| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 11/26/2009 | US20090291231 Method and apparatus for producing a solar cell module with integrated laser patterning |
| 11/26/2009 | US20090291197 Laser cladding of tubes |
| 11/26/2009 | US20090290614 Nano-composites for thermal barrier coatings and thermo-electric energy generators |
| 11/26/2009 | US20090290290 Porous valve metal thin film, method for production thereof and thin film capacitor |
| 11/26/2009 | US20090289270 Group iii nitride semiconductor multilayer structure and production method thereof |
| 11/26/2009 | US20090289034 Operating a Plasma Process |
| 11/26/2009 | US20090288948 Physical vapor deposition apparatus |
| 11/26/2009 | US20090288944 Sputtering apparatus and method of manufacturing solar battery and image display device by using the same |
| 11/26/2009 | US20090288943 Thin film batteries and methods for manufacturing same |
| 11/26/2009 | US20090288942 Particulate capture in a plasma tool |
| 11/26/2009 | US20090288773 Multiple-electrode plasma processing systems with confined process chambers and interior-bussed electrical connections with the electrodes |
| 11/26/2009 | US20090288684 Vacuum processing apparatus and vacuum processing method |
| 11/26/2009 | DE102009007587A1 Vacuum-deposition plant producing e.g. organic light-emitting diodes or organic solar cells, first deposits materials onto belt then re-vaporizes for deposition onto substrate |
| 11/26/2009 | DE102004024114B4 Sputter-Target aus einer Legierung auf Ag-Bi-Basis und Verfahren zur Herstellung desselben Of the same sputtering target made of an alloy Ag-Bi-based and methods for preparing |
| 11/26/2009 | DE102004020058B4 Verfahren zum Abscheiden einer Schicht aus einer Formgedächtnislegierung A method of depositing a layer of a shape memory alloy |
| 11/25/2009 | EP2123791A1 Deep-pot-shaped copper sputtering target and process for producing the same |
| 11/25/2009 | EP2123790A1 Deep-pot-shaped copper sputtering target and process for producing the same |
| 11/25/2009 | EP2123789A1 A method of producing hard coatings |
| 11/25/2009 | EP2123581A1 Vacuum device and method of conveying substrate |
| 11/25/2009 | EP2122006A2 Methods and apparatus for forming diamond-like coatings |
| 11/25/2009 | EP2122004A1 Wear resistant coating for brake disks with unique surface appearance and methods for coating |
| 11/25/2009 | EP1949408B1 Method and device for colouring a metal strip in vacuum by magnetron sputtering |
| 11/25/2009 | CN101589469A Method for forming chalcogenide film and method for manufacturing recording element |
| 11/25/2009 | CN101589170A Magnetron sputter electrode, and sputtering device having the magnetron sputter electrode |
| 11/25/2009 | CN101588912A Method for producing a nanostructure on a plastic surface |
| 11/25/2009 | CN101586234A Method for determining optimized rotation speed ratio of rectangular target of multi-station coating system |
| 11/25/2009 | CN101586233A Wide spectrum film thickness monitoring system of composite light path |
| 11/25/2009 | CN101586232A Compensation plate deformation monitoring system |
| 11/25/2009 | CN101586231A Film deposition device |
| 11/25/2009 | CN101586230A High power AC variable frequency power supply |
| 11/25/2009 | CN101586229A Magnetron sputtering apparatus and film manufacturing method |
| 11/25/2009 | CN101586228A Method for improving utilization ratio of planar targets in magnetron sputtering coating system |
| 11/25/2009 | CN101586227A Method for preparing aluminium nitride material on growth substrate by ion plating |
| 11/25/2009 | CN101585978A Preparation method for high brightness aluminum pigment |
| 11/25/2009 | CN101585134A Manufacturing method of radiating module |
| 11/25/2009 | CN100562602C Reel to reel vacuum sputtering apparatus |
| 11/24/2009 | US7622228 Halftone phase shift mask blank, and method of manufacture |
| 11/24/2009 | US7622198 Decorative article having white coating and method for manufacture thereof |
| 11/24/2009 | US7622161 Method of making window unit including diamond-like carbon (DLC) coating |
| 11/24/2009 | US7622153 contacting the oxidizable component (Fe, Al or alloy) in particle form with a gas containing a vapour of the activating component(AlCl3, FeCl3 etc.) and depositing activating component from the gas onto the oxidizable component in either a liquid or solid form; utility in packaging |
| 11/24/2009 | US7622152 MoSi2-Si3N4 composite coating and manufacturing method thereof |
| 11/24/2009 | US7622149 Reactive metal sources and deposition method for thioaluminate phosphors |
| 11/24/2009 | US7622007 Substrate processing apparatus and semiconductor device producing method |
| 11/19/2009 | WO2009140470A1 Method of making thin film structure and compositions thereof |
| 11/19/2009 | WO2009139434A1 Sputtering system for depositing thin film and method for depositing thin film |
| 11/19/2009 | WO2009138960A1 Method and system for manufacturing nanostructures |
| 11/19/2009 | WO2009138774A1 A process for the manufacture of a high density ito sputtering target |
| 11/19/2009 | WO2009138496A1 A method of producing hard wear-resistant coatings |
| 11/19/2009 | WO2009138063A1 Protective layer and method for producing a protective layer |
| 11/19/2009 | WO2009138062A2 Protective layer and method for applying a protective layer |
| 11/19/2009 | WO2008110151A3 Method and device for the plasma-assisted surface treatment of large-volume components |
| 11/19/2009 | US20090287335 Processing data managing system, processing system, and processing device data managing method |
| 11/19/2009 | US20090286435 Method for Producing, and a Substrate with, a Surface with Specific Characteristics |
| 11/19/2009 | US20090286105 Method for producing a coated article by sputtering a ceramic target |
| 11/19/2009 | US20090286071 Transparent conductive film and method for production thereof |
| 11/19/2009 | US20090286014 Photoluminescent composition and method |
| 11/19/2009 | US20090285998 Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method |
| 11/19/2009 | US20090285978 Electrochromic devices having improved ion conducting layers |
| 11/19/2009 | US20090283401 Method for manufacturing liquid crystal device |
| 11/19/2009 | US20090283400 Microwave-assisted rotatable pvd |
| 11/19/2009 | DE10337732B4 Verfahren und Beschichtungsanlage zum Beschichten von Substraten für optische Komponenten The method and coating system for coating substrates for optical components |
| 11/19/2009 | DE102008023591A1 Schutzschicht und Verfahren zum Aufbringen einer Schutzschicht Protective coating and method for applying a protective layer |
| 11/19/2009 | DE102008022145A1 Vorrichtung und Verfahren zum Hochleistungs-Puls-Gasfluß-Sputtern Apparatus and method for high-power pulse sputtering gas flow |
| 11/19/2009 | DE102006036403B4 Verfahren zur Beschichtung eines Substrats mit einer definierten Schichtdickenverteilung A process for coating a substrate with a defined layer thickness distribution |
| 11/19/2009 | DE102005024180B4 Transferkammer und Vakuumbeschichtungsanlage Transfer chamber and vacuum coating system |
| 11/19/2009 | CA2729017A1 Method of making thin film structures and compositions thereof |
| 11/18/2009 | EP2119813A1 Coating device with insulation |
| 11/18/2009 | EP2119810A2 Magnetron sputtering source |
| 11/18/2009 | EP2119809A1 Substrate processing module exchange unit. |
| 11/18/2009 | EP2119808A1 Target formed of sintering-resistant material of high-melting point metal alloy, high-melting point metal silicide, high-melting point metal carbide, high-melting point metal nitride, or high-melting point metal boride, process for producing the target, assembly of the sputtering target-backing plate, and process for producing the same |
| 11/18/2009 | EP2119807A1 Chromium nitride coating film by ion plating, process for producing the same, and piston ring for internal combustion engine |
| 11/18/2009 | EP2119806A1 Multilayer film forming method and multilayer film forming apparatus |
| 11/18/2009 | EP2118940A1 Apparatus for continuous fabricating superconducting tapes |
| 11/18/2009 | EP2118334A1 Vacuum coating apparatus |
| 11/18/2009 | EP2118333A1 A universal method for selective area growth of organic molecules by vapor deposition |
| 11/18/2009 | EP2118031A2 Method for depositing a thin layer and product thus obtained |
| 11/18/2009 | EP2118015A1 Perovskite oxide, process for producing the same, piezoelectric film, and piezoelectric device |
| 11/18/2009 | EP2118003A2 Method, material and apparatus for enhancing dynamic stiffness |
| 11/18/2009 | EP1761369B1 Colored razor blades |
| 11/18/2009 | EP1432510B1 Substrate having catalyst compositions on surfaces of opposite sides and method for producing the same |
| 11/18/2009 | CN101583735A Multilayer film forming method and multilayer film forming apparatus |
| 11/18/2009 | CN101582461A Novel multilayer transparent conductive film structure and preparation method thereof |
| 11/18/2009 | CN101581809A Selective light-absorption nano-film for PDP displays, and preparation method thereof |
| 11/18/2009 | CN101581808A Light-conversion nano-film for PDP display, and preparation method thereof |
| 11/18/2009 | CN101581036A Preparation method of continuous SiC fiber surface C/AIN composite gradient coating. |
| 11/18/2009 | CN101580929A Preheating using laser beam |
| 11/18/2009 | CN101580928A Amorphous carbon membrane and preparation method thereof as well as material of amorphous carbon membrane coating |
| 11/18/2009 | CN101580927A Method for preparing manganese-stabilized hafnia film |
| 11/18/2009 | CN101580384A Yttrium-doped AZO target material and preparation method thereof |
| 11/18/2009 | CN101580379A Nb-doped nano indium tin oxide powder and method for preparing high density sputtering coating target thereof |
| 11/18/2009 | CN101580269A Method for preparing green emission ZnO nano-rod |
| 11/18/2009 | CN100562196C Anti-active oxygen corrosion new plane antenna radiation heater |
| 11/18/2009 | CN100561778C Surface coating decoration method for improving cathode security of lithium ion battery |
| 11/18/2009 | CN100561637C Method for manufacturing plasma display panel |
| 11/18/2009 | CN100560791C Annealing treatment method for deposition ring |
| 11/18/2009 | CN100560790C Control method for ionic beam electric charge |
| 11/18/2009 | CN100560789C Substrate fixture and rotary disc for coating film and film coating machine |
| 11/18/2009 | CN100560788C Magnetron sputtering ion plating method |
| 11/18/2009 | CN100560787C Method for formation of titanium nitride film on metal substrate in magnetized sheet plasma source |
| 11/18/2009 | CN100560786C Sputtering device and method |