| Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304) |
|---|
| 04/12/2001 | DE19949084A1 Transport system for substrates in plant with several processing stations has substrate carrier with at least two runners with which it can be supported on roller path and moved through plant |
| 04/12/2001 | DE19945338A1 Stacking device for glass plates has handling robots spaced along glass plate transport path for rotating glass plates between horizontal and vertical position selectively operated in synchronism |
| 04/10/2001 | US6215897 Automated substrate processing system |
| 04/10/2001 | US6214692 Method and apparatus for the aligned joining of disk-shaped semiconductor substrates |
| 04/10/2001 | US6213853 Integral machine for polishing, cleaning, rinsing and drying workpieces |
| 04/10/2001 | US6213704 Method and apparatus for substrate transfer and processing |
| 04/05/2001 | WO2001024233A1 Wafer atmospheric transport module having a controlled mini-environment |
| 04/05/2001 | WO2000068975A3 System for manufacturing semiconductor products |
| 04/04/2001 | EP1087897A2 Substrate transfer shuttle having a magnetic drive |
| 04/04/2001 | CN1290228A Machine for treating sheet-shaped goods with various media, and goods carrier for use in such a machine |
| 04/03/2001 | US6211514 Device and method for sensing wafer-shaped objects and shelves in a container |
| 03/29/2001 | WO2001022477A1 Device for loading and unloading substrates |
| 03/29/2001 | CA2388586A1 Device for loading and unloading substrates |
| 03/28/2001 | EP1086486A1 In-situ substrate transfer shuttle |
| 03/28/2001 | CN1289405A Wafer carrier and semiconductor apparatus for processing a semiconductor substrate |
| 03/28/2001 | CA2321386A1 Packing frame and system for the packing and handling of glass sheet packages |
| 03/27/2001 | US6208909 Wafer transport device |
| 03/27/2001 | US6206974 Substrate processing system, interface apparatus, and substrate transportation method |
| 03/27/2001 | US6206176 Substrate transfer shuttle having a magnetic drive |
| 03/27/2001 | US6205881 Device for controlling the drive of mechanisms operating separately from one another |
| 03/21/2001 | EP1085558A2 Multiple sided robot blade for semiconductor processing equipment |
| 03/21/2001 | EP1084807A2 Transporting device for articles to be dried like tiles |
| 03/21/2001 | CN2424168Y Bat transporting vehicle |
| 03/20/2001 | US6204483 Heating assembly for rapid thermal processing system |
| 03/20/2001 | US6203621 Vacuum chuck for holding thin sheet material |
| 03/20/2001 | US6203582 Interchangable modules |
| 03/20/2001 | US6203268 Positioning apparatus for substrates to be processed |
| 03/20/2001 | US6203249 Particulate objects conveying apparatus for conveying particles of a predetermined size |
| 03/20/2001 | US6202592 Substrate holder |
| 03/20/2001 | US6202482 Method and apparatus for testing of sheet material |
| 03/15/2001 | WO2001017691A1 Method for introducing and removing workpieces into or from a surface treatment area, a surface treatment device and an arrangement for surface treatment |
| 03/15/2001 | WO2000068973A3 System for treating wafers |
| 03/15/2001 | CA2383756A1 Method for introducing and removing workpieces into or from a surface treatment area, a surface treatment device and an arrangement for surface treatment |
| 03/14/2001 | EP1082756A1 Method and device for transferring wafers |
| 03/14/2001 | EP1082755A1 A wafer buffer station and a method for a per-wafer transfer between work stations |
| 03/14/2001 | EP1082259A1 Roller arrangement for a product to be coated in a molten metal bath |
| 03/13/2001 | US6201998 Apparatus, method and medium for enhancing the throughput of a wafer processing facility using a multi-slot cool down chamber and a priority transfer scheme |
| 03/13/2001 | US6199927 Robot blade for handling of semiconductor substrates |
| 03/13/2001 | US6199604 Clean box, clean transfer method and apparatus therefor |
| 03/08/2001 | DE19737839C2 Transportsystem Transport system |
| 03/07/2001 | EP1080489A2 Substrate transfer shuttle |
| 03/07/2001 | EP1080488A1 Method and apparatus for substrate transfer and processing |
| 03/07/2001 | EP1080487A1 Automated wafer buffer for use with wafer processing equipment |
| 03/07/2001 | EP1080486A1 Device for fixing substrates |
| 03/07/2001 | CN1286396A Equipment for automatically dispensing based on prescription |
| 03/06/2001 | US6197385 Film forming apparatus, substrate conveying apparatus, film forming method, and substrate conveying method |
| 03/06/2001 | US6196154 Air lock for introducing substrates to and/or removing them from a treatment chamber |
| 03/01/2001 | WO2001014227A1 Material delivery system for clean room environments |
| 02/28/2001 | EP1079429A1 Alignment processing mechanism and semiconductor processing device using it |
| 02/28/2001 | EP1078392A1 An automated substrate processing system |
| 02/28/2001 | EP1078391A1 Method and device for changing a semiconductor wafer position |
| 02/28/2001 | EP1078024A1 Installation for processing waste by means of thermolysis with transport means in an inert atmosphere |
| 02/28/2001 | CN2421271Y Device for bearing semiconductor chip |
| 02/28/2001 | CN1285310A Automatic medicine weighing and feeding device according to prescription |
| 02/27/2001 | US6193807 Conveyors, suction pads and switches |
| 02/27/2001 | US6193459 Integrated wafer pod-load/unload and mass-transfer system |
| 02/22/2001 | WO2001012568A1 Method and device for producing double glazing unit |
| 02/22/2001 | CA2381590A1 Method and apparatus for preparing a double glazing unit |
| 02/21/2001 | EP1077022A1 Apparatus for transporting thin boards, in particular printed circuit boards |
| 02/20/2001 | US6190118 Tilt mechanism for wafer cassette |
| 02/20/2001 | US6190104 Treatment object conveyor apparatus, semiconductor manufacturing apparatus, and treatment object treatment method |
| 02/20/2001 | US6189686 Slat conveyor chain |
| 02/15/2001 | WO2001010756A1 Load lock system for foups |
| 02/14/2001 | CN1284041A Semiconductor wafer input/output handling system |
| 02/13/2001 | US6188935 Vacuum processing apparatus and semiconductor manufacturing line using the same |
| 02/13/2001 | US6188323 Wafer mapping system |
| 02/13/2001 | US6187132 Substrate treatment device and substrate transporting method |
| 02/13/2001 | US6186723 Load port |
| 02/13/2001 | US6186722 Chamber apparatus for processing semiconductor devices |
| 02/08/2001 | WO2001009020A1 Vertically stacked load lock and transport robot |
| 02/08/2001 | WO2001009011A1 Substrate transfer chamber having a substrate holder vertically aligned with a substrate processing module |
| 02/07/2001 | EP1075023A1 Unprocessed material storing device and carry-in/out stage |
| 02/07/2001 | EP1073599A1 Device and method for handling substrates |
| 02/06/2001 | US6183615 Transport system for wafer processing line |
| 02/06/2001 | US6183186 Wafer handling system and method |
| 02/06/2001 | US6182940 Spacer for stacking glass plates, method for attaching the spacer to the glass plate and apparatus for attaching the spacer to the glass plate |
| 02/01/2001 | WO2001008210A1 Wafer storing method and storing container therefor and wafer transferring method for transferring wafer to the storing container |
| 02/01/2001 | WO2001008201A1 Method and device for transporting a semiconductor wafer through a treatment container |
| 02/01/2001 | DE19944825A1 Transport car for green brick drying stage comprises cassette frame with spaced removal brick setdown bars so frame sidewalls guide drying air up and along bricks. |
| 02/01/2001 | DE19934301A1 Verfahren und Vorrichtung zum Transportieren eines Halbleiterwafers durch einen Behandlungsbehälter Method and device for transporting a semiconductor wafer by a treatment vessel |
| 01/27/2001 | CA2278862A1 A system for galvanic treatment or finishing of pieces, and corresponding method |
| 01/25/2001 | WO2001006560A1 Open/close device for open/close lid of untreated object storing box and treating system for untreated object |
| 01/23/2001 | US6177978 Stage device and exposure apparatus using the same |
| 01/23/2001 | US6177129 A surface treatment in vacuum station, controlling the timing process by a programmable process controller unit; batch processing; treating semiconductor wafers, memory discs, or machine components, tools |
| 01/23/2001 | US6176668 In-situ substrate transfer shuttle |
| 01/23/2001 | US6176667 Multideck wafer processing system |
| 01/23/2001 | US6176023 Device for transporting flat objects and process for transferring said objects between said device and a processing machine |
| 01/18/2001 | WO2001004031A1 Apparatus and method for handling a wafer |
| 01/18/2001 | WO2001004029A1 Anticontamination device for transporting containers and pneumatic conveyor equipped with same |
| 01/18/2001 | WO2001004028A1 Smif-compatible open cassette enclosure |
| 01/18/2001 | WO2001004027A1 Low profile automated pod door removal system |
| 01/18/2001 | DE10024734A1 Halbleiterfabrikautomatisierungssystem und Verfahren zum Transportieren von Halbleiterwafern Semiconductor factory automation system and method for transporting semiconductor wafers |
| 01/18/2001 | CA2341597A1 Anticontamination device for transporting containers and pneumatic conveyor equipped with same |
| 01/16/2001 | US6175777 Method for transferring wafer cassettes after checking whether process equipment is in a suitable mode |
| 01/16/2001 | US6174417 Electroplating machine |
| 01/16/2001 | US6173750 Method and apparatus for removing die from a wafer and conveying die to a pickup location |
| 01/11/2001 | WO2001002496A2 Light-transmitting and/or coated article with removable protective coating and methods of making the same |
| 01/11/2001 | WO2000059003A3 Device for manufacturing semiconductor products |
| 01/10/2001 | EP1067592A2 Compact apparatus and method for storing and loading semiconductor wafer carriers |
| 01/10/2001 | EP1067583A2 Substrate transport container |