| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
|---|
| 09/08/2009 | US7585386 Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method |
| 09/08/2009 | US7585380 Having fine and uniform microstructure; sputtering target and in electrical components such as capacitors |
| 09/08/2009 | US7585371 Substrate susceptors for receiving semiconductor substrates to be deposited upon |
| 09/08/2009 | US7585370 Gas-purged vacuum valve |
| 09/08/2009 | CA2281788C Method of producing silicon oxide film, method of manufacturing semiconductor device, semiconductor device, display, and infrared irradiating device |
| 09/03/2009 | WO2009107763A1 Metallic sputtering target material |
| 09/03/2009 | WO2009107733A1 Film forming source, deposition apparatus and apparatus for manufacturing organic el element |
| 09/03/2009 | WO2009107669A1 Thin film of metal silicon compound and process for producing the thin film of metal silicon compound |
| 09/03/2009 | WO2009107548A1 Deposition method and manufacturing method of light-emitting device |
| 09/03/2009 | WO2009107542A1 Method for manufacturing light emitting device and manufacturing apparatus used in the method |
| 09/03/2009 | WO2009107525A1 Thin film of aluminum nitride and process for producing the thin film of aluminum nitride |
| 09/03/2009 | WO2009107498A1 Sb-te alloy powder for sintering, process for production of the powder, and sintered target |
| 09/03/2009 | WO2009107157A2 Method for producing a cermet-based spectrally selective coating for the receiver tube of a solar concentrator, and material thus obtained |
| 09/03/2009 | WO2009106654A1 Method for obtaining films of semiconductor materials including an intermediate band |
| 09/03/2009 | WO2009106113A1 Method for producing structured surfaces |
| 09/03/2009 | WO2006117625A3 Equipment and method for ion implantation processing of medical devices |
| 09/03/2009 | US20090221107 Deposition Method and Manufacturing Method of Light-Emitting Device |
| 09/03/2009 | US20090221058 Potentiometric biosensor for detection of lactate in food and forming method thereof |
| 09/03/2009 | US20090220802 Highly reflective layer system, method for producing the layer system and device for carrying out the method |
| 09/03/2009 | US20090220801 Method and apparatus for growth of high purity 6h-sic single crystal |
| 09/03/2009 | US20090220777 Sputter Deposition Method, Sputter Deposition System and Chip |
| 09/03/2009 | US20090220773 Coating of a thermally and erosively stressed functional component |
| 09/03/2009 | US20090220706 Film-Formation Method and Manufacturing Method of Light-Emitting Device |
| 09/03/2009 | US20090218697 Electronic device, method of manufacture of the same, and sputtering target |
| 09/03/2009 | US20090218593 Nitride semiconductor light emitting device and method of frabicating nitride semiconductor laser device |
| 09/03/2009 | US20090218311 Layer-structured fuel cell catalysts and current collectors |
| 09/03/2009 | US20090218219 Manufacturing Apparatus |
| 09/03/2009 | US20090218218 Magnet unit for magnetron sputtering system |
| 09/03/2009 | US20090218217 Sputtering apparatus for depositing a higher permittivity dielectric film |
| 09/03/2009 | US20090218215 Laminate for forming a substrate with wires, substrate with wires and methods for producing them |
| 09/03/2009 | US20090218214 Backside coating prevention device, coating chamber comprising a backside coating prevention device, and method of coating |
| 09/03/2009 | US20090218213 SPRAYED Si- OR Si:Al-TARGET WITH LOW IRON CONTENT |
| 09/03/2009 | US20090217975 Glassless Solar Power Module Comprising at Least One Flexible Thin-Film Solar Cell and Method for Producing the Same |
| 09/03/2009 | US20090217876 Coating System For A Ceramic Evaporator Boat |
| 09/03/2009 | DE202009004157U1 Fluidenergiemaschine mit Beschichtung Fluid Power engine with coating |
| 09/03/2009 | DE102008011774A1 Lock device for the continuous introduction and removal of containers e.g. bottles into and from a vacuum treatment chamber, comprises chamber elements, which are combined to conveyor and comprises chambers for containers, and lock plate |
| 09/03/2009 | DE102008011185A1 Verfahren zur Herstellung einer dotierten organischen halbleitenden Schicht A process for the preparation of a doped organic semiconducting layer |
| 09/03/2009 | CA2688453A1 Thin film of aluminum nitride and process for producing the thin film of aluminum nitride |
| 09/02/2009 | EP2096192A1 Backside coating prevention device. |
| 09/02/2009 | EP2096190A1 Coating apparatus for coating a web |
| 09/02/2009 | EP2096189A1 Sprayed Si- or Si:Al-target with low iron content |
| 09/02/2009 | EP2096188A1 Sputtering target and oxide semiconductor film |
| 09/02/2009 | EP2094495A2 Organic vapor jet deposition using an exhaust |
| 09/02/2009 | EP1785505B1 Barrier film for flexible copper substrate and sputtering target for forming barrier film |
| 09/02/2009 | EP1644186A4 Heat treatable coated article with dual layer overcoat |
| 09/02/2009 | EP1622760A4 Coated article with niobium zirconium inclusive layer(s) and method of making same |
| 09/02/2009 | CN201301340Y Planar magnetic control spluttering cathode capable of improving utilization ratio of target |
| 09/02/2009 | CN201301339Y High-power planar magnetic control spluttering cathode |
| 09/02/2009 | CN201301338Y Cooling device of sputtering machine |
| 09/02/2009 | CN201301337Y Cathode structure of vacuum sputtering machine |
| 09/02/2009 | CN201301336Y Plate-attachment prevention structure of sputtering machine |
| 09/02/2009 | CN201301335Y Auxiliary device for sputtering equipment to replace target |
| 09/02/2009 | CN101522940A Sb-Te base alloy sinter sputtering target |
| 09/02/2009 | CN101522939A Plasma display panel manufacturing method and manufacturing device |
| 09/02/2009 | CN101521988A Preparation method of metal base copper-clad plate and copper-clad sectional material |
| 09/02/2009 | CN101521278A Method for preparing anode material of lithium-ion battery |
| 09/02/2009 | CN101521260A Nano composite phase-change material and preparation method thereof |
| 09/02/2009 | CN101521085A Nanocrystal iron nitride thin-film material and functions thereof |
| 09/02/2009 | CN101520247A Inner tube of heat collector tube for use in trough type solar power generation and method for preparing same |
| 09/02/2009 | CN101519770A Production line for coating solar heat-collecting pipe |
| 09/02/2009 | CN101519769A Plane magnetron sputtering target for improving magnetic field distribution |
| 09/02/2009 | CN101519768A Sprayed si- or si:al-target with low iron content |
| 09/02/2009 | CN101519767A Method for restoring and reusing focusing coil |
| 09/02/2009 | CN101519766A System for realizing the cleavage of an ultrahigh vacuum semiconductor epitaxial wafer and cavity surface multicoating |
| 09/02/2009 | CN101519765A Method for preparing high-purity copper sputtering target material for semiconductor and display |
| 09/02/2009 | CN101519764A Method for sputtering CIS film |
| 09/02/2009 | CN101519307A Method for preparing CIS powder and target thereof |
| 09/02/2009 | CN101518935A PVD nano composite ceramic coating screw and method for manufacturing same |
| 09/02/2009 | CN101518851A Structure and method for welding target material and backboard |
| 09/02/2009 | CN100536187C Biaxially-textured film deposition for superconductor coated tapes |
| 09/02/2009 | CN100535180C Method for surface treatment of carbide cutter by broad-beam N ion and device thereof |
| 09/02/2009 | CN100535179C Film thickness correcting process and system for magnetron sputtering coating |
| 09/02/2009 | CN100535178C Sputtering method and apparatus |
| 09/02/2009 | CN100535177C Insulating target material, method of manufacturing insulating target material, insulating complex oxide film, and device |
| 09/02/2009 | CN100535176C Driving shaft of effusion cell for deposition system and deposition system having the same |
| 09/02/2009 | CN100535175C Vacuum evaporator and method for manufacturing organic el display panel using the same |
| 09/01/2009 | US7583020 Light-emitting device, film-forming method and manufacturing apparatus thereof, and cleaning method of the manufacturing apparatus |
| 09/01/2009 | US7582507 Catalyst support substrate, method for growing carbon nanotubes using the same, and the transistor using carbon nanotubes |
| 09/01/2009 | US7582490 Controlled fabrication of gaps in electrically conducting structures |
| 09/01/2009 | US7582328 For use in alternating current and time varying magnetic field applications |
| 09/01/2009 | US7582194 Method and apparatus for forming fluoride thin film |
| 09/01/2009 | US7582193 Producing magnetic recording medium in which noise is reduced and thermostability of recorded magnetization is improved while enabling easy writing to be carried out by recording head; includes underlayer having hcp crystal structure and magnetic layer produced by multilayer lamination of cobalt/platinum |
| 09/01/2009 | US7582166 Holder for supporting wafers during semiconductor manufacture |
| 08/27/2009 | WO2009105518A2 Organic vapor jet printing system |
| 08/27/2009 | WO2009105024A1 Multilayered coated cutting tool |
| 08/27/2009 | WO2009104759A1 Semiconductor substrate, semiconductor element, light emitting element and electronic element |
| 08/27/2009 | WO2009104740A1 Sputtering targets with adjusted proportion of pinholes and manufacturing method thereof |
| 08/27/2009 | WO2009104567A1 A method for the production of cubic boron nitride-containing films |
| 08/27/2009 | WO2009104509A1 Fe-co alloy sputtering target material for forming soft magnetic film |
| 08/27/2009 | WO2009104463A1 Vacuum processing device, method for maintaining vacuum processing device and vacuum processing factory |
| 08/27/2009 | WO2009104382A1 Thin film forming apparatus and thin film forming method |
| 08/27/2009 | WO2009104273A1 Iron base alloy product with composite coating |
| 08/27/2009 | WO2009104241A1 Method for pattern formation and shadow mask |
| 08/27/2009 | WO2009065039A3 Methods and apparatus for sputtering deposition using direct current |
| 08/27/2009 | WO2009046081A3 Process for limiting the growth of microorganisms |
| 08/27/2009 | US20090215224 Coating methods and apparatus for making a cigs solar cell |
| 08/27/2009 | US20090214961 Photomask blank, photomask, and methods of manufacturing the same |
| 08/27/2009 | US20090214896 Perpendicular recording magnetic media having a granular magnetic recording layer and an amorphous soft underlayer |
| 08/27/2009 | US20090214895 Magnetic recording medium and manufacturing method thereof |
| 08/27/2009 | US20090214889 Double silver low-emissivity and solar control coatings |