Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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02/18/2014 | US8652297 Symmetric VHF plasma power coupler with active uniformity steering |
02/18/2014 | US8652260 Apparatus for holding semiconductor wafers |
02/18/2014 | US8652259 Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition |
02/18/2014 | US8652258 Substrate treatment device |
02/18/2014 | US8651049 Plasma processing apparatus |
02/13/2014 | WO2014024404A1 Production method for epitaxial silicon wafer and epitaxial silicon wafer |
02/13/2014 | WO2014023414A1 Heating element for a planar heater of a mocvd reactor |
02/13/2014 | WO2014023413A1 Terminal for mechanical support of a heating element |
02/13/2014 | WO2014022872A2 Apparatus and method for the plasma coating of a substrate, in particular a press platen |
02/13/2014 | WO2013173896A8 A cylinder for application on an internal combustion engine |
02/13/2014 | US20140045340 Method and apparatus for processing a semiconductor workpiece |
02/13/2014 | US20140044875 In-line deposition chamber design for multi-stage physical vapor deposition |
02/13/2014 | US20140044874 Graphene manufacturing system and the method thereof |
02/13/2014 | US20140044873 Single-walled carbon nanotube (swcnt) fabrication by controlled chemical vapor deposition (cvd) |
02/13/2014 | US20140044863 Deposition apparatus capable of measuring residual amount of deposition material and method of measuring the residual amount of the deposition material using the deposition apparatus |
02/13/2014 | US20140043615 System, apparatus and method for emittance control and suppressing stray light |
02/13/2014 | US20140043216 Boron nitride antistiction films and methods for forming same |
02/13/2014 | US20140041590 Canister |
02/13/2014 | US20140041589 Heating element for a planar heater of a mocvd reactor |
02/13/2014 | US20140041588 Method for Supplying Gas With Flow Rate Gradient Over Substrate |
02/13/2014 | US20140041585 Exhaust gas processing conduit, manufacturing apparatus and gas flow guiding method thereof |
02/13/2014 | US20140041186 Method for loading and unloading a cassette |
02/13/2014 | DE102013213897A1 Verfahren und Vorrichtung zum Bilden von amorphen, harten Kohlenstoffbeschichtungen Method and apparatus for forming the amorphous hard carbon coatings |
02/13/2014 | DE102012219897A1 Mehrlagige Beschichtung für eine Form Multilayer coating for a form |
02/13/2014 | DE102012214284A1 Gleitelement, insbesondere Kolbenring, mit einer widerstandsfähigen Beschichtung Sliding element, in particular piston ring, with a durable coating |
02/13/2014 | DE102012110052B3 Batch plant e.g. vacuum coating plant for processing tubular substrates for solar heat collectors, has carrier and substrate carrier train that are arranged to form prism or truncated pyramid shaped structure in process chamber |
02/13/2014 | DE102009014067B4 Plasmabearbeitungsvorrichtung The plasma processing apparatus |
02/12/2014 | EP2695966A1 Insulator material for use in RRAM |
02/12/2014 | EP2694701A1 Deposition reactor with plasma source |
02/12/2014 | EP2694700A1 Atomic layer deposition with plasma source |
02/12/2014 | EP2694699A1 Method for depositing one or more polycrystalline silicon layers on substrate |
02/12/2014 | CN203429251U Novel PECVD (plasma enhanced chemical vapour deposition) radio frequency electrode contact |
02/12/2014 | CN203429250U Table board for placing vacuum high-temperature baking oven |
02/12/2014 | CN203429249U Device for automatically assembling/disassembling chip in PECVD (Plasma Enhanced Chemical Vapor Deposition) workpiece rack |
02/12/2014 | CN203429248U Waterproof device of amorphous silicon thin film solar PECVD (plasma-enhanced chemical vapor deposition) substrate loading box |
02/12/2014 | CN203429247U Manufacturing device of PECVD (plasma enhanced chemical vapor deposition) flexible solar cells |
02/12/2014 | CN203429246U Leakproof structure, reaction chamber and semiconductor processing equipment |
02/12/2014 | CN103582956A A chemical bath deposition apparatus for fabrication of semiconductor films through roll-to-roll processes |
02/12/2014 | CN103582719A Compositions and processes for depositing carbon-doped silicon-containing films |
02/12/2014 | CN103582718A Organic ruthenium compound for chemical vapor deposition raw material and production method for said organic ruthenium compound |
02/12/2014 | CN103579589A Graphene-silicon-graphene composite material, preparation method of graphene-silicon-graphene composite material, lithium ion battery and preparation method of lithium ion battery |
02/12/2014 | CN103579419A Grapheme/MoS2/Si heterojunction thin-film solar cell and manufacturing method thereof |
02/12/2014 | CN103572262A Light CVD film manufacturing method and light CVD film manufacturing apparatus |
02/12/2014 | CN103572261A 石墨加热器 Graphite heater |
02/12/2014 | CN103572260A Heating device, CVD equipment reaction chamber with heating device, and CVD equipment |
02/12/2014 | CN103572259A Film forming apparatus and film forming method |
02/12/2014 | CN103572258A Vapor delivery device, methods of manufacture and methods of use thereof |
02/12/2014 | CN103572257A Surface low-friction orthodontics arch wire and preparation method thereof |
02/12/2014 | CN103572256A Device for preparing P type doped amorphous silicon carbon film |
02/12/2014 | CN103572255A Metal chemical vapor deposition equipment and reaction chamber thereof |
02/12/2014 | CN103572254A Heat exchange jacekt |
02/12/2014 | CN103572253A Reaction cavity and semiconductor device with same |
02/12/2014 | CN103572252A Device and technology for double-glow chemical vapor deposition |
02/12/2014 | CN103572251A Non-oxygen containing silicon-based films and methods of forming the same |
02/12/2014 | CN103572250A 表面包覆切削工具 Coated cutting tool |
02/12/2014 | CN103572249A Method and device for forming amorphous carbon coating |
02/12/2014 | CN103572248A Diamond producing method and DC plasma enhanced CVD apparatus |
02/12/2014 | CN103572247A Method for preparing thin layer graphene on surface of metal catalyst |
02/12/2014 | CN103572246A Mask for deposition and method for alignment thereof |
02/12/2014 | CN103572245A Mask module and organic vapor deposition device and thermal evaporation device using mask module |
02/12/2014 | CN103571476A Cerium-doped Group-III molybdate light-emitting film, preparation method and application thereof |
02/12/2014 | CN103571460A Titanium-ion-containing co-doped zinc oxide light-emitting film and preparation method and application thereof |
02/12/2014 | CN103569998A Device and method for preparing carbon nanotube |
02/12/2014 | CN103567735A Surface coating cutting device |
02/12/2014 | CN103567520A Blind groove diamond coating milling cutter |
02/12/2014 | CN102618851B Tool for compacting thick-walled hollow carbon/carbon (C/C) composite product |
02/12/2014 | CN102308368B Chemical vapor deposition flow inlet elements and methods |
02/12/2014 | CN102234791B Gas distribution shower module and coating equipment |
02/12/2014 | CN102002685B Film formation apparatus and film formation method |
02/12/2014 | CN101974735B Inductively coupled plasma processing apparatus |
02/12/2014 | CN101798673B Film forming method, panel manufacturing device and annealing device |
02/12/2014 | CN101748405B Transparent conducting film and preparation method thereof, solar battery and flat panel display device |
02/11/2014 | US8647992 Flowable dielectric using oxide liner |
02/11/2014 | US8647714 Nickel film forming method |
02/11/2014 | US8647707 Method of forming pattern and method of manufacturing organic light emitting device |
02/11/2014 | US8647706 Film forming apparatus and method of manufacturing light emitting device |
02/11/2014 | US8647704 Method for the translation of a white light color palette to a black light color palette |
02/11/2014 | US8647580 Gas abatement |
02/11/2014 | US8647485 Process kit shield for plasma enhanced processing chamber |
02/11/2014 | US8647438 Annular baffle |
02/11/2014 | US8647437 Apparatus, tool and methods for depositing annular or circular wedge coatings |
02/11/2014 | US8646409 Plasma booster for plasma treatment installation |
02/11/2014 | US8646408 Flux monitor |
02/11/2014 | US8646407 Film formation apparatus for semiconductor process and method for using the same |
02/11/2014 | US8646405 Deposition mask and method of fabricating the same |
02/06/2014 | WO2014022219A1 Chemical precursor bubbler |
02/06/2014 | WO2014021365A1 Semiconductor structure, semiconductor device, and method for producing semiconductor structure |
02/06/2014 | WO2014021259A1 Nitride semiconductor element structure and method for producing same |
02/06/2014 | WO2014021220A1 Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium |
02/06/2014 | WO2014020776A1 SiC MOLDED BODY AND METHOD FOR PRODUCING SiC MOLDED BODY |
02/06/2014 | WO2014019571A1 Method for producing protective layers containing silicides and/or oxidized silicides on substrates |
02/06/2014 | US20140038421 Deposition Chamber and Injector |
02/06/2014 | US20140038395 Vapor deposition device and vapor deposition method |
02/06/2014 | US20140038393 Method and system for ion-assisted processing |
02/06/2014 | US20140037983 Titanium aluminide components and methods for manufacturing the same from articles formed by consolidation processes |
02/06/2014 | US20140037865 Migration and plasma enhanced chemical vapor deposition |
02/06/2014 | US20140037857 Methods for applying fixed images to electrochemical devices |
02/06/2014 | US20140036340 Thin film stack with surface-conditioning buffer layers and related methods |
02/06/2014 | US20140033980 Deposition apparatus |
02/06/2014 | US20140033978 Method of Parallel Shift Operation of Multiple Reactors |