Patents
Sitemap › C23 - Coating metallic material; Coating material with metallic material; Chemical surface treatment; Diffusion treatment of metallic material; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general; Inhibiting corrosion of metallic material or incrustation in general › C23C - Coating metallic material; Coating material with metallic material; Surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; Coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general › C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
09/2010
09/16/2010US20100230274 Minimizing magnetron substrate interaction in large area sputter coating equipment
09/16/2010US20100230273 Film forming apparatus and film forming method
09/16/2010US20100230048 Method and system for tone inverting of residual layer tolerant imprint lithography
09/16/2010DE112008002463T5 Supraleiter aus einem auf RE123 basierenden Oxid und Verfahren zu dessen Herstellung Superconductor made of a RE123-based oxide, and process for its preparation
09/16/2010DE10203730B4 Verfahren zur Abscheidung von metallfreien Kohlenstoffschichten A process for the deposition of metal-free carbon layers
09/16/2010DE102009013129A1 Kunststoffbauteil mit Erosionsschutzschicht für Anwendungen mit erosiver Beanspruchung Plastic component with erosion protection layer for applications with erosive attack
09/16/2010DE102009002183A1 Verbrennungskraftmaschine mit einer Brennraum- oder brennraumnahen Oberflächenbeschichtung sowie Verfahren zur Beschichtung Internal combustion engine with a combustion chamber or combustion chamber near surface coating and methods for coating
09/15/2010EP2228805A1 Transparent conducive film and method for producing the same
09/15/2010EP2228464A1 Indium target for sputtering device and assembly and method for producing such indium targets
09/15/2010EP2228463A1 Functional film and method for manufacturing the functional film
09/15/2010EP2227573A2 Thin-film solar array having molybdenum-containing rear electrode layer
09/15/2010CN201581127U Horizontal direction revolution and autorotation mechanism for vacuum coating
09/15/2010CN201581126U Cooling baffle
09/15/2010CN201581125U Film-coating covering mould
09/15/2010CN1883060B Increasing the lateral resolution of organic vapor jet deposition by using a confining guard flow
09/15/2010CN101835922A Method for manufacturing workpieces and apparatus
09/15/2010CN101835921A Sputtering target, method for producing thin film and display device
09/15/2010CN101835920A Sputtering target for magnetic recording film and method for manufacturing such sputtering target
09/15/2010CN101835919A Piston ring
09/15/2010CN101835914A High-purity ytterbium, sputtering target made of high-purity ytterbium, thin film containing high-purity ytterbium, and method for producing high-purity ytterbium
09/15/2010CN101834293A Tungsten nitride cathode material for lithium ion battery and preparation method thereof
09/15/2010CN101834233A Method for rapidly depositing hydrogenated amorphous silicon solar battery thin film at low temperature
09/15/2010CN101834068A Core-shell structure positive electrode for dye sensitization solar battery and preparation method thereof
09/15/2010CN101834009A Low-indium doping amount zinc oxide transparent conducting film and preparation method thereof
09/15/2010CN101831651A Hard alloy cutter and film plating method of same
09/15/2010CN101831620A Method for prehanging liquid metal on emitting electrode bombard and sputtered by primary ion beam
09/15/2010CN101831619A Nano-crystalline Mg-Ni multilayer composite film and preparation method thereof
09/15/2010CN101831618A Gate dielectric film with TiO2/ZrO2 two-layer stack structure and high dielectric constant and preparation method thereof
09/15/2010CN101831617A Basal plate retainer for ECR (Equivalent Continuous Rating) plasma sputtering device
09/15/2010CN101831616A Nano composite titanium-chromium-silicon nitride cutter coat and preparation method thereof
09/15/2010CN101831615A Nano composite titanium-chromium-aluminum-silicon nitride cutter coat and preparation method thereof
09/15/2010CN101831614A Film coating manufacturing process of capacitive touch screen
09/15/2010CN101831613A Method for growing nonpolar InN film by utilizing nonpolar ZnO buffer layer
09/15/2010CN101831612A Precise positioning sputtering device and positioning method thereof
09/15/2010CN101831611A Vacuum coating device and method
09/15/2010CN101831610A Observation window baffle device and cavity observation window having the same
09/15/2010CN101831609A Circulating cooling water system of diffusion pump of vacuum coater
09/15/2010CN101831608A Nano composite titanium-aluminum-silicon nitride cutter coating and preparation method thereof
09/15/2010CN101831607A OLED (Organic Light Emitting Diode) mask and application method thereof
09/15/2010CN101831606A Ball valve surface treatment method
09/15/2010CN101831584A High heat-conducting copper-based composite material and preparation method thereof
09/15/2010CN101830092A Method for preparing corrosion-resistant colored decorative film
09/15/2010CN101829401A Implanted bioelectrode based on photoetching and other micro-nano manufacturing technologies and preparation method thereof
09/15/2010CN101603170B Method for plating parylene film on surface of LED chip
09/15/2010CN101596607B TiZrN coated cutting tool and preparation method thereof
09/15/2010CN101532122B Method for preparing diamond-like coating on surface of biological medical NiTi alloy
09/15/2010CN101525734B Method for preparing boron, carbon and nitrogen hard coating
09/15/2010CN101499529B Indium phosphide cathode material for lithium ion battery and method for producing the same
09/15/2010CN101418430B Omnidirectional ion injection and deposition batch composite handling arrangement and method
09/15/2010CN101370958B Sputtering apparatus
09/15/2010CN101263243B Flow-formed chamber component having a textured surface
09/15/2010CN101185773B Method for preparing bioactivity gradient hard tissue alternate material
09/15/2010CN101177775B Vacuum deposition film and film heat treating plant having applied magnetic field
09/14/2010USRE41694 Method for roll-to-roll deposition of optically transparent and high conductivity metallic thin films
09/14/2010US7794800 Component coating
09/14/2010US7794798 providing to a depressurized atmosphere a gas cluster ion beam (GCIB) from a pressurized gas mixture of silicon-containing gas and at least one of a N2-containing or a carbon-containing gases, accelerating the GCIB, irradiating the accelerated GCIB onto a surface to produce SiC, Si3n4, SiO2 or SiON
09/14/2010US7794786 Composite material and process for preparing a composite material
09/14/2010US7794574 Top shield for sputtering system
09/14/2010US7794563 Etching depth measuring device, etching apparatus, and etching depth measuring method
09/14/2010US7794554 Rejuvenation of refractory metal products
09/10/2010WO2010101688A1 Ultra-thin film formation using gas cluster ion beam processing
09/10/2010WO2010101160A1 Al ALLOY REFLECTIVE FILM, AUTOMOBILE LIGHT, ILLUMINATOR, AND ORNAMENTATION, AND Al ALLOY SPUTTERING TARGET
09/10/2010WO2010101051A1 Sputtering target and process for producing same
09/10/2010WO2010100835A1 Alternating current power supply for sputtering apparatus
09/10/2010WO2010100710A1 Substrate processing device, manufacturing device and manufacturing method of magnetic device
09/10/2010WO2010100561A1 Process and device for the thermal conversion of metallic precursor layers into semiconducting layers using a chalcogen source
09/10/2010WO2010100384A1 Method for treating a surface of an elastomer part using multi-energy ions he+ and he2+
09/10/2010WO2010100345A2 Smart system for the high-yield production of solar energy in multiple capture chambers provided with nanoparticle photovoltaic cells
09/10/2010WO2010099805A1 Highly ordered arrays of nanoholes in metallic films and methods for producing the same
09/09/2010US20100227372 Biological functionalisation of substrates
09/09/2010US20100227178 Barrier laminate, gas barrier film, and device using the same
09/09/2010US20100227176 Transparent Conductive Film and Method for Manufacturing the Same
09/09/2010US20100227156 Decorative part
09/09/2010US20100227133 Pulsed laser micro-deposition pattern formation
09/09/2010US20100227107 Recording layer for optical information recording medium, optical information recording medium, and spattering target
09/09/2010US20100227083 Nanoscale Oxide Coatings
09/09/2010US20100227066 Multi-element metal chalcogenide and method for preparing the same
09/09/2010US20100224592 Charged particle beam processing
09/09/2010US20100224486 Dynamic Film Thickness Control System/Method and its Utilization
09/09/2010US20100224482 Deposition apparatus and electronic device manufacturing method
09/09/2010US20100224481 Gas flow set-up for multiple, interacting reactive sputter sources
09/09/2010US20100224390 Multilayer structure, electrode for electrical curcuit using the same, and method for producing the same
09/09/2010US20100224127 Dynamic Film Thickness Control System/Method and its Utilization
09/09/2010DE102010002344A1 Abscheidungsmaske Deposition mask
09/09/2010DE102009011495A1 Method for the continuous treatment of a flat substrate in a vacuum comprises heating the substrate within a flow resistor using heat radiation from the wall of the resistor
09/09/2010DE102009009992A1 Vapor deposition equipment used to make high- efficiency chalcopyrite solar cells, employs automatically-controlled wire feed to introduce coating materials
09/09/2010DE102005063421B4 Hartstoff-Schichtsystem Hard material layer system
09/08/2010EP2226305A1 Heat reflecting glass and process for producing heat reflecting glass
09/08/2010EP2225406A1 Method for sputter targets for electrolyte films
09/08/2010EP2225405A2 Methods and apparatus for sputtering deposition using direct current
09/08/2010EP1224242B1 Methods and apparatus for producing enhanced interference pigments
09/08/2010EP1144544B1 Method for forming films or layers
09/08/2010CN201577239U Electronic device shell surface cladding layer structure
09/08/2010CN201576664U Semiconductor production equipment of PVD process
09/08/2010CN1854329B Device for coating a substrate and module
09/08/2010CN101828212A Display device and cu alloy film for use in the display device
09/08/2010CN101827955A Workpiece carrier device
09/08/2010CN101827954A Coated substrates and semiconductor devices including the substrates
09/08/2010CN101827953A Voltage variable type thinfilm deposition method and apparatus thereof
09/08/2010CN101827766A Substrate processing apparatus
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