| Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304) |
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| 01/16/2002 | EP1172189A2 Apparatus to cut material in plates, in particular glass, ceramics, marble, aluminium, steel, wood and composite material plates |
| 01/15/2002 | US6339321 Electronic device tray electronic device tray, transporting apparatus, and electronic device testing apparatus |
| 01/15/2002 | US6338626 Load-lock mechanism and processing apparatus |
| 01/10/2002 | WO2002003433A2 Wheel and conveyor system for transporting semiconductor wafers and method for transferring wafers |
| 01/10/2002 | WO2002003431A2 Apparatus and methods for semiconductor wafer processing equipment |
| 01/10/2002 | WO2002002282A1 Edge-gripping pre-aligner |
| 01/10/2002 | US20020003616 Stage system for exposure apparatus and device manufacturing method using the same |
| 01/10/2002 | US20020002946 Processing apparatus for processing sample in predetermined atmosphere |
| 01/10/2002 | US20020002914 Apparatus for printing on individual articles |
| 01/09/2002 | EP1170063A1 Method to introduce and remove workpieces, especially automobile bodies, device and installation for workpiece surface processing |
| 01/08/2002 | US6337258 Method of dividing a wafer |
| 01/08/2002 | US6336775 Gas floating apparatus, gas floating-transporting apparatus, and thermal treatment apparatus |
| 01/08/2002 | US6336546 Conveying system |
| 01/03/2002 | WO2002000534A1 Apparatus and method for carrying substrate |
| 01/03/2002 | US20020002422 Transfer apparatus for semiconductor process |
| 01/03/2002 | US20020000099 Method of and apparatus for working a glass plate |
| 01/03/2002 | US20020000019 Multi functional cleaning module of manufacturing apparatus for flat panel display and cleaning apparatus using the same |
| 01/03/2002 | DE10030388A1 Verfahren zur Herstellung von Glassubstraten für elektronische Speichermedien A process for the production of glass substrates for electronic storage media |
| 01/02/2002 | EP1166337A2 Device for manufacturing semiconductor products |
| 01/02/2002 | EP1166333A1 Multi-stage single-drive foup door opening system |
| 01/02/2002 | EP1165412A1 Door assembly for semiconductor wafer manufacturing |
| 01/02/2002 | CN1077088C Device for transportation of thin glass sheet |
| 01/01/2002 | US6336054 Interlock apparatus for a transfer machine |
| 01/01/2002 | US6335054 Air lock for introducing substrates to and/or removing them from a treatment chamber |
| 12/27/2001 | WO2001099101A2 Method for the production of glass substrates for electronic storage media |
| 12/27/2001 | WO2001098368A1 Method and device for producing glass panes of any desired contour from sheet glass |
| 12/27/2001 | WO2001098015A2 Method for the production of glass substrates for electronic storage media |
| 12/27/2001 | US20010055522 Substrate processing apparatus |
| 12/27/2001 | US20010054535 Gantry conveyor apparatus |
| 12/25/2001 | US6333636 Semiconductor wafer aligning system and method using same |
| 12/25/2001 | US6332898 Substrate processing apparatus and maintenance method therefor |
| 12/25/2001 | US6332525 Vacuum chamber for flat substrates |
| 12/20/2001 | WO1999012190A3 Sealed capsule opening and unloading system |
| 12/20/2001 | US20010053656 Feeding system for electro-chemically polishing contact tips |
| 12/20/2001 | US20010053617 Transportation method for a semiconductor device and transportation route selection method for a semiconductor device |
| 12/20/2001 | US20010053324 By introducing carbon dioxide to the pulp suspension; for the production of paper or board |
| 12/20/2001 | US20010052352 Method and device for treating substrates |
| 12/20/2001 | US20010052325 Substrate processing apparatus |
| 12/19/2001 | EP1164111A2 Method of and apparatus for working a glass plate |
| 12/19/2001 | EP1164098A1 Gantry conveyor apparatus |
| 12/19/2001 | EP1082259B1 Roller arrangement for a product to be coated in a molten metal bath |
| 12/19/2001 | CN2466109Y Board feeding machine for conveying circuit board |
| 12/18/2001 | USRE37470 Substrate processing apparatus and substrate processing method |
| 12/18/2001 | US6331095 Transportation system and processing apparatus employing the transportation system |
| 12/14/2001 | CA2350372A1 Harmonic lift drive system for a gantry conveyor |
| 12/13/2001 | WO2001094245A1 Material transport system |
| 12/13/2001 | US20010050456 Clamping device |
| 12/13/2001 | US20010050212 Continuous treatment apparatus |
| 12/13/2001 | US20010050146 Substrate processing apparatus and substrate processing method |
| 12/13/2001 | US20010050046 Conveyance apparatus and conveyance method |
| 12/12/2001 | CN2464689Y Ampoule conveying track for filling-closing machine |
| 12/11/2001 | US6327794 Processing method for substrate |
| 12/06/2001 | WO2001063651A3 Wafer processing system |
| 12/06/2001 | WO2001033615A3 Method and apparatus for supercritical processing of multiple workpieces |
| 12/06/2001 | US20010048874 Microelectronic workpiece support and apparatus using the support |
| 12/06/2001 | US20010048865 Substrate processing system and substrate processing method |
| 12/06/2001 | US20010047815 Method for treating substrates |
| 12/05/2001 | EP1160839A2 Exposure apparatus, coating/developing apparatus, method of transferring a substrate, method of producing a device, semiconductor production factory, and method of maintaining an exposure apparatus |
| 12/05/2001 | EP1159755A1 Method and device for rotating a wafer |
| 12/05/2001 | EP1159214A1 In/out load port transfer mechanism |
| 12/05/2001 | EP1159213A1 Integrated load port-conveyor transfer system |
| 12/05/2001 | EP1159212A1 Integrated intra-bay transfer, storage and delivery system |
| 12/05/2001 | CN2463358Y Ampoule conveying system |
| 12/04/2001 | US6327517 Apparatus for on-the-fly center finding and notch aligning for wafer handling robots |
| 12/04/2001 | US6327512 Method and apparatus using positional data detected in a non-contact manner to transfer a substrate from a first position to a second position |
| 12/04/2001 | US6326755 System for parallel processing of workpieces |
| 12/04/2001 | US6325571 Particulate object conveying apparatus |
| 11/29/2001 | DE10023344A1 Holder has suction or vacuum part , handle., lever, contact surfaces and connecting rod, tension spring or rubber part/ |
| 11/28/2001 | EP1157184A1 Device for conveying insulating glass panes |
| 11/28/2001 | CN1075665C Conveying apparatus |
| 11/27/2001 | US6322313 Apparatus and method for inserting a wafer, substrate or other article into a process module |
| 11/27/2001 | US6321898 Display panel transporting apparatus and a display panel transporting unit |
| 11/22/2001 | US20010043860 Reactor for the processing of wafers, with a protection device |
| 11/22/2001 | US20010043856 Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces |
| 11/22/2001 | US20010043850 Indexer for magazine shelves of a magazine and wafer-shaped objects contained therein |
| 11/22/2001 | US20010043849 Apparatus for storing and moving a cassette |
| 11/22/2001 | US20010042819 Device and method for detecting and distinguishing shelf-forming supports in cassettes and disk-shaped objects deposited thereon |
| 11/21/2001 | EP1155438A1 Device for transporting objects |
| 11/21/2001 | EP1154929A1 Passively activated valve for carrier purging |
| 11/21/2001 | EP1154880A1 Substrate transport apparatus with multiple arms on a common axis of rotation |
| 11/21/2001 | CN1075340C Apparatus for taking out and storing semiconductor device trays |
| 11/20/2001 | US6318957 Method for handling of wafers with minimal contact |
| 11/20/2001 | US6318953 SMIF-compatible open cassette enclosure |
| 11/20/2001 | US6318945 Substrate processing apparatus with vertically stacked load lock and substrate transport robot |
| 11/15/2001 | WO2000072361A3 Apparatus and method for testing of sheet material |
| 11/15/2001 | US20010041530 Local clean method and local clean processing and treating apparatus |
| 11/15/2001 | US20010041122 Single wafer load lock with internal wafer transport |
| 11/15/2001 | US20010041120 Substrate processing apparatus with vertically stacked load lock and substrate transport robot |
| 11/15/2001 | US20010041119 Processing system and device manufacturing method using the same |
| 11/14/2001 | EP1152964A1 Port door retention and evacuation system |
| 11/13/2001 | US6315512 Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber |
| 11/13/2001 | US6315501 Air stream particulate collecting transfer apparatus |
| 11/08/2001 | WO2001083333A1 Throughput enhancement for single wafer reactor |
| 11/08/2001 | WO2001083180A1 Method for working glass sheets |
| 11/08/2001 | US20010038791 Method for aligning wafers in a cassette |
| 11/08/2001 | US20010038783 Dual loading port semiconductor processing equipment |
| 11/08/2001 | US20010037856 Etching apparatus for manufacturing semiconductor devices |
| 11/08/2001 | CA2407358A1 Throughput enhancement for single wafer reactor |
| 11/07/2001 | EP1152455A1 Transportation container and method for opening and closing lid thereof |
| 11/07/2001 | EP1150808A1 Workpiece handling robot |