Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
10/2009
10/28/2009CN101564793A Welding method of aluminum target blank and aluminum alloy backboard
10/28/2009CN100555687C Semiconductor light-emitting device and method for manufacturing same
10/28/2009CN100554521C Preparation method for titanic oxide nano-tube composite electrode under room temperature
10/28/2009CN100554503C Vacuum processing apparatus
10/28/2009CN100554502C Ceramic vacuum coating technique
10/28/2009CN100554501C Method for coating silicon film on surface of carborundum reflection mirror by employing magnetron sputtering
10/28/2009CN100554500C Method for implementing cobalt doping in zinc oxide nano pole
10/28/2009CN100554499C Device for the calibration of salver and its fixer
10/28/2009CN100554498C Multichannel coil filter ion composite film plating device and method
10/28/2009CN100554497C A method for forming a superhard amorphous carbon coating in vacuum
10/28/2009CN100554496C Process for manufacturing devices which require a non evaporable getter material for their working
10/28/2009CN100553968C Hard coating film
10/28/2009CN100553967C Non-metal article and its surface coating method
10/28/2009CN100553966C Non-metal article and its surface coating method
10/28/2009CN100553964C Nano multi-layer film material and method for increasing high-temperture stability of said film structure
10/28/2009CN100553832C Device for preparing nanometer powder and film material
10/27/2009US7608766 Polymer treated surfaces and methods for making
10/27/2009US7608562 Method and apparatus for producing photocatalyst
10/27/2009US7608308 forming a small deposition feature sizes, which can be similar in size to the laser focal spot; alternate multilayer dielectric structures; ablation or evaporation using laser energy; vapor deposition
10/27/2009US7608307 laser evaporation method by shining a laser beam upon a target position; forming a thin films of ferroelectric substances, insulators, conducting oxides, oxide superconductors, magnetic materials; depositing while performing rotation; uniformity of thickness
10/27/2009US7608301 Process for forming a protective coating containing aluminium and zirconium on a metal
10/27/2009US7608172 High-purity ferromagnetic sputter targets and method of manufacture
10/27/2009US7608151 Method and system for coating sections of internal surfaces
10/22/2009WO2009129537A2 Magnetic microstructures for magnetic resonance imaging
10/22/2009WO2009129115A2 Cylindrical magnetron
10/22/2009WO2009128782A1 A coated cutting tool and a method of making thereof
10/22/2009WO2009128495A1 Sputtering target
10/22/2009WO2009128132A1 Winding vacuum film coating apparatus
10/22/2009WO2009128067A2 Localized plasmon transducers and methods of fabrication thereof
10/22/2009WO2009127373A1 Transparent barrier layer system
10/22/2009WO2009127344A1 Coating process, workpiece or tool and its use
10/22/2009WO2009127272A1 Mask support, mask assembly, and assembly comprising a mask support and a mask
10/22/2009WO2009126979A1 Vapour permeable, water-tight and reflecting foil
10/22/2009WO2009106079A3 Corrosion resistant object with alloying zone
10/22/2009WO2009099775A3 Modified sputtering target and deposition components, methods of production and uses thereof
10/22/2009WO2009026035A3 Catalyst production process
10/22/2009US20090263966 Apparatus for sputtering and a method of fabricating a metallization structure
10/22/2009US20090263748 Method of manufacturing wiring circuit board
10/22/2009US20090263678 Metal material with electric contact layer and manufacturing method of the same
10/22/2009US20090263668 Durable coating of an oligomer and methods of applying
10/22/2009US20090263667 Method of making scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s)
10/22/2009US20090263649 Method for manufacturing ultra-hydrophilic thin film coated metal product, and ultra-hydrophilic thin film coated metal product
10/22/2009US20090263596 Coated article with IR reflecting layer and method of making same
10/22/2009US20090263595 Method for producing an element, including a multiplicity of nanocylinders on a substrate, and use thereof
10/22/2009US20090263591 Multi-component composite film method for preparing the same
10/22/2009US20090263590 Method of manufacturing polysilane-modified silicon fine wire and method of forming silicon film
10/22/2009US20090263566 Reduced Pressure Deposition Apparatus and Reduced Pressure Deposition Method
10/22/2009US20090261345 Method for manufacturing compliant substrate, compliant substrate manufactured thereby, gallium nitride based compound semiconductor device having the compliant substrate and manufacturing method thereof
10/22/2009US20090261262 Scintillation Detector Reflector
10/22/2009US20090260983 Cylindrical Magnetron
10/22/2009US20090260982 Wafer processing deposition shielding components
10/22/2009US20090260976 Magnetron sputtering apparatus and production method of thin film
10/22/2009US20090260975 Apparatus
10/22/2009DE102009016708A1 Solar absorber layer system comprises two subsystems comprising transparent, highly-refractive dielectric layer containing silicon nitride and partially absorbing layer containing metal or alloy or its oxide, nitride or oxynitride
10/22/2009DE102009010854A1 Fotomaskenrohling, Fotomaske und Verfahren zu ihrer Herstellung Photomask blank, and photomask processes for their preparation
10/22/2009DE102008019665A1 Transparentes Barriereschichtsystem Transparent barrier layer system
10/22/2009DE102008019202A1 Beschichtungsverfahren , Werkstück oder Werkzeug und dessen Verwendung Coating method, the workpiece or tool and the use thereof
10/22/2009DE102008016864B3 Kolbenring Piston ring
10/22/2009DE102008001005A1 Method for the production of layered composite with epitactically grown layer made of magnetic shape-memory material, comprises subjecting a sacrificial layer on one- or multilayered substrate
10/22/2009DE102005050424B4 Sputtertarget aus mehrkomponentigen Legierungen Sputtering target multicomponent alloys
10/22/2009DE102005033769B4 Verfahren und Vorrichtung zur Mehrkathoden-PVD-Beschichtung und Substrat mit PVD-Beschichtung Method and apparatus for multi-cathode PVD coating and substrate with PVD Coating
10/22/2009CA2721797A1 Magnetic microstructures for magnetic resonance imaging
10/22/2009CA2716619A1 Coating process, workpiece or tool and its use
10/21/2009EP2110457A2 Platinum-modified cathodic arc coating
10/21/2009EP2110456A1 Mask support, mask assembly, and assembly comprising a mask support and a mask
10/21/2009EP2110455A1 Mask support, mask assembly, and assembly comprising a mask support and a mask
10/21/2009EP2109899A1 Vapor deposition sources and methods
10/21/2009EP2109543A1 Optical recording medium, and sputtering target and method for producing the same
10/21/2009CN201330279Y Structure of multi-element sputtering target
10/21/2009CN101563479A Vacuum processing system
10/21/2009CN101563478A Method for forming multilayer film and apparatus for forming multilayer film
10/21/2009CN101563477A Reactive sputter deposition of a transparent conductive film
10/21/2009CN101562237A Organic light-emitting device
10/21/2009CN101562220A Process for manufacturing amorphous silicon thin film solar cell
10/21/2009CN101562208A Back incident-type TiO* UV detector and preparation method thereof
10/21/2009CN101562065A Oxide buffer layer and preparation method thereof
10/21/2009CN101561519A Method for preparing high metallic texture high transmission lens
10/21/2009CN101560645A Large vacuum coating equipment
10/21/2009CN101560644A Magnetron sputtering apparatus and method for preparing film
10/21/2009CN101560643A Plasma generating apparatus, deposition apparatus and deposition method
10/21/2009CN101560642A Method for preparing In2O3 transparent conductive film with high mobility doped with Mo
10/21/2009CN101560641A Tool for realizing both revolution and autorotation and only autorotation on multi-arc ion plating equipment
10/21/2009CN101560640A Method for preparing zinc oxide nano-layer structure on supportless carbon nano-tube film
10/21/2009CN101560639A Organic deposition apparatus and method of depositing organic substance using the same
10/21/2009CN101560638A Method for preparing vanadium oxide film by metal oxidation method
10/21/2009CN101559364A Method for preparing alumina load Pt catalyst by laser deposition method
10/21/2009CN100552913C Power supply apparatus and deposition method using the power supply apparatus
10/21/2009CN100552784C Silver alloy reflective films for optical information recording media, silver alloy sputtering targets therefor, and optical information recording media
10/21/2009CN100552490C Sonic surface wave driven two-dimensional micro optical platform and method of manufacture
10/21/2009CN100552247C Production method of PVD shaft bushing with diffusion layer
10/21/2009CN100552081C Method for preparing stable cavity type zinc oxide film by inductive coupling sputtering
10/21/2009CN100552080C Co-cr-pt-b alloy sputtering target
10/21/2009CN100552079C Use of a titanium-copper-nickel based alloy
10/21/2009CN100552078C Transparent conductive thin film, process for producing the same, sintered target for producing the same, and its use
10/21/2009CN100552068C High-purity Ru powder, sputtering target, thin film and process for producing high-purity Ru powder
10/21/2009CN100551871C Oxidate sintered body and method for making same, sputtering target and transparent conductive film
10/21/2009CN100551503C Hydrogen separation membrane, sputtering target for forming of hydrogen separation membrane, and process for producing the same
10/20/2009US7605481 Nickel alloy sputtering target and nickel alloy thin film
10/20/2009US7605393 Organic electro-luminance device and method for fabricating the same
10/20/2009US7604846 Provides a diamond having various colors with unifom, permanent color development effects