively Coupled Plasma Ion Source |
11/21/2013 | US20130305985 Plasma processing device |
11/21/2013 | DE112012000579T5 Anlage, Verfahren und Reaktionskammer System, method and reaction chamber |
11/21/2013 | DE102012010603B4 Beschichteter Dichtungsartikel Lined rubber products |
11/21/2013 | DE102012009801A1 Device for coating electrical conductive fiber material used for e.g. artificial heart valve, applies high frequency electrical alternating voltage to fiber that is moved through separation chamber |
11/21/2013 | DE102007004744B4 Verfahren und Vorrichtung zur partiellen Beschichtung von Bauteilen Method and apparatus for the partial coating of components |
11/20/2013 | EP2558614B1 Method for producing a coating on an extrusion die |
11/20/2013 | EP2262043B1 Method for manufacturing at least one micro-component with a single mask |
11/20/2013 | EP2145987B1 Fabrication method of a group III nitride crystal substance |
11/20/2013 | EP2072149B1 Method for manufacturing process gases for vapour deposition |
11/20/2013 | EP1551768B1 Process for manufacturing a gallium rich gallium nitride film |
11/20/2013 | EP1533834B1 Vapor phase epitaxial apparatus and vapor phase epitaxial method |
11/20/2013 | CN203295602U Device for coating antireflection film |
11/20/2013 | CN203295601U Equipment for preparing diamond-coated woodworking double-edge end milling cutters in large batches |
11/20/2013 | CN203295599U Jig structure for preventing product port from being evaporated |
11/20/2013 | CN103403857A Thin heated substrate support |
11/20/2013 | CN103403841A Gas phase growth device and gas phase growth method |
11/20/2013 | CN103403837A Microwave plasma reactors and substrates for synthetic diamond manufacture |
11/20/2013 | CN103403222A Coating layer for cutting tool |
11/20/2013 | CN103403221A Apparatus for coating a substrate |
11/20/2013 | CN103403220A Device and process for coating a substrate |
11/20/2013 | CN103397312A Control method and system for low pressure chemical vapor deposition (LPCVD) technical production environment |
11/20/2013 | CN103397311A PECVD (Plasma Enhanced Chemical Vapor Deposition) flexible solar battery manufacturing equipment |
11/20/2013 | CN103397310A Spray head and reaction chamber |
11/20/2013 | CN103397309A Air-inlet device and reaction chamber |
11/20/2013 | CN103397308A Spray head used for MOCVD equipment |
11/20/2013 | CN103397307A Method to prepare silicon-containing film |
11/20/2013 | CN103397306A Process for producing silicon oxide film from organoaminosilane precursors |
11/20/2013 | CN102732834B Apparatus for preparing two-dimensional nanometer film |
11/20/2013 | CN102560423B Carbon plate lifting table of automatic loading and unloading system of plate plasma enhanced chemical vapor deposition (PECVD) device |
11/20/2013 | CN102496658B Preparation method for antireflective film of solar cell |
11/20/2013 | CN102264639B Composite carbon and manufacturing method therefor |
11/20/2013 | CN102108495B Method for cleaning reaction cavity for growing films of compounds of group III elements and group V elements |
11/20/2013 | CN102027603B Process for depositing organic materials |
11/20/2013 | CN101384747B Dual mode ion source for ion implantation |
11/19/2013 | US8586456 Use of CL2 and/or HCL during silicon epitaxial film formation |
11/19/2013 | US8586195 Method for forming an acoustic mirror with reduced metal layer roughness and related structure |
11/19/2013 | US8586151 Process for the preparation of photoluminescent nanostructured silicon thin films using radio frequency plasma discharge |
11/19/2013 | US8586140 Film formation method for forming hafnium oxide film |
11/19/2013 | US8586139 Method for producing electrode composite material |
11/19/2013 | US8585877 Multi-step deposition control |
11/19/2013 | US8585862 Plasma processing device and plasma discharge state monitoring device |
11/19/2013 | US8585823 CVD apparatus having a rotating heater |
11/19/2013 | US8585820 Abatement of reaction gases from gallium nitride deposition |
11/19/2013 | US8584612 UV lamp assembly of degas chamber having rotary shutters |
11/19/2013 | US8584611 In-line vacuum coating system |
11/19/2013 | CA2634297C Article having patterned decorative coating |