| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 12/05/2013 | WO2013180005A1 Rolled film formation device |
| 12/05/2013 | WO2013179886A1 Resin container coating device |
| 12/05/2013 | WO2013179837A1 Semiconductor device and method for manufacturing same |
| 12/05/2013 | WO2013179561A1 Film-forming apparatus and film-forming method |
| 12/05/2013 | WO2013179489A1 Substrate placing apparatus and substrate placing method |
| 12/05/2013 | WO2013178563A2 Multilayer structure as reflector |
| 12/05/2013 | WO2013136052A3 Chemical vapor deposition process for depositing zinc oxide coatings, method for forming a conductive glass article and the coated glass articles produced thereby |
| 12/05/2013 | US20130324390 Scalable lead zirconium titanate (pzt) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material |
| 12/05/2013 | US20130323860 Substrate support providing gap height and planarization adjustment in plasma processing chamber |
| 12/05/2013 | US20130323859 System and method of monitoring and controlling atomic layer deposition of tungsten |
| 12/05/2013 | US20130323422 Apparatus for CVD and ALD with an Elongate Nozzle and Methods Of Use |
| 12/05/2013 | US20130323421 Film forming method and film forming device |
| 12/05/2013 | US20130323420 Apparatus and method for atomic layer deposition on a surface |
| 12/05/2013 | US20130323407 Method for coating with an evaporation material |
| 12/05/2013 | US20130323157 Apparatus and Methods for the Synthesis of Graphene by Chemical Vapor Deposition |
| 12/05/2013 | US20130319333 Injector and Material Layer Deposition Chamber Including the Same |
| 12/05/2013 | DE102012108742A1 Transporting a band-shaped material in a vacuum treatment plant, comprises e.g. treating band-shaped material in many vacuum treatment sections, and transporting the band-shaped material in a transport path within vacuum treatment section |
| 12/05/2013 | DE102012104583A1 Pressure element, used in electric power steering system of motor vehicle, comprises hard material coating that is applied on pressure element by chemical or physical vapor deposition and contains carbon as alloying element and hydrogen |
| 12/05/2013 | DE102007058052B4 Vakuumbeschichtungsanlage Vacuum coating system |
| 12/05/2013 | DE10043600B4 Vorrichtung zum Abscheiden insbesondere kristalliner Schichten auf einem oder mehreren, insbesondere ebenfalls kristallinen Substraten Device for depositing in particular crystalline layers on one or more, in particular likewise crystalline substrates |
| 12/04/2013 | EP2669249A1 Organoaminodisilane precursors and methods for depositing films comprising same |
| 12/04/2013 | EP2669248A1 Organoaminodisilane precursors and methods for depositing films comprising same |
| 12/04/2013 | CN203320124U Device for promoting productivity of aluminum oxide coating equipment |
| 12/04/2013 | CN203320123U Polycrystalline silicon preparation device |
| 12/04/2013 | CN103430327A Systems and methods for charging solar cell layers |
| 12/04/2013 | CN103430290A 干洗方法 Dry Cleaning Methods |
| 12/04/2013 | CN103429786A Apparatus and method for coating using hot wire |
| 12/04/2013 | CN103429785A Coated body and method for the production thereof |
| 12/04/2013 | CN103428908A Silicon shell tungsten core heater strip and preparation method |
| 12/04/2013 | CN103422075A Method for forming film layer |
| 12/04/2013 | CN103422074A Reaction chamber for sedimentation technology and regulating method for temperature of tray therein |
| 12/04/2013 | CN103422073A Pallet and plasma processing equipment for induction heating |
| 12/04/2013 | CN103422072A Loading bench used in vacuum processing device |
| 12/04/2013 | CN103422071A Vacuum cavity chamber capable of rapidly changing gas-homogenizing mode |
| 12/04/2013 | CN103422070A PECVD device, carrier board visual identification system and method |
| 12/04/2013 | CN103422069A Low K precursors having superior integration attributes |
| 12/04/2013 | CN103422068A Manufacture equipment and method for polysilicon film |
| 12/04/2013 | CN103421494A Titanium and magnesium codoped alumina luminescent thin film and preparation method and application thereof |
| 12/04/2013 | CN103421361A Modified carbon nanometer coating used for scale inhibition of inner member of rectifying tower |
| 12/04/2013 | CN102421935B 锶钌氧化物界面 Strontium ruthenium oxide interface |
| 12/04/2013 | CN102315283B Antireflective film for solar panel and preparation method thereof |
| 12/04/2013 | CN102312212B Scanning coating device and scan coating assembly |
| 12/04/2013 | CN102292795B Device and method for coating a substrate using CVD |
| 12/04/2013 | CN102110639B Method for preparing diffusion impervious layer |
| 12/04/2013 | CN102078921B Surface-treated mold and method of producing surface-treated mold |
| 12/04/2013 | CN101812677B Plasma-reinforced chemical vapor deposition process cavity |
| 12/04/2013 | CN101346492B Apparatus for an optimized plasma chamber grounded electrode assembly |
| 12/03/2013 | US8598047 Substrate processing apparatus and producing method of semiconductor device |
| 12/03/2013 | US8597732 Thin film depositing method |
| 12/03/2013 | US8597731 Method for applying a diamond layer onto a graphite substrate |
| 12/03/2013 | US8597487 Method of producing aluminum structure and aluminum stucture |
| 12/03/2013 | US8597464 Inductively coupled plasma reactor with multiple magnetic cores |
| 12/03/2013 | US8597463 Inductively coupled plasma processing apparatus |
| 12/03/2013 | US8597462 Movable chamber liner plasma confinement screen combination for plasma processing apparatuses |
| 12/03/2013 | US8597430 Modular system and process for continuous deposition of a thin film layer on a substrate |
| 12/03/2013 | US8597429 Manufacturing apparatus and method for semiconductor device |
| 12/03/2013 | US8597428 Vacuum sealing radio frequency (RF) and low frequency conducting actuator |
| 12/03/2013 | CA2582573C Alloyed tungsten produced by chemical vapour deposition |
| 12/02/2013 | DE202013104902U1 Bandsubstratbehandlungsanlage Tape substrate treatment plant |
| 11/28/2013 | WO2013177326A1 Silicon precursors for low temperature ald of silicon-based thin-films |
| 11/28/2013 | WO2013177292A1 Titanium-containing precursors for vapor deposition |
| 11/28/2013 | WO2013177284A1 Hafnium-containing precursors for vapor deposition |
| 11/28/2013 | WO2013176986A2 Vapor delivery apparatus |
| 11/28/2013 | WO2013176475A1 Organic vapor deposition apparatus |
| 11/28/2013 | WO2013176408A1 Nozzle unit and substrate-processing system including the nozzle unit |
| 11/28/2013 | WO2013176132A1 Method for manufacturing glass substrate and glass substrate |
| 11/28/2013 | WO2013176048A1 Method for feeding raw material and device for feeding raw material |
| 11/28/2013 | WO2013176029A1 Patterned roll and manufacturing method therefor |
| 11/28/2013 | WO2013175562A1 Semiconductor manufacturing apparatus |
| 11/28/2013 | WO2013175470A1 Nanoshell, method of fabricating same and uses thereof |
| 11/28/2013 | WO2013173896A1 A cylinder for application on an internal combustion engine |
| 11/28/2013 | US20130316544 Method for replacing chlorine atoms on a film layer |
| 11/28/2013 | US20130316167 Copper substrate for deposition of graphene |
| 11/28/2013 | US20130316108 Gas-barrier plastic molded product and manufacturing process therefor |
| 11/28/2013 | US20130316096 Device and Method for Vacuum Coating |
| 11/28/2013 | US20130316095 Retaining device for substrates and method for coating a substrate |
| 11/28/2013 | US20130316094 Rf-powered, temperature-controlled gas diffuser |
| 11/28/2013 | US20130316079 Device and Process for Coating a Substrate |
| 11/28/2013 | US20130316077 Mechanically fluidized silicon deposition systems and methods |
| 11/28/2013 | US20130312855 Vessel with Filter |
| 11/28/2013 | US20130312666 Apparatus for depositing thin film |
| 11/28/2013 | US20130312665 Method and apparatus |
| 11/28/2013 | US20130312663 Vapor Delivery Apparatus |
| 11/28/2013 | DE102012208492A1 Dehnmessstreifenanordnung Dehnmessstreifenanordnung |
| 11/28/2013 | DE102012104475A1 Device useful for depositing layer on substrate comprises processing chamber having susceptor heated by heating device for receiving substrate, gas inlet element, gas outlet element and gas-tight reactor housing which is outwardly arranged |
| 11/28/2013 | DE102012010151A1 Holder, used to hold electrostatic substrate, includes identical layered structure that includes support and electrode and cover layers, where geometric ratio of support surface to thickness of layered structure has specified value |
| 11/27/2013 | EP2666883A1 Method for modifying a border area of a substrate |
| 11/27/2013 | EP2666544A1 Process for deposition and characterization of a coating |
| 11/27/2013 | EP2666181A1 Plasma treatment device for producing coatings |
| 11/27/2013 | CN203307432U Special gas pipeline device and PECVD (plasma enhanced chemical vapor deposition) equipment |
| 11/27/2013 | CN203307420U Hinge mechanism for vacuum coating equipment |
| 11/27/2013 | CN103415911A Catalytic chemical vapor deposition device, and deposition method and catalyst body surface treatment method using same |
| 11/27/2013 | CN103415650A Apparatus and method for atomic layer deposition |
| 11/27/2013 | CN103415649A Atomic layer deposition carousel with continuous rotation and methods of use |
| 11/27/2013 | CN103415648A Apparatus for atomic layer deposition |
| 11/27/2013 | CN103415647A Microwave power delivery system for plasma reactors |
| 11/27/2013 | CN103413860A Preparation method of local region back surface passivated crystalline silicon cell |
| 11/27/2013 | CN103413839A AlGaN based ultraviolet detector with double layers of passive films and manufacturing method thereof |
| 11/27/2013 | CN103409731A Spray head and vapor-deposition reaction chamber |
| 11/27/2013 | CN103409730A MOCVD (Metal Organic Chemical Vapor Deposition) equipment and spraying head thereof |