Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
11/2009
11/05/2009WO2009053479A3 Application of high power magnetron sputtering to through silicon via metallization
11/05/2009US20090274927 Multilayer alloy coating film, heat-resistant metal member having the same, and method for producing multilayer alloy coating film
11/05/2009US20090274872 Device and Method for Coating a Micro-and/or Nano-Structured Structural Substrate and Coated Structural Substrate
11/05/2009US20090274870 method of fabricating a membrane having a tapered pore
11/05/2009US20090274033 Optical recording medium and production method therefor, and sputtering target and production method therefor
11/05/2009US20090273779 Metal nano-void photonic crystal for enhanced raman spectroscopy
11/05/2009US20090273756 Process To Mold A Plastic Optical Article With Integrated Hard Coating
11/05/2009US20090273752 Liquid crystal display having transparent conductive film on interlayer insulating film formed by coating
11/05/2009US20090273087 Closed-loop sputtering controlled to enhance electrical characteristics in deposited layer
11/05/2009US20090272947 made of polycrystals of an alloy of aluminum; contains additives; mirrors, electrodes, magnetic disks; cost efficiency
11/05/2009US20090272647 Process kit for rf physical vapor deposition
11/05/2009US20090272642 Method and arrangement for producing contacts on photovoltaic elements without carrier substrate
11/05/2009US20090272641 Sputter target, method for manufacturing a layer, particularly a tco (transparent conductive oxide) layer, and method for manufacturing a thin layer solar cell
11/05/2009US20090272437 Transparent Conductive Materials Including Cadmium Stannate
11/05/2009US20090272322 Film depositing apparatus
11/05/2009US20090272272 Semiconductor manufacturing facility utilizing exhaust recirculation
11/05/2009DE202009011414U1 Vorrichtung zur kontinuierlichen Bandbeschichtung An apparatus for continuous strip coating
11/05/2009DE112007002293T5 Bedampfungsvorrichtung, Vorrichtung zum Steuern der Bedampfungsvorrichtung, Verfahren zum Steuern der Bedampfungsvorrichtung und Verfahren zur Verwendung der Bedampfungsvorrichtung A vapor-deposition, apparatus for controlling the evaporating apparatus, method of controlling the evaporating apparatus and method of using the sputtering apparatus
11/05/2009DE10249151B4 Vorrichtung zur ein- oder mehrschichtigen Bedampfung von Substraten in einem einzigen Bedampfungsprozeß Apparatus for single- or multilayer vapor deposition of substrates in a single evaporation process
11/05/2009DE10224908B4 Vorrichtung für die Beschichtung eines flächigen Substrats An apparatus for coating a flat substrate
11/05/2009DE102008022039A1 Wear-resistant coating of amorphous carbon, is deposited in layers with varying oxygen content to control hardness, friction and wear rate
11/05/2009DE102008021912A1 Pretreating and/or coating bodies with high power impulse magnetron sputtering-power supplies in metallic coating chamber, comprises synchronizing pulses of power supplies to each other, and producing gas- and metal ions by power supplies
11/05/2009DE102008016619B3 Verdampferkörper Evaporator body
11/05/2009DE102007062618B4 Verfahren und Vorrichtung zum Beschichten von Gläsern Method and apparatus for coating lenses
11/05/2009CA2722572A1 Transparent conductive materials including cadmium stannate
11/04/2009EP2113585A1 Apparatus and method for coating of a web in vacuum by twisting and guiding the web multiple times along a roller past a processing region
11/04/2009EP2113584A1 Evaporation system
11/04/2009EP2113322A1 Surface film member, process for rpoducing the surface covering member, cutting tool, and machine tool
11/04/2009EP2113310A1 Film depositing apparatus
11/04/2009EP2113127A1 Selective absorber for converting sunlight into heat, and method and device for the production thereof
11/04/2009EP1825545B1 Deposition of licoo2
11/04/2009EP1639149B1 A method for forming a superhard amorphous carbon coating in vacuum
11/04/2009EP1306972B1 Method of manufacturing surface acoustic wave device
11/04/2009CN201340459Y Vacuum-plated glass reflector
11/03/2009US7612015 Member having photocatalytic function and method for manufacture thereof
11/03/2009US7611990 Deposition methods for barrier and tungsten materials
11/03/2009US7611971 Method of removing residual contaminants from an environment
11/03/2009US7611610 Method and apparatus for controlling topographical variation on a milled cross-section of a structure
11/03/2009US7611587 Thin-film deposition evaporator
10/2009
10/29/2009WO2009131737A1 Method and apparatus for improved high power impulse magnetron sputtering
10/29/2009WO2009131136A1 Heat insulation resin base and architectural member using the same
10/29/2009WO2009131064A1 Process for producing si(1-v-w-x)cwalxnv base material, process for producing epitaxial wafer, si(1-v-w-x)cwalxnvbase material, and epitaxial wafer
10/29/2009WO2009131063A1 Process for producing si(1-v-w-x)cwalxnv base material, process for producing epitaxial wafer, si(1-v-w-x)cwalxnv base material, and epitaxial wafer
10/29/2009WO2009131061A1 Method of manufacturing a si(1-v-w-x)cwalxnv substrate, method of manufacturing an epitaxial wafer, si(1-v-w-x)cwalxnv substrate, and epitaxial wafer
10/29/2009WO2009131036A1 Film-forming method and film-forming apparatus
10/29/2009WO2009130051A1 Sherardizing method
10/29/2009WO2009129880A1 Method for producing metal oxide layers having a pre-defined structure by way of arc evaporation
10/29/2009WO2009129879A1 Method for producing metal oxide layers by way of arc evaporation
10/29/2009WO2009129790A1 Erosion protection coating
10/29/2009WO2009094622A3 Vacuum coating techniques
10/29/2009US20090270283 Process for Deposition of Amorphous Carbon
10/29/2009US20090269933 Substrate Processing Apparatus and Semiconductor Device Manufacturing Method
10/29/2009US20090269914 Process for forming a dielectric on a copper-containing metallization and capacitor arrangement
10/29/2009US20090269615 Method for producing metal oxide layers of predetermined structure through arc vaporization
10/29/2009US20090269614 Hard coating film and target for formation thereof
10/29/2009US20090269600 Method for producing metal oxide layers through arc vaporization
10/29/2009US20090269558 Method and apparatus for producing small structures
10/29/2009US20090269539 Information Recording Medium and Method for Manufacturing Same
10/29/2009US20090269511 Process for producing hybrid nano-filament electrodes for lithium batteries
10/29/2009US20090269509 Method of Manufacturing Evaporation Donor Substrate and Method of Manufacturing Light-Emitting Device
10/29/2009US20090269506 Method and apparatus for cleaning of a CVD reactor
10/29/2009US20090269486 Evaporation method, evaporation device and method of fabricating light emitting device
10/29/2009US20090268580 Master recording apparatus, master recording method, master for stamper containing heat-sensitive resist material, and method of forming film of heat-sensitive
10/29/2009US20090267032 Hydrogen Gas Detecting Material and the Coating Method
10/29/2009US20090267029 Indium-oxide-based transparent conductive film and method for producing the film
10/29/2009US20090266711 Substrate processing apparatus
10/29/2009US20090266704 Sputtering Method and Sputtering Apparatus, and Electronic Device Manufacturing Method
10/29/2009US20090266703 Plasma generating device and film deposition method in which the plasma generating device is used
10/29/2009US20090266599 Circuit board with high thermal conductivity and method for manufacturing the same
10/29/2009US20090266454 Method of Diffusion Zinc Coating
10/29/2009US20090266410 Vacuum processing apparatus, vacuum processing method, electronic device, and electronic device manufacturing method
10/29/2009US20090266254 Gravure printing roll and method of manufacturing the same
10/29/2009DE112007002294T5 Bedampfungsvorrichtung, Vorrichtung zum Steuern einer Bedampfungsvorrichtung, Verfahren zum Steuern einer Bedampfungsvorrichtung, Verfahren zur Verwendung einer Bedampfungsvorrichtung und Verfahren zum Herstellen eines Blasausganges A vapor-deposition, apparatus for controlling a vapor-deposition device, method for controlling a vapor-deposition device, method of using a sputtering apparatus and method for producing a Blasausganges
10/29/2009DE102008018820A1 Airlock system for supplying bottles to vacuum chamber and then removing them comprises cups, on to which lids can be fitted, to which bottles are attached, cups being connected to tubular arms to form rotating wheel
10/29/2009CA2722520A1 Method for producing metal oxide layers of predetermined structure through arc vaporization
10/29/2009CA2722380A1 Method for producing metal oxide layers through arc vaporization
10/29/2009CA2722202A1 Erosion protection coating
10/28/2009EP2112248A1 Method for producing a fire resistant titanium gas turbine component and the titanium component.
10/28/2009EP2111480A2 Method of making inorganic or inorganic/organic hybrid films
10/28/2009EP2111479A1 Optical lens holder
10/28/2009EP2111478A2 Method of diffusion-bond powder metallurgy sputtering target
10/28/2009EP2111477A2 Method for coating a substrate, equipment for implementing said method and metal supply device for such equipment
10/28/2009EP1672091B1 Laminate containing wurtzrite crystal layer, and method for production thereof
10/28/2009EP0748260B2 Ion beam process for deposition of highly abrasion-resistant coatings
10/28/2009CN101568669A Method of surface treatment for metal glass part, and metal glass part with its surface treated by the method
10/28/2009CN101568665A Sno-based sputtering target
10/28/2009CN101567395A Surface-texturing n-type ZnO-based transparent conductive film and preparation method thereof
10/28/2009CN101567304A Gas distributing device and semiconductor processing device applying same
10/28/2009CN101566077A Last stage vane of steam turbine and preparation method thereof
10/28/2009CN101565822A Release method of residual compression stress in nanocrystalline cubic boron nitride pellicle
10/28/2009CN101565820A Device for preparing textured ZnO transparent conductive coated glass by plasma bombardment
10/28/2009CN101565819A Magnetic controlled sputtering ring
10/28/2009CN101565818A Sputter coating method
10/28/2009CN101565817A Sputtering carrier
10/28/2009CN101565816A Process for performing steel-strip film coating by using pulse laser evaporation ablation in vacuum
10/28/2009CN101565815A Uncontinuous high-metallic coating method
10/28/2009CN101565814A Anti-oxidation and anti-electron radiation vacuum coating method
10/28/2009CN101565813A MgO film electron beam evaporation method and device
10/28/2009CN101565812A Shading fixture and lens mount coating method applying shading fixture
10/28/2009CN101565115A Producing technique of films for aluminized wrapping paper imitating aluminum foil