Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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11/18/2009 | CN100560785C Sputtering target material |
11/18/2009 | CN100560784C System and method of detecting life of consumed material thick plate used for processing machine |
11/18/2009 | CN100560783C Method of manufacturing permalloy iron core film |
11/18/2009 | CN100560782C Novel mask system of organic electroluminescent device and method for manufacturing the same |
11/18/2009 | CN100560780C Electrically exploding and electromagnetically accelerated superhigh speed spraying process |
11/18/2009 | CN100560362C Molybdenum base nitride composite hard thin film and preparation thereof |
11/17/2009 | US7618769 Textured chamber surface |
11/17/2009 | US7618521 Split magnet ring on a magnetron sputter chamber |
11/17/2009 | US7618520 Physical vapor deposition target constructions |
11/17/2009 | US7618505 Target of high-purity nickel or nickel alloy and its producing method |
11/17/2009 | US7618494 Substrate holding structure and substrate processing device |
11/17/2009 | US7618131 Structure of piezoelectric element and liquid discharge recording head, and method of manufacture therefor |
11/17/2009 | CA2377828C An improved antiglare optical device |
11/12/2009 | WO2009137513A2 Microwave rotatable sputtering deposition |
11/12/2009 | WO2009136670A1 Heater for vacuum thermal deposition |
11/12/2009 | WO2009117262A3 Method and system for depositing silicon carbide film using a gas cluster ion beam |
11/12/2009 | WO2009117229A3 Coaxial microwave assisted deposition and etch systems |
11/12/2009 | US20090280600 Amorphous oxide and thin film transistor |
11/12/2009 | US20090280266 Barrier film and laminated material, container for wrapping and image display medium using the same, and manufacturing method for barrier film |
11/12/2009 | US20090280235 Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation |
11/12/2009 | US20090280025 High-Purity Ru Alloy Target, Process for Producing the Same, and Sputtered Film |
11/12/2009 | US20090279227 Multi Layer Chip Capacitor, and Method and Apparatus for Manufacturing the Same |
11/12/2009 | US20090279179 Deposition donor substrate and deposition method using the same |
11/12/2009 | US20090279173 Apparatus and methods for providing a static interferometric display device |
11/12/2009 | US20090278320 Piston ring with chromium nitride coating for internal combustion engines |
11/12/2009 | US20090278211 Composite dielectric thin film, capacitor and field effect transistor using the same, and each fabrication method thereof |
11/12/2009 | US20090277873 Dry etching method |
11/12/2009 | US20090277788 Sputtering Target/Backing Plate Bonded Body |
11/12/2009 | US20090277787 Rotatable sputter target comprising an end-block with a liquid coolant supply system |
11/12/2009 | US20090277782 Silicon Oxynitride Coating Compositions |
11/12/2009 | US20090277781 Magnetron sputtering apparatus and method for manufacturing thin film |
11/12/2009 | US20090277780 Sputtering device |
11/12/2009 | US20090277779 Magnetic field generating apparatus, magnetic field generating method, sputtering apparatus, and method of manufacturing device |
11/12/2009 | US20090277778 Microwave rotatable sputtering deposition |
11/12/2009 | US20090277777 Cold-pressed sputter targets |
11/12/2009 | US20090277490 Thermoelectric module device with thin film elements and fabrication thereof |
11/12/2009 | US20090277390 Source, an Arrangement for Installing a Source, and a Method for Installing and Removing a Source |
11/12/2009 | DE10312641B4 Verfahren und Vorrichtung zum Herstellen einer OLED-Anzeige Method and apparatus for manufacturing an OLED display |
11/12/2009 | DE102008039211A1 Rohrtarget mit Endblock zur Kühlmittelversorgung Tube target with end block to the coolant supply |
11/12/2009 | DE102008023025A1 Crucible arrangement for thermal coating process, comprises a ceramic crucible and a crucible box surrounding an external side of the crucible, where a covering element is arranged between the crucible and the crucible box |
11/11/2009 | EP2116631A1 Sputter target |
11/11/2009 | EP2116630A1 Arc evaporation source |
11/11/2009 | EP2116629A1 Deposition source, deposition apparatus and method for forming organic thin film |
11/11/2009 | EP2116628A1 Hard coating film and target for formation thereof |
11/11/2009 | EP2115185A1 Conductive laminated body and method for preparing the same |
11/11/2009 | EP2115183A2 Apparatus for gas handling in vacuum processes |
11/11/2009 | EP2115182A1 Bright coatings for aluminium or steel motor vehicle wheels and their production |
11/11/2009 | EP2115181A2 Method for assembling at least two plates and use of said method for making an ionic sputtering assembly |
11/11/2009 | EP1620047B1 Metallic implantable grafts and method of making same |
11/11/2009 | CN201345096Y Patterned transparent conducting film for transparent substrate and touch panel |
11/11/2009 | CN201345094Y Improved circuit for transparent current-conducting plate |
11/11/2009 | CN201344668Y Selective solar photo-thermal absorbing composite coat |
11/11/2009 | CN201344667Y Selective solar photo-thermal absorbing coat |
11/11/2009 | CN201343569Y Continuous plane magnetron sputtering filming device |
11/11/2009 | CN201343498Y Substrate holder preventing thermal deformation of cross rod |
11/11/2009 | CN201343497Y Adjustable glass substrate frame |
11/11/2009 | CN201343496Y Glass substrate clip part |
11/11/2009 | CN101578728A Alloy coating film for metal separator of fuel cell, method for producing the same, sputtering target material, metal separator and fuel cell |
11/11/2009 | CN101578715A III nitride compound semiconductor element and method for manufacturing the same, III nitride compound semiconductor light emitting element and method for manufacturing the same, and lamp |
11/11/2009 | CN101578396A Multilayered coated cutting tool |
11/11/2009 | CN101578394A Plated material having metal thin film formed by electroless plating, and method for production thereof |
11/11/2009 | CN101578393A Plated material having metal thin film formed by electroless plating, and method for production thereof |
11/11/2009 | CN101578389A Highly corrosion-resistant members and processes for production thereof |
11/11/2009 | CN101578387A Sputtering target |
11/11/2009 | CN101578386A Method and apparatus for converting precursor layers into photovoltaic absorbers |
11/11/2009 | CN101578245A ITO sintered body and ITO sputtering target |
11/11/2009 | CN101576793A Capacitance touch screen and preparation method thereof |
11/11/2009 | CN101575699A Film plating bracket |
11/11/2009 | CN101575698A Magnetron sputtering apparatus and method for manufacturing thin film |
11/11/2009 | CN101575697A ZnO-based transparent conductive film co-doped with Al-F and preparation method thereof |
11/11/2009 | CN101575696A Preparation method of chromium-aluminum-nitrogen film by closed field unbalanced magnetron sputtering |
11/11/2009 | CN101575695A Laser coating device and method based on transparent material |
11/11/2009 | CN101575207A Ge-doped AZO target and preparation method thereof |
11/11/2009 | CN101575203A Preparation method of ITO sputtering target material |
11/11/2009 | CN101574654A Method for preparing supported nanometer gold catalyst by laser deposition |
11/11/2009 | CN100558939C Low temperature preparation method for alcohol heat assistant ferro-electricity film |
11/11/2009 | CN100558938C Method for processing three-dimensional metal bead |
11/11/2009 | CN100558931C Ion implantation method and ion implantation device |
11/11/2009 | CN100558930C Sputtering target, optical information recording medium and process for producing the same |
11/11/2009 | CN100558929C Evaporator, vapor deposition apparatus, and method of switching evaporator in vapor deposition apparatus |
11/11/2009 | CN100558928C Hard film and method for preparing the same |
11/11/2009 | CN100558552C Hard film and hard film-coated material |
11/10/2009 | US7615287 Thermoplastics; formed via solution of alkali metal ions, alkaline earth metal ions, and ammonium ions and originating from low-molecular-weight electrolyte; wrapping |
11/05/2009 | WO2009135114A2 Transparent conductive materials including cadmium stannate |
11/05/2009 | WO2009134810A2 Vanadium oxide thin films |
11/05/2009 | WO2009134211A1 Inorganic graded barrier film and methods for their manufacture |
11/05/2009 | WO2009134041A2 Evaporator and vacuum deposition apparatus having the same |
11/05/2009 | WO2009133921A1 Sputtering target material for producing intermediate layer film of perpendicular magnetic recording medium and thin film produced by using the same |
11/05/2009 | WO2009133841A1 METHOD FOR PRODUCTION OF WATER-REACTIVE Al FILM, AND STRUCTURAL MEMBER FOR FILM-FORMING CHAMBER |
11/05/2009 | WO2009133840A1 WATER-REACTIVE Al COMPOSITE MATERIAL, WATER-REACTIVE Al FILM, METHOD FOR PRODUCTION OF THE AL FILM, AND STRUCTURAL MEMBER FOR FILM-FORMING CHAMBER |
11/05/2009 | WO2009133839A1 Water-reactive al composite material, water-reactive al film, method for production of the al film, and structural member for film-forming chamber |
11/05/2009 | WO2009133838A1 WATER-REACTIVE Al COMPOSITE MATERIAL, WATER-REACTIVE Al FILM, PROCESS FOR PRODUCTION OF THE Al FILM, AND CONSTITUENT MEMBER FOR FILM DEPOSTION CHAMBER |
11/05/2009 | WO2009133837A1 WATER-REACTIVE Al COMPOSITE MATERIAL, WATER-REACTIVE Al FILM, PROCESS FOR PRODUCTION OF THE Al FILM, AND CONSTITUENT MEMBER FOR FILM DEPOSITION CHAMBER |
11/05/2009 | WO2009133836A1 PROCESS FOR PRODUCTION OF WATER-REACTIVE Al FILM AND CONSTITUENT MEMBERS FOR FILM DEPOSITION CHAMBERS |
11/05/2009 | WO2009133814A1 Surface coated cutting tool |
11/05/2009 | WO2009133500A1 Method of forming a nanocluster-comprising dielectric layer and device comprising such a layer |
11/05/2009 | WO2009133076A2 Sputter target, method for manufacturing a layer, particularly a tco (transparent conductive oxide) layer, and method for manufacturing a thin layer solar cell |
11/05/2009 | WO2009132822A2 Device and method for pretreating and coating bodies |
11/05/2009 | WO2009132769A1 Evaporation system |
11/05/2009 | WO2009112780A3 Textured substrate including a stack with thermal properties |