Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
05/2014
05/14/2014EP2730677A1 Vacuum film formation device
05/14/2014EP2730676A1 Method for deposition of silicon nitride layers
05/14/2014EP2730675A1 Device for generating a gas mixture
05/14/2014EP2730674A1 Delivery device for thin film deposition
05/14/2014EP2729594A1 Method and device for continuously coating substrates
05/14/2014CN203593784U 一种石墨框 Graphite frame
05/14/2014CN203593622U 一种在碳化硅衬底上制备石墨烯的装置 An apparatus for producing graphene on a silicon carbide substrate
05/14/2014CN103797563A 具备原料浓度检测结构的原料气化供给装置 With the concentration of the raw material evaporation supply apparatus of a raw material detection structure
05/14/2014CN103797156A 用于线性沉积腔室中的气体分布与等离子体应用的方法与设备 Linear deposition method for the gas distribution chamber and the plasma application of the device
05/14/2014CN103797155A 用于直线型大面积等离子体反应器中均匀处理的气体输送和分配 For gas transmission and distribution of the linear type large area uniform plasma processing reactor
05/14/2014CN103797154A 用于真空处理设备的旋转台滑架 Sets the carriage for rotating the vacuum processing apparatus
05/14/2014CN103796765A 功能膜制造方法和功能膜 The method of manufacturing a functional film and a functional film
05/14/2014CN103794718A 阻变存储器中钨氧化物变阻材料的制备方法 Tungsten oxide resistive switching memory varistor material preparation methods
05/14/2014CN103794658A 复合膜高效晶体硅太阳能电池及其制造方法 Composite film crystalline silicon solar cell efficiency and manufacturing method
05/14/2014CN103794459A 用于等离子处理腔室的气体喷淋头及其涂层形成方法 And coating the gas shower head for plasma processing method for forming a chamber
05/14/2014CN103794458A 用于等离子体处理腔室内部的部件及制造方法 Inside the plasma processing chamber components, and a method for producing
05/14/2014CN103794445A 用于等离子体处理腔室的静电夹盘组件及制造方法 The plasma processing chamber assembly, and the electrostatic chuck manufacturing method for
05/14/2014CN103792974A 一种可快速精细调节温度场空间分布的加热盘及控制方法 A quick way to fine-tune the spatial distribution of temperature field of the heating plate and control method
05/14/2014CN103789750A 等离子增强化学气相沉积装置 Plasma enhanced chemical vapor deposition apparatus
05/14/2014CN103789749A 一种钢纤维的腐蚀防护方法 A method of corrosion protection of steel fibers
05/14/2014CN103789748A 一种面向工艺腔室气流分布调节的cvd设备喷淋头 Oriented process chamber air distribution adjustable shower head cvd equipment
05/14/2014CN103789747A 一种气体喷淋头及制作该气体喷淋头的方法 A gas shower head and method for making the gas sprinkler
05/14/2014CN103789746A 一种形成钻石膜的成核方法 A nucleating diamond film formation method
05/14/2014CN103789745A 一种带隙宽度可调的铝铟氧化物薄膜材料及其制备方法 Aluminum indium oxide thin film material and a method for preparing the band gap width adjustable
05/14/2014CN103789744A 一种原位生长碳纳米管增强银基电接触材料的制备方法 An in-situ method of growing carbon nanotubes enhance the preparation of silver-based electrical contact materials
05/14/2014CN103787335A 一种针尖型硅纳米线的制备方法 Preparation method of tip-type silicon nanowires
05/14/2014CN103014617B 薄膜形成装置 A thin film forming apparatus
05/14/2014CN102037547B 形成含纳米丛集介电层的方法及包括上述介电层的装置 The method for forming a dielectric layer containing nanoclusters and includes means for the dielectric layer
05/14/2014CN101298457B 较高级硅烷的制备方法 Advanced than the preparation of silane
05/13/2014US8722202 Method and system for enhancing heat transfer of turbine engine components
05/13/2014US8722143 Method to prepare superhydrophobic surfaces on solid bodies by rapid expansion solutions
05/13/2014US8721836 Plasma processing with preionized and predissociated tuning gases and associated systems and methods
05/13/2014US8721835 Gas injection device with uniform gas velocity
05/13/2014US8721791 Showerhead support structure for improved gas flow
05/13/2014US8721790 Film deposition apparatus
05/13/2014CA2582312C A method for the manufacture of a coating
05/08/2014WO2014071061A1 Coating inspection method
05/08/2014WO2014070051A1 A porous coating applied onto an aerial article
05/08/2014WO2014069915A1 Oxygen sensor having porous ceramic coating layer formed thereon and method for forming porous ceramic coating layer
05/08/2014WO2014069487A1 Method for forming thin film
05/08/2014WO2014069309A1 Plasma source for plasma cvd device and method for manufacturing article using plasma source
05/08/2014WO2014068981A1 Substrate processing device and control device for substrate processing device
05/08/2014WO2014067972A1 Anti-corrosion coatings
05/08/2014WO2014066966A1 Valve for internal combustion engines
05/08/2014WO2012173980A3 Passive compensation for temperature-dependent wafer gap changes in plasma processing systems
05/08/2014US20140127425 Plasma deposition apparatus and plasma deposition method
05/08/2014US20140127424 Method and Apparatus for Bonding Functional Groups to the Surface of a Substrate
05/08/2014US20140127406 Automatic supply device for an industrial metal vapor generator
05/08/2014US20140127405 Atomic layer deposition of metal carbide films using aluminum hydrocarbon compounds
05/08/2014US20140127404 Apparatus For Spatial Atomic Layer Deposition With Recirculation And Methods Of Use
05/08/2014US20140124064 Raw material vaporizing and supplying apparatus
05/08/2014US20140123900 Gas shower device having gas curtain and apparatus for depositing film using the same
05/08/2014US20140123899 Vapor deposition apparatus
05/08/2014US20140123897 Plasma generation apparatus, cvd apparatus, and plasma-treated particle generation apparatus
05/08/2014US20140123896 Probe assembly for a fluid bed reactor
05/08/2014DE102012202715B4 Vakuumprozessanlage mit einer Einrichtung zur Druckseparation Vacuum processing system having a device for pressure separation
05/08/2014DE102012112780B3 Optically effective layer system, useful as solar absorber layer system, comprises substrate, functional layer assembly, and assembly comprising cover layer made of titanium, oxygen, silicon and oxygen-containing material
05/08/2014DE102012106078A1 Beschichtungsvorrichtung und Verfahren zur Beschichtung eines Substrats Coating apparatus and method for coating a substrate
05/07/2014EP2726646A1 Cartridge reactor for production of materials via the chemical vapor deposition process
05/07/2014EP2726645A1 Deposition cartridge for production materials via the chemical vapor deposition process
05/07/2014EP2726644A1 Jet-spouted bed reactor having a specific profile
05/07/2014EP2726643A1 Plasma treatment of hollow bodies
05/07/2014EP2726427A1 Temperable and non-temperable transparent nanocomposite layers
05/07/2014CN203582972U 一种连续材料表面常压等离子体多级处理装置 A continuous multi-stage atmospheric plasma surface treatment device
05/07/2014CN203582971U 一种提高mocvd外延片均匀性的石墨盘 A way to improve the uniformity of the epitaxial wafer mocvd graphite plate
05/07/2014CN203582970U 一种承载治具及等离子体增强化学气相沉积设备 One kind of bearing fixtures and plasma enhanced chemical vapor deposition equipment
05/07/2014CN203582969U 一种塔舟式石墨舟皿 One kind of tower-type graphite boat boat
05/07/2014CN203582968U 一种制备p型掺杂非晶硅碳薄膜的装置 Means the preparation of a carbon thin film of amorphous silicon p-type doped
05/07/2014CN203582967U 沉积装置 Deposition apparatus
05/07/2014CN1950538B 围绕真空反应室的中央轴排列的可分别控制的电磁线圈组成的阵列 An array of electromagnetic coils can be controlled around the central axis of the vacuum reaction chamber arrangement consisting of
05/07/2014CN103782663A 等离子体产生装置、cvd装置及等离子体处理粒子生成装置 The plasma generating device, cvd apparatus and a plasma processing apparatus of particle production
05/07/2014CN103782375A 第iii族氮化物外延基板及其制造方法 Iii first nitride epitaxial substrate and manufacturing method
05/07/2014CN103782366A 涂敷电子设备和相关方法 Coating an electronic device and an associated method
05/07/2014CN103782113A 基于双氮化物复合材料的太阳能选择性吸收剂及其制备方法 Solar selective absorbers based on its preparation method double nitride composites
05/07/2014CN103781947A 外延生长用基板和晶体层叠结构体 The crystal growth substrate and the epitaxial layered structure
05/07/2014CN103781937A 成膜材料、使用该成膜材料的密封膜、及其用途 Film-forming material, the sealing film forming material, its use
05/07/2014CN103781935A 角落切除遮罩 Corner cut mask
05/07/2014CN103781738A 光催化材料和包含这种材料的窗玻璃或者光电池 Photocatalytic materials and glazing or photovoltaic cells containing such material
05/07/2014CN103781737A 带碱金属阻挡层的玻璃基板及带透明导电性氧化物膜的玻璃基板 A glass substrate and a glass substrate with a transparent conductive oxide film with the alkali metal barrier layer
05/07/2014CN103781209A 一种应用化学气相沉积技术的纳米电热板及其制造方法 One application of chemical vapor deposition techniques and the method for manufacturing a hot plate nano
05/07/2014CN103779524A 一种电池隔膜及其制备方法 A battery separator and its preparation method
05/07/2014CN103779457A 一种可获得极宽短波红外发光谱的半导体材料及其制备方法 An extremely wide shortwave infrared spectra of semiconductor material and preparation method available
05/07/2014CN103774230A 一种无氨化制备氮化镓纳米线的方法 Preparation of a non-ammoniated method of GaN nanowires
05/07/2014CN103774143A 一种保护膜的真空镀膜方法 A protective film vacuum deposition method
05/07/2014CN103774142A 等离子体反应器室的碳化钨涂布的金属部件及涂布方法 The coating method of metal components and the plasma reactor chamber of the tungsten carbide coated
05/07/2014CN103774141A 一种面对等离子体的钨涂层部件的制备方法 A method for preparing the face of tungsten plasma coating components
05/07/2014CN103774121A 一种用于非晶硅沉积的控制系统 A control system for depositing amorphous silicon
05/07/2014CN103774120A 一种用于pecvd系统的匀气装置 Gas absorption device for pecvd system
05/07/2014CN103774119A 用于非晶硅薄膜均匀镀膜的沉积夹具 Fixture for depositing amorphous silicon thin uniform coating
05/07/2014CN103774118A 基片承载装置及金属有机化学气相沉积装置 Substrate carrying device and metal organic chemical vapor deposition apparatus
05/07/2014CN103774117A 一种化学气相沉积设备的反应系统及沉积设备 The reaction system and a chemical vapor deposition apparatus of the deposition apparatus
05/07/2014CN103774116A 用于非晶硅电池沉积的等离子体气相沉积设备与方法 Plasma vapor deposition apparatus and method for deposition of amorphous silicon cells
05/07/2014CN103774115A 化学气相沉积装置 Chemical vapor deposition apparatus
05/07/2014CN103774114A 氧化物膜的制备方法 Preparation of an oxide film
05/07/2014CN103774113A 一种制备六方氮化硼薄膜的方法 A method of hexagonal boron nitride thin films
05/07/2014CN103774112A 一种钨涂层铜合金部件及其制备方法 A coating of copper tungsten alloy components and preparation method
05/07/2014CN103770223A 纳米金刚石涂层刀具及其在口腔修复陶瓷加工中的应用 Nano-diamond coated tool and its application in the processing of dental ceramics
05/07/2014CN102719803B 一种石墨烯透明薄膜的制备和转移方法 Graphite ethylenically transparent film preparation and transfer methods
05/07/2014CN102703881B Pecvd载板导轨 Pecvd carrier rail
05/07/2014CN102365387B 气体屏蔽膜、包含它的电子器件、气体屏蔽袋、以及气体屏蔽膜的制造方法 The gas barrier film, which contains an electronic device, the gas barrier bag, and a method of manufacturing a gas barrier film
1 ... 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 ... 719