| Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304) |
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| 01/02/2003 | US20030000635 Method of transferring a substiantially disc-shaped workpiece, and device for carrying out this method |
| 01/02/2003 | US20030000302 Method and apparatus for testing of sheet material |
| 01/02/2003 | US20030000301 Method and apparatus for testing of sheet material |
| 01/02/2003 | US20030000075 Apparatus and method for carrying substrate |
| 01/01/2003 | CN1388273A Surface treating apparatus |
| 01/01/2003 | CN1388054A Screw conveying method and conveyer capable of preventing thread damage |
| 01/01/2003 | CN1097551C Loader transferring apparatus and method for transferring loader asing the same apparatus |
| 12/31/2002 | US6501070 Pod load interface equipment adapted for implementation in a fims system |
| 12/31/2002 | US6499367 Device and method for detecting substrate |
| 12/27/2002 | WO2002102687A1 System for transporting substrates |
| 12/26/2002 | US20020198623 Method and apparatus for providing distributed material management and flow control in an integrated circuit factory |
| 12/26/2002 | US20020197145 Substrate processing apparatus and a method for fabricating a semiconductor device by using same |
| 12/26/2002 | US20020197139 Transfer device for substrate and storing device therein |
| 12/26/2002 | US20020194995 First and second filters; noncontamination by hydrocarbon in air and a hydrocarbon such as phthalate ester generated from a retaining box and the like |
| 12/26/2002 | US20020194716 Modular semiconductor workpiece processing tool |
| 12/25/2002 | CN1387673A Method and apparatus for supercritical processing of multiple workpieces |
| 12/19/2002 | WO2002101326A1 Device and method for substrate displacement detection |
| 12/19/2002 | WO2002034477A3 Drive system with coaxical drive shafts for a robot arm |
| 12/19/2002 | WO2001078112A8 Method for charging and discharging a process tank |
| 12/19/2002 | US20020192057 System for transporting substrates |
| 12/19/2002 | US20020192056 Method and apparatus for transferring a semiconductor substrate |
| 12/18/2002 | EP1267390A2 Method of transferring a substantially disk-shaped workpiece and apparatus for carrying out such a transfer |
| 12/17/2002 | US6494670 Three chamber load lock apparatus |
| 12/17/2002 | US6494511 Apparatus and method for handling substrates |
| 12/17/2002 | US6494308 Integrated roller transport pod and asynchronous conveyor |
| 12/17/2002 | US6494021 Contact lens transfer and material removal system |
| 12/17/2002 | US6493961 Processing unit for a substrate |
| 12/12/2002 | WO2002099861A1 Rector having a movale shuter |
| 12/12/2002 | WO2002099165A2 Tools with transfer devices for handling workpieces |
| 12/12/2002 | US20020187299 Glass spacer |
| 12/12/2002 | US20020187024 Apparatus for storing and moving a carrier |
| 12/12/2002 | US20020185068 Reactor having a movable shutter |
| 12/11/2002 | CN1384799A SMIF-compatible open cassette enclosure |
| 12/11/2002 | CN1384074A Plate article locator and glass plate blending molder |
| 12/11/2002 | CN1384033A Elevator |
| 12/11/2002 | CN1096112C Wafer supporting and/or conveying apparatus |
| 12/11/2002 | CN1095993C Integrated circuit conveying device |
| 12/10/2002 | US6491732 Wafer handling apparatus and method |
| 12/10/2002 | US6491330 Edge gripping end effector wafer handling apparatus |
| 12/05/2002 | WO2002097879A1 Precision substrate storage container and retaining member therefor |
| 12/05/2002 | US20020182764 System and method for moving substrates in and out of a manufacturing process |
| 12/05/2002 | US20020182052 Monitoring system for a conveying device that conveys flat articles, especially wafers |
| 12/05/2002 | US20020182047 Air track conveyor system for disk production |
| 12/05/2002 | US20020182040 Substrate processing apparatus and substrate processing method |
| 12/05/2002 | US20020182037 Substrate processing apparatus, substrate processing system, and substrate conveying method |
| 12/05/2002 | US20020182016 Method of loading a sputter pallet |
| 12/05/2002 | US20020179863 Method and apparatus for accessing microelectronic workpiece containers |
| 12/05/2002 | US20020179409 Overhead conveyance device and overhead conveyance vehicle |
| 12/04/2002 | EP1261985A2 Method and apparatus for supporting a substrate |
| 12/04/2002 | CN2523696Y Glass bottles conveyer |
| 12/04/2002 | CN1383199A Driving gear of manipulator |
| 12/03/2002 | US6488996 Cushion spacer for glass plates and stack of glass plates |
| 12/03/2002 | US6488804 Method of manufacturing a stack of spaced lites |
| 12/03/2002 | US6488778 Apparatus and method for controlling wafer environment between thermal clean and thermal processing |
| 11/28/2002 | WO2002095542A2 Workpiece sorter operating with modular bare workpiece stockers and/or closed container stockers |
| 11/28/2002 | US20020176988 Light-transmitting and/or coated article with removable protective coating and methods of making the same |
| 11/28/2002 | US20020175043 Transport diverter for plate material conveyor, particularly a plate glass conveyor |
| 11/28/2002 | US20020174881 First section for supporting a semiconductor wafer at a first level and a second section for supporting the water at a second lower level; tilting to separate from water during processing; conveying to brush boxes |
| 11/28/2002 | US20020174709 Air-sampling carrier, apparatus and method for analyzing air in a semiconductor process tool |
| 11/27/2002 | CN2522393Y Integrated-circuit member processing device |
| 11/26/2002 | US6486574 Small footprint vertical lift and rotation stage |
| 11/26/2002 | US6485250 Substrate transport apparatus with multiple arms on a common axis of rotation |
| 11/21/2002 | WO2002093617A2 Device for loading and unloading silicon wafers in an oven from a multiple-cassette station |
| 11/21/2002 | WO2002092480A2 Device and method for moving substrates with motion coupling |
| 11/21/2002 | US20020170673 System and method of processing composite substrates within a high throughput reactor |
| 11/21/2002 | DE10123062A1 Device for transport of media, such as DVDs during production has an improved mechanical coupling device for linking a lifting arrangement to a conveyor belt arrangement so that disks can be moved through a production zone |
| 11/20/2002 | EP1258028A2 Wafer processing system |
| 11/20/2002 | CN1380238A Arm of scalar robot |
| 11/19/2002 | US6481956 Method of transferring substrates with two different substrate holding end effectors |
| 11/19/2002 | US6481951 Multiple sided robot blade for semiconductor processing equipment |
| 11/19/2002 | US6481945 Method and device for transferring wafers |
| 11/19/2002 | US6481558 Integrated load port-conveyor transfer system |
| 11/14/2002 | WO2002090222A1 Device for gripping and holding an object in a contactless manner |
| 11/14/2002 | US20020168256 Wafer ring supplying and returning apparatus |
| 11/14/2002 | US20020168251 Self-contained semiconductor device manufacturing equipment having compact arrangement of load-lock and processing chambers |
| 11/14/2002 | US20020168199 Image forming apparatus having structure for preventing noise and vibration of developing device |
| 11/14/2002 | US20020166344 Plate-shaped member positioning apparatus and glass sheet bending apparatus |
| 11/13/2002 | EP1256552A1 Apparatus for positioning a hot glass sheet travelling on a conveyor |
| 11/13/2002 | EP1055253B1 Device for loading substrates into and unloading them from a clean room |
| 11/13/2002 | CN1379708A Method and device for isolating plate-like substrates |
| 11/13/2002 | CN1379455A Film carrying belt for electron spare parts assembling and its making method |
| 11/12/2002 | US6478531 Article transfer apparatus |
| 11/07/2002 | WO2002089183A2 Holding device for wafers |
| 11/07/2002 | WO2002088007A1 Conveyor device for transporting workpieces through a processing area for surface treatment of said workpieces |
| 11/07/2002 | US20020164242 Control system for transfer and buffering |
| 11/07/2002 | US20020164241 Method for handling and processing microelectronic-device substrate assemblies |
| 11/07/2002 | US20020164232 Semiconductor wafer processing apparatus |
| 11/07/2002 | US20020162728 Transport apparatus and method |
| 11/07/2002 | US20020162504 Method for introducing and removing workpieces into or from a surface treatment area, a surface treatment device and an arrangement for surface treatment |
| 11/07/2002 | CA2440258A1 Conveyor device for advancing work-pieces through a processing zone fo r the surface treatment of the workpieces |
| 11/06/2002 | EP1254081A2 Method for transporting glass panels through a coating installation and device for transporting said glass panels |
| 11/06/2002 | CN2519792Y Board piece clamp device with protection and guiding function |
| 11/06/2002 | CN1378261A Carrier band packaging processor |
| 11/05/2002 | US6474712 Gripper for supporting substrate in a vertical orientation |
| 11/05/2002 | US6473996 Load port system for substrate processing system, and method of processing substrate |
| 10/31/2002 | US20020159879 Plant for processing wafers |
| 10/31/2002 | US20020157691 Substrate transfer device |
| 10/31/2002 | DE10121115A1 Haltevorrichtung für Wafer Holding device for wafers |
| 10/31/2002 | DE10121056A1 Device for transporting motor vehicle bodies through surface treatment area has conveyor which brings bodies into treatment area in vertical position in which longitudinal direction of body is orientated at 30 degrees to vertical |
| 10/31/2002 | DE10121055A1 Device for transporting of especially motor vehicle bodies through surface treatment area has holders each with base section pivot-mounted by suspension, and rotatable section mounted on base section and carrying workpiece |