| Patents for B65G 49 - Conveying systems characterised by their application for specified purposes not otherwise provided for (12,304) |
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| 02/25/2003 | US6524052 Electronic parts-feeding tray feeder and electronic parts-feeding method |
| 02/25/2003 | US6523676 Continuous treatment apparatus |
| 02/20/2003 | WO2003015156A1 Foup mounting robot for semiconductor efem |
| 02/20/2003 | WO2003014411A1 Rapid cycle chamber having a top vent with nitrogen purge |
| 02/20/2003 | WO2003014000A2 Edge gripping pre-aligner |
| 02/20/2003 | US20030035711 Centering double side edge grip end effector with integrated mapping sensor |
| 02/20/2003 | US20030035709 Robot for handling semiconductor wafers |
| 02/20/2003 | US20030035705 Chuck transport method and system |
| 02/20/2003 | US20030034523 Semiconductor thin-film manufacturing method, semiconductor device manufacturing method, semiconductor device, integrated circuit, electro-optical device, and electronic appliance |
| 02/19/2003 | EP1284245A1 Method and device for processing glass pane |
| 02/19/2003 | EP1284229A2 Process and apparatus for handling glass sheets |
| 02/19/2003 | EP1284228A2 Method for separating stacks of large, flat glass sheets and means of separating said glass sheets |
| 02/19/2003 | EP1159755B1 Method and device for rotating a wafer |
| 02/19/2003 | CN2536554Y Vertical frame collecting apparatus |
| 02/19/2003 | CN1398428A Tilting fluid cutout device |
| 02/18/2003 | US6522942 Transfer apparatus for semiconductor process |
| 02/18/2003 | US6520839 Load and unload station for semiconductor wafers |
| 02/18/2003 | US6520733 Substrate transport and apparatus |
| 02/18/2003 | US6520727 Modular sorter |
| 02/18/2003 | US6520726 Apparatus and method for using a robot to remove a substrate carrier door |
| 02/18/2003 | CA2231469C Plant for processing containers, transport device and pallets for containers |
| 02/18/2003 | CA2047682C Jigging conveyor immersed in a liquid with attenuation of the transmitted vibrations |
| 02/13/2003 | WO2003012830A1 Wafer processing system including a robot |
| 02/13/2003 | WO2003011778A2 Tightening a fiber roll cover |
| 02/13/2003 | WO2002062680A3 Conveyorized storage and transportation system |
| 02/13/2003 | US20030031540 System and method for intelligent lens transfer |
| 02/13/2003 | US20030031539 Apparatus for storing and moving a cassette |
| 02/13/2003 | US20030031537 Load port, wafer processing apparatus, and method of replacing atmosphere |
| 02/13/2003 | US20030029696 Work conveying system |
| 02/11/2003 | US6519504 Vacuum processing apparatus and semiconductor manufacturing line using the same |
| 02/11/2003 | US6517304 Method for transporting substrates and a semiconductor manufacturing apparatus using the method |
| 02/11/2003 | US6517303 Substrate transfer shuttle |
| 02/06/2003 | WO2003010804A1 Method of producing semiconductor thin film, method of producing semiconductor device, semiconductor device, integrated circuit, electrooptical device and electronic apparatus |
| 02/06/2003 | WO2002005314A9 Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly |
| 02/06/2003 | WO2002002282A9 Edge-gripping pre-aligner |
| 02/06/2003 | US20030027410 Thin film semiconductor device having arrayed configuration of semiconductor crystals and a method for producing it |
| 02/06/2003 | US20030026683 Gripper for supporting substrate in a vertical orientation |
| 02/05/2003 | EP1097387B1 Device without set-up kit for the targeted moving of electronic components |
| 02/05/2003 | CN2534147Y Central positioning device for circuit board |
| 02/05/2003 | CN2534146Y Anode lifting mechanism for electrolytic tank |
| 02/04/2003 | US6516266 Transportation method for a semiconductor device and transportation route selection method for a semiconductor device |
| 02/04/2003 | US6516238 Semiconductor factory automation system and method for transporting semiconductor wafers |
| 02/04/2003 | US6514032 Substrate transfer system |
| 02/04/2003 | US6514015 Anti-contamination device for the transport of recipients and air conveyor equipped with such a device |
| 01/30/2003 | WO2003009351A1 Thin-film semiconductor device and its production method |
| 01/30/2003 | WO2003009347A2 Integrated system for tool front-end workpiece handling |
| 01/30/2003 | WO2003009346A2 Processing system |
| 01/30/2003 | WO2003008157A2 Centering double side edge grip end effector with integrated mapping sensor |
| 01/30/2003 | WO2002095542A9 Workpiece sorter operating with modular bare workpiece stockers and/or closed container stockers |
| 01/30/2003 | US20030023343 Wafer transfer system, wafer transfer method and automatic guided vehicle system |
| 01/30/2003 | US20030021658 Substrate transfer shuttle having a magnetic drive |
| 01/30/2003 | US20030019578 Substrate processing apparatus equipping with high-pressure processing unit |
| 01/29/2003 | EP1280186A2 Wafer transfer system, wafer transfer method and automatic guided vehicle system |
| 01/29/2003 | CN2533641Y Water stopping device for horizontal wet making circuit board |
| 01/29/2003 | CN1393387A System for driving loading station |
| 01/29/2003 | CN1393385A Moving loading device for plate shape substrates and its storing device |
| 01/29/2003 | CN1099958C Method and composition for applying interleaving material to glass sheet and glass sheet obtained thereby |
| 01/29/2003 | CN1099957C Product of glass sheets comprising buffered acid interleaving material |
| 01/28/2003 | US6511722 Spacer |
| 01/28/2003 | US6510950 Apparatus for storing and transferring planar products, provided with parking station |
| 01/28/2003 | US6510940 Vacuum assisted walking beam apparatus |
| 01/23/2003 | WO2003007347A2 Smif load port interface including smart port door |
| 01/23/2003 | WO2003007340A2 Wafer transport apparatus |
| 01/23/2003 | WO2003007129A2 Trajectory planning and motion control strategies for a planar three-degree-of-freedom robotic arm |
| 01/23/2003 | WO2003006346A1 Skid conveyor |
| 01/23/2003 | US20030017044 Method of removing substrates from a storage site and a multiple substrate batch loader |
| 01/23/2003 | US20030017034 Automated semiconductor processing system |
| 01/23/2003 | US20030017031 Semiconductor apparatus for transferring workpiece with protection feature |
| 01/23/2003 | US20030015290 Substrate processing apparatus, substrate processing method, and exposure apparatus |
| 01/22/2003 | EP1278231A2 Substrate processing apparatus, substrate precessing method, and exposure apparatus |
| 01/22/2003 | EP1278230A2 Dual wafer load lock |
| 01/21/2003 | US6510365 Carrier system positioning method |
| 01/21/2003 | US6508883 Throughput enhancement for single wafer reactor |
| 01/16/2003 | WO2003005413A2 Fast swap dual substrate transport for load lock |
| 01/16/2003 | WO2003004386A1 System and method for manufacturing flat display panel |
| 01/16/2003 | US20030013318 Apparatus and method for forming a combined substrate structure |
| 01/16/2003 | US20030012629 Mobile elevator transporter for semi-automatic wafer transfer |
| 01/16/2003 | US20030012627 Apparatus for transferring front opener unified pod door in opener of front opener unified pod |
| 01/16/2003 | US20030012626 Docking cart with integrated load port |
| 01/16/2003 | US20030012625 Smif load port interface including smart port door |
| 01/16/2003 | US20030012624 Wafer transport apparatus |
| 01/16/2003 | US20030010887 Method and apparatus for automatically loading a double-sided polishing machine with wafer crystals |
| 01/16/2003 | US20030010608 Skid conveyor |
| 01/16/2003 | US20030010450 Input/output valve switching apparatus of semiconductor manufacturing system |
| 01/16/2003 | US20030010062 Processing relatively thin glass sheets |
| 01/16/2003 | US20030009904 Wafer carrier, wafer conveying system, stocker, and method of replacing gas |
| 01/15/2003 | CN2530926Y Charging and discharging material conveying device for oven |
| 01/14/2003 | US6506009 Semiconductor substrates stored in cassettes |
| 01/09/2003 | WO2003003415A2 Method and apparatus for providing distributed material management and flow control in an integrated circuit factory |
| 01/09/2003 | US20030009251 Apparatus, method and medium for enhancing the throughput of a wafer processing facility using a multi-slot cool down chamber and a priority transfer scheme |
| 01/09/2003 | US20030007849 Material handling and transport process |
| 01/08/2003 | EP1273535A2 Conveying system |
| 01/08/2003 | EP1272411A1 System for parallel processing of workpieces |
| 01/08/2003 | EP1272410A1 Modular sorter |
| 01/07/2003 | US6503630 Glass article with water proof film is handled with a tool via a protective coating film, which is removable with water; prevents contaminant from surface of the handling tool from adhering to the water repellant film |
| 01/02/2003 | US20030002970 End effector for lifting semiconductor wafer carrier |
| 01/02/2003 | US20030002961 Semiconductor wafer processing apparatus having improved wafer input/output handling system |
| 01/02/2003 | US20030002960 Dual cassette load lock |
| 01/02/2003 | US20030002959 Dual cassette load lock |
| 01/02/2003 | US20030002958 Fast swap dual substrate transport for load lock |